公开(公告)号：US20130320227A1

公开(公告)日：2013-12-05

申请号：US14000236

申请日：2012-02-29

申请人： Kotoko Urano ,  Takeshi Kawasaki ,  Noboru Moriya ,  Tomonori Nakano

发明人： Kotoko Urano ,  Takeshi Kawasaki ,  Noboru Moriya ,  Tomonori Nakano

IPC分类号： H01J37/153

CPC分类号： H01J37/153 ,  H01J2237/1534

摘要： In order to realize a multiple assembled easily with high accuracy, a multipole having assembly accuracy within 10 micrometer and within several seconds of angle is achieved by fixing multipole elements by being guided by grooves provided on an inner side of a cylindrical housing to form the multipole.

摘要翻译： 为了实现高精度的多次组装，通过由设置在圆柱形壳体的内侧上的槽引导固定多极元件来实现具有10微米和几秒钟内的组装精度的多极，以形成多极 。

公开(公告)号：US08558171B2

公开(公告)日：2013-10-15

申请号：US13404492

申请日：2012-02-24

申请人： Kotoko Hirose ,  Takeshi Kawasaki ,  Tomonori Nakano

发明人： Kotoko Hirose ,  Takeshi Kawasaki ,  Tomonori Nakano

IPC分类号： G01N23/225 ,  H01J37/304

CPC分类号： H01J37/28 ,  H01J37/153 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/216

摘要： A focused charged particle beam apparatus including an aberration corrector, capable of finding the absolute value of the aberration coefficient at high speed, and capable of making high-accuracy adjustments at high speed. A deflection coil tilts the input beam relative to the object point, and measures the defocus data and aberration quantity at high speed while the beam is tilted from one image, and perform least squares fitting on these results to find the absolute value of the aberration coefficient prior to tilting the beam, and to adjust the aberration corrector.

摘要翻译： 一种聚焦带电粒子束装置，包括像差校正器，能够在高速下找到像差系数的绝对值，并能够高精度地进行高精度的调整。 偏转线圈相对于物点倾斜输入光束，并且当光束从一个图像倾斜时测量散焦数据和高速的像差量，并对这些结果进行最小二乘拟合以找到像差系数的绝对值 在倾斜光束之前，并调整像差校正器。

公开(公告)号：US08168951B2

公开(公告)日：2012-05-01

申请号：US12410174

申请日：2009-03-24

申请人： Takeshi Kawasaki ,  Tomonori Nakano

发明人： Takeshi Kawasaki ,  Tomonori Nakano

IPC分类号： G01N23/00

CPC分类号： H01J37/153 ,  H01J37/28 ,  H01J2237/1532

摘要： A charged particle beam apparatus having an aberration correction capability at high acceleration voltages. The charged particle beam apparatus comprises a charged particle beam source; an extraction electrode to extract charged particles from the charged particle beam source; a charged particle beam gun including a means for converging a charged particle beam; an acceleration means for accelerating a charged particle beam emitted from the charged particle beam gun; and an aberration correction means disposed between the charged particle beam gun and the acceleration means, in which an aberration enough to cancel out an aberration of a charged particle beam on the specimen surface is provided to an extraction electrical potential or an equivalent beam at the initial acceleration stage.

摘要翻译： 一种在高加速电压下具有像差校正能力的带电粒子束装置。 带电粒子束装置包括带电粒子束源; 提取电极，用于从带电粒子束源提取带电粒子; 带电粒子束枪，包括用于会聚带电粒子束的装置; 用于加速从带电粒子束枪发射的带电粒子束的加速装置; 以及设置在带电粒子束枪和加速装置之间的像差校正装置，其中足够抵消样品表面上的带电粒子束的像差的像差被提供给初始时的提取电位或等效光束 加速阶段。

公开(公告)号：US07714286B2

公开(公告)日：2010-05-11

申请号：US12121924

申请日：2008-05-16

申请人： Tomonori Nakano ,  Takeshi Kawasaki ,  Kotoko Hirose ,  Makoto Ezumi

发明人： Tomonori Nakano ,  Takeshi Kawasaki ,  Kotoko Hirose ,  Makoto Ezumi

IPC分类号： G01N23/00

CPC分类号： H01J37/153 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/216 ,  H01J2237/221

摘要： A charged particle beam apparatus includes: a correction image acquisition part 52 for making a detector 20 acquire items of two-dimensional image data at different focal positions; a directional differentiation operation part 53 for obtaining directional derivative values in a plurality of directions for each of the items of two-dimensional image data at different focal positions; an aberration parameter calculation part 54 for obtaining aberration parameters according to previously determined methods by using the directional derivative values in a plurality of directions for each of the items of two-dimensional image data; an aberration correction value calculation part 55 for obtaining correction values for aberrations by using the aberration parameters; and a control part 56 for setting the correction values in a correction optical system control means to make an aberration corrector 16 correct the aberrations.

摘要翻译： 带电粒子束装置包括：校正图像获取部52，用于使检测器20获取不同焦点位置处的二维图像数据项; 方向微分运算部53，用于在不同的焦点位置获得每个二维图像数据项的多个方向的方向导数值; 像差参数计算部54，用于根据先前确定的方法通过对于每个二维图像数据使用多个方向上的方向导数值来获得像差参数; 用于通过使用像差参数获得像差的校正值的像差校正值计算部55; 以及用于在校正光学系统控制装置中设置校正值以使像差校正器16校正像差的控制部分56。

公开(公告)号：US20110272578A1

公开(公告)日：2011-11-10

申请号：US13143965

申请日：2010-01-14

申请人： Kotoko Hirose ,  Takeshi Kawasaki ,  Tomonori Nakano

发明人： Kotoko Hirose ,  Takeshi Kawasaki ,  Tomonori Nakano

IPC分类号： H01J37/28

CPC分类号： H01J37/153 ,  H01J37/28 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/221 ,  H01J2237/2802

摘要： There is provided a charged particle radiation device provided with an aberration corrector capable of correcting aberration with high precision in a short time by automatically setting an aberration coefficient measuring condition to thereby realize measurement with high precision. The charged particle radiation device has a feature that a value of defocus and a value of astigma, occurring owing to aberration at the time of the beam tilting, are estimated on the basis of results of aberration measurement, thereby adjusting an electron optical system on the basis of these values.

摘要翻译： 提供一种带有像差校正器的带电粒子辐射装置，其能够通过自动设置像差系数测量条件，以高精度实现测量，从而在短时间内以高精度校正像差。 带电粒子辐射装置具有基于像差测量的结果来估计由于波束倾斜时的像差而发生的散焦值和散射值的特征，由此调整电子光学系统 这些价值的基础。

公开(公告)号：US07718976B2

公开(公告)日：2010-05-18

申请号：US11762802

申请日：2007-06-14

申请人： Takeshi Kawasaki ,  Mitsugu Sato ,  Makoto Ezumi ,  Tomonori Nakano

发明人： Takeshi Kawasaki ,  Mitsugu Sato ,  Makoto Ezumi ,  Tomonori Nakano

IPC分类号： G21K1/08

CPC分类号： H01J37/153 ,  H01J37/248 ,  H01J37/28 ,  H01J2237/04735 ,  H01J2237/1534

摘要： The present invention provides a stable charged particle beam apparatus to enable high-resolution observation by reducing the influence of the noise of a large number of power supplies used in an aberration corrector. The charged particle beam apparatus that has: an SEM column for irradiating an electron beam onto a specimen and making the electron beam scan it; a specimen chamber for housing a specimen stage on which the specimen is placed and held; a detector for detecting secondary electrons generated by the scanning of the electron beam; display means for displaying an output signal of the detector as an SEM image; and a control unit for controlling component parts including the SEM column, the specimen chamber, and the display means. The SEM column has a pair of accelerating electrodes and an aberration corrector that is placed between the pair of accelerating electrodes and corrects aberration of the electron beam, and accelerates the electron beam during a period when being transmitted through the aberration corrector by a high voltage being impressed across the pair of accelerating electrodes.

摘要翻译： 本发明提供了一种稳定的带电粒子束装置，通过减少在像差校正器中使用的大量电源的噪声的影响来实现高分辨率观察。 具有：用于将电子束照射到试样上并使电子束扫描的SEM柱的带电粒子束装置; 用于容纳放置和保持所述试样的试样台的试样室; 用于检测由扫描电子束产生的二次电子的检测器; 用于将检测器的输出信号显示为SEM图像的显示装置; 以及用于控制包括SEM柱，样品室和显示装置的部件的控制单元。 SEM列具有一对加速电极和像差校正器，该像素校正器被放置在一对加速电极之间并校正电子束的像差，并且通过高电压透过像差校正器的期间加速电子束 穿过该对加速电极。

公开(公告)号：US20100033560A1

公开(公告)日：2010-02-11

申请号：US12535021

申请日：2009-08-04

申请人： Takeshi Kawasaki ,  Tomonori Nakano ,  Kotoko Hirose

发明人： Takeshi Kawasaki ,  Tomonori Nakano ,  Kotoko Hirose

IPC分类号： H04N7/18 ,  G01N23/00 ,  G01N23/20

CPC分类号： G01N23/203 ,  G01N2223/302

摘要： A tilted illumination observation method and observation device with easy adjustment, high speed, good reproducibility and low cost is provided. A high resolution tilt image of a specimen is obtained by extracting the blurring on the scanning spot occurring during beam tilt from the image (step 6) captured by the tilted beam, and the image (step 4) captured from directly above the standard specimen; and then deconvoluting (step 11, 12) the tilted image of the target specimen (step 10) using the extracted scanning spot from the oblique beam.

摘要翻译： 提供了一种倾斜的照明观察方法和观察装置，其调节方便，速度快，再现性好，成本低。 通过从由倾斜光束拍摄的图像（步骤6）和从标准样品的正上方捕获的图像（步骤4）提取在光束倾斜期间发生的扫描点上的模糊，获得样本的高分辨率倾斜图像。 然后使用来自倾斜光束的提取的扫描光点对目标样本的倾斜图像进行去卷积（步骤11,12）（步骤10）。

公开(公告)号：US20090212228A1

公开(公告)日：2009-08-27

申请号：US12367811

申请日：2009-02-09

申请人： Kotoko HIROSE ,  Takeshi Kawasaki ,  Tomonori Nakano

发明人： Kotoko HIROSE ,  Takeshi Kawasaki ,  Tomonori Nakano

IPC分类号： H01J3/14

CPC分类号： H01J37/28 ,  H01J37/153 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/216

摘要： A focused charged particle beam apparatus including an aberration corrector, capable of finding the absolute value of the aberration coefficient at high speed, and capable of making high-accuracy adjustments at high speed. A deflection coil tilts the input beam relative to the object point, and measures the defocus data and aberration quantity at high speed while the beam is tilted from one image, and perform least squares fitting on these results to find the absolute value of the aberration coefficient prior to tilting the beam, and to adjust the aberration corrector.

摘要翻译： 一种聚焦带电粒子束装置，包括像差校正器，能够在高速下找到像差系数的绝对值，并能够高精度地进行高精度的调整。 偏转线圈相对于物点倾斜输入光束，并且当光束从一个图像倾斜时测量散焦数据和高速的像差量，并对这些结果进行最小二乘拟合以找到像差系数的绝对值 在倾斜光束之前，并调整像差校正器。

公开(公告)号：US20090184243A1

公开(公告)日：2009-07-23

申请号：US12410174

申请日：2009-03-24

申请人： Takeshi KAWASAKI ,  Tomonori Nakano

发明人： Takeshi KAWASAKI ,  Tomonori Nakano

IPC分类号： G01N23/00 ,  H01J3/14

CPC分类号： H01J37/153 ,  H01J37/28 ,  H01J2237/1532

摘要： A charged particle beam apparatus having an aberration correction capability at high acceleration voltages. The charged particle beam apparatus comprises a charged particle beam source; an extraction electrode to extract charged particles from the charged particle beam source; a charged particle beam gun including a means for converging a charged particle beam; an acceleration means for accelerating a charged particle beam emitted from the charged particle beam gun; and an aberration correction means disposed between the charged particle beam gun and the acceleration means, in which an aberration enough to cancel out an aberration of a charged particle beam on the specimen surface is provided to an extraction electrical potential or an equivalent beam at the initial acceleration stage.

摘要翻译： 一种在高加速电压下具有像差校正能力的带电粒子束装置。 带电粒子束装置包括带电粒子束源; 提取电极，用于从带电粒子束源提取带电粒子; 带电粒子束枪，包括用于会聚带电粒子束的装置; 用于加速从带电粒子束枪发射的带电粒子束的加速装置; 以及设置在带电粒子束枪和加速装置之间的像差校正装置，其中足够抵消样品表面上的带电粒子束的像差的像差被提供给初始时的提取电位或等效光束 加速阶段。

公开(公告)号：US07504624B2

公开(公告)日：2009-03-17

申请号：US11341663

申请日：2006-01-30

申请人： Takeshi Kawasaki ,  Tomonori Nakano ,  Michio Hatano ,  Momoyo Enyama

发明人： Takeshi Kawasaki ,  Tomonori Nakano ,  Michio Hatano ,  Momoyo Enyama

IPC分类号： G21K7/00

CPC分类号： H01J37/153 ,  H01J2237/0453

摘要： A scanning charged particle microscope which facilitates adjustment, has a deep focal depth, and is provided with an aberration correction means. The state of aberration correction is judged from a SEM image by using a stop having plural openings and the judgment result is fed back to the adjustment of the aberration correction means. A stop of a nearly orbicular zone shape is used in combination with the aberration correction means.

摘要翻译： 便于调整的扫描带电粒子显微镜具有深的焦深，并且设置有像差校正装置。 通过使用具有多个开口的停止​​来从SEM图像判断像差校正的状态，并且将判断结果反馈到像差校正装置的调整。 与像差校正装置组合使用几乎轮状的区域形状的停止。