公开(公告)号：US20130320227A1

公开(公告)日：2013-12-05

申请号：US14000236

申请日：2012-02-29

申请人： Kotoko Urano ,  Takeshi Kawasaki ,  Noboru Moriya ,  Tomonori Nakano

发明人： Kotoko Urano ,  Takeshi Kawasaki ,  Noboru Moriya ,  Tomonori Nakano

IPC分类号： H01J37/153

CPC分类号： H01J37/153 ,  H01J2237/1534

摘要： In order to realize a multiple assembled easily with high accuracy, a multipole having assembly accuracy within 10 micrometer and within several seconds of angle is achieved by fixing multipole elements by being guided by grooves provided on an inner side of a cylindrical housing to form the multipole.

摘要翻译： 为了实现高精度的多次组装，通过由设置在圆柱形壳体的内侧上的槽引导固定多极元件来实现具有10微米和几秒钟内的组装精度的多极，以形成多极 。

公开(公告)号：US08558171B2

公开(公告)日：2013-10-15

申请号：US13404492

申请日：2012-02-24

申请人： Kotoko Hirose ,  Takeshi Kawasaki ,  Tomonori Nakano

发明人： Kotoko Hirose ,  Takeshi Kawasaki ,  Tomonori Nakano

IPC分类号： G01N23/225 ,  H01J37/304

CPC分类号： H01J37/28 ,  H01J37/153 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/216

摘要： A focused charged particle beam apparatus including an aberration corrector, capable of finding the absolute value of the aberration coefficient at high speed, and capable of making high-accuracy adjustments at high speed. A deflection coil tilts the input beam relative to the object point, and measures the defocus data and aberration quantity at high speed while the beam is tilted from one image, and perform least squares fitting on these results to find the absolute value of the aberration coefficient prior to tilting the beam, and to adjust the aberration corrector.

摘要翻译： 一种聚焦带电粒子束装置，包括像差校正器，能够在高速下找到像差系数的绝对值，并能够高精度地进行高精度的调整。 偏转线圈相对于物点倾斜输入光束，并且当光束从一个图像倾斜时测量散焦数据和高速的像差量，并对这些结果进行最小二乘拟合以找到像差系数的绝对值 在倾斜光束之前，并调整像差校正器。

公开(公告)号：US08168951B2

公开(公告)日：2012-05-01

申请号：US12410174

申请日：2009-03-24

申请人： Takeshi Kawasaki ,  Tomonori Nakano

发明人： Takeshi Kawasaki ,  Tomonori Nakano

IPC分类号： G01N23/00

CPC分类号： H01J37/153 ,  H01J37/28 ,  H01J2237/1532

摘要： A charged particle beam apparatus having an aberration correction capability at high acceleration voltages. The charged particle beam apparatus comprises a charged particle beam source; an extraction electrode to extract charged particles from the charged particle beam source; a charged particle beam gun including a means for converging a charged particle beam; an acceleration means for accelerating a charged particle beam emitted from the charged particle beam gun; and an aberration correction means disposed between the charged particle beam gun and the acceleration means, in which an aberration enough to cancel out an aberration of a charged particle beam on the specimen surface is provided to an extraction electrical potential or an equivalent beam at the initial acceleration stage.

摘要翻译： 一种在高加速电压下具有像差校正能力的带电粒子束装置。 带电粒子束装置包括带电粒子束源; 提取电极，用于从带电粒子束源提取带电粒子; 带电粒子束枪，包括用于会聚带电粒子束的装置; 用于加速从带电粒子束枪发射的带电粒子束的加速装置; 以及设置在带电粒子束枪和加速装置之间的像差校正装置，其中足够抵消样品表面上的带电粒子束的像差的像差被提供给初始时的提取电位或等效光束 加速阶段。

公开(公告)号：US07714286B2

公开(公告)日：2010-05-11

申请号：US12121924

申请日：2008-05-16

申请人： Tomonori Nakano ,  Takeshi Kawasaki ,  Kotoko Hirose ,  Makoto Ezumi

发明人： Tomonori Nakano ,  Takeshi Kawasaki ,  Kotoko Hirose ,  Makoto Ezumi

IPC分类号： G01N23/00

CPC分类号： H01J37/153 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/216 ,  H01J2237/221

摘要： A charged particle beam apparatus includes: a correction image acquisition part 52 for making a detector 20 acquire items of two-dimensional image data at different focal positions; a directional differentiation operation part 53 for obtaining directional derivative values in a plurality of directions for each of the items of two-dimensional image data at different focal positions; an aberration parameter calculation part 54 for obtaining aberration parameters according to previously determined methods by using the directional derivative values in a plurality of directions for each of the items of two-dimensional image data; an aberration correction value calculation part 55 for obtaining correction values for aberrations by using the aberration parameters; and a control part 56 for setting the correction values in a correction optical system control means to make an aberration corrector 16 correct the aberrations.

摘要翻译： 带电粒子束装置包括：校正图像获取部52，用于使检测器20获取不同焦点位置处的二维图像数据项; 方向微分运算部53，用于在不同的焦点位置获得每个二维图像数据项的多个方向的方向导数值; 像差参数计算部54，用于根据先前确定的方法通过对于每个二维图像数据使用多个方向上的方向导数值来获得像差参数; 用于通过使用像差参数获得像差的校正值的像差校正值计算部55; 以及用于在校正光学系统控制装置中设置校正值以使像差校正器16校正像差的控制部分56。

公开(公告)号：US20080236965A1

公开(公告)日：2008-10-02

申请号：US11841017

申请日：2007-08-20

申请人： Hideyuki NAKAMURA ,  Takeshi Kawasaki ,  Toshihiko Mochida ,  Takashi Yamaguchi

发明人： Hideyuki NAKAMURA ,  Takeshi Kawasaki ,  Toshihiko Mochida ,  Takashi Yamaguchi

IPC分类号： F16F9/30

CPC分类号： B61G11/16 ,  B61D15/06

摘要： The invention provides a transportation device having a shock absorbing device with a reduced non-collapse region. Shock absorbers 14 and 17 constituting a shock absorbing device 10A provided on a transportation device is connected respectively to shock absorbers 17 and 20 disposed rearward therefrom via connecting members 23 and 26 having ashtray-like cross-sectional shapes. The shock absorber 20 disposed at the rearmost position is connected via welding to a base 29. Collapse regions 15, 18 and 21 of the shock absorbers 14, 17 and 20 are collapsed by the load applied to the shock absorbers 14, 17 and 20, and their lengths are shortened. Non-collapse regions 16 and 19 of the shock absorbers 14 and 17 overlap respectively with the non-collapse regions 19 and 22 of the shock absorbers 17 and 20 disposed rearward therefrom. Therefore, the non-collapse regions 16, 19 and 22 fit within a recessed portion of the connecting members 23 and 26, and the overall longitudinal length of the non-collapse regions of the shock absorbing device can be shortened.

摘要翻译： 本发明提供了具有减小的非崩溃区域的减震装置的运输装置。 构成设置在运送装置上的减震装置10A的减震器14和17分别通过具有烟灰缸状横截面形状的连接构件23和26分别连接到其后方设置的减震器17和20。 设置在最后位置的减震器20通过焊接连接到基座29。 减震器14,17和20的折叠区域15,18和21被施加到减震器14,17和20的负载折叠，并且它们的长度被缩短。 减震器14和17的非塌陷区域16和19分别与设置在其后方的减震器17和20的非塌陷区域19和22重叠。 因此，非塌陷区域16,19和22装配在连接构件23和26的凹陷部分内，并且可以缩短减震装置的非塌陷区域的整个纵向长度。

公开(公告)号：US20080116720A1

公开(公告)日：2008-05-22

申请号：US11943113

申请日：2007-11-20

申请人： Takashi Yamaguchi ,  Toshiharu Miyamoto ,  Toshihiko Mochida ,  Takeshi Kawasaki ,  Hideyuki Nakamura

发明人： Takashi Yamaguchi ,  Toshiharu Miyamoto ,  Toshihiko Mochida ,  Takeshi Kawasaki ,  Hideyuki Nakamura

IPC分类号： B60R21/04

CPC分类号： B61D15/06 ,  B61D17/06

摘要： There is provided a vehicle equipped with a shock absorbing structure that can absorb collision energy stably under all collision conditions to ensure the safety of crew members and passengers. The shock absorbing structure is arranged in an end part of the vehicle. The shock absorbing structure comprises an upper-stage shock absorbing structure 100 that is arranged in an upper part of a crushable zone to absorb collision energy by being crushed by a predetermined load, a lower-stage shock absorbing structure 120 that is arranged in a lower part of the crushable zone to absorb the collision energy by being crushed by the predetermined load, and a middle-stage shock absorbing structure 110 that is held between the upper-stage shock absorbing structure 100 and the lower-stage shock absorbing structure 120 arranged over and under the middle-stage shock absorbing structure 110. The middle-stage shock absorbing structure 110 includes a buffer structure 112 and a slide structure 113, and the buffer structure 112 is slid to the rear by the predetermined load.

摘要翻译： 提供了一种配备有减震结构的车辆，能够在所有碰撞条件下稳定地吸收碰撞能量，以确保船员和乘客的安全。 冲击吸收结构布置在车辆的端部。 冲击吸收结构包括上部的减震结构100，其被布置在可压碎区域的上部，以通过被预定负载压碎来吸收碰撞能量;下部缓冲结构120，其布置在下部 通过被预定负载压碎以吸收碰撞能量的部分可压碎区域;以及中间缓冲结构体110，其被保持在上级缓冲结构体100和下层减震结构体120之间 并且在中级缓冲结构110下方。 中间缓冲结构110包括缓冲结构112和滑动结构113，并且缓冲结构112向后方滑动预定的载荷。

公开(公告)号：US07375323B2

公开(公告)日：2008-05-20

申请号：US11655946

申请日：2007-01-22

申请人： Takeshi Kawasaki ,  Takaho Yoshida ,  Yoichi Ose ,  Hideo Todokoro

发明人： Takeshi Kawasaki ,  Takaho Yoshida ,  Yoichi Ose ,  Hideo Todokoro

IPC分类号： G21K1/08 ,  H01J3/14

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/1471 ,  H01J37/153 ,  H01J37/265 ,  H01J37/28 ,  H01J37/302 ,  H01J2237/1501 ,  H01J2237/1534 ,  H01J2237/21 ,  H01J2237/2487 ,  H01J2237/2817 ,  H01J2237/31793

摘要： An electron beam apparatus with an aberration corrector using multipole lenses is provided. The electron beam apparatus has a scan mode for enabling the operation of the aberration corrector and a scan mode for disabling the operation of the aberration corrector and the operation of each of the aberration corrector, a condenser lens, and the like is controlled such that the object point of an objective lens does not change in either of the scan modes. If a comparison is made between the secondary electron images of a specimen in the two modes, the image scaling factor and the focus remain unchanged and evaluation and adjustment can be performed by distinctly recognizing only the effect of the aberration corrector. This reduces the time required to adjust an optical axis which has been long due to an axial alignment defect inherent in the aberration corrector and an axial alignment defect in a part other than the aberration corrector which are indistinguishably intermingled with each other.

摘要翻译： 提供具有使用多极透镜的像差校正器的电子束装置。 电子束装置具有能够进行像差校正器的操作的扫描模式和用于禁止像差校正器的操作的扫描模式，并且每个像差校正器，聚光透镜等的操作被控制，使得 物镜的物体在任一种扫描模式下都不会改变。 如果在两种模式中的样本的二次电子图像之间进行比较，则图像缩放因子和焦点保持不变，并且可以通过清楚地仅识别像差校正器的效果来进行评估和调整。 这减少了由于像差校正器固有的轴向对准缺陷而长时间调整光轴所需的时间以及像差校正器之外的不同于彼此混合的部分的轴向对准缺陷所需的时间。

公开(公告)号：US07211804B2

公开(公告)日：2007-05-01

申请号：US10990498

申请日：2004-11-18

申请人： Takaho Yoshida ,  Takeshi Kawasaki

发明人： Takaho Yoshida ,  Takeshi Kawasaki

IPC分类号： G21K1/08 ,  G21K7/00

CPC分类号： H01J37/153

摘要： The present invention provides an aberration corrector functioning under a condition outside the setting optical condition of an incorporated charged particle beam apparatus.An intermediate potential region different from the ground potential of an aberration corrector is provided in the space between the stages of multipole lenses constructing the aberration corrector to adjust a potential. Using this, when selecting an incident (outgoing) condition, an outgoing (incident) condition can be adjusted.

摘要翻译： 本发明提供一种像差校正器，其在装入的带电粒子束装置的设定光学条件之外的条件下起作用。 在构成像差校正器的多极透镜的阶段之间的空间中设置与像差校正器的接地电位不同的中间电位区域，以调整电位。 使用此方法，当选择事件（输出）条件时，可以调整输出（事件）条件。

公开(公告)号：US06933545B2

公开(公告)日：2005-08-23

申请号：US10859615

申请日：2004-06-03

申请人： Takeshi Kawasaki ,  Hiroshi Yano

发明人： Takeshi Kawasaki ,  Hiroshi Yano

IPC分类号： H01L21/331 ,  H01L23/482 ,  H01L29/04 ,  H01L29/08 ,  H01L29/417 ,  H01L29/423 ,  H01L29/737 ,  H01L31/0328

CPC分类号： H01L29/0821 ,  H01L23/4824 ,  H01L29/045 ,  H01L29/41708 ,  H01L29/42304 ,  H01L29/7371 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention provides a hetero-bipolar transistor having a new configuration of the interconnection. The bipolar transistor of the present invention includes the collector mesa, having the base and collector layers therein, includes a first side having a normal mesa surface and extending along the [01-1] orientation, and a second side having a reverse mesa surface and extending along the [011] orientation. The present HBT has a base interconnection, a portion of which diagonally intersects the first side of the collector mesa, accordingly, the breaking of the interconnection may not occur and the high frequency performance of the HBT may be enhanced because the width of the collector mesa is not necessary to widen to disposed the base interconnection on the first side.

摘要翻译： 本发明提供具有互连的新配置的异质双极晶体管。 本发明的双极晶体管包括其中具有基极和集电极层的集电极台面，包括具有正常台面并沿着[01-1]取向延伸的第一侧，以及具有反向台面的第二侧， 沿[011]方向延伸。 本HBT具有基极互连，其一部分与集电极台面的第一侧对角地相交，相应地可能不会发生互连的断裂，并且HBT的高频性能可能增强，因为集电极台面的宽度 不需要扩大以在第一侧上布置基座互连。

公开(公告)号：US06550397B2

公开(公告)日：2003-04-22

申请号：US10118007

申请日：2002-04-09

申请人： Takeshi Kawasaki ,  Sumio Okuno ,  Toshiaki Makino ,  Kentaro Masai ,  Kazufumi Yamaji

发明人： Takeshi Kawasaki ,  Sumio Okuno ,  Toshiaki Makino ,  Kentaro Masai ,  Kazufumi Yamaji

IPC分类号： B61D1700

CPC分类号： B61D17/08

摘要： A car body, in which a hollow shape stock composed of two face plates and ribs joining the face plates together is used to form a side body, and stresses are reduced while minimizing an increase in mass. A car body, comprising a hollow shape stock composed of two face plates (31, 31) and ribs (32) joining the face plates together and used to form a side body (11), wherein face plate portions (31c, 31d) in regions (B, D) above and below connection points (c) between circular arcs, which constitute corner portions of a window (15), and vertical sides of the window (15) are greater in thickness than in the remaining regions (A, C, E). Stresses are most heavily concentrated in the regions (B, D). Therefore, it is possible to achieve reduction in mass and enhancement in strength together. Further, buckling preventive tools can be arranged in spaces in the regions (B, D) of the hollow shape stock. Further, with the hollow shape stock (18) in a pier panel, face plates on an internal side are greater in thickness than those on an external side.