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公开(公告)号：US20200258731A1
公开(公告)日：2020-08-13
申请号：US16833103
申请日：2020-03-27
Applicant: Elemental Scientific, Inc.
Inventor： Daniel R. Wiederin , Kyle W. Uhlmeyer , Austin Schultz , Jonathan Hein
Abstract: A sample introduction system providing variable online dilution of a sample is described. In one or more implementations, a device includes a spectrometry analysis system that employs example techniques in accordance with the present disclosure includes an inline dilution environment, including a first valve assembly configured to prepare a sample by accepting at least one of the sample, a diluent, a carrier, or an internal standard, where the first valve assembly includes a first sample loop; and a second valve assembly configured to prepare the sample by accepting the sample from the first valve assembly, where the second valve assembly is coupled to the first valve assembly, and where the second valve assembly includes a second sample loop.
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公开(公告)号：US20200066537A1
公开(公告)日：2020-02-27
申请号：US16532408
申请日：2019-08-05
Applicant: Elemental Scientific, Inc.
Inventor： Kyle W. Uhlmeyer , Jae Seok Lee , Daniel R. Wiederin , Patrick Sullivan
IPC: H01L21/306 , G01N35/10 , G01N1/20
Abstract: Systems and methods for automatic sampling of a sample for the determination of chemical element concentrations and control of semiconductor processes are described. A system embodiment includes a remote sampling system configured to collect a sample of phosphoric acid at a first location, the remote sampling system including a remote valve having a holding loop coupled thereto; and an analysis system configured for positioning at a second location remote from the first location, the analysis system coupled to the remote valve via a transfer line, the analysis system including an analysis device configured to determine a concentration of one or more components of the sample of phosphoric acid and including a sample pump at the second location configured to introduce the sample from the holding loop into the transfer line for analysis by the analysis device.
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公开(公告)号：US20160305917A1
公开(公告)日：2016-10-20
申请号：US15192464
申请日：2016-06-24
Applicant: Elemental Scientific, Inc.
Inventor： David Diaz , Jonathan Hein , Kyle W. Uhlmeyer , Daniel R. Wiederin , Tyler Yost , Kevin Wiederin
Abstract: Systems and methods are described to determine whether a sample transmitted through a transfer line from a remote sampling system contains a suitable sample to analyze by an analysis system. A system embodiment includes, but is not limited to, a sample receiving line configured to receive a liquid segment a first detector configured to detect the liquid segment at a first location in the sample receiving line; a second detector configured to detect the liquid segment at a second location in the sample receiving line downstream from the first location; and a controller configured to register a continuous liquid segment in the sample receiving line when the first detector and the second detector match detection states prior to the controller registering a change of state of the first detector.
Abstract translation: 描述系统和方法以确定通过远程采样系统的传输线传输的样本是否包含合适的样本以供分析系统分析。 系统实施例包括但不限于被配置为接收液体段的样品接收管线，第一检测器被配置为检测样品接收管线中的第一位置处的液体段; 第二检测器，被配置为在所述第一位置下游的所述样本接收线中的第二位置处检测所述液体段; 以及控制器，其被配置为当所述第一检测器和所述第二检测器在所述控制器记录所述第一检测器的状态改变之前匹配检测状态时，在所述样本接收线中登记连续液体段。
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公开(公告)号：US20250076160A1
公开(公告)日：2025-03-06
申请号：US18816564
申请日：2024-08-27
Applicant: Elemental Scientific, Inc.
Inventor： Jacob Unnerstall , Brianna Dufek , Daniel R. Wiederin , Suhas Ketkar , Austin Schultz , Kyle W. Uhlmeyer , Beau A. Marth
Abstract: Systems and methods are described for generating organic solvent scan solutions and calibration standards inline for semiconductor wafer analysis. A method embodiment includes, but is not limited to, drawing, via a pump system, a first organic solvent from a first organic chemical source; drawing, via the pump system, a second organic solvent from a second organic chemical source; mixing, inline, the first organic solvent and the second organic solvent to form an organic scan solution; and introducing the organic scan solution to a scan nozzle for introduction to one or more surfaces of a semiconducting wafer to remove one or more organic contaminants from the semiconducting wafer.
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公开(公告)号：US11710640B2
公开(公告)日：2023-07-25
申请号：US16532408
申请日：2019-08-05
Applicant: Elemental Scientific, Inc.
Inventor： Kyle W. Uhlmeyer , Jae Seok Lee , Daniel R. Wiederin , Patrick Sullivan
IPC: H01L21/306 , G01N35/10 , G01N1/20 , G01N1/10 , H01L21/311
CPC classification number: H01L21/30604 , G01N1/2035 , G01N35/1097 , G01N2001/1062 , G01N2001/2057 , H01L21/31111
Abstract: Systems and methods for automatic sampling of a sample for the determination of chemical element concentrations and control of semiconductor processes are described. A system embodiment includes a remote sampling system configured to collect a sample of phosphoric acid at a first location, the remote sampling system including a remote valve having a holding loop coupled thereto; and an analysis system configured for positioning at a second location remote from the first location, the analysis system coupled to the remote valve via a transfer line, the analysis system including an analysis device configured to determine a concentration of one or more components of the sample of phosphoric acid and including a sample pump at the second location configured to introduce the sample from the holding loop into the transfer line for analysis by the analysis device.
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Patent Agency Ranking
公开(公告)号：US11499895B2
公开(公告)日：2022-11-15
申请号：US17046567
申请日：2019-04-09
Applicant: Elemental Scientific, Inc.
Inventor： Daniel R. Wiederin , Kyle W. Uhlmeyer , Austin Schultz , Jacob Unnerstall , Kevin Wiederin
Abstract: Systems and methods are described to maintain a liquid sample segment of a sample transmitted through a transfer line from a remote sampling to an analysis system. A system, embodiment includes, but is not limited to, a sample transfer line configured to transport a liquid sample from a remote sampling system via gas pressure; a sample loop fluidically coupled with the sample transfer line, the sample loop configured to hold a sample fluid; and a backpressure chamber fluidically coupled with a gas pressure source and with the sample transfer line, the backpressure chamber configured to supply a backpressure against the liquid sample during transport through the sample transfer line.
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公开(公告)号：US11249101B2
公开(公告)日：2022-02-15
申请号：US16781262
申请日：2020-02-04
Applicant: Elemental Scientific, Inc.
Inventor： David Diaz , Jonathan Hein , Kyle W. Uhlmeyer , Daniel R. Wiederin , Tyler Yost , Kevin Wiederin
Abstract: Systems and methods are described to determine whether a sample transmitted through a transfer line from a remote sampling system contains a suitable sample to analyze by an analysis system. A system embodiment includes, but is not limited to, a sample receiving line configured to receive a liquid segment a first detector configured to detect the liquid segment at a first location in the sample receiving line; a second detector configured to detect the liquid segment at a second location in the sample receiving line downstream from the first location; and a controller configured to register a continuous liquid segment in the sample receiving line when the first detector and the second detector match detection states prior to the controller registering a change of state of the first detector.
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公开(公告)号：US20210382022A1
公开(公告)日：2021-12-09
申请号：US17355031
申请日：2021-06-22
Applicant: Elemental Scientific, Inc.
Inventor： DAVID DIAZ , Jonathan Hein , Kyle W. Uhlmeyer , Daniel R. Wiederin , Tyler Yost , Kevin Wiederin
Abstract: Systems and methods are described to determine whether a sample transmitted through a transfer line from a remote sampling system contains a suitable sample to analyze by an analysis system. A system embodiment includes, but is not limited to, a sample receiving line configured to receive a liquid segment a first detector configured to detect the liquid segment at a first location in the sample receiving line; a second detector configured to detect the liquid segment at a second location in the sample receiving line downstream from the first location; and a controller configured to register a continuous liquid segment in the sample receiving line when the first detector and the second detector match detection states prior to the controller registering a change of state of the first detector.
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公开(公告)号：US10373838B2
公开(公告)日：2019-08-06
申请号：US15366250
申请日：2016-12-01
Applicant: Elemental Scientific, Inc.
Inventor： Kyle W. Uhlmeyer , Jae Seok Lee , Daniel R. Wiederin , Patrick Sullivan
IPC: G01N1/10 , H01L21/306 , G01N35/10 , G01N1/20 , H01L21/311
Abstract: Systems and methods for automatic sampling of a sample for the determination of chemical element concentrations and control of semiconductor processes are described. A system embodiment includes a remote sampling system configured to collect a sample of phosphoric acid at a first location, the remote sampling system including a remote valve having a holding loop coupled thereto; and an analysis system configured for positioning at a second location remote from the first location, the analysis system coupled to the remote valve via a transfer line, the analysis system including an analysis device configured to determine a concentration of one or more components of the sample of phosphoric acid and including a sample pump at the second location configured to introduce the sample from the holding loop into the transfer line for analysis by the analysis device.
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公开(公告)号：US10222303B1
公开(公告)日：2019-03-05
申请号：US14942681
申请日：2015-11-16
Applicant: Elemental Scientific, Inc.
Inventor： Daniel R. Wiederin , Kyle W. Uhlmeyer , James W. Harris
Abstract: A dual spray chamber apparatus is described. In one or more implementations, the dual spray chamber apparatus includes a first cyclonic spray chamber for receiving an aerosol and conditioning the aerosol to separate a first conditioned portion of the aerosol from a second portion of the aerosol. The first cyclonic spray chamber defines a first chamber interior and comprises an input port in fluid communication with the first chamber interior. The dual spray chamber apparatus also includes a second spray chamber coupled with the first cyclonic spray chamber for receiving the first conditioned portion of the aerosol and further conditioning the first conditioned portion of the aerosol. The second spray chamber defines a second chamber interior and comprises an output port for expelling a first further conditioned portion of the first conditioned portion of the aerosol from the second chamber interior.
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