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32 条记录 (耗时 0.023 秒)

    Pressure transducer using integrated circuit elements
    22.
    发明授权
    Pressure transducer using integrated circuit elements 失效
    使用集成电路元件的压力传感器

    公开(公告)号：US4558238A

    公开(公告)日：1985-12-10

    申请号：US536870

    申请日：1983-09-29

    申请人： Kazuji Yamada ,  Hideo Sato ,  Yukitaka Kitadate ,  Kanji Kawakami ,  Kazuo Kato ,  Takao Sasayama

    发明人： Kazuji Yamada ,  Hideo Sato ,  Yukitaka Kitadate ,  Kanji Kawakami ,  Kazuo Kato ,  Takao Sasayama

    IPC分类号： G01L9/04 ,  G01L9/00 ,  G01L9/06

    CPC分类号： G01L9/065 ,  Y10S323/907

    摘要： A pressure transducer comprises a pressure sensor including a bridge connection of gauging resistors formed on a semiconductor substrate, and a power supply connected to the pressure sensor for driving it and basically acting as a constant current source. The power supply includes at least two transistors formed on the semiconductor substrate. One of the transistors provides a collector current which is less in temperature-dependency relative to that of the other transistor, and the other transistor has a collector circuit connected to the pressure sensor and provides a collector current corresponding to a sum of a substantially temperature-dependent current and a substantially temperature-independent current. A ratio of the temperature-dependent current to the temperature-independent current is adjusted by selecting operation characteristics of the two transistors such that a temperature characteristic of the collector current of the other transistor is substantially inversely proportional to a temperature characteristic of the output of the pressure sensor when it is driven with a constant voltage.

    摘要翻译： 压力传感器包括压力传感器，该压力传感器包括形成在半导体衬底上的测量电阻器的桥连接器，以及连接到压力传感器的电源，用于驱动它并基本上作为恒定电流源。 电源包括形成在半导体衬底上的至少两个晶体管。 晶体管中的一个提供了相对于另一个晶体管的温度依赖性较小的集电极电流，另一个晶体管具有连接到压力传感器的集电极电路，并且提供对应于基本上温度相关的总和的集电极电流， 依赖电流和基本上温度无关的电流。 通过选择两个晶体管的工作特性来调节温度依赖电流与独立于温度的电流的比例，使得另一个晶体管的集电极电流的温度特性与输出的温度特性成反比 压力传感器用恒定电压驱动时。

    Magnetic rotary encoder
    23.
    发明授权
    Magnetic rotary encoder 失效
    磁力旋转编码器

    公开(公告)号：US4418372A

    公开(公告)日：1983-11-29

    申请号：US173842

    申请日：1980-07-30

    申请人： Hiroshi Hayashida ,  Tadashi Takahashi ,  Kunio Miyashita ,  Kanji Kawakami

    发明人： Hiroshi Hayashida ,  Tadashi Takahashi ,  Kunio Miyashita ,  Kanji Kawakami

    IPC分类号： G01D5/14 ,  G01D5/16 ,  G01D5/245 ,  G01P3/487 ,  G11B5/12 ,  G11B5/30

    CPC分类号： G01D5/145 ,  G01D5/2451 ,  G01P3/487

    摘要： Disclosed is a magnetic rotary encoder used in combination with a rotary body having plural pieces of magnetic information recorded on at least one circumferentially running track. The rotary encoder comprises a substrate having a surface disposed opposite to the rotary body and at least one magnetoresistive element formed on the surface of the substrate. The magnetoresistive element is formed on the substrate surface as an integral pattern including at least two portions extending substantially in the radial direction of the rotary body in a relation opposite to the magnetic information recorded portion of the rotary body, two lead connection terminal portions formed at the outer ends of the radially extending portions respectively, and a circumferentially extending portion interconnecting the radially extending portions at their ends, so as to form a single electrical signal path which passes both of the radially extending portions and terminates in the two lead connection terminal portions. These lead connection terminal portions are disposed outside of the outer peripheral edge of the rotary body.

    摘要翻译： 公开了一种与旋转体组合使用的磁旋转编码器，其具有记录在至少一个周向运行的轨道上的多个磁信息。 旋转编码器包括具有与旋转体相对设置的表面的基板和形成在基板的表面上的至少一个磁阻元件。 磁阻元件作为整体图案形成在基板表面上，该整体图形包括至少两个基本上沿着旋转体的径向方向延伸的部分，其与旋转体的磁信息记录部分相反，两个引线连接端子部分形成在 径向延伸部分的外端以及在其端部互连径向延伸部分的周向延伸部分，以便形成通过两个径向延伸部分并终止在两个引线连接端子部分中的单个电信号路径 。 这些引线连接端子部设置在旋转体的外周边缘的外侧。

    Semiconductor pressure sensor having plural pressure sensitive diaphragms and method
    24.
    发明授权
    Semiconductor pressure sensor having plural pressure sensitive diaphragms and method 失效
    具有多个压敏膜的半导体压力传感器及方法

    公开(公告)号：US4322980A

    公开(公告)日：1982-04-06

    申请号：US170663

    申请日：1979-11-08

    申请人： Seikou Suzuki ,  Motohisa Nishihara ,  Kanji Kawakami ,  Hideo Sato ,  Shigeyuki Kobori ,  Hiroaki Hachino ,  Minoru Takahashi

    发明人： Seikou Suzuki ,  Motohisa Nishihara ,  Kanji Kawakami ,  Hideo Sato ,  Shigeyuki Kobori ,  Hiroaki Hachino ,  Minoru Takahashi

    IPC分类号： G01L9/00 ,  G01L9/06 ,  H01L23/15 ,  H01L27/20

    CPC分类号： G01L19/147 ,  G01L19/0038 ,  G01L19/148 ,  G01L9/0054 ,  G01L9/065 ,  H01L23/15 ,  H01L27/20 ,  H01L2224/45144 ,  H01L2224/48091

    摘要： A semiconductor pressure sensor having plural pressure sensitive diaphragms and capable of producing electric signals of at least two pressures.A semiconductor pressure sensor has a semiconductor single crystal chip (1) on which two diaphragms (12a, 12b) are shaped, pairs of strain gauges (13a and 14a, and 13b and 14b), each of which pairs are constructed on each pressure sensitive diaphragm, electrodes (15a and 16a, and 15b and 16b) which are provided for electrical connections of these strain gauges on the semiconductor single crystal, and an insulating substrate of borosilicate glass, the thermal expansion coefficient is substantially equal tol that of said semiconductor single-crystal chip, wherein the semiconductor single-crystal chip (1) and the glass substrate (2) are bonded to each other by an Anodic Bonding method, thereby being able to obtain a semiconductor pressure sensor which scarcely producing errors outputs.

    摘要翻译： 一种半导体压力传感器，具有多个压敏光阑，并能产生至少两个压力的电信号。 半导体压力传感器具有半导体单晶芯片（1），其上形成有两个隔膜（12a，12b），成对的应变计（13a和14a和13b和14b），每个压敏传感器在每个压敏敏感元件 隔膜，用于半导体单晶上的这些应变计的电连接的电极（15a和16a，15b和16b）和硼硅酸盐玻璃的绝缘基板，热膨胀系数基本上等于所述半导体单晶 晶体芯片，其中半导体单晶芯片（1）和玻璃基板（2）通过阳极接合方法彼此接合，从而能够获得几乎不产生误差输出的半导体压力传感器。

    Capacitive pressure sensor
    25.
    发明授权
    Capacitive pressure sensor 失效
    电容式压力传感器

    公开(公告)号：US4257274A

    公开(公告)日：1981-03-24

    申请号：US59552

    申请日：1979-07-23

    申请人： Satoshi Shimada ,  Kanji Kawakami ,  Motohisa Nishihara

    发明人： Satoshi Shimada ,  Kanji Kawakami ,  Motohisa Nishihara

    IPC分类号： G01L9/12 ,  G01L9/00 ,  G01L13/02

    CPC分类号： G01L13/025 ,  G01L9/0042 ,  G01L9/0072 ,  G01L9/0073

    摘要： A capacitive pressure sensor is provided which has a conductive silicon diaphragm having a thick supporting portion at the periphery thereof and a thin inner deflecting portion which is reduced in thickness from the supporting portion by means of an etching process which makes possible a very accurate dimensioning of the hollow formed by the deflecting portion of the diaphragm. A substrate of borosilicate glass has a flat surface which is placed against the side of the diaphragm in contact with the supporting portion and the two elements are joined by a process of anodic bonding so that a pressure chamber is formed between the substrate and the thin deflecting portion of the diaphragm. Within the pressure chamber, a thin electrode is provided on the surface of the substrate thereby forming electrostatic capacity between the substrate and the diaphragm and a hole is provided through the substrate for supplying of fluid into the pressure chamber.

    摘要翻译： 提供一种电容式压力传感器，其具有导电硅膜片，其外围具有厚的支撑部分，以及薄的内部偏转部分，其通过蚀刻工艺从支撑部分减小厚度，这使得可能非常精确的尺寸 由隔膜的偏转部分形成的中空部。 硼硅酸盐玻璃的基板具有平坦表面，该平坦表面抵靠隔膜的与支撑部分接触的一侧放置，并且两个元件通过阳极接合的过程相连，使得在基板和薄偏转之间形成压力室 隔膜的一部分。 在压力室内，在基板的表面上设置有薄的电极，从而在基板和隔膜之间形成静电电容，并且通过基板设置有用于向压力室供给流体的孔。

    Flying head slider and magnetic disk unit employing same
    27.
    发明授权
    Flying head slider and magnetic disk unit employing same 失效
    飞头滑块和采用其的磁盘单元

    公开(公告)号：US5128821A

    公开(公告)日：1992-07-07

    申请号：US529452

    申请日：1990-05-29

    申请人： Yoshinori Takeuchi ,  Yuzo Yamaguchi ,  Fumitaka Muranushi ,  Katsuyuki Tanaka ,  Kanji Kawakami ,  Hiroshi Daito ,  Tetsuo Masukawa

    发明人： Yoshinori Takeuchi ,  Yuzo Yamaguchi ,  Fumitaka Muranushi ,  Katsuyuki Tanaka ,  Kanji Kawakami ,  Hiroshi Daito ,  Tetsuo Masukawa

    IPC分类号： G11B21/21 ,  G11B5/60

    CPC分类号： G11B5/6005

    摘要： A flying head slider has gas bearing rails formed on a surface thereof disposed in opposed relation to a recording medium. The flying head slider flies at a microscopic distance above the recording medium by a pressure produced by a stream of gas resulted from the rotation of the recording medium. Each of the gas bearing rails comprises an inflow portion disposed at an inflow side of the gas stream so as to produce a pressure, an outflow portion disposed at an outflow side of the gas stream so as to produce a pressure, and a connective portion interconnecting the inflow portion and the outflow portion in a common plane. The connective portion serves to suppress an excessive compression of the gas, and achieves good damping characteristics.

    摘要翻译： 飞头滑块具有形成在与记录介质相对的表面上的气体轴承轨道。 飞头滑块由记录介质的旋转产生的气体产生的压力在记录介质上方的微观距离处飞行。 每个气体支承轨道包括设置在气流的流入侧的流入部分，以便产生压力，设置在气流的出流侧的流出部分以产生压力，并且连接部分互连 流入部和流出部。 连接部用于抑制气体的过度压缩，并且实现良好的阻尼特性。

    Semiconductor pressure detector apparatus with zero-point temperature compensation
    28.
    发明授权
    Semiconductor pressure detector apparatus with zero-point temperature compensation 失效
    具有零点温度补偿的半导体压力检测仪

    公开(公告)号：US4337665A

    公开(公告)日：1982-07-06

    申请号：US121093

    申请日：1980-02-13

    申请人： Hideo Sato ,  Kanji Kawakami ,  Motohisa Nishihara

    发明人： Hideo Sato ,  Kanji Kawakami ,  Motohisa Nishihara

    IPC分类号： G01D5/16 ,  G01B7/00 ,  G01B7/16 ,  G01D5/18 ,  G01L9/06

    CPC分类号： G01L9/065

    摘要： A semiconductor pressure detector apparatus has a strain--electric signal conversion bridge which is composed of four semiconductor strain gauges, and an amplifier which serves to hold at a predetermined value the sum of currents flowing through the bridge. The midpoints of two arms constituting the bridge are respectively connected to the noninverting inputs of two negative feedback amplifiers. Outputs from the two negative feedback amplifiers are applied to a differential amplifier, and an output proportional to the difference of the outputs of the former amplifiers appears at an output terminal of the latter amplifier. A potential equal to potentials which appear at the midpoints of the two arms of the bridge when the bridge is in its balanced state at a predetermined temperature and under a predetermined pressure is generated by two resistances which are connected in series with a supply voltage, and the potential is applied through a switch to either of the inverting inputs of the two negative feedback amplifiers, whereby the zero-point temperature compensation of this apparatus is made.

    摘要翻译： 半导体压力检测装置具有由四个半导体应变计构成的应变电信号转换桥，以及用于以预定值保持流过桥的电流的总和的放大器。 构成桥的两臂的中点分别连接到两个负反馈放大器的同相输入。 来自两个负反馈放大器的输出被施加到差分放大器，并且与前一放大器的输出的差成比例的输出出现在后一放大器的输出端。 当桥在预定温度和预定压力下处于平衡状态时出现在桥的两个臂的中点处的电位的电位由与电源电压串联的两个电阻产生，并且 通过开关将电位施加到两个负反馈放大器的反相输入中的任一个，由此进行该装置的零点温度补偿。

    Semiconductor absolute pressure transducer assembly and method
    30.
    发明授权
    Semiconductor absolute pressure transducer assembly and method 失效
    半导体绝对压力传感器组件及方法

    公开(公告)号：US4291293A

    公开(公告)日：1981-09-22

    申请号：US76813

    申请日：1979-09-19

    申请人： Kazuji Yamada ,  Seiko Suzuki ,  Motohisa Nishihara ,  Kanji Kawakami ,  Hideo Sato ,  Shigeyuki Kobori ,  Ryosaku Kanzawa ,  Minoru Takahashi ,  Hitoshi Minorikawa

    发明人： Kazuji Yamada ,  Seiko Suzuki ,  Motohisa Nishihara ,  Kanji Kawakami ,  Hideo Sato ,  Shigeyuki Kobori ,  Ryosaku Kanzawa ,  Minoru Takahashi ,  Hitoshi Minorikawa

    IPC分类号： G01L9/04 ,  G01L9/00 ,  H01L23/08 ,  H01L29/84 ,  G01L1/22

    CPC分类号： G01L9/0042 ,  G01L9/0054

    摘要： A semiconductor pressure transducer assembly comprising a silicon diaphragm assembly and a glass covering member. The silicon diaphragm assembly has a circular diaphragm portion of thin silicon which is formed using etching, and a thick supporting portion therearound. Piezoresistive elements of a piezoresistive bridge circuit and conducting paths for electrically connection thereof are formed on the silicon diaphragm assembly. On a surface of the silicon diaphragm assembly, a passivating layer of silicon dioxide are formed in uniform thickness, and further on a surface of the passivating layer is formed a layer of polysilicon on the supporting portion of the silicon diaphragm assembly. In the passivating layer, a contacting window is formed, through which the polysilicon layer is electrically connected to the silicon diaphragm assembly. The covering member of borosilicate glass having a circular well is mounted and bonded onto the silicon diaphragm assembly in contact with the polysilicon layer using Anodic Bonding method. And the processed silicon diaphragm assembly has a flat surface thereof, on which the piezoresistive elements and the conducting paths are constructed using Ion Implantation method, or reforming a silicon dioxide layer thereon after removing another silicon dioxide layer used as mask in diffusing process.

    摘要翻译： 一种半导体压力传感器组件，包括硅膜组件和玻璃覆盖件。 硅膜组件具有通过蚀刻形成的薄硅的圆形隔膜部分和其周围的厚的支撑部分。 在硅膜组件上形成压阻电桥电路的压阻元件和用于电连接的导电路径。 在硅膜组件的表面上形成均匀厚度的二氧化硅钝化层，并且在钝化层的表面上进一步在硅膜组件的支撑部分上形成多晶硅层。 在钝化层中，形成接触窗，多晶硅层通过该接触窗电连接到硅膜组件。 使用阳极接合方法将具有圆形孔的硼硅酸盐玻璃的覆盖部件安装并接合到与硅多晶硅层接触的硅膜组件上。 并且经处理的硅膜组件具有平坦的表面，在其上使用离子注入方法构建压阻元件和导电路径，或者在去除扩散过程中用作掩模的另一二氧化硅层之后重新形成二氧化硅层。