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1.发明授权公开(公告)号：US07875942B2
公开(公告)日：2011-01-25
申请号：US12006819
申请日：2008-01-04
IPC分类号： H01L29/84
CPC分类号： B81B7/0061 , B81B7/007 , H01L2224/0554 , H01L2224/0557 , H01L2224/05571 , H01L2224/05573 , H01L2224/056 , H01L2224/16225 , H01L2224/48091 , H01L2924/00014 , H01L2924/1461 , H01L2224/05599 , H01L2224/0555 , H01L2224/0556
摘要： An electronic device includes a substrate provided with a passing opening and a MEMS device including an active surface wherein a portion of the MEMS device is integrated sensitive to chemical/physical variations of a fluid. The active surface of the MEMS device faces the substrate and is spaced therefrom, the sensitive portion being aligned to the opening. A protective package incorporates at least partially the MEMS device and the substrate, leaving at least the sensitive portion of the MEMS device, and the opening of the substrate exposed. A barrier element is positioned in an area which surrounds the sensitive portion to realize a protection structure for the MEMS device, so that the sensitive portion is free.
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2.发明申请Electronic device including MEMS devices and holed substrates, in particular of the LGA or BGA type 有权电子设备包括MEMS器件和带孔衬底，特别是LGA或BGA型公开(公告)号：US20080179697A1
公开(公告)日：2008-07-31
申请号：US12006819
申请日：2008-01-04
CPC分类号： B81B7/0061 , B81B7/007 , H01L2224/0554 , H01L2224/0557 , H01L2224/05571 , H01L2224/05573 , H01L2224/056 , H01L2224/16225 , H01L2224/48091 , H01L2924/00014 , H01L2924/1461 , H01L2224/05599 , H01L2224/0555 , H01L2224/0556
摘要： An electronic device includes a substrate provided with a passing opening and a MEMS device including an active surface wherein a portion of the MEMS device is integrated sensitive to chemical/physical variations of a fluid. The active surface of the MEMS device faces the substrate and is spaced therefrom, the sensitive portion being aligned to the opening. A protective package incorporates at least partially the MEMS device and the substrate, leaving at least the sensitive portion of the MEMS device, and the opening of the substrate exposed. A barrier element is positioned in an area which surrounds the sensitive portion to realize a protection structure for the MEMS device, so that the sensitive portion is free.
摘要翻译： 电子设备包括设置有通过开口的基板和包括活性表面的MEMS器件，其中MEMS器件的一部分对流体的化学/物理变化敏感。 MEMS器件的有源表面面向衬底并与其间隔开，敏感部分与开口对准。 保护封装至少部分地包括MEMS器件和衬底，至少留下MEMS器件的敏感部分，并暴露衬底的开口。 屏障元件位于围绕敏感部分的区域中，以实现用于MEMS器件的保护结构，使得敏感部分是自由的。
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3.发明申请ELECTRONIC DEVICE INCLUDING MEMS DEVICES AND HOLED SUBSTRATES, IN PARTICULAR OF THE LGA OR BGA TYPE 有权包括MEMS器件和HOLED衬底的电子器件，特别是LGA或BGA型公开(公告)号：US20110081739A1
公开(公告)日：2011-04-07
申请号：US12969022
申请日：2010-12-15
IPC分类号： H01L21/50
CPC分类号： B81B7/0061 , B81B7/007 , H01L2224/0554 , H01L2224/0557 , H01L2224/05571 , H01L2224/05573 , H01L2224/056 , H01L2224/16225 , H01L2224/48091 , H01L2924/00014 , H01L2924/1461 , H01L2224/05599 , H01L2224/0555 , H01L2224/0556
摘要： An electronic device includes a substrate provided with a passing opening and a MEMS device including an active surface wherein a portion of the MEMS device is integrated sensitive to chemical/physical variations of a fluid. The active surface of the MEMS device faces the substrate and is spaced therefrom, the sensitive portion being aligned to the opening. A protective package incorporates at least partially the MEMS device and the substrate, leaving at least the sensitive portion of the MEMS device, and the opening of the substrate exposed. A barrier element is positioned in an area which surrounds the sensitive portion to realize a protection structure for the MEMS device, so that the sensitive portion is free.
摘要翻译： 电子设备包括设置有通过开口的基板和包括活性表面的MEMS器件，其中MEMS器件的一部分对流体的化学/物理变化敏感。 MEMS器件的有源表面面向衬底并与其间隔开，敏感部分与开口对准。 保护封装至少部分地包括MEMS器件和衬底，至少留下MEMS器件的敏感部分，并暴露衬底的开口。 屏障元件位于围绕敏感部分的区域中，以实现用于MEMS器件的保护结构，使得敏感部分是自由的。
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4.发明授权Electronic device including MEMS devices and holed substrates, in particular of the LGA or BGA type 有权电子设备包括MEMS器件和带孔衬底，特别是LGA或BGA型公开(公告)号：US08043881B2
公开(公告)日：2011-10-25
申请号：US12969022
申请日：2010-12-15
IPC分类号： H01L29/84
CPC分类号： B81B7/0061 , B81B7/007 , H01L2224/0554 , H01L2224/0557 , H01L2224/05571 , H01L2224/05573 , H01L2224/056 , H01L2224/16225 , H01L2224/48091 , H01L2924/00014 , H01L2924/1461 , H01L2224/05599 , H01L2224/0555 , H01L2224/0556
摘要： An electronic device includes a substrate provided with a passing opening and a MEMS device including an active surface wherein a portion of the MEMS device is integrated sensitive to chemical/physical variations of a fluid. The active surface of the MEMS device faces the substrate and is spaced therefrom, the sensitive portion being aligned to the opening. A protective package incorporates at least partially the MEMS device and the substrate, leaving at least the sensitive portion of the MEMS device, and the opening of the substrate exposed. A barrier element is positioned in an area which surrounds the sensitive portion to realize a protection structure for the MEMS device, so that the sensitive portion is free.
摘要翻译： 电子设备包括设置有通过开口的基板和包括活性表面的MEMS器件，其中MEMS器件的一部分对流体的化学/物理变化敏感。 MEMS器件的有源表面面向衬底并与其间隔开，敏感部分与开口对准。 保护封装至少部分地包括MEMS器件和衬底，至少留下MEMS器件的敏感部分，并暴露衬底的开口。 屏障元件位于围绕敏感部分的区域中，以实现用于MEMS器件的保护结构，使得敏感部分是自由的。
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5.发明授权Electronic device including MEMS devices and holed substrates, in particular of the LGA or BGA type 有权电子设备包括MEMS器件和带孔衬底，特别是LGA或BGA型公开(公告)号：US08546895B2
公开(公告)日：2013-10-01
申请号：US13275092
申请日：2011-10-17
IPC分类号： H01L29/84
CPC分类号： B81B7/0061 , B81B7/007 , H01L2224/0554 , H01L2224/0557 , H01L2224/05571 , H01L2224/05573 , H01L2224/056 , H01L2224/16225 , H01L2224/48091 , H01L2924/00014 , H01L2924/1461 , H01L2224/05599 , H01L2224/0555 , H01L2224/0556
摘要： An electronic device includes a substrate provided with a passing opening and a MEMS device including an active surface wherein a portion of the MEMS device is integrated sensitive to chemical/physical variations of a fluid. The active surface of the MEMS device faces the substrate and is spaced therefrom, the sensitive portion being aligned to the opening. A protective package incorporates at least partially the MEMS device and the substrate, leaving at least the sensitive portion of the MEMS device, and the opening of the substrate exposed. A barrier element is positioned in an area which surrounds the sensitive portion to realize a protection structure for the MEMS device, so that the sensitive portion is free.
摘要翻译： 电子设备包括设置有通过开口的基板和包括活性表面的MEMS器件，其中MEMS器件的一部分对流体的化学/物理变化敏感。 MEMS器件的有源表面面向衬底并与其间隔开，敏感部分与开口对准。 保护封装至少部分地包括MEMS器件和衬底，至少留下MEMS器件的敏感部分，并暴露衬底的开口。 屏障元件位于围绕敏感部分的区域中，以实现用于MEMS器件的保护结构，使得敏感部分是自由的。
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公开(公告)号：US20130319148A1
公开(公告)日：2013-12-05
申请号：US13823254
申请日：2011-09-23
申请人： Don C. Alfano , Robert Lipsett , Edward Myers , Gregory Nichols , Peter Paulsson
发明人： Don C. Alfano , Robert Lipsett , Edward Myers , Gregory Nichols , Peter Paulsson
IPC分类号： F16H25/12
CPC分类号： F16H25/12 , F16H25/20 , F16H2025/2031 , F16H2025/2081 , F16H2025/209 , F16H2025/2093 , H02K5/04 , H02K7/06 , Y10T74/18648
摘要： A linear actuator includes a housing and a cover tube that is supported relative to the housing. A nut engages the cover tube so as to prevent rotation of the nut relative to the cover tube. A lead screw rotatably engages the nut, wherein rotation of the lead screw causes the nut to travel along the lead screw.
摘要翻译： 线性致动器包括壳体和相对于壳体支撑的盖管。 螺母接合盖管，以防止螺母相对于盖管旋转。 导螺杆可旋转地接合螺母，其中导螺杆的旋转使得螺母沿着导螺杆行进。
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公开(公告)号：US20120272742A1
公开(公告)日：2012-11-01
申请号：US13384474
申请日：2010-07-13
申请人： Philippe Andreucci , Laurent Duraffourg , Carine Marcoux , Pierre Brianceau , Sebastien Hentz , Stephane Minoret , Edward Myers , Michael Roukes
发明人： Philippe Andreucci , Laurent Duraffourg , Carine Marcoux , Pierre Brianceau , Sebastien Hentz , Stephane Minoret , Edward Myers , Michael Roukes
CPC分类号： G01P15/097 , B81B3/0021 , B81B2203/0118 , B81B2203/058 , G01N29/022 , G01N2291/014 , G01N2291/0427 , G01P15/123
摘要： The invention relates to a nano electro- mechanical system (NEMS) formed on a substrate (21) and comprising at least one fixed part associated with the substrate and at least one movable part (23) in relation to the substrate, said system comprising transduction means (24) capable of exciting the movable part to confer on it a movement and/or to detect a movement of movable part, the transduction means comprising at least one electrically conductive material. The electrically conductive material is made of an AlSi alloy based deposition, said deposition being supported at least in part by the movable part of the system.
摘要翻译： 本发明涉及一种形成在基片（21）上的纳米电子机械系统（NEMS），它包括至少一个与该基片有关的固定部分和至少一个相对于该基片的可动部分（23），该系统包括转导 能够激励可移动部分以赋予运动和/或检测可移动部分的运动的装置（24），所述转导装置包括至少一种导电材料。 导电材料由基于AlSi合金的沉积制成，所述沉积至少部分地由系统的可移动部分支撑。
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公开(公告)号：US09453563B2
公开(公告)日：2016-09-27
申请号：US13823254
申请日：2011-09-23
申请人： Don C. Alfano , Robert Lipsett , Edward Myers , Gregory Nichols , Peter Paulsson
发明人： Don C. Alfano , Robert Lipsett , Edward Myers , Gregory Nichols , Peter Paulsson
CPC分类号： F16H25/12 , F16H25/20 , F16H2025/2031 , F16H2025/2081 , F16H2025/209 , F16H2025/2093 , H02K5/04 , H02K7/06 , Y10T74/18648
摘要： A linear actuator includes a housing and a cover tube that is supported relative to the housing. A nut engages the cover tube so as to prevent rotation of the nut relative to the cover tube. A lead screw rotatably engages the nut, wherein rotation of the lead screw causes the nut to travel along the lead screw.
摘要翻译： 线性致动器包括壳体和相对于壳体支撑的盖管。 螺母接合盖管，以防止螺母相对于盖管旋转。 导螺杆可旋转地接合螺母，其中导螺杆的旋转使得螺母沿着导螺杆行进。
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9.发明申请公开(公告)号：US20130043143A1
公开(公告)日：2013-02-21
申请号：US13497962
申请日：2010-09-24
CPC分类号： G01N29/036 , G01N29/022 , G01N2291/0255 , G01N2291/0256 , G01N2291/0426
摘要： The present invention concerns a device for detecting gases or volatile organic compounds (VOC) comprising an electrically conducting or semiconducting zone f unctionalized with an organic film resulting from the polymerization of aromatic diazonium salt derived monomer.
摘要翻译： 本发明涉及一种用于检测气体或挥发性有机化合物（VOC）的装置，其包括由芳族重氮盐衍生的单体的聚合产生的有机膜的导电或半导电区域。
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公开(公告)号：US20080068000A1
公开(公告)日：2008-03-20
申请号：US11857615
申请日：2007-09-19
申请人： Igor Bargatin , Jessica Arlett , Michael Roukes , Inna Kozinsky , John Aldridge , Edward Myers
发明人： Igor Bargatin , Jessica Arlett , Michael Roukes , Inna Kozinsky , John Aldridge , Edward Myers
CPC分类号： G01N29/036 , G01N2291/0256 , Y10T29/41
摘要： Systems and methods for thermally actuating piezoresistive cantilevers are described. One embodiment includes a nanoelectromechanical resonator connected in at least one location to a substrate, an electrically conductive path formed on the resonator and a signal source connected to the electrically conductive path and configured to provide an oscillating actuation signal capable of exciting a resonant mode in the resonator.
摘要翻译： 描述了用于热致压压阻悬臂的系统和方法。 一个实施例包括在至少一个位置连接到衬底的纳米机电谐振器，形成在谐振器上的导电路径和连接到导电路径的信号源，并且被配置为提供能够激励谐振模式的振荡致动信号 谐振器。
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