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公开(公告)号：US20160236205A1
公开(公告)日：2016-08-18
申请号：US15031096
申请日：2014-09-30
Applicant: EDWARDS LIMITED
Inventor： Andrew James Seeley , Alexander Michael Pope , Thomas Frank Cohn
CPC classification number: B03C3/01 , B01D53/14 , B01D53/1456 , B01D2252/103 , B01D2257/2045 , B01D2257/2047 , B01D2257/553 , B01D2258/0216 , B03C3/16 , B03C3/41 , B03C3/53 , B03C2201/10
Abstract: A gas treatment includes: a gas scrubber chamber operable to receive an effluent gas stream originating from a manufacturing process tool to be scrubbed therewithin to provide a scrubbed gas stream; and an electrostatic precipitation chamber operable to receive the scrubbed gas stream to be treated therewithin to provide a treated gas stream, one of the gas scrubber chamber and the electrostatic precipitation chamber defining a first chamber and another of the gas scrubber chamber and the electrostatic precipitation chamber defining a second chamber, the first chamber being configured to surround the second chamber. In this way, the first chamber and the second chamber can share the same volume.
Abstract translation: 气体处理包括：气体洗涤器室，其可操作以接收来自制造工艺工具的流出气体流，以在其中进行擦洗以提供洗涤气流; 以及静电沉淀室，其可操作以接收待处理的洗涤气体流以提供经处理的气流，气体洗涤室和静电沉淀室中的一个限定第一室，另一个气体洗涤室和静电沉淀室 限定第二室，所述第一室被构造成围绕所述第二室。 以这种方式，第一室和第二室可以共享相同的体积。
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公开(公告)号：US20240310040A1
公开(公告)日：2024-09-19
申请号：US18576592
申请日：2022-07-07
Applicant: Edwards Limited
Inventor： Andrew James Seeley , Ian David Benzeval
CPC classification number: F23G7/06 , F23D14/48 , B01D53/70 , B01D2257/2066 , B01D2258/0216 , F23G2209/142
Abstract: An inlet nozzle assembly includes: a delivery nozzle configured to deliver an effluent stream into an abatement chamber; and a mount configured to couple with an enclosure defining the abatement chamber, the mount being further configured to receive the delivery nozzle, wherein the delivery nozzle is configured to extend from the mount distal from the abatement chamber. In this way, the height of the mount and the location of the abatement chamber can remain fixed for different length delivery nozzles and different amounts of the delivery nozzle extend from the mount, dependent on the length of that nozzle.
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公开(公告)号：US11859725B2
公开(公告)日：2024-01-02
申请号：US17776418
申请日：2020-11-12
Applicant: Edwards Limited
Inventor： Andrew James Seeley
IPC: F16K27/06 , F16K37/00 , F16K11/087 , F16K11/085 , C23C16/455 , F16K5/02
CPC classification number: F16K27/067 , C23C16/45561 , F16K5/0207 , F16K11/085 , F16K11/087 , F16K11/0853 , F16K11/0873 , F16K11/0876 , F16K37/005 , F16K2200/30
Abstract: A valve includes a housing with at least one inlet and at least one outlet; a valve member located within the housing and being moveable between different positions for controlling, in use, the flow of a fluid from an inlet to an outlet of the valve; wherein the valve further includes at least two spaced-apart valve seats in which the valve member is seated so as to form a cavity bounded by the valve seats, an exterior surface of the valve member and an interior surface of the housing; a first conduit extending between the exterior of the housing and the cavity; and a second conduit extending between the cavity and a bore of the valve member, through which conduits, in use, a purge gas can be introduced into the cavity and bore.
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公开(公告)号：US11437248B2
公开(公告)日：2022-09-06
申请号：US16628337
申请日：2018-07-03
Applicant: Edwards Limited
Inventor： Andrew James Seeley
Abstract: A pumping line arrangement includes a chamber connecting line which is fluidly connectable to a process chamber that forms part of a semiconductor fabrication tool. The pumping line arrangement also includes a valve module which is fluidly connected to the chamber connecting line. The valve module splits the chamber connecting line into respective first and second pumping lines. The first pumping line is intended to carry a first process flow and the second pumping line is intended to carry a second process flow which is incompatible with the first process flow. At least one of the first pumping line or the second pumping line includes fluidly connected therewithin a pre-abatement module that is configured to remove one or more incompatible constituents from the process flow intended to be carried by the other pumping line.
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公开(公告)号：US20220032227A1
公开(公告)日：2022-02-03
申请号：US17012430
申请日：2020-09-04
Applicant: Edwards Limited , Edwards Vacuum LLC
Inventor： Andrew James Seeley , Steve Cottle , Neil Condon , Christopher Mark Bailey , Julian Richard Dean , Joanne Rachel Greenwood , Zachary Dunbar
Abstract: A system comprising a pumping system configured to pump respective exhaust gases from each of a plurality of chemical etching process chambers and to combine the exhaust gases to provide a combined exhaust gas, and a noble gas recovery system configured to process the combined exhaust gas to remove one or more noble gases therefrom.
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Patent Agency Ranking
公开(公告)号：US10702824B2
公开(公告)日：2020-07-07
申请号：US15745923
申请日：2016-06-15
Applicant: Edwards Limited
Inventor： Gary Peter Knight , Andrew James Seeley , Duncan Michael Price
Abstract: Venturi Scrubbers are used to separate particulate from a large range of fluids. Many provide additional liquid and/or gas to drive the fluid and aid in the removal of particulate. The present invention provides a liquid ring pump through which the fluid to be treated is first passed and then exhausted, with additional work fluid to a Venturi scrubber such that the particulate can be separated from the exhaust fluid.
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公开(公告)号：US10655626B2
公开(公告)日：2020-05-19
申请号：US15745619
申请日：2016-06-15
Applicant: Edwards Limited
Inventor： Gary Peter Knight , Andrew James Seeley , Geoffrey Young , Duncan Michael Price
Abstract: Liquid ring pumps are used to pump a variety of fluid types. Corrosive fluids are easily handled by the work fluid but can cause corrosion of pumping mechanisms. The present invention provides a magnetically driven liquid ring pump with corrosion resistant pumping mechanisms which achieves a longer time between service intervals.
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公开(公告)号：US10099169B2
公开(公告)日：2018-10-16
申请号：US15746261
申请日：2016-06-15
Applicant: Edwards Limited
Inventor： Andrew James Seeley , Duncan Michael Price , Gary Peter Knight
Abstract: Liquid ring pumps are used to pump a variety of fluid types. The present invention provides a two stage liquid ring pump through which an exhaust gas comprising compounds to be destroyed is passed. The exhaust gas passes through the first stage to a gas abatement device, following which it is passed back to the second stage of the liquid ring pump for removal of the compounds formed in said abatement device. The stages of the liquid ring pump may be adjustable.
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公开(公告)号：US20180207576A1
公开(公告)日：2018-07-26
申请号：US15746261
申请日：2016-06-15
Applicant: Edwards Limited
Inventor： Andrew James Seeley , Duncan Michael Price , Gary Peter Knight
CPC classification number: B01D53/1406 , B01D53/323 , B01D2252/103 , B01D2259/818 , F04C19/00 , F04C19/001 , F04C29/0042 , F04C2240/10 , F04C2240/20 , F04C2250/30
Abstract: Liquid ring pumps are used to pump a variety of fluid types. The present invention provides a two stage liquid ring pump through which an exhaust gas comprising compounds to be destroyed is passed. The exhaust gas passes through the first stage to a gas abatement device, following which it is passed back to the second stage of the liquid ring pump for removal of the compounds formed in said abatement device. The stages of the liquid ring pump may be adjustable.
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公开(公告)号：US10018354B2
公开(公告)日：2018-07-10
申请号：US14416457
申请日：2013-06-20
Applicant: Edwards Limited
Inventor： Andrew James Seeley
CPC classification number: F23D14/50 , B01D53/68 , B01D2257/204 , B01D2258/0216 , F23D11/386 , F23G7/06 , F23G2209/142
Abstract: An inlet assembly for a burner includes a manifold having an inlet aperture and a coaxially aligned outlet aperture, the manifold having a nozzle bore extending along a longitudinal axis between the inlet aperture and the outlet aperture for conveying an effluent gas from an inlet pipe coupleable with the inlet aperture to the outlet aperture for delivery to a combustion chamber of the burner. A nozzle bore scraper is housed within the nozzle bore. An actuator is operable to reciprocate the nozzle bore scraper relative to the nozzle bore, the nozzle bore scraper reciprocating along the longitudinal axis within the nozzle bore between a rest position and an actuated position to reduce effluent gas deposits within the nozzle bore.
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