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    Process for manufacturing a triaxial piezoresistive accelerometer and relative pressure-monitoring device
    26.
    发明申请
    Process for manufacturing a triaxial piezoresistive accelerometer and relative pressure-monitoring device 有权
    制造三轴压阻加速度计和相对压力监测装置的方法

    公开(公告)号：US20060185428A1

    公开(公告)日：2006-08-24

    申请号：US11338614

    申请日：2006-01-24

    申请人： Chantal Combi ,  Lorenzo Baldo ,  Dino Faralli ,  Flavio Villa

    发明人： Chantal Combi ,  Lorenzo Baldo ,  Dino Faralli ,  Flavio Villa

    IPC分类号： B60C23/02

    CPC分类号： G01P15/123 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/084

    摘要： A manufacturing process of a semiconductor piezoresistive accelerometer includes the steps of: providing a wafer of semiconductor material; providing a membrane in the wafer over a cavity; rigidly coupling an inertial mass to the membrane; and providing, in the wafer, piezoresistive transduction elements, that are sensitive to strains of the membrane and generate corresponding electrical signals. The step of coupling is carried out by forming the inertial mass on top of a surface of the membrane opposite to the cavity. The accelerometer is advantageously used in a device for monitoring the pressure of a tire of a vehicle.

    摘要翻译： 半导体压阻加速度计的制造方法包括以下步骤：提供半导体材料的晶片; 在晶片上在腔上提供膜; 将惯性质量刚性耦合到膜上; 并且在晶片中提供对膜的应变敏感的压阻转导元件并产生相应的电信号。 通过在与空腔相对的膜的表面的顶部上形成惯性质量来进行耦合的步骤。 加速度计有利地用于监测车辆的轮胎的压力的装置中。

    Analog input device with integrated pressure sensor and electronic apparatus equipped with said input device
    27.
    发明授权
    Analog input device with integrated pressure sensor and electronic apparatus equipped with said input device 有权
    具有集成压力传感器的模拟输入设备和配备有所述输入设备的电子设备

    公开(公告)号：US07928960B2

    公开(公告)日：2011-04-19

    申请号：US11530170

    申请日：2006-09-08

    申请人： Lorenzo Baldo ,  Chantal Combi ,  Dino Faralli

    发明人： Lorenzo Baldo ,  Chantal Combi ,  Dino Faralli

    IPC分类号： G09G5/00

    CPC分类号： G01L5/223 ,  G06F3/0338 ,  Y10T29/49105 ,  Y10T29/49169

    摘要： In an input device, a control element is operated by a user; a pressure sensor is mechanically coupled to the control element and is provided with a monolithic body of semiconductor material housing a first sensitive element, which detects an actuation of the control element; a supporting element is connected to the pressure sensor; and connection elements electrically connect the monolithic body to the supporting element without interposition of a package. In particular, the monolithic body has electrical-contact areas carried by one main surface thereof, and the printed circuit board has conductive regions carried by a main face thereof; the connection elements are conductive bumps and electrically connect the electrical-contact areas to the conductive regions.

    摘要翻译： 在输入装置中，控制元件由用户操作; 压力传感器机械耦合到控制元件并且设置有容纳第一敏感元件的半导体材料的整体体，第一敏感元件检测控制元件的致动; 支撑元件连接到压力传感器; 并且连接元件将整体体电连接到支撑元件而不插入封装。 特别地，整体式主体具有由其主表面承载的电接触区域，并且印刷电路板具有由其主面承载的导电区域; 连接元件是导电凸块并将电接触区域电连接到导电区域。

    ASSEMBLY OF AN INTEGRATED DEVICE ENABLING A FACILITATED FLUIDIC CONNECTION TO REGIONS OF THE DEVICE
    29.
    发明申请
    ASSEMBLY OF AN INTEGRATED DEVICE ENABLING A FACILITATED FLUIDIC CONNECTION TO REGIONS OF THE DEVICE 有权
    集成装置的装配使得装置的区域的流体流动连接

    公开(公告)号：US20080011090A1

    公开(公告)日：2008-01-17

    申请号：US11768090

    申请日：2007-06-25

    申请人： Federico Giovanni Ziglioli ,  Chantal Combi ,  Lorenzo Baldo ,  Caterina Riva ,  Mark Andrew Shaw

    发明人： Federico Giovanni Ziglioli ,  Chantal Combi ,  Lorenzo Baldo ,  Caterina Riva ,  Mark Andrew Shaw

    IPC分类号： G01L9/00

    CPC分类号： G01L19/0038

    摘要： Described herein is an assembly of an integrated device and of a cap coupled to the integrated device; the integrated device is provided with at least a first and a second region to be fluidically accessed from outside, and the cap has an outer portion provided with at least a first and a second inlet port in fluid communication with the first and second regions. In particular, the first and second regions are arranged on a first outer face, or on respective adjacent outer faces, of the integrated device, and an interface structure is set between the integrated device and the outer portion of the cap, and is provided with a channel arrangement for routing the first and second regions towards the first and second inlets.

    摘要翻译： 这里描述的是集成装置和联接到集成装置的盖的组件; 集成装置设置有至少第一和第二区域以从外部流体地访问，并且帽具有至少设置有与第一和第二区域流体连通的第一入口和第二入口的外部。 特别地，第一和第二区域布置在集成装置的第一外表面或相应的相邻外表面上，并且界面结构设置在集成装置和盖的外部之间，并且设置有 用于将第一和第二区域朝向第一和第二入口路由的通道布置。

    SURFACE ACOUSTIC WAVE PRESSURE SENSOR
    30.
    发明申请
    SURFACE ACOUSTIC WAVE PRESSURE SENSOR 有权
    表面声波式压力传感器

    公开(公告)号：US20070113658A1

    公开(公告)日：2007-05-24

    申请号：US11531808

    申请日：2006-09-14

    申请人： Chantal Combi ,  Simona Petroni ,  Anna Pomarico ,  Lorenzo Baldo

    发明人： Chantal Combi ,  Simona Petroni ,  Anna Pomarico ,  Lorenzo Baldo

    IPC分类号： G01L11/00

    CPC分类号： G01L9/0025

    摘要： A surface acoustic wave pressure sensor includes: a substrate and at least one flexible membrane, suspended over a cavity defined in the thickness of the substrate, the membrane being elastically deformable by a pressure applied by a fluid and being defined between a first surface facing the cavity and a second opposite surface; a SAW device comprising a layer of piezoelectric material arranged on the second surface of the membrane, the SAW device further comprising at least one SAW electro-acoustic transducer formed on one free surface of the piezoelectric layer. The piezoelectric layer is formed by deposition of piezoelectric material on the membrane and the substrate is integrated in a chip of semiconductor material, the membrane being a layer of the chip suspended over the cavity.

    摘要翻译： 表面声波压力传感器包括：衬底和至少一个柔性膜，其悬挂在限定在衬底的厚度上的空腔上，所述膜可通过由流体施加的压力弹性变形，并且限定在面向 空腔和第二相对表面; 一种SAW器件，包括布置在膜的第二表面上的压电材料层，SAW器件还包括形成在压电层的一个自由表面上的至少一个SAW电声换能器。 压电层通过在膜上沉积压电材料而形成，并且衬底集成在半导体材料芯片中，该膜是悬挂在空腔上的芯片层。