-
公开(公告)号：US12258963B2
公开(公告)日：2025-03-25
申请号：US18251484
申请日：2021-10-28
Applicant: Edwards Limited
Inventor： Alan Ernest Kinnaird Holbrook , David Bedwell , Nigel Paul Schofield
Abstract: A scroll pump includes an inlet and an outlet, a fixed scroll and an orbiting scroll intermeshed with each other, wherein the fixed scroll and orbiting scroll define a space therebetween. The scroll pump further includes a biasing apparatus configured to bias the orbiting scroll against the fixed scroll, a fluid recirculation channel which extends from the space to the inlet through either the fixed scroll or the orbiting scroll, and a fluid recirculation valve disposed in the fluid recirculation channel. The fluid recirculation valve is configured to permit flow of fluid from the space to the inlet through the fluid recirculation channel or to block flow of fluid through the fluid recirculation channel. The fluid recirculation valve is configured to switch from a closed state to an open state when a pressure differential across the fluid recirculation valve is equal to or exceeds a certain threshold value.
-
公开(公告)号：US20250052241A1
公开(公告)日：2025-02-13
申请号：US18721793
申请日：2022-12-16
Applicant: Edwards Limited
Inventor： Cainan Long , Nigel Paul Schofield , Alan Ernest Kinnaird Holbrook
Abstract: The present disclosure relates to vacuum pump 10 comprising a substantially hermetically sealed enclosure 40, a core pump assembly located within the enclosure 40, and an inert purge gas inlet 70 fluidly connected to the enclosure 40 for supplying inert purge gas to an interior of the enclosure 40 surrounding the core pump assembly. By providing a sealed enclosure 40 around the core pump assembly and supplying inert purge gas thereto via the inlet 70, an inert positive pressure can be applied to the core pump assembly that reduces leakage of process gas from the core pump assembly such that seals therein can be removed or reduced. In particular, the need for elastomer seals that may be expensive and not be suited to high temperature or corrosive process gas conditions can be removed.
-
公开(公告)号：US11933284B2
公开(公告)日：2024-03-19
申请号：US17297807
申请日：2019-11-27
Applicant: Edwards Limited
Inventor： Nigel Paul Schofield , Christopher Mark Bailey , Michael Andrew Galtry , Andrew David Mann
CPC classification number: F04B37/14 , F04B41/06 , F04B49/007 , F04D13/12 , F04D19/042 , F04D25/16 , F04D27/005
Abstract: A vacuum exhaust system includes a plurality of turbo pumps that evacuate a plurality of vacuum chambers. A plurality of chamber valves are positioned between the turbo pumps and the plurality of vacuum chambers. A plurality of branch channels are each connected to a corresponding exhaust of the plurality of turbo pumps and a main channel is formed from a confluence of the branch channels. A booster vacuum pump is connected to the main channel. A backing vacuum pump is connected to an exhaust of the booster vacuum pump. A plurality of bypass channels, each having a valve, provide a fluid communication path between at least some of the plurality of vacuum chambers and the booster vacuum pump.
-
公开(公告)号：US11885341B2
公开(公告)日：2024-01-30
申请号：US17617795
申请日：2020-06-02
Applicant: Edwards Limited
Inventor： Nigel Paul Schofield
IPC: F04D19/04 , F04D29/059 , F04D29/66
CPC classification number: F04D19/042 , F04D29/059 , F04D29/668
Abstract: A rotor support configured to rotatably mount a rotor shaft in a vacuum pump is disclosed. The rotor support comprises: a rolling bearing for rotatably supporting the shaft; an insert and at least one resilient damping member, the insert and the at least one resilient damping member surrounding the rolling bearing. The insert comprises inner and outer annular portions connected by a plurality of flexible members, the plurality of flexible members being configured to flex in a radial plane and resist movement in an axial plane, thereby absorbing radial movement of the shaft. The at least one resilient damping member is formed of an elastomeric material configured to flex in both a radial and axial direction.
-
公开(公告)号：US20230184251A1
公开(公告)日：2023-06-15
申请号：US17999327
申请日：2021-05-20
Applicant: Edwards Limited
Inventor： Nigel Paul Schofield , Alan Ernest Kinnaird Holbrook
CPC classification number: F04C27/009 , F04C18/0215 , F04D27/0246 , F04C27/002 , F04C27/004 , F04C2210/14
Abstract: A scroll vacuum pump has an axially extending drive shaft with an eccentric shaft portion, such that rotation of the drive shaft imparts an orbiting motion to an orbiting scroll relative to a fixed scroll. An axial adjustment mechanism has a plurality of adjustment members angularly spaced around the drive shaft and extending through the pump housing towards the orbiting scroll, the plurality of adjustment members each being configured to provide an independently adjustable axial position of the orbiting scroll. A plurality of sealing means isolate the plurality of adjustment members from a pump chamber, the plurality of sealing means extending around each of the plurality of adjustment members and comprising at least one flexible portion such that one end of the sealing means may orbit relative to a fixed other end of the sealing means.
-
Patent Agency Ranking
公开(公告)号：US10947974B2
公开(公告)日：2021-03-16
申请号：US16309809
申请日：2017-05-25
Applicant: Edwards Limited
Inventor： Nigel Paul Schofield
Abstract: A scroll vacuum pump includes an orbiting scroll having a wall extending axially from an orbiting scroll base towards a fixed scroll, the fixed scroll having a fixed scroll wall extending axially from a fixed scroll base towards the orbiting scroll; an axially extending drive shaft having an eccentric shaft portion so that rotation of the eccentric shaft portion imparts an orbiting motion to the orbiting scroll relative to the fixed scroll; and an axial thrust bearing arrangement including an array of ball bearings for bearing against the orbiting scroll base in an axial direction, each ball bearing describing a circular path over the orbiting scroll base during orbiting motion; at least one thrust surface for bearing against the array of ball bearings; and an adjustment mechanism for adjusting the axial position of said at least one thrust surface and thereby the axial position of the orbiting scroll base.
-
公开(公告)号：US20180328410A1
公开(公告)日：2018-11-15
申请号：US15975208
申请日：2018-05-09
Applicant: Edwards Limited
Inventor： Nigel Paul Schofield
IPC: F16C33/66 , F16N7/12 , F04D29/053 , F04D19/04 , F04D29/063
CPC classification number: F16C33/6648 , F01C17/02 , F04C18/12 , F04C29/028 , F04C2240/809 , F04D19/042 , F04D29/053 , F04D29/063 , F16C33/6659 , F16C33/6685 , F16C2360/45 , F16N7/12
Abstract: A twin-shaft pump comprising: two shafts configured to rotate in synchronisation, each of the shafts comprising a gear mounted thereon, the gears each comprising gear wheels, the gear wheels being configured to intermesh to provide the synchronised rotation; an oil reservoir comprising a porous material, the reservoir being configured when supplied with oil to retain the oil within the porous material; and at least one wick extending from the oil reservoir towards a first of the two shafts and operable to supply oil by capillary action from the porous material along the wick to lubricate the gears.
-
公开(公告)号：US20150037137A1
公开(公告)日：2015-02-05
申请号：US14374106
申请日：2013-01-24
Applicant: Edwards Limited
Inventor： Nigel Paul Schofield , Ian David Stones , Stephen Dowdeswell
CPC classification number: F04D17/168 , F04D17/06 , F04D19/04 , F04D19/042 , F04D19/044 , F04D19/046 , F04D29/185 , F04D29/188 , F04D29/384 , F04D29/544
Abstract: An improved vacuum pump mechanism is described in which an intersecting solid or perforated element is arranged to intersect a channel member. Relative movement of the intersecting solid or perforated element and channel member causes gas molecules to be urged from inlet to an outlet of the pump. Gas molecules are constrained within the channel member and interaction of the gas molecules with the flat and smooth surfaces of the intersecting solid or perforated member influence momentum of the gas molecules so that they are directed towards the outlet. In one embodiment, the channel member is formed as a helix and the intersecting solid or perforated elements are disk-shaped. An alternative embodiment is provided having the channel member configured as a spiral and the perforated elements as cylindrical skirts. The pump provides significant improvements in pump capacity, reduced power consumption and size of pump.
Abstract translation: 描述了一种改进的真空泵机构，其中相交的固体或穿孔元件布置成与通道构件相交。 相交的固体或穿孔元件和通道构件的相对运动导致气体分子从泵的入口到出口被推动。 气体分子被限制在通道构件内并且气体分子与相交的固体或穿孔构件的平坦和平滑表面的相互作用影响气体分子的动量，使得它们被引导到出口。 在一个实施例中，通道构件形成为螺旋，并且相交的实体或穿孔元件是盘形的。 提供了一种替代实施例，其具有被配置为螺旋的通道构件和作为圆柱形裙部的多孔元件。 该泵提供了泵容量的显着改进，降低了功率消耗和泵的尺寸。
-
公开(公告)号：US12110896B2
公开(公告)日：2024-10-08
申请号：US17904143
申请日：2021-02-10
Applicant: Edwards Limited
Inventor： Nigel Paul Schofield , Stephen Dowdeswell
CPC classification number: F04D19/048 , F04D29/32 , F04D29/38 , F04D29/542
Abstract: An axial flow vacuum pump for evacuating a chamber in a semiconductor manufacturing process comprises a rotor having a plurality of rotor blades and a stator having a plurality of stator blades, wherein the rotor blades and stator blades have a curved shape.
-
公开(公告)号：US12025128B2
公开(公告)日：2024-07-02
申请号：US17999327
申请日：2021-05-20
Applicant: Edwards Limited
Inventor： Nigel Paul Schofield , Alan Ernest Kinnaird Holbrook
CPC classification number: F04C18/0215 , F01C19/005 , F04C27/002 , F04C27/005 , F04C2240/50
Abstract: A scroll vacuum pump has an axially extending drive shaft with an eccentric shaft portion, such that rotation of the drive shaft imparts an orbiting motion to an orbiting scroll relative to a fixed scroll. An axial adjustment mechanism has a plurality of adjustment members angularly spaced around the drive shaft and extending through the pump housing towards the orbiting scroll, the plurality of adjustment members each being configured to provide an independently adjustable axial position of the orbiting scroll. A plurality of sealing means isolate the plurality of adjustment members from a pump chamber, the plurality of sealing means extending around each of the plurality of adjustment members and comprising at least one flexible portion such that one end of the sealing means may orbit relative to a fixed other end of the sealing means.
-
-
-
-
-
-
-
-
-
Search Results
41
records
(took 0.02 seconds)
