Method for manufacturing an ink jet recording head
    21.
    发明授权
    Method for manufacturing an ink jet recording head 失效
    喷墨记录头的制造方法

    公开(公告)号:US06315853B1

    公开(公告)日:2001-11-13

    申请号:US08721311

    申请日:1996-10-15

    IPC分类号: B05D512

    摘要: A method for manufacturing an ink jet recording head by combining each of the processes to fabricate a heater board comprises (I) the first step of patterning a resistive layer on a substrate, (II) the second step of laminating a first protection layer and patterning the protection layer to form a groove by removing an area for wiring electrode layers to be formed later, (III) the third step of laminating a layer formed by material for use of the wiring electrode layers, (IV) the forth step of continuously giving heat treatment to the surface of the substrate, while the surface is not allowed to be exposed to the air outside, to enable the layer formed by the material of the wiring electrode layers to flow into only the groove on the first protection layer provided in the first step, and making the surface flat, as a result of which, a pair of electrode layers are formed to enable the resistive layer between them to be constituted as the heat generating unit and (V) the fifth step of forming a second protection layer. With this method of manufacture, it is possible to provide an ink jet recording head whose power dissipation is small, while having a good durability and capability of recording in high quality.

    摘要翻译: 通过组合加热板的各个工序来制造喷墨记录头的方法包括:(I)在基板上图形化电阻层的第一步骤,(II)层压第一保护层和图案化的第二步骤 保护层,通过去除稍后要形成的布线电极层的区域来形成沟槽;(III)层叠由用于布线电极层的材料形成的层的第三步骤,(IV)连续给予第四步骤 对基板的表面进行热处理,而不允许表面暴露在外部的空气中,使得由布线电极层的材料形成的层仅能够流入设置在第一保护层中的第一保护层中的凹槽中 第一步骤,使表面平坦化,由此形成一对电极层以使其之间的电阻层能够被构成为发热单元,(V)第五步骤f 建立第二个保护层。 利用这种制造方法,可以提供功率小的喷墨记录头,同时具有良好的耐久性和高质量的记录能力。

    Substrate for liquid discharge head, liquid discharge head and liquid discharge apparatus
    22.
    发明授权
    Substrate for liquid discharge head, liquid discharge head and liquid discharge apparatus 有权
    液体排放头,排液头和排液装置用基板

    公开(公告)号:US06299293B1

    公开(公告)日:2001-10-09

    申请号:US09451873

    申请日:1999-12-01

    IPC分类号: B41J205

    摘要: A substrate, for use in a liquid discharge head for discharging liquid by applying thermal energy thereto, is provided with a heat generating member for applying the thermal energy to the liquid and a movable member so positioned as to be opposed to the heat generating member, to be fixed at the upstream side in the flowing direction of the liquid and to have a free end at the downstream end. Two wiring layers for applying a voltage to the heat generating member are provided in a superposed manner with an interlayer insulation layer therebetween and are mutually connected electrically via a through-hole. The through-hole is provided in a position different from the boundary between a fixing portion and a movable portion of the movable member.

    摘要翻译: 用于通过向其施加热能而向液体喷射液体的液体排出头的基板设置有用于向液体施加热能的发热部件和与发热部件相对定位的可动部件, 被固定在液体的流动方向的上游侧,并且在下游端具有自由端。 用于向发热元件施加电压的两个布线层以叠层的方式设置在其间的层间绝缘层,并且通过通孔相互连接。 通孔设置在与可动构件的固定部和可动部之间的边界不同的位置。

    Method for manufacturing liquid discharge head
    24.
    发明授权
    Method for manufacturing liquid discharge head 有权
    液体排放头的制造方法

    公开(公告)号:US08778200B2

    公开(公告)日:2014-07-15

    申请号:US12251229

    申请日:2008-10-14

    摘要: A method for manufacturing a liquid discharge head including a substrate on which supply ports for supplying a liquid are provided, includes forming a first supply port among the supply ports by performing crystal anisotropic etching on the substrate from one surface of the substrate, and forming a plurality of second supply ports among the supply ports by performing dry etching on the substrate using a crystal anisotropic etching method from a surface exposed toward the one surface of the substrate to a rear surface so that the independent second supply ports are respectively opened on the rear surface.

    摘要翻译: 一种液体排出头的制造方法,其特征在于,具备:基板,其上设置有用于供给液体的供给口的基板,包括:在所述基板的一个表面上对所述基板进行结晶各向异性蚀刻,形成供给口中的第一供给口, 通过使用晶体各向异性蚀刻方法从从衬底的一个表面暴露的表面到后表面在基板上对基板进行干蚀刻,使得独立的第二供给端口分别在后部分别地开放,从而在供给端口中的多个第二供给口 表面。

    Liquid discharge head manufacturing method, and liquid discharge head obtained using this method
    26.
    发明授权
    Liquid discharge head manufacturing method, and liquid discharge head obtained using this method 有权
    液体排出头的制造方法以及使用该方法得到的排液头

    公开(公告)号:US08227043B2

    公开(公告)日:2012-07-24

    申请号:US10565658

    申请日:2005-06-27

    IPC分类号: B05D1/36 B05D7/00

    摘要: A method for manufacturing a liquid discharge head includes the steps of: forming a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid; forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer; forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer deposited on the solid layer; and removing the solid layer to form a flow path that communicates with the energy element and the discharge port. A material used for the coating layer contains a cationically polymerizable chemical compound, a cationic photopolymerization initiator and an inhibitor of cationic photopolymerization, and a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer is formed contains a copolymer of methacrylic acid and methacrylate ester.

    摘要翻译: 一种液体排出头的制造方法,其特征在于,包括以下步骤:在基板上形成固体层,所述基板上配置能量产生元件,以产生用于排出液体的能量; 在固体固体层的基板上形成用于涂覆固体层的涂层; 形成用于通过光刻工艺在沉积在固体层上的涂层中排出液体的排出口; 并且去除固体层以形成与能量元件和排出口连通的流路。 用于涂层的材料包含阳离子可聚合化合物,阳离子光聚合引发剂和阳离子光聚合抑制剂,并且与形成涂层的排出口的部分形成边界的固体层的材料包含 甲基丙烯酸和甲基丙烯酸酯的共聚物。

    LASER PROCESSING METHOD
    28.
    发明申请
    LASER PROCESSING METHOD 有权
    激光加工方法

    公开(公告)号:US20110108532A1

    公开(公告)日:2011-05-12

    申请号:US12907349

    申请日:2010-10-19

    IPC分类号: B23K26/38

    摘要: Provided is a laser processing method capable of improving precision of a processing shape and degree of freedom of the processing shape. When a recess portion is formed in a substrate (W) which is an object to be processed, an inner portion of the substrate (W) is scanned with a condensing point (LS1) of modification laser light (L1) which is first laser light to form a modified layer (Wr) which becomes a boundary of a laser processing region (R1) in a position corresponding to a bottom part of the recess portion (modified layer forming step). Next, a surface (Wa) of the substrate (W) is irradiated with condensed processing laser light which is second laser light to remove and process the laser processing region (R1) defined by the modified layer (Wr), to thereby form the recess portion (removing/processing step).

    摘要翻译: 提供了能够提高加工形状的精度和加工形状的自由度的激光加工方法。 当在作为被加工物的基板(W)上形成有凹部时,用作为第一激光的变形激光(L1)的聚光点(LS1)扫描基板(W)的内部, 形成在与凹部(修饰层形成工序)的底部对应的位置成为激光加工区域(R1)的边界的改质层(Wr)。 接下来,用作为第二激光的聚光处理用激光照射基板(W)的表面(Wa),以去除并处理由改性层(Wr)限定的激光加工区域(R1),从而形成凹部 部分(去除/处理步骤)。

    Liquid discharge head having hollow portions for relaxing stress in the head and manufacturing method of the same
    30.
    发明授权
    Liquid discharge head having hollow portions for relaxing stress in the head and manufacturing method of the same 有权
    具有用于在头部中缓和应力的中空部分的排液头及其制造方法

    公开(公告)号:US07625069B2

    公开(公告)日:2009-12-01

    申请号:US11549871

    申请日:2006-10-16

    IPC分类号: B41J2/05

    摘要: A liquid discharge head includes a substrate having an energy generating element configured to generate energy required to discharge liquid, a discharge port configured to discharge the liquid and provided in an opposed relationship to the energy generating element, a wall member defining a chamber adapted to store the energy required to discharge liquid the energy being generated by the energy generating element, a discharge portion defining a fluid path connecting the chamber and the discharge port, a supply path facilitating supplying the liquid into the chamber, and a pair of hollow portions provided in the wall member, wherein the hollow portions oppose each other and sandwich at least the entire discharge port in a direction from the discharge port to the substrate, and the hollow portions are independent of the chamber.

    摘要翻译: 液体排出头包括具有能量产生元件的基板,该能量产生元件被配置为产生排出液体所需的能量,排出端口,其构造成排出液体并以与该能量产生元件相对的关系提供;壁构件,其限定适于存储的室 由能量产生元件产生的能量排出液体所需的能量,限定连接腔室和排放口的流体路径的排出部分,便于将液体供应到腔室中的供应路径以及设置在腔室中的一对中空部分 所述壁构件,其中所述中空部分彼此相对并且在从所述排出口到所述基板的方向上至少夹着所述排出口的整个排出口,并且所述中空部分与所述室独立。