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    Vacuum pump
    21.
    发明授权
    Vacuum pump 有权

    公开(公告)号：US12044251B2

    公开(公告)日：2024-07-23

    申请号：US17436426

    申请日：2020-03-09

    Applicant: Edwards Japan Limited

    Inventor： Hideki Enosawa ,  Manabu Nonaka ,  Yasushi Maejima ,  Tsutomu Takaada

    IPC: F04D29/66 ,  F04D19/04 ,  F04D29/38 ,  F04D29/64

    CPC classification number: F04D29/666 ,  F04D19/042 ,  F04D29/388 ,  F04D29/644 ,  F04D29/662

    Abstract: A vacuum pump includes: a particle transferring portion that functions as a means for transferring a particle in an exhaust direction of the gas particle by increasing or reducing a height of an upstream end of at least a part of rotor blades among a plurality of rotor blades that constitute an uppermost exhaust stage to realize a stepped structure in which heights of the upstream ends differ as the uppermost exhaust stage as a whole, and in a rotating body constituted by the plurality of rotor blades, the particle transferring portion, and a cylindrical portion that supports the plurality of rotor blades, an imbalance created with respect to the rotating body as a whole by a presence of a rotor blade of which a height of the upstream end has become higher than other rotor blades due to the stepped structure has been corrected.

    Vacuum pump, rotor, and washer
    22.
    发明授权
    Vacuum pump, rotor, and washer 有权

    公开(公告)号：US11946482B2

    公开(公告)日：2024-04-02

    申请号：US17625165

    申请日：2020-07-03

    Applicant: Edwards Japan Limited

    Inventor： Katsuhisa Yokozuka ,  Yoshinobu Ohtachi ,  Yasushi Maejima ,  Tsutomu Takaada

    IPC: F04D29/04 ,  F04D19/04 ,  F04D29/048

    CPC classification number: F04D29/048 ,  F04D19/042

    Abstract: A vacuum pump and a washer which can reduce vibration of a rotor and the rotor which can reduce the vibration are provided. When an inertia moment ratio which is a ratio between the inertia moment around a z-axis and the inertia moment around an x-axis or a y-axis is larger than 1, a natural frequency ω2 does not match a rotational frequency Ωz but goes away from that. When the natural frequency ω2 matches the rotational frequency Ωz, the rotor vibrates and thus, a fatigue failure occurs in a rotor blade. When the rotor is to be made larger in a radial direction of a rotating shaft, a value of the inertia moment ratio is set to a value larger than 1.

    VACUUM PUMP, ROTOR, AND WASHER
    23.
    发明申请
    VACUUM PUMP, ROTOR, AND WASHER 有权

    公开(公告)号：US20220268289A1

    公开(公告)日：2022-08-25

    申请号：US17625165

    申请日：2020-07-03

    Applicant: Edwards Japan Limited

    Inventor： Katsuhisa Yokozuka ,  Yoshinobu Ohtachi ,  Yasushi Maejima ,  Tsutomu Takaada

    IPC: F04D29/048 ,  F04D19/04

    Abstract: A vacuum pump and a washer which can reduce vibration of a rotor and the rotor which can reduce the vibration are provided. When an inertia moment ratio which is a ratio between the inertia moment around a z-axis and the inertia moment around an x-axis or a y-axis is larger than 1, a natural frequency ω2 does not match a rotational frequency Ωz but goes away from that. When the natural frequency ω2 matches the rotational frequency Ωz, the rotor vibrates and thus, a fatigue failure occurs in a rotor blade. When the rotor is to be made larger in a radial direction of a rotating shaft, a value of the inertia moment ratio is set to a value larger than 1.

    Vacuum pump
    24.
    发明授权
    Vacuum pump 有权

    公开(公告)号：US10480523B2

    公开(公告)日：2019-11-19

    申请号：US15545145

    申请日：2016-01-19

    Applicant: Edwards Japan Limited

    Inventor： Yoshinobu Ohtachi ,  Yasushi Maejima ,  Tsutomu Takaada

    IPC: F04D29/08 ,  F04D17/16 ,  F04D19/04 ,  F04D29/40 ,  F04D29/42

    Abstract: Provided is a vacuum pump having a stator disc having a divided structure, in which gaps or misalignments that occur between connection surfaces at which the divided structure is connected are reduced. In a turbo-molecular pump according to this embodiment, a mating relationship between a stator disc and a stator member for alignment (center-alignment) is opposite from that of the related art. Specifically, in a structure in which a base and the stator disc are fitted together, center alignment (positioning/centering) is performed through a structure in which an outer peripheral surface of the stator disc is held (restrained from an outer side) by an inner peripheral surface of the base to be connected thereto. Further, the mating structure of the stator disc includes an integral component. Moreover, the mating position of a stator blade and the mating position of the stator disc having a Siegbahn structure are provided separately.

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