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公开(公告)号：US06465795B1
公开(公告)日：2002-10-15
申请号：US09536897
申请日：2000-03-28
IPC分类号： H01J4000
CPC分类号： H01J37/026 , G01N23/225 , H01J2237/0047 , H01J2237/3175
摘要： In a charged particle or electron beam system, gas, such as argon or helium, is introduced over the surface of a substrate and ionized to neutralize charge accumulating on the surface from interactions caused by the impinging charged particles. The gas can be distributed throughout the gas chamber or confined to an area above the substrate. The radiation beam to ionize the gas can be directed across or towards the surface of the substrate. In the latter case, the gas pressure may be reduced to zero.
摘要翻译： 在带电粒子或电子束系统中，诸如氩或氦的气体被引入到衬底的表面上并电离以中和由撞击的带电粒子引起的相互作用累积在表面上的电荷。 气体可以分布在整个气体室中或限制在基板上方的区域中。 用于离子化气体的辐射束可以被引导穿过或朝向衬底的表面。 在后一种情况下，气体压力可以减小到零。
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公开(公告)号：US07847566B2
公开(公告)日：2010-12-07
申请号：US11940432
申请日：2007-11-15
申请人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号： G01R31/26
CPC分类号： G09G3/006 , G01R31/2893 , G01R31/305
摘要： A method of testing electronic devices on substrates is described. The method includes placing a configurable prober over a first substrate, testing the first substrate, re-configuring the configurable prober, placing the configurable prober over a second substrate, and testing the second substrate.
摘要翻译： 描述了一种在基板上测试电子器件的方法。 该方法包括将可配置的探测器放置在第一衬底上，测试第一衬底，重新配置可配置的探测器，将可配置的探测器放置在第二衬底上，以及测试第二衬底。
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公开(公告)号：US20100188666A1
公开(公告)日：2010-07-29
申请号：US11813334
申请日：2006-01-05
申请人： Matthias Brunner , Ralf Schmid , Bernhard Mueller , Axel Wenzel
发明人： Matthias Brunner , Ralf Schmid , Bernhard Mueller , Axel Wenzel
IPC分类号： G01B11/14
CPC分类号： G09G3/006 , G01R31/305 , G01R31/308 , G01R35/005 , H01J2237/2826
摘要： The invention relates to a method of calibration of the beam position of a corpuscular beam. A calibration body with structures is used, wherein the structures have a structure period Ps in the plain section and within each structure there is a position L intended for the measurement. For the calibration, at least one detection signal each at structures in the plain section of the calibration body is generated, wherein the corpuscular beam is deflected with deflectors on beam target positions L1 with the beam target period P1, which is larger than half of the structure period Ps, whereby a basic calibration is used for the control of the deflectors, and wherein the beam target deflections intentionally deviate either in the beam target period P1 from the structure period Ps and/or in the beam target position L1 from the position L.
摘要翻译： 本发明涉及一种校准红细胞束的束位置的方法。 使用具有结构的校准体，其中结构在平坦部分中具有结构周期Ps，并且在每个结构内具有用于测量的位置L. 对于校准，生成校准体的平坦部分中的结构处的至少一个检测信号，其中，粒子束在束目标位置L1上被偏转器偏转，其中光束目标周期P1大于 结构周期Ps，由此基准校准用于偏转器的控制，并且其中光束目标偏转有意地在光束目标周期P1中与结构周期Ps和/或光束目标位置L1从位置L 。
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4.发明申请Method and apparatus for testing function of active microstructural elements and method for producing microstructural elements using the test method 失效用于测试活性微结构元件功能的方法和装置以及使用该测试方法生产微结构元件的方法公开(公告)号：US20050212545A1
公开(公告)日：2005-09-29
申请号：US10115685
申请日：2002-04-04
申请人： Matthias Brunner , Ralf Schmid
发明人： Matthias Brunner , Ralf Schmid
IPC分类号： G01R31/302 , G01N23/225 , G01R1/06 , G01R31/26 , G01R31/307 , G01R31/311 , G02F1/13 , H01L21/66
CPC分类号： G01R31/311 , G01R31/307
摘要： A method and an apparatus for testing the function of a plurality of microstructural elements by irradiation with particle radiation. All of the microstructural elements detected as malfunctioning are listed in a first error list in a first test sequence. The microstructural elements listed in the first error list are tested once more in at least one further test sequence and at least the result of the test sequence last carried out is evaluated to establish the overall test result. The first test sequence is designed so that, if possible, all of the microstructural elements which are actually malfunctioning are detected. The invention further relates to a method for producing microstructural elements which are constructed as a plurality on a substrate and are tested according to the above test method.
摘要翻译： 一种用于通过用粒子辐射照射来测试多个微结构元件的功能的方法和装置。 检测为故障的所有微结构元件都列在第一个测试序列的第一个错误列表中。 在第一个错误列表中列出的微结构元素在至少一个进一步的测试序列中再次被测试，并且至少对上次执行的测试序列的结果进行评估以建立整体测试结果。 第一测试序列被设计成使得如果可能的话，检测到所有实际故障的微结构元件。 本发明还涉及一种用于制造在基板上多个构造并根据上述测试方法测试的显微结构元件的方法。
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公开(公告)号：US20050179451A1
公开(公告)日：2005-08-18
申请号：US10889695
申请日：2004-07-12
申请人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez Frank Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez Frank Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号： G01R31/302 , G01R31/26 , G01R31/305 , G02F1/13 , G09G3/00 , H01L21/687
CPC分类号： G09G3/006 , G01R31/2893 , G01R31/305
摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame.
摘要翻译： 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点 沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常，玻璃基板是正方形的，框架也是正方形的。 以这种方式，“x”和“y”轴由框架定义。
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公开(公告)号：US4983833A
公开(公告)日：1991-01-08
申请号：US393221
申请日：1989-08-14
申请人： Matthias Brunner , Ralf Schmid , Michael Regula
发明人： Matthias Brunner , Ralf Schmid , Michael Regula
IPC分类号： H01J37/147 , G01Q30/02 , G01Q90/00 , H01J37/244 , H01J37/26
CPC分类号： H01J37/268 , H01J37/244 , H01J2237/2448 , H01J2237/2449 , H01J2237/24507
摘要： A device for the detection of secondary electrons triggered at a large-area specimen is composed of a tube electrode arranged concentrically relative to the primary beam axis of an electron beam measuring device and an electrostatic or magnetic octupole for the deflection of the secondary electrons in the direction of a detector. An opposing electrical field is formed by two hemispherically shaped electrodes. The tube electrode which is arranged immediately above the specimen, and preferably has a circular cross-sectional area, whereby the tube diameter is selected larger than the diagonal of the specimen. An electrical extraction field that is rotationally symmetric with respect to the primary beam axis is generated inside the device. The secondary particles will be accelerated in the direction of the deflection unit.In the electrical extraction field, the particles are detected independently of the location of the respective measuring point inside the scanned field that is 20.times.20 cm.sup.2 in size.
摘要翻译： 用于检测在大面积标本处触发的二次电子的装置由相对于电子束测量装置的主光束轴同心布置的管电极和用于二次电子的偏转的静电或磁八极 检测器的方向。 相反的电场由两个半球形电极形成。 管状电极配置在试样的正上方，优选具有圆形的横截面积，从而选择管径大于试样的对角线。 在器件内产生相对于主光束轴旋转对称的电提取场。 次级粒子将沿着偏转单元的方向被加速。 在电提取领域中，独立于扫描场内相应测量点的尺寸为20×20cm 2的位置来检测颗粒。
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公开(公告)号：US20100327162A1
公开(公告)日：2010-12-30
申请号：US12826635
申请日：2010-06-29
申请人： FAYEZ E. ABBOUD , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
发明人： FAYEZ E. ABBOUD , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
IPC分类号： G01N23/00
CPC分类号： H01L21/67748 , H01J2237/2811 , H01J2237/2817 , H01L21/67201 , H01L21/67236
摘要： A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.
摘要翻译： 描述了用于测试形成在大面积基板上的多个电子装置的方法和装置。 在一个实施例中，该装置在至少一个室内的一个线性轴线上对衬底进行测试，所述至少一个腔室比待测试衬底的尺寸略宽。 由于系统的尺寸和体积较小，洁净室空间和处理时间被最小化。
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公开(公告)号：US20090179656A1
公开(公告)日：2009-07-16
申请号：US12296055
申请日：2007-04-04
IPC分类号： G01R31/305 , G01N23/225 , G01N21/88
CPC分类号： G02F1/1309 , G02F2001/136254
摘要： The present invention relates to a device for testing an optoelectronic module, comprising a first source for generating an electromagnetic beam or particle beam, a second source for illuminating the optoelectronic module; and a detector. In addition, a method for testing an optoelectronic module is provided comprising illuminating the optoelectronic module, directing an electromagnetic beam or particle beam and detecting defects in the optoelectronic module. The illumination additional to the electromagnetic beam or particle beam makes defects visible which otherwise would not be detected.
摘要翻译： 本发明涉及一种用于测试光电子模块的装置，包括用于产生电磁束或粒子束的第一源，用于照亮光电子模块的第二源; 和检测器。 此外，提供了一种用于测试光电子模块的方法，包括照亮光电子模块，引导电磁束或粒子束并检测光电子模块中的缺陷。 附加到电磁波束或粒子束的照明使缺陷可见，否则将不会被检测到。
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公开(公告)号：US07319335B2
公开(公告)日：2008-01-15
申请号：US10889695
申请日：2004-07-12
申请人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号： G01R31/305
CPC分类号： G09G3/006 , G01R31/2893 , G01R31/305
摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame.
摘要翻译： 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点 沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常，玻璃基板是正方形的，框架也是正方形的。 以这种方式，“x”和“y”轴由框架定义。
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公开(公告)号：US20070296426A1
公开(公告)日：2007-12-27
申请号：US11746530
申请日：2007-05-09
申请人： SRIRAM KRISHNASWAMI , Matthias Brunner , William Beaton , Yong Liu , Benjamin Johnston , Hung Nguyen , Ludwig Ledl , Ralf Schmid
发明人： SRIRAM KRISHNASWAMI , Matthias Brunner , William Beaton , Yong Liu , Benjamin Johnston , Hung Nguyen , Ludwig Ledl , Ralf Schmid
IPC分类号： G01R31/02
CPC分类号： G01R31/2887 , G09G3/006 , G09G3/3208 , G09G3/3611
摘要： An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays on the large area substrate. The apparatus includes a prober assembly that is movable relative to the large area substrate and/or the contact points, and may be configured to test various patterns of displays and contact points on various large area substrates. The prober assembly is also configured to test fractional sections of the large area substrate positioned on a testing table, and the prober assembly may be configured for different display and contact point patterns without removing the prober assembly from the testing table.
摘要翻译： 描述了用于测试大面积基板的装置和方法。 大面积基板包括电耦合到大面积基板上的显示器的显示器图案和接触点。 该装置包括可相对于大面积基板和/或接触点移动的探测器组件，并且可以被配置为测试各种大面积基板上的各种显示图案和接触点。 探测器组件还被配置为测试位于测试台上的大面积衬底的小数部分，并且探针组件可以被配置为用于不同的显示和接触点图案，而不从测试台移除探测器组件。
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