公开(公告)号：US07075323B2

公开(公告)日：2006-07-11

申请号：US10901936

申请日：2004-07-29

申请人： Matthias Brunner ,  Shinichi Kurita ,  Wendell T. Blonigan ,  Edgar Kehrberg

发明人： Matthias Brunner ,  Shinichi Kurita ,  Wendell T. Blonigan ,  Edgar Kehrberg

IPC分类号： G01R31/26

CPC分类号： H01J37/185 ,  G01R31/2886 ,  H01J2237/204

摘要： A method and system for testing one or more large substrates are provided. In one or more embodiments, the system includes a testing chamber having a substrate table disposed therein. The substrate table is adapted to move a substrate within the testing chamber in various directions. More particularly, the substrate table includes a first stage movable in a first direction, and a second stage movable in a second direction, wherein each of the stages moves in an X-direction, Y-direction or both X and Y directions. The system further includes a load lock chamber at least partially disposed below the testing chamber, and a transfer chamber coupled to the load lock chamber and the testing chamber. In one or more embodiments, the transfer chamber includes a robot disposed therein which is adapted to transfer substrates between the load lock chamber and the testing chamber.

公开(公告)号：US20100188666A1

公开(公告)日：2010-07-29

申请号：US11813334

申请日：2006-01-05

申请人： Matthias Brunner ,  Ralf Schmid ,  Bernhard Mueller ,  Axel Wenzel

发明人： Matthias Brunner ,  Ralf Schmid ,  Bernhard Mueller ,  Axel Wenzel

IPC分类号： G01B11/14

CPC分类号： G09G3/006 ,  G01R31/305 ,  G01R31/308 ,  G01R35/005 ,  H01J2237/2826

摘要： The invention relates to a method of calibration of the beam position of a corpuscular beam. A calibration body with structures is used, wherein the structures have a structure period Ps in the plain section and within each structure there is a position L intended for the measurement. For the calibration, at least one detection signal each at structures in the plain section of the calibration body is generated, wherein the corpuscular beam is deflected with deflectors on beam target positions L1 with the beam target period P1, which is larger than half of the structure period Ps, whereby a basic calibration is used for the control of the deflectors, and wherein the beam target deflections intentionally deviate either in the beam target period P1 from the structure period Ps and/or in the beam target position L1 from the position L.

摘要翻译： 本发明涉及一种校准红细胞束的束位置的方法。 使用具有结构的校准体，其中结构在平坦部分中具有结构周期Ps，并且在每个结构内具有用于测量的位置L. 对于校准，生成校准体的平坦部分中的结构处的至少一个检测信号，其中，粒子束在束目标位置L1上被偏转器偏转，其中光束目标周期P1大于 结构周期Ps，由此基准校准用于偏转器的控制，并且其中光束目标偏转有意地在光束目标周期P1中与结构周期Ps和/或光束目标位置L1从位置L 。

公开(公告)号：US20050212545A1

公开(公告)日：2005-09-29

申请号：US10115685

申请日：2002-04-04

申请人： Matthias Brunner ,  Ralf Schmid

发明人： Matthias Brunner ,  Ralf Schmid

IPC分类号： G01R31/302 ,  G01N23/225 ,  G01R1/06 ,  G01R31/26 ,  G01R31/307 ,  G01R31/311 ,  G02F1/13 ,  H01L21/66

CPC分类号： G01R31/311 ,  G01R31/307

摘要： A method and an apparatus for testing the function of a plurality of microstructural elements by irradiation with particle radiation. All of the microstructural elements detected as malfunctioning are listed in a first error list in a first test sequence. The microstructural elements listed in the first error list are tested once more in at least one further test sequence and at least the result of the test sequence last carried out is evaluated to establish the overall test result. The first test sequence is designed so that, if possible, all of the microstructural elements which are actually malfunctioning are detected. The invention further relates to a method for producing microstructural elements which are constructed as a plurality on a substrate and are tested according to the above test method.

摘要翻译： 一种用于通过用粒子辐射照射来测试多个微结构元件的功能的方法和装置。 检测为故障的所有微结构元件都列在第一个测试序列的第一个错误列表中。 在第一个错误列表中列出的微结构元素在至少一个进一步的测试序列中再次被测试，并且至少对上次执行的测试序列的结果进行评估以建立整体测试结果。 第一测试序列被设计成使得如果可能的话，检测到所有实际故障的微结构元件。 本发明还涉及一种用于制造在基板上多个构造并根据上述测试方法测试的显微结构元件的方法。

公开(公告)号：US06465795B1

公开(公告)日：2002-10-15

申请号：US09536897

申请日：2000-03-28

申请人： Juan R. Madonado ,  Lee H. Veneklasen ,  Matthias Brunner ,  Ralf Schmid

发明人： Juan R. Madonado ,  Lee H. Veneklasen ,  Matthias Brunner ,  Ralf Schmid

IPC分类号： H01J4000

CPC分类号： H01J37/026 ,  G01N23/225 ,  H01J2237/0047 ,  H01J2237/3175

摘要： In a charged particle or electron beam system, gas, such as argon or helium, is introduced over the surface of a substrate and ionized to neutralize charge accumulating on the surface from interactions caused by the impinging charged particles. The gas can be distributed throughout the gas chamber or confined to an area above the substrate. The radiation beam to ionize the gas can be directed across or towards the surface of the substrate. In the latter case, the gas pressure may be reduced to zero.

摘要翻译： 在带电粒子或电子束系统中，诸如氩或氦的气体被引入到衬底的表面上并电离以中和由撞击的带电粒子引起的相互作用累积在表面上的电荷。 气体可以分布在整个气体室中或限制在基板上方的区域中。 用于离子化气体的辐射束可以被引导穿过或朝向衬底的表面。 在后一种情况下，气体压力可以减小到零。

公开(公告)号：US4983833A

公开(公告)日：1991-01-08

申请号：US393221

申请日：1989-08-14

申请人： Matthias Brunner ,  Ralf Schmid ,  Michael Regula

发明人： Matthias Brunner ,  Ralf Schmid ,  Michael Regula

IPC分类号： H01J37/147 ,  G01Q30/02 ,  G01Q90/00 ,  H01J37/244 ,  H01J37/26

CPC分类号： H01J37/268 ,  H01J37/244 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/24507

摘要： A device for the detection of secondary electrons triggered at a large-area specimen is composed of a tube electrode arranged concentrically relative to the primary beam axis of an electron beam measuring device and an electrostatic or magnetic octupole for the deflection of the secondary electrons in the direction of a detector. An opposing electrical field is formed by two hemispherically shaped electrodes. The tube electrode which is arranged immediately above the specimen, and preferably has a circular cross-sectional area, whereby the tube diameter is selected larger than the diagonal of the specimen. An electrical extraction field that is rotationally symmetric with respect to the primary beam axis is generated inside the device. The secondary particles will be accelerated in the direction of the deflection unit.In the electrical extraction field, the particles are detected independently of the location of the respective measuring point inside the scanned field that is 20.times.20 cm.sup.2 in size.

摘要翻译： 用于检测在大面积标本处触发的二次电子的装置由相对于电子束测量装置的主光束轴同心布置的管电极和用于二次电子的偏转的静电或磁八极 检测器的方向。 相反的电场由两个半球形电极形成。 管状电极配置在试样的正上方，优选具有圆形的横截面积，从而选择管径大于试样的对角线。 在器件内产生相对于主光束轴旋转对称的电提取场。 次级粒子将沿着偏转单元的方向被加速。 在电提取领域中，独立于扫描场内相应测量点的尺寸为20×20cm 2的位置来检测颗粒。

公开(公告)号：US20090179656A1

公开(公告)日：2009-07-16

申请号：US12296055

申请日：2007-04-04

申请人： Bernhard Gunter Mueller ,  Ralf Schmid ,  Matthias Brunner

发明人： Bernhard Gunter Mueller ,  Ralf Schmid ,  Matthias Brunner

IPC分类号： G01R31/305 ,  G01N23/225 ,  G01N21/88

CPC分类号： G02F1/1309 ,  G02F2001/136254

摘要： The present invention relates to a device for testing an optoelectronic module, comprising a first source for generating an electromagnetic beam or particle beam, a second source for illuminating the optoelectronic module; and a detector. In addition, a method for testing an optoelectronic module is provided comprising illuminating the optoelectronic module, directing an electromagnetic beam or particle beam and detecting defects in the optoelectronic module. The illumination additional to the electromagnetic beam or particle beam makes defects visible which otherwise would not be detected.

摘要翻译： 本发明涉及一种用于测试光电子模块的装置，包括用于产生电磁束或粒子束的第一源，用于照亮光电子模块的第二源; 和检测器。 此外，提供了一种用于测试光电子模块的方法，包括照亮光电子模块，引导电磁束或粒子束并检测光电子模块中的缺陷。 附加到电磁波束或粒子束的照明使缺陷可见，否则将不会被检测到。

公开(公告)号：US20060028230A1

公开(公告)日：2006-02-09

申请号：US10977510

申请日：2004-10-29

申请人： Axel Wenzel ,  Ralf Schmid ,  Matthias Brunner

发明人： Axel Wenzel ,  Ralf Schmid ,  Matthias Brunner

IPC分类号： G01R31/00

CPC分类号： G01N23/2251 ,  G02F2001/136254

摘要： The present invention provides a method of electron beam testing of liquid crystal displays comprising non-uniform electrodes having a conductive portion and a dielectric portion. In accordance with methods of the present invention, the diameter of the electron beam is increased so that the beam is less focused, i.e., enlarged or “blurred,” over a non-uniform electrode area. The diameter of the beam is increased so that the beam generates secondary electrons from the conductive portion of the non-uniform electrode area. The configured test beam may be circular, elliptical, or other suitable shapes.

摘要翻译： 本发明提供了包括具有导电部分和电介质部分的不均匀电极的液晶显示器的电子束测试方法。 根据本发明的方法，电子束的直径增加，使得光束在非均匀电极区域上聚焦较少，即扩大或“模糊”。 光束的直径增加，使得光束从非均匀电极区域的导电部分产生二次电子。 配置的测试光束可以是圆形，椭圆形或其他合适的形状。

公开(公告)号：US08222911B2

公开(公告)日：2012-07-17

申请号：US12296055

申请日：2007-04-04

申请人： Bernhard Gunter Mueller ,  Ralf Schmid ,  Matthias Brunner

发明人： Bernhard Gunter Mueller ,  Ralf Schmid ,  Matthias Brunner

IPC分类号： G01R31/305

CPC分类号： G02F1/1309 ,  G02F2001/136254

摘要： The present invention relates to a device for testing an optoelectronic module, comprising a first source for generating an electromagnetic beam or particle beam, a second source for illuminating the optoelectronic module; and a detector. In addition, a method for testing an optoelectronic module is provided comprising illuminating the optoelectronic module, directing an electromagnetic beam or particle beam and detecting defects in the optoelectronic module. The illumination additional to the electromagnetic beam or particle beam makes defects visible which otherwise would not be detected.

摘要翻译： 本发明涉及一种用于测试光电子模块的装置，包括用于产生电磁束或粒子束的第一源，用于照亮光电子模块的第二源; 和检测器。 此外，提供了一种用于测试光电子模块的方法，包括照亮光电子模块，引导电磁束或粒子束并检测光电子模块中的缺陷。 附加到电磁波束或粒子束的照明使缺陷可见，否则将不会被检测到。

公开(公告)号：US08009299B2

公开(公告)日：2011-08-30

申请号：US11813334

申请日：2006-01-05

申请人： Matthias Brunner ,  Ralf Schmid ,  Bernhard Mueller ,  Axel Wenzel

发明人： Matthias Brunner ,  Ralf Schmid ,  Bernhard Mueller ,  Axel Wenzel

IPC分类号： G01B11/14

CPC分类号： G09G3/006 ,  G01R31/305 ,  G01R31/308 ,  G01R35/005 ,  H01J2237/2826

摘要： The invention relates to a method of calibration of the beam position of a corpuscular beam. A calibration body with structures is used, wherein the structures have a structure period PS in the plain section and within each structure there is a position L intended for the measurement. For the calibration, at least one detection signal each at structures in the plain section of the calibration body is generated, wherein the corpuscular beam is deflected with deflectors on beam target positions L1 with the beam target period P1, which is larger than half of the structure period PS, whereby a basic calibration is used for the control of the deflectors, and wherein the beam target deflections deviate either in the beam target period P1 from the structure period PS and/or in the beam target position L1 from the position L.

摘要翻译： 本发明涉及一种校准红细胞束的束位置的方法。 使用具有结构的校准体，其中结构在平坦部分中具有结构周期PS，并且在每个结构内具有用于测量的位置L. 对于校准，生成校准体的平坦部分中的结构处的至少一个检测信号，其中，粒子束在束目标位置L1上被偏转器偏转，其中光束目标周期P1大于 结构周期PS，由此使用基准校准来控制偏转器，并且其中光束目标偏转在光束目标周期P1中与结构周期PS和/或从位置L的光束目标位置L1偏离。

公开(公告)号：US07256606B2

公开(公告)日：2007-08-14

申请号：US10977510

申请日：2004-10-29

申请人： Axel Wenzel ,  Ralf Schmid ,  Matthias Brunner

发明人： Axel Wenzel ,  Ralf Schmid ,  Matthias Brunner

IPC分类号： G01R31/00 ,  G01R31/307

CPC分类号： G01N23/2251 ,  G02F2001/136254

摘要： The present invention provides a method of electron beam testing of liquid crystal displays comprising non-uniform electrodes having a conductive portion and a dielectric portion. In accordance with methods of the present invention, the diameter of the electron beam is increased so that the beam is less focused, i.e., enlarged or “blurred,” over a non-uniform electrode area. The diameter of the beam is increased so that the beam generates secondary electrons from the conductive portion of the non-uniform electrode area. The configured test beam may be circular, elliptical, or other suitable shapes.

摘要翻译： 本发明提供了包括具有导电部分和电介质部分的不均匀电极的液晶显示器的电子束测试方法。 根据本发明的方法，电子束的直径增加，使得光束在非均匀电极区域上聚焦较少，即扩大或“模糊”。 光束的直径增加，使得光束从非均匀电极区域的导电部分产生二次电子。 配置的测试光束可以是圆形，椭圆形或其他合适的形状。