Method for processing coating film and method for manufacturing semiconductor element with use of the same method
    21.
    发明授权
    Method for processing coating film and method for manufacturing semiconductor element with use of the same method 有权
    使用相同方法处理涂膜的方法和半导体元件的制造方法

    公开(公告)号:US06746963B2

    公开(公告)日:2004-06-08

    申请号:US10136744

    申请日:2002-04-30

    IPC分类号: H01L21302

    摘要: A method for processing a coating film includes the steps of forming a silica group coating film having a low dielectric constant on a substrate, conducting an etching process to the silica group coating film through a photoresist pattern, and processing the silica group coating film with plasma induced from helium gas. With this, it is possible to prevent the silica group coating film from being damaged when a wet stripping process is conducted to remove the photoresist pattern as a subsequent process, and to maintain the low dielectric constant of the coating film.

    摘要翻译: 一种涂膜的处理方法,其特征在于,在基板上形成介电常数低的二氧化硅系涂膜,通过光致抗蚀剂图案对二氧化硅基涂膜进行蚀刻处理,并对该二氧化硅基涂膜进行等离子体处理 由氦气引起。 由此,当进行湿剥离处理以除去作为后续工艺的光致抗蚀剂图案时,可以防止二氧化硅基涂膜损坏,并且保持涂膜的低介电常数。

    Sewing machine with shuttle replenishing
    22.
    发明授权
    Sewing machine with shuttle replenishing 有权
    缝纫机带梭子补充

    公开(公告)号:US6105521A

    公开(公告)日:2000-08-22

    申请号:US299701

    申请日:1999-04-26

    申请人: Isao Sato

    发明人: Isao Sato

    CPC分类号: D05C11/18 D05C13/06

    摘要: A sewing machine has needles reciprocally movable in a first direction through a fabric web and shuttles reciprocally movable in a second direction perpendicular to the first direction. The used shuttles accommodating an empty bobbin is replaced with the new shuttle accommodating a full bobbin. The needles and the shuttles cooperate to form stitch patterns on the fabric web. A device is provided for the automatic replacement of the used shuttle with the new shuttle.

    摘要翻译: 缝纫机具有可沿着第一方向通过织物幅材往复运动的针,并且能够在垂直于第一方向的第二方向上往复移动。 容纳空筒管的二手梭子被容纳全筒管的新梭子代替。 针和梭子协作在织物网上形成缝合图案。 提供了一种用于使用新班车自动更换二手班车的装置。

    Semiconductor integrated circuit with an input buffer circuit for
preventing false operation caused by power noise
    25.
    发明授权
    Semiconductor integrated circuit with an input buffer circuit for preventing false operation caused by power noise 失效
    具有输入缓冲电路的半导体集成电路,用于防止由电源噪声引起的误操作

    公开(公告)号:US4983861A

    公开(公告)日:1991-01-08

    申请号:US412120

    申请日:1989-09-25

    摘要: A semiconductor integrated circuit comprises a first input circuit for generating an internal chip enable signal in response to a chip enable signal externally applied; and a second input circuit for supplying to an internal circuit a signal corresponding to a data signal externally applied thereto, the second input circuit containing a gate circuit controlled by an internal chip enable signal. The gate circuit responds to the data signal at a first response speed, and responds to the internal chip enable signal at a second response speed when the semiconductor integrated circuit is changed from the active state to the stand-by state. The second response speed being slower than the first response speed, so as to prevent the semi-conductor integrated circuit from being set into the stand-by state by a false operation of the first input circuit.

    摘要翻译: 半导体集成电路包括:第一输入电路,用于响应于外部施加的芯片使能信号产生内部芯片使能信号; 以及第二输入电路,用于向内部电路提供与外部施加到其上的数据信号相对应的信号,所述第二输入电路包含由内部芯片使能信号控制的门电路。 门电路以第一响应速度响应数据信号,并且当半导体集成电路从激活状态改变为待机状态时以第二响应速度响应于内部芯片使能信号。 第二响应速度比第一响应速度慢,以防止半导体集成电路通过第一输入电路的错误操作而被置于待机状态。

    Gas turbine combustor
    26.
    发明授权
    Gas turbine combustor 失效
    燃气轮机燃烧器

    公开(公告)号:US4429538A

    公开(公告)日:1984-02-07

    申请号:US234015

    申请日:1981-02-12

    CPC分类号: F23R3/06 F23R3/12

    摘要: A gas turbine combustor comprising a combustor inner-pipe for forming a head combustion chamber and a rear combustion chamber having a diameter larger than a diameter of head combustion chamber. A combustor outer-pipe covers the combustor inner-pipe, and a fuel nozzle is disposed at an end part of the head combustion chamber for supplying fuel to said combustor inner pipe. A first group of ports are arranged for swirling and feeding air in an axial direction of the combustor inner-pipe. The first group of ports are around the fuel nozzle. A second group of ports for swirling and feeding air in a radial direction of said combustor inner-pipe are disposed in a side wall of the head combustion chamber near the fuel nozzle. A third group of ports for swirling and feeding air in a radial direction of the combustion inner-pipe and a fourth group of ports for feeding air in a radial direction of the combustor inner-pipe are provided and ar both disposed in a side wall of the head combustion chamber near the said rear combustion chamber. A fifth group of ports are disposed in a side wall of the rear combustion chamber near the head combustion chamber and a sixth group of ports are disposed in a side wall of the rear combustion chamber on a downstream side of the fifth group of ports. Another group of ports for swirling and feeding air into the head combustion chamber are disposed in a vicinity of a central portion of an end part of the head combustion chamber along an inner periphery of the fuel nozzle, with this group of ports and the first group of ports being constructed so that air flowing from both groups of ports has the same swirling direction.

    摘要翻译: 一种燃气轮机燃烧器,包括用于形成头部燃烧室的燃烧器内管和具有大于头部燃烧室直径的直径的后燃烧室。 燃烧器外管覆盖燃烧器内管,并且燃料喷嘴设置在头部燃烧室的端部,用于向燃烧器内管供应燃料。 第一组端口布置成在燃烧器内管的轴向上旋转和进给空气。 第一组港口在燃油喷嘴周围。 用于在所述燃烧器内管的径向方向上旋转和进给空气的第二组端口设置在靠近燃料喷嘴的头部燃烧室的侧壁中。 设置有用于在燃烧内管的径向上旋转和进给空气的第三组端口和用于沿着燃烧器内管的径向供给空气的第四组端口,并且ar设置在 靠近所述后燃烧室的头部燃烧室。 第五组端口设置在靠近头部燃烧室的后燃烧室的侧壁中,并且第六组端口设置在第五组端口的下游侧的后燃烧室的侧壁中。 用于将空气旋转并进入头部燃烧室的另一组端口沿着燃料喷嘴的内周设置在头部燃烧室的端部的中心部分的附近,该组端口和第一组 的端口被构造成使得从两组端口流出的空气具有相同的旋转方向。

    Valve device
    27.
    发明授权
    Valve device 失效
    阀门装置

    公开(公告)号:US4364543A

    公开(公告)日:1982-12-21

    申请号:US244393

    申请日:1981-03-16

    摘要: A valve device comprises a valve body having an inflow passage and an outflow passage, a valve seat fixed to the valve body at a position between the passages, a valve element for seating against and separating from the valve seat, a valve stem movable together with the valve element toward and away from the valve seat, a stem holding member secured at a portion thereof to the valve body in the body interior and holding the valve stem at a screw engagement part therewith where a surface at an extremity of the portion of the stem holding member is in abutting contact with a surface of the main body thereby to form a first metal-contact seal, a bonnet which is detachably fixed to the valve body with a sealing member interposed therebetween, and through which the valve stem is rotatably fitted, where the bonnet covers the remainder portion of the stem holding member, and a mechanism for forming a second metal-contact seal at a stem holding part of the stem holding member when the valve is in the fully opened state thereof.

    摘要翻译: 阀装置包括具有流入通道和流出通道的阀体,在通道之间的位置处固定到阀体的阀座,用于抵靠和离开阀座的阀元件,可与 所述阀元件朝向和远离所述阀座,杆保持构件,其固定在所述阀体的一部分处,并且将所述阀杆保持在与所述阀体的螺纹接合部分处的所述阀体的一部分处的表面, 杆保持构件与主体的表面邻接接触,从而形成第一金属接触密封件,阀盖可拆卸地固定到阀体上,密封构件插入其间,阀杆可旋转地安装在阀体上 其中所述发动机罩覆盖所述杆保持构件的剩余部分,以及用于在所述阀为所述杆保持构件的杆保持构件的杆保持部分处形成第二金属接触密封件的机构 处于完全打开状态。

    Combustor of gas turbine with features for vibration reduction and
increased cooling
    28.
    发明授权
    Combustor of gas turbine with features for vibration reduction and increased cooling 失效
    燃气轮机燃烧器具有减振和增加冷却功能

    公开(公告)号:US4297843A

    公开(公告)日:1981-11-03

    申请号:US84438

    申请日:1979-10-12

    摘要: A combustor of a gas turbine having a plurality of liners defining combustion chambers, and transition pieces adapted to rectify the flow of the combustion gas discharged from the liners before the combustion gas is introduced to the turbine. A guide plate is disposed in the gap between each pair of adjacent transition pieces near the gas outlets of the latter so as to guide the flow of air to the radially outer surfaces of adjacent transition pieces, thereby to improve the cooling of these surfaces and, at the same time, to mechanically connect the adjacent transition pieces to suppress the vibration of the transition pieces.

    摘要翻译: 具有限定燃烧室的多个衬套的燃气涡轮机的燃烧器,以及适于在将燃烧气体引入涡轮机之前对从衬套排出的燃烧气体的流动进行整流的过渡件。 引导板设置在靠近后者的气体出口的每对相邻过渡件之间的间隙中,以将空气流引导到相邻过渡件的径向外表面,从而改善这些表面的冷却, 同时机械连接相邻的过渡件以抑制过渡件的振动。

    Friction welding apparatus
    29.
    发明授权
    Friction welding apparatus 失效
    摩擦焊接设备

    公开(公告)号:US4247346A

    公开(公告)日:1981-01-27

    申请号:US905018

    申请日:1978-05-11

    摘要: A friction welding apparatus for welding a pair of members in which the welding surfaces of the members are contacted under pressure with each other, relative circular orbit motion of the members producing friction therebetween thereby heating and melting the welding surfaces and the relative circular orbit motion being stopped to locate the welding surfaces in a predetermined position. The apparatus comprises an eccentric device including a rotary driving shaft, an inertia member disposed around the periphery of the rotary driving shaft, the inertia member being rotated by the rotary driving shaft and being capable of subjecting an angular movement relative thereto and an eccentric shaft rotated by the rotary driving shaft and engaged with the inertia member so as to be moved by the relative angular movement of the inertia member relative to the rotary driving shaft between a co-axial position with the axis of the rotary driving shaft and an eccentric position spaced by a predetermined distance apart therefrom, a movable table engaged through a bearing with the eccentric shaft for supporting the member to be welded, the movable table being connected by a motion restricting device to a fixed frame to be capable of causing substantial relative circular orbit motion in a plane perpendicular to the axis of the rotary driving shaft, the inertia member being angularly moved by rapid increase in the speed of the rotary driving shaft relative thereto from a first position to a second position such that the eccentric shaft is moved from the co-axial position to the eccentric position and the movable table is put in the relative circular orbit motion, and the inertia member being returned by rapid stoppage of the rotary driving shaft from the second position to the first position such that the eccentric shaft is returned to the co-axial position and the movable table is stopped at the predetermined position.

    摘要翻译: 一种用于焊接一对构件的摩擦焊接装置,其中,所述构件的焊接表面在压力下彼此接触,所述构件的相对圆形轨道运动产生摩擦,从而加热和熔化焊接表面,并且相对圆形轨道运动是 停止将焊接表面定位在预定位置。 该装置包括偏心装置,该偏心装置包括旋转驱动轴,围绕旋转驱动轴的周边设置的惯性构件,惯性构件由旋转驱动轴旋转,并且能够相对于其旋转并且偏心轴旋转 通过旋转驱动轴与惯性构件接合,以通过惯性构件相对于旋转驱动轴的相对角度运动在与旋转驱动轴的轴线的同轴位置与间隔开的偏心位置之间移动 通过轴承与活动台相接合,可移动台与偏心轴相接合,用于支撑待焊接的构件,活动台由运动限制装置连接到固定框架上,以能够引起相当大的相对圆周轨道运动 在与旋转驱动轴的轴线垂直的平面中,惯性构件成角度地移动 d,通过使旋转驱动轴相对于第一位置到第二位置的速度快速增加,使得偏心轴从同轴位置移动到偏心位置,并且可移动台被放入相对圆形轨道 运动,并且所述惯性构件通过所述旋转驱动轴从所述第二位置快速停止而返回到所述第一位置,使得所述偏心轴返回到同轴位置,并且所述可动台停止在所述预定位置。

    Gas turbine combustor
    30.
    发明授权
    Gas turbine combustor 失效
    燃气轮机燃烧器

    公开(公告)号:US4226088A

    公开(公告)日:1980-10-07

    申请号:US880109

    申请日:1978-02-22

    CPC分类号: F23R3/04 F23R3/54

    摘要: A combustor for gas turbines includes a stepped cylindrical tube defining first, second and main combustion spaces. Primary air supply openings are formed in the tube portion defining the first combustion space, secondary air supply openings in the tube portion defining the second combustion space, and diluting air supply openings in the tube portion defining the main combustion space. To achieve effective cooling of the combustion gas within the combustion chamber, particularly in the second combustion space, and especially in the central portion thereof, and at the same time to maintain a stable combustion, the tube is formed so, and the cross-sectional areas of the primary, secondary and diluting air supply openings are dimensioned so, that 25 to 32% of the total amount of air supplied to the combustion chamber are used as primary air in the first combustion space, 38 to 50% as secondary air in the second combustion space, and less than 30% as diluting air in the main combustion space.

    摘要翻译: 用于燃气轮机的燃烧器包括限定第一,第二和主燃烧空间的阶梯形圆柱形管。 主要空气供应开口形成在限定第一燃烧空间的管部分中,限定第二燃烧空间的管部分中的二次空气供应开口,以及限定主燃烧空间的管部分中的稀释空气供应开口。 为了有效地冷却燃烧室内的燃烧气体,特别是在第二燃烧空间,特别是在其中心部分,并且同时保持燃烧稳定的燃烧气体,管形成为这样,并且横截面 初级,次级和稀释空气供应开口的区域尺寸使得供应到燃烧室的空气总量的25%至32%用作第一燃烧空间中的一次空气,作为二次空气中的38%至50% 第二燃烧空间,并且在主燃烧空间中稀释空气小于30%。