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公开(公告)号:US20200216677A1
公开(公告)日:2020-07-09
申请号:US16465790
申请日:2018-09-28
Applicant: FUJIMI INCORPORATED
Inventor: Shogo TSUBOTA , Souma TAGUCHI , Keiji ASHITAKA , Naoya MIWA
IPC: C09C1/30 , C01B32/956
Abstract: According to the present invention, there is provided a means for producing an aluminum hydroxide-coated SiC particle powder having a coating layer containing aluminum hydroxide on a surface of SiC particles. The present invention relates to a method for producing an aluminum hydroxide-coated SiC particle powder, which includes a coating step of maintaining a pH of a dispersion containing SiC particles, sodium aluminate, and water in a range of from 9 to 12 and forming coated particles having a coating layer containing aluminum hydroxide on a surface of the SiC particles.
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22.
公开(公告)号:US20190309191A1
公开(公告)日:2019-10-10
申请号:US16449011
申请日:2019-06-21
Applicant: FUJIMI INCORPORATED
Inventor: Keiji ASHITAKA , Shogo TSUBOTA
IPC: C09G1/02 , C01B33/148 , C01B33/146 , C09K3/14 , H01L21/304 , C07F7/02 , H01L21/3105 , B24B37/04 , B24B37/00 , C01B33/149
Abstract: To provide modified colloidal silica capable of improving the stability of the polishing speed with time when used as abrasive grains in a polishing composition for polishing a polishing object that contains a material to which charged modified colloidal silica easily adheres, such as a SiN wafer, and to provide a method for producing the modified colloidal silica.Modified colloidal silica, being obtained by modifying raw colloidal silica, whereinthe raw colloidal silica has a number distribution ratio of 10% or less of microparticles having a particle size of 40% or less relative to a volume average particle size based on Heywood diameter (equivalent circle diameter) as determined by image analysis using a scanning electron microscope.
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公开(公告)号:US20190010059A1
公开(公告)日:2019-01-10
申请号:US15748771
申请日:2016-07-25
Applicant: FUJIMI INCORPORATED
Inventor: Keiji ASHITAKA , Masaaki ITO , Jun SHINODA
IPC: C01B33/145 , B01J13/00 , C08L83/04
Abstract: [Problem] Provided is a method for producing a silica sol capable of providing consistent production of the silica sol having a uniform particle size of silica particles in any particle size of the silica particles.[Solution] A method for producing a silica sol is a method including a step of mixing liquid (A) containing an alkaline catalyst, water, and a first organic solvent with liquid (B) containing an alkoxysilane or its condensate and a second organic solvent, and liquid (C1) having a pH of 5.0 or higher and lower than 8.0 and containing water or liquid (C2) containing water and being free of an alkaline catalyst to make a reaction liquid.
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24.
公开(公告)号:US20170362465A1
公开(公告)日:2017-12-21
申请号:US15544389
申请日:2016-01-19
Applicant: FUJIMI INCORPORATED
Inventor: Keiji ASHITAKA , Shogo TSUBOTA
IPC: C09G1/02 , C01B33/149 , C07F7/02 , B24B37/04 , H01L21/3105 , C01B33/148 , C09K3/14 , H01L21/768
CPC classification number: C09G1/02 , B24B37/00 , B24B37/044 , C01B33/146 , C01B33/148 , C01B33/149 , C01P2004/03 , C01P2004/51 , C01P2004/61 , C07F7/025 , C09K3/14 , C09K3/1436 , H01L21/304 , H01L21/31053 , H01L21/76819
Abstract: To provide modified colloidal silica capable of improving the stability of the polishing speed with time when used as abrasive grains in a polishing composition for polishing a polishing object that contains a material to which charged modified colloidal silica easily adheres, such as a SiN wafer, and to provide a method for producing the modified colloidal silica.Modified colloidal silica, being obtained by modifying raw colloidal silica, whereinthe raw colloidal silica has a number distribution ratio of 10% or less of microparticles having a particle size of 40% or less relative to a volume average particle size based on Heywood diameter (equivalent circle diameter) as determined by image analysis using a scanning electron microscope.
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公开(公告)号:US20240199432A1
公开(公告)日:2024-06-20
申请号:US18595187
申请日:2024-03-04
Applicant: FUJIMI INCORPORATED
Inventor: Masaaki ITO , Jun SHINODA , Keiji ASHITAKA
IPC: C01B33/148 , C01B33/14 , C01B33/141 , C01B33/145
CPC classification number: C01B33/148 , C01B33/141 , C01B33/145 , C01B33/14 , C01P2004/64 , C01P2006/22
Abstract: A method for manufacturing a silica sol according to an embodiment of the present invention includes: a step of preparing a silica sol reaction liquid by hydrolyzing and polycondensing an alkoxysilane or a condensate thereof using an alkali catalyst in a solvent; and at least one of a step of concentrating the silica sol reaction liquid by an ultrasonic atomization separation method and a step of replacing the silica sol reaction liquid with water by the ultrasonic atomization separation method.
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公开(公告)号:US20240116763A1
公开(公告)日:2024-04-11
申请号:US18543060
申请日:2023-12-18
Applicant: FUJIMI INCORPORATED
Inventor: Keiji ASHITAKA
IPC: C01B33/145
CPC classification number: C01B33/145
Abstract: Provided is a method for producing a silica sol. A gel-like material cannot be generated and highly associated silica particles can be obtained. A method for producing a silica sol comprises a step of making a reaction liquid by mixing liquid (A) comprising an alkaline catalyst, water, a first organic solvent and silica particles for association with liquid (B) comprising at least one of tetramethoxysilane and a condensate thereof and a second organic solvent, wherein during the mixing, an addition rate of the liquid (B) is 8.5×10−4 to 5.6×10−3 (mol of silicon atoms in liquid (B)/mol of water in liquid (A)) per minute.
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公开(公告)号:US20240002232A1
公开(公告)日:2024-01-04
申请号:US18213459
申请日:2023-06-23
Applicant: FUJIMI INCORPORATED
Inventor: Ryo NOMURA , Keiji ASHITAKA , Naoya MIWA
IPC: C01B25/37
CPC classification number: C01B25/372 , C01P2004/03 , C01P2002/72 , C01P2004/24
Abstract: A titanium phosphate powder containing plate-like particles with a reduced content ratio of byproducts other than the plate-like particles, and exhibiting crystallinity of titanium phosphate represented by a chemical formula Ti(HPO4)2·nH2O (0≤n≤1) is provided in the present disclosure. The present disclosure relates to a method for producing a titanium phosphate powder exhibiting crystallinity of titanium phosphate represented by a chemical formula Ti(HPO4)2·nH2O (0≤n≤1), and containing plate-like particles, the method comprising putting an acidic raw material aqueous solution containing phosphorus and titanium in a sealed vessel, and storing the sealed vessel containing the raw material aqueous solution for a period of 2 hours or more, with the ambient temperature of the sealed vessel maintained under a constant temperature condition within a range of 40° C. or more and less than 100° C., wherein during the storage, the raw material aqueous solution is not stirred, or during the storage, the raw material aqueous solution is stirred, and in the case where the raw material aqueous solution is stirred during the storage, a swirl flow rate in stirring the raw material aqueous solution is within a range of more than 0 m/s and 0.30 m/s or less.
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公开(公告)号:US20220403178A1
公开(公告)日:2022-12-22
申请号:US17638494
申请日:2020-05-15
Applicant: FUJIMI INCORPORATED
Inventor: Tomomi AKIYAMA , Takashi HAYAKAWA , Keiji ASHITAKA , Naoya MIWA
Abstract: A method for increasing the specific surface area of titanium phosphate plate-shaped particles of this invention includes: obtaining a liquid in a state where a powder containing titanium phosphate plate-shaped particles is dispersed in an aqueous alkaline solution.
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公开(公告)号:US20220144639A1
公开(公告)日:2022-05-12
申请号:US17585134
申请日:2022-01-26
Applicant: FUJIMI INCORPORATED
Inventor: Mayumi IWAKUNI , Keiji ASHITAKA , Naoya MIWA
Abstract: The titanium phosphate powder of the present invention includes plate-shaped crystalline particles of titanium phosphate, an average thickness of the plate-shaped crystalline particles is 0.01 μm or more and less than 0.10 μm, and an aspect ratio, which is a value obtained by dividing an average primary particle diameter of the plate-shaped crystalline particles by the average thickness, is 5 or more. In the method for producing a titanium phosphate powder of the present invention, a raw material containing titanium and phosphorus is caused to react by a hydrothermal synthesis method, and when the titanium phosphate powder including plate-shaped crystalline particles of titanium phosphate is produced, a mixture of titanium sulfate and phosphoric acid is used as the raw material.
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30.
公开(公告)号:US20220055951A1
公开(公告)日:2022-02-24
申请号:US17415267
申请日:2019-12-05
Applicant: FUJIMI INCORPORATED
Inventor: Souma Taguchi , Keigo KAMOSHIDA , Tomoaki NAKAMURA , Naoya MIWA , Keiji ASHITAKA
IPC: C04B35/565 , C04B35/628
Abstract: The present invention provides means capable of satisfactorily exhibit the properties inherent in the inorganic particle and the constituent material of the coating layer, such as obtaining high dispersibility and high mechanical properties in the coated particle that contains the inorganic particle having at least the inorganic substance capable of forming an inorganic oxide on a surface, and the coating layer with which the inorganic particle is coated. The present invention relates to a coated particle that contains an inorganic particle having at least an inorganic substance capable of forming an inorganic oxide on a surface, and a coating layer with which the inorganic particle is coated, in which the amount of the inorganic oxide per unit surface area of the inorganic particle does not exceed 0.150 mg/m2.
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