Method for making ohmic contact to silicon structures with low thermal loads
    23.
    发明授权
    Method for making ohmic contact to silicon structures with low thermal loads 失效
    与低热负荷对硅结构进行欧姆接触的方法

    公开(公告)号:US07554055B2

    公开(公告)日:2009-06-30

    申请号:US11120820

    申请日:2005-05-03

    IPC分类号: B23K26/00 H01L21/44

    摘要: An ohmic contact for a silicon slider body is disclosed. A scanned laser beam locally heats a metal film on the slider body to interdiffuse the metal and silicon while minimizing the total thermal load on the slider body. This localized heating avoids thermal damage to the sensitive magnetic head region on the slider. The native oxide layer on the slider is removed by a sputter etch, followed by deposition of a diffusion layer. A capping layer is then deposited to reduce oxidation during subsequent processing. The metal layer is then locally annealed by scanning the laser beam over the target area. Contact resistance of less than 100 ohms is achieved while minimizing the thermal load on the slider body.

    摘要翻译: 公开了一种用于硅滑块体的欧姆接触。 扫描的激光束局部加热滑块体上的金属膜以相互扩散金属和硅,同时最小化滑块体上的总热负荷。 这种局部加热避免了滑块上敏感磁头区域的热损伤。 通过溅射蚀刻去除滑块上的自然氧化物层,然后沉积扩散层。 然后沉积覆盖层以在随后的处理期间减少氧化。 然后通过在目标区域上扫描激光束来对金属层进行局部退火。 实现小于100欧姆的接触电阻,同时最小化滑块体上的热负载。

    THERMALLY-ASSISTED PERPENDICULAR MAGNETIC RECORDING SYSTEM WITH WRITE POLE SURROUNDING AN OPTICAL CHANNEL AND HAVING RECESSED POLE TIP
    24.
    发明申请
    THERMALLY-ASSISTED PERPENDICULAR MAGNETIC RECORDING SYSTEM WITH WRITE POLE SURROUNDING AN OPTICAL CHANNEL AND HAVING RECESSED POLE TIP 有权
    具有写入光圈通道并具有接收点的热辅助磁性记录系统

    公开(公告)号:US20080068748A1

    公开(公告)日:2008-03-20

    申请号:US11532084

    申请日:2006-09-14

    IPC分类号: G11B5/127

    摘要: A thermally-assisted perpendicular magnetic recording head and system has a head carrier that supports an optical channel for the transmission of radiation to the recording layer, a write pole for directing a magnetic field to the recording layer, and an electrical coil for inducing the magnetic field from the write pole. The optical channel has a radiation exit face with an aperture at the recording-layer-facing surface of the head carrier. The write pole has a pole tip with an end face that is recessed from the recording-layer-facing surface. The write pole tip is tapered down to the end faces. The pole tip taper and the recession of the end face concentrates the write field at the middle of the perpendicular magnetic recording layer where the radiation from the optical channel is incident. The characteristic dimension of the aperture and the spacing between the aperture and the recording layer are both less than the wavelength of the radiation. The radiation source may be a laser diode mounted to the head carrier.

    摘要翻译: 热辅助垂直磁记录头和系统具有头托架,其支撑用于将辐射传输到记录层的光通道,用于将磁场引导到记录层的写磁极和用于引导磁场的电线圈 字段从写柱。 光通道具有在头托架的面向记录层的表面上具有孔的辐射出射面。 写极具有极尖,端面从面向记录层的表面凹陷。 写磁极尖端朝向端面逐渐变细。 极尖锥度和端面的凹陷将写入场集中在垂直磁记录层的中心处,其中来自光通道的辐射入射。 孔径的特征尺寸和孔径与记录层之间的间距均小于辐射波长。 辐射源可以是安装到头部托架的激光二极管。

    Magnetic recording disk drive with shingled writing and wide-area thermal assistance
    26.
    发明授权
    Magnetic recording disk drive with shingled writing and wide-area thermal assistance 有权
    磁记录磁盘驱动器带有书写和广泛的热辅助功能

    公开(公告)号:US08270256B1

    公开(公告)日:2012-09-18

    申请号:US13102959

    申请日:2011-05-06

    IPC分类号: G11B11/00

    摘要: A thermally-assisted recording (TAR) disk drive uses a “wide-area” heater with “shingled” recording. In shingled recording, the write head pole tip is wider than the read head in the cross-track direction and writes magnetic transitions by making a plurality of consecutive circular paths that partially overlap. The non-overlapped portions of adjacent paths form the data tracks, which are thus narrower than the width of the write pole tip. The data tracks are grouped into annular bands and when data is to be rewritten, all of the data tracks in an annular band are also rewritten. The wide-area heater may be a waveguide with an output end that generates a heated area on the disk recording layer which is wider than the cross-track width of the write pole tip. It has been determined that the use of a wide-area heater with shingled recording does not result in any significant adjacent track erasure (ATE).

    摘要翻译: 热辅助记录(TAR)磁盘驱动器使用“广域”加热器,“带状”录音。 在带状闪烁的记录中,写头磁极尖在交叉磁道方向上比读取头宽,并且通过使多个部分重叠的连续圆形路径写入磁转变。 相邻路径的非重叠部分形成数据轨道,因此比写入磁极尖端的宽度窄。 数据轨道被分组成环形带,并且当数据被重写时,环形带中的所有数据轨迹也被重写。 广域加热器可以是具有输出端的波导,该输出端在盘记录层上产生比写极尖的横越轨道宽度更宽的加热区域。 已经确定,使用具有带灰度记录的广域加热器不会导致任何显着的相邻轨道擦除(ATE)。

    Slider with integrated thermally-assisted recording (TAR) head and long laser diode with optical body for directing laser radiation
    28.
    发明授权
    Slider with integrated thermally-assisted recording (TAR) head and long laser diode with optical body for directing laser radiation 有权
    滑块具有集成的热辅助记录(TAR)头和长激光二极管,具有用于引导激光辐射的光学体

    公开(公告)号:US08184507B1

    公开(公告)日:2012-05-22

    申请号:US12969307

    申请日:2010-12-15

    IPC分类号: G11B11/00

    摘要: A thermally-assisted recording (TAR) slider has an integrated TAR head and an integrated long laser diode, like an external-cavity VCSEL. The TAR head is integrated with the slider at the trailing end and includes an optical waveguide having a grating coupler oriented in a plane generally parallel to the slider trailing end, and a near-field transducer (NFT) at the slider air-bearing surface (ABS) and coupled to the waveguide. A carrier is attached to the slider front end and supports the external-cavity VCSEL so that the linear path of its output laser beam is directed from the slider front end to the slider trailing end. An optical body is attached to the slider trailing end and has an input surface for receipt of the laser radiation from the laser diode, an output surface for directing the laser radiation to the grating coupler, and at least one reflective surface for turning the laser radiation from the input surface to the output surface.

    摘要翻译: 热辅助记录(TAR)滑块具有集成的TAR头和集成的长激光二极管,如外腔VCSEL。 TAR头与后端的滑块一体化,并且包括光导体,其具有在大致平行于滑块后端的平面中定向的光栅耦合器,以及在滑块空气轴承表面处的近场换能器(NFT) ABS)并耦合到波导。 载体附接到滑块前端并支撑外腔VCSEL,使得其输出激光束的线性路径从滑块前端引导到滑块后端。 光学主体附接到滑块后端,并且具有用于接收来自激光二极管的激光辐射的输入表面,用于将激光辐射引导到光栅耦合器的输出表面,以及用于转动激光辐射的至少一个反射表面 从输入表面到输出表面。

    WAFER-LEVEL METHOD FOR FABRICATING AN OPTICAL CHANNEL AND APERTURE STRUCTURE IN MAGNETIC RECORDING HEAD SLIDERS FOR USE IN THERMALLY-ASSISTED RECORDING (TAR)
    29.
    发明申请
    WAFER-LEVEL METHOD FOR FABRICATING AN OPTICAL CHANNEL AND APERTURE STRUCTURE IN MAGNETIC RECORDING HEAD SLIDERS FOR USE IN THERMALLY-ASSISTED RECORDING (TAR) 审中-公开
    用于制作用于热辅助记录(TAR)的磁记录头滑块中的光通道和光孔结构的波形方法

    公开(公告)号:US20090258186A1

    公开(公告)日:2009-10-15

    申请号:US12101066

    申请日:2008-04-10

    IPC分类号: G03F7/00 B32B3/10

    摘要: A process for forming a plurality of sliders for use in thermally-assisted recording (TAR) disk drives includes a wafer-level process for forming a plurality of aperture structures, and optionally abutting optical channels, on a wafer surface prior to cutting the wafer into individual sliders. The wafer has a generally planar surface arranged into a plurality of rectangularly-shaped regions. In each rectangular region a first metal layer is deposited on the wafer surface, followed by a layer of radiation-transmissive aperture material, which is then lithographically patterned to define the width of the aperture, the aperture width being parallel to the length of the rectangularly-shaped region. A second metal layer is deposited over the patterned layer of aperture material. The resulting structure is then lithographically patterned to define an aperture structure comprising aperture material surrounded by metal and having parallel radiation entrance and exit faces orthogonal to the wafer surface.

    摘要翻译: 用于形成用于热辅助记录(TAR)盘驱动器中的多个滑动件的方法包括在将晶片切割成晶片之前在晶片表面上形成多个孔结构和可选地邻接的光通道的晶片级工艺 个人滑块 晶片具有布置成多个矩形区域的大致平坦的表面。 在每个矩形区域中,第一金属层沉积在晶片表面上,随后是一层辐射透射的孔隙材料,然后将其光刻图案化以限定孔的宽度,孔的宽度平行于矩形的长度 形状区域。 在孔材料的图案化层上沉积第二金属层。 然后将所得结构光刻图案化以限定孔结构,该孔结构包括由金属包围并具有与晶片表面正交的平行辐射入射面和出射面的孔隙材料。