公开(公告)号：US5036258A

公开(公告)日：1991-07-30

申请号：US392630

申请日：1989-08-11

申请人： Hsing-Yao Chen ,  Richard M. Gorski

发明人： Hsing-Yao Chen ,  Richard M. Gorski

IPC分类号： H01J29/50 ,  H01J29/51 ,  H01J29/62

CPC分类号： H01J29/628 ,  H01J29/503 ,  H01J29/51 ,  H01J2229/4841 ,  H01J2229/4865 ,  H01J2229/4872 ,  H01J2229/4879 ,  H01J2229/4893

摘要： For use in a color cathode ray tube (CRT) having a self-converging yoke for applying an asymmetric magnetic field in a synchronous manner to a plurality of inline electron beams for deflecting the electron beams across a phosphorescing screen in the CRT, wherein the magnetic field causes defocusing of and an astigmatism of the electron beams where incident upon the CRT screen in off-center regions of the screen, an electron gun comprising: a cathode for generating electrons; a beam crossover arrangement for receiving electrons from the cathode and for forming a beam crossover; a first electrostatic quadrupole field aligned in a spaced manner along the electron beams and having a first asymmetric aperture through which the inline electron beams pass for applying a first electrostatic quadrupole field to the electron beams in compensating for the defocusing and astigmatism of the electron beams; and a second electrostatic quadrupole field aligned in a spaced manner along the electron beams with the first electrostatic quadrupole field and having a second asymmetric aperture through which the inline electron beams pass for applying a second electrostatic quandrupole field to the electron beams for further compensating for the defocusing and astigmatism of the electron beams.

摘要翻译： 用于具有自会聚磁轭的彩色阴极射线管（CRT），用于以与多个在线电子束同步的方式施加非对称磁场，以使电子束偏转在CRT中的磷光屏上，其中磁 场引起在屏幕的偏心区域入射到CRT屏幕上的电子束的散焦和散光，电子枪包括：用于产生电子的阴极; 用于从阴极接收电子并形成光束交叉的光束交叉布置; 第一静电四极场沿着电子束以间隔的方式排列并且具有第一不对称孔，线内电子束通过该第一非对称孔，用于向电子束施加第一静电四极场，以补偿电子束的散焦和像散; 以及第二静电四极场，沿着具有第一静电四极场的电子束以间隔的方式排列，并且具有第二不对称孔，线内电子束通过该第二非对称孔，用于向电子束施加第二静电反相场，以进一步补偿 电子束的散焦和散光。

公开(公告)号：US4583024A

公开(公告)日：1986-04-15

申请号：US581668

申请日：1984-02-21

申请人： Hsing-Yao Chen

发明人： Hsing-Yao Chen

IPC分类号： H01J29/50 ,  H01J29/56 ,  H01J29/51

CPC分类号： H01J29/503

摘要： An improved color picture tube has an inline electron gun for generating and directing three electron beams, a center beam and two side beams, along coplanar paths toward a screen of the tube. The gun includes a main focus lens for focusing the electron beams. The main focus lens is formed by two spaced electrode members, each having three separate inline apertures therein, a center aperture and two side apertures. The improvement comprises each of the apertures in each of the focus lens electrodes having a shape that distorts a portion of the focus lens thereat, to at least partially compensate for an astigmatic effect within the tube that acts on an associated electron beam. The side apertures in both of the electrodes are nonsymmetrical about axes that pass through the respective side apertures and are perpendicular to the initial coplanar paths of the electron beams.

摘要翻译： 一种改进的彩色显像管具有一个一字形电子枪，用于沿着朝向管的屏幕的共面路径产生和引导三束电子束，中心光束和两个侧光束。 枪包括用于聚焦电子束的主聚焦透镜。 主聚焦透镜由两个间隔开的电极构件形成，每个电极构件具有三个单独的在线孔，中心孔和两个侧孔。 改进包括每个聚焦透镜电极中的每个孔具有使聚焦透镜的一部分扭曲的形状，以至少部分地补偿作用在相关联的电子束上的管内的散光效应。 两个电极中的侧孔相对于穿过相应的侧孔并且垂直于电子束的初始共面路径的轴线是非对称的。

公开(公告)号：US4319163A

公开(公告)日：1982-03-09

申请号：US164685

申请日：1980-06-30

申请人： Hsing-Yao Chen

发明人： Hsing-Yao Chen

IPC分类号： H01J29/50 ,  H01J29/56 ,  H04N3/26 ,  H01J29/46

CPC分类号： H01J29/503

摘要： An electron gun comprises an astigmatic beam forming means including a cathode, a control grid, a first screen grid electrode having a horizontally elongated rectangular aperture, and a second screen grid electrode having a circular aperture. In operation, the second screen grid is energized with a DC bias voltage and the control grid and first screen grid is energized with a DC bias superposed with a substantially parabolically shaped dynamic signal synchronized with either or both the horizontal and vertical deflection signals. Thus, the astigmatic optics of the beam forming means varies in strength in phase with the beam scan so as to provide optimum correction for flare distortion of the electron beam.

摘要翻译： 电子枪包括散光束形成装置，其包括阴极，控制栅格，具有水平细长矩形孔的第一栅格栅极和具有圆形孔的第二栅极栅极。 在操作中，第二屏幕网格用直流偏置电压通电，并且控制网格和第一屏幕网格被以与基本上抛物线形状的动态信号叠加的DC偏压通电，该动态信号与水平和垂直偏转信号中的一个或两者同时工作。 因此，波束形成装置的像散光学器件与束扫描的相位强度变化，以便为电子束的耀斑变形提供最佳校正。

公开(公告)号：US07075093B2

公开(公告)日：2006-07-11

申请号：US10844201

申请日：2004-05-12

申请人： Richard M. Gorski ,  Boris Rozansky ,  Hsing-Yao Chen

发明人： Richard M. Gorski ,  Boris Rozansky ,  Hsing-Yao Chen

IPC分类号： H01J37/07

CPC分类号： H01J37/3177 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/045 ,  H01J2237/0435 ,  H01J2237/31766 ,  H01J2237/31774

摘要： A maskless, direct write electron lithography apparatus for accurately and simultaneously writing plural sub-micron patterns on a silicon substrate employs plural parallel electron beams with precise X-Y mechanical translation of the substrate to provide low cost, high throughput integrated circuit (IC) fabrication. Plural compact micro electron gun assemblies arranged in an I×J rectangular grid each simultaneously expose one IC pattern on the substrate, with each electron gun assembly including a K×L array of individually controlled electron guns emitting K×L electron beams. The regular, small spacing between electron beams in each array, i.e., approximately 1 mm or less, requires a correspondingly small X-Y translation of the substrate to write the entire wafer. Each electron gun array includes plural AC blanked cathodes and DC biased plates having plural aligned beam passing apertures. A computer controlled pattern generator synchronized with wafer X-Y translation controls the duration and timing of the cathode blanking signals.

摘要翻译： 用于在硅衬底上准确并同时地写入多个亚微米图案的无掩模式直写式电子光刻设备采用具有精确的X-Y机械平移的平行电子束，以提供低成本，高吞吐量的集成电路（IC）制造。 以1x×矩形栅格排列的多个紧凑型微电子枪组件同时暴露基板上的一个IC图案，每个电子枪组件包括发射KxL电子束的独立控制的电子枪的KxL阵列。 每个阵列中的电子束之间规则的小的间隔，即大约1mm或更小，需要基片的相应较小的X-Y平移来写入整个晶片。 每个电子枪阵列包括多个交流阴极阴极和具有多个对准的光束通过孔的直流偏压板。 与晶片X-Y平移同步的计算机控制模式发生器控制阴极消隐信号的持续时间和时序。

公开(公告)号：US06674228B2

公开(公告)日：2004-01-06

申请号：US10117301

申请日：2002-04-04

申请人： Hsing-Yao Chen ,  Yu-Kun Ma ,  Hsiang-Lin Chang ,  Chun-Hsien Yeh

发明人： Hsing-Yao Chen ,  Yu-Kun Ma ,  Hsiang-Lin Chang ,  Chun-Hsien Yeh

IPC分类号： H01J2950

CPC分类号： H01J29/503 ,  H01J29/58

摘要： An inline electron gun for use in a multi-beam electron gun as in a color cathode ray tube (CRT) includes a main focus lens for focusing the electron beams on the CRT's display screen for providing a video image. The main focus lens includes plural charged grids aligned in a spaced manner along the electron gun's longitudinal axis through which plural (typically three) electron beams are directed. One or more of these charged grids includes at least two aligned common apertures for passing the three electron beams. The layered common aperture arrangement allows for increasing the length of the electron gun as well as the effective diameter of the electron gun's main focus lens for improved video image resolution without introducing electron beam astigmatism.

摘要翻译： 用于彩色阴极射线管（CRT）中的多光束电子枪的直列电子枪包括用于将电子束聚焦在CRT显示屏上以提供视频图像的主聚焦透镜。 主聚焦透镜包括沿电子枪的纵向轴线间隔排列的多个带电栅格，多个（通常为三个）电子束通过该纵向轴线被引导。 这些带电栅格中的一个或多个包括用于使三个电子束通过的至少两个对准的公共孔。 分层公共孔布置允许增加电子枪的长度以及电子枪的主要聚焦透镜的有效直径，以改善视频图像分辨率而不引入电子束散光。

公开(公告)号：US06670621B2

公开(公告)日：2003-12-30

申请号：US09911068

申请日：2001-07-23

申请人： Hsing-Yao Chen

发明人： Hsing-Yao Chen

IPC分类号： A61N500

CPC分类号： H01L21/67727 ,  H01J2237/3175 ,  H01L21/6776

摘要： For use in the fabrication of semiconductor devices by electron beam lithography, a transport system provides relative displacement between an array of plural vacuum stations and a first ultra clean room for sequentially transporting each vacuum station through the first clean room. The first ultra clean room and vacuum stations are disposed in a second clean room having an atmosphere not as contaminant-free as the first ultra clean room. Each vacuum station includes an evacuated housing within which is disposed a combination of a semiconductor substrate, or wafer, and plural electron beam sources for forming integrated circuits on the substrate as the vacuum station is transported through the second clean room. The first ultra clean room is displaced along an aligned array of vacuum stations or the aligned array of vacuum stations are displaced through a stationary first ultra clean room to permit the electron beam formed integrated circuits to be removed from a vacuum station and be replaced by a new set of substrates.

摘要翻译： 为了用于通过电子束光刻制造半导体器件，传输系统提供多个真空站的阵列之间的相对位移和用于顺序地将每个真空站通过第一洁净室顺序地传送的第一超净室。 第一超净室和真空站设置在具有与第一超洁净室不如无污染的气氛的第二洁净室中。 每个真空站包括抽真空的壳体，当真空站通过第二洁净室运送时，其中设置有半导体衬底或晶片的组合以及用于在衬底上形成集成电路的多个电子束源。 第一个超洁净室沿着对准的真空站阵列移位，或者对齐的真空站排列通过固定的第一超净室移位，以允许形成电子束的集成电路从真空站移除，并由 新的基板。

公开(公告)号：US5689158A

公开(公告)日：1997-11-18

申请号：US697626

申请日：1996-08-28

申请人： Hsing-Yao Chen

发明人： Hsing-Yao Chen

IPC分类号： H01J29/50 ,  G09G1/04 ,  H01J29/46

CPC分类号： H01J29/503 ,  H01J2229/507

摘要： A color cathode ray tube (CRT) includes a multi-beam electron gun capable of operating in two or more modes for use as either a television receiver display or as a high resolution video monitor. The electron gun directs a plurality of electron beams onto the CRT's display screen, with the electron beams arranged in two or more groups. In one group of electron beams, the beam forming portion of the electron gun provides small diameter electron beams having reduced spot size on the CRT's display screen for high video image resolution when used as a monitor for graphics and/or character display. In another group of electron beams, the beam forming portion of the electron gun provides electron beams having a larger diameter and current for increased video image brightness when used as a television receiver. Each group of electron beams includes a plurality of horizontally aligned electron beams, with each beam providing one of the primary colors of red, green, or blue. The G2 control grid is divided into an upper G2 control grid for use in the television receiver mode of operation and a separate lower G2 control grid for use in the high resolution mode of operation, which grids may be independently positioned relative to the G1 screen grid and provided with selected, independent voltage values. By independently establishing the G1-G2 grid spacing and beam cutoff voltages for the two modes of operation, flexibility in electron gun performance and design is afforded.

摘要翻译： 彩色阴极射线管（CRT）包括能够以两种或多种模式操作的多光束电子枪，用作电视接收机显示器或用作高分辨率视频监视器。 电子枪将多个电子束引导到CRT的显示屏上，电子束以两个或更多个组排列。 在一组电子束中，当用作图形和/或字符显示器的监视器时，电子枪的光束形成部分提供具有减小的CRT显示屏上的斑点尺寸的小直径电子束，用于高视频图像分辨率。 在另一组电子束中，当用作电视接收机时，电子枪的波束形成部分提供具有较大直径和电流的电子束，以增加视频图像亮度。 每组电子束包括多个水平排列的电子束，每个光束提供红色，绿色或蓝色的原色之一。 G2控制网格分为用于电视接收机操作模式的上部G2控制网格和用于高分辨率操作模式的单独的下部G2控制网格，该网格可以相对于G1屏幕网格独立定位 并提供选定的独立电压值。 通过独立建立两种工作模式的G1-G2栅格间隔和光束截止电压，提供电子枪性能和设计的灵活性。

公开(公告)号：US5557344A

公开(公告)日：1996-09-17

申请号：US192819

申请日：1994-02-07

申请人： Hsing-Yao Chen

发明人： Hsing-Yao Chen

IPC分类号： H01J29/50 ,  H04N3/28

CPC分类号： H04N3/28 ,  H01J29/50 ,  H01J2229/507

摘要： A multi-beam electron gun for a color cathode ray tube (CRT) includes a plurality of vertically spaced, horizontal inline beams, where each inline array of beams provides the three primary colors of red, green and blue and adjacent inline beam arrays simultaneously trace adjacent horizontal scan lines on the color CRT's display screen. The beams in each horizontal inline array of beams are focused on a common spot on the display screen, with the three beams deflected across the screen in unison. Each inline array of beams is modulated in accordance with that portion of the video image which they form allowing adjacent, vertically spaced inline arrays to write different video image information on the screen in simultaneously forming adjacent portions of the color video image. In the beam-forming region of the electron gun, a charged grid includes an array of apertures including at least upper and lower horizontally aligned apertures for passing inline arrays of beams. Vertical spacing between each of the upper and lower apertures is given by S.sub.V and horizontal spacing between vertically aligned groups of apertures is given by S.sub.H, where:1/20 S.sub.H .ltoreq.S.sub.V .ltoreq.1/2 S.sub.H.Simultaneously providing color video image information on more than one horizontal scan line allows for a reduction in horizontal scan frequency and associated magnetic deflection yoke operating criteria, and also increases beam dwell time on the screen's phosphor elements allowing for a reduction in individual beam current without sacrificing video image brightness.

摘要翻译： 用于彩色阴极射线管（CRT）的多光束电子枪包括多个垂直间隔的水平内联光束，其中每个在线阵列的光束提供红色，绿色和蓝色的三原色以及相邻的在线光束阵列同时追踪 彩色CRT显示屏上的相邻水平扫描线。 每个水平的直列线阵列中的光束聚焦在显示屏上的公共点上，三个光束一致地偏转在屏幕上。 根据它们形成的每个视频图像的一部分，对其进行调制，允许相邻的垂直间隔的线阵列在屏幕上写入不同的视频图像信息，同时形成彩色视频图像的相邻部分。 在电子枪的波束形成区域中，带电栅格包括孔阵列，其包括至少上和下水平对准的孔，用于通过线内列阵列。 上部孔径和下部孔径之间的垂直间距由SV给出，垂直对齐的孔径组之间的水平间距由SH给出，其中：+ E，fra 1/20 + EE SH

公开(公告)号：US5483128A

公开(公告)日：1996-01-09

申请号：US301342

申请日：1994-09-06

申请人： Hsing-Yao Chen

发明人： Hsing-Yao Chen

IPC分类号： H01J31/20 ,  H01J29/48 ,  H01J29/50 ,  H01J29/58

CPC分类号： H01J29/503 ,  H01J2229/507

摘要： A color cathode ray tube (CRT) includes a multi-beam electron gun capable of operating in two or more modes for use as either a television receiver display or as a high resolution video monitor. The electron gun directs a plurality of electron beams onto the CRT's display screen, with the electron beams arranged in two or more groups. In one group of electron beams, the beam forming portion of the electron gun provides small diameter electron beams having reduced spot size on the CRT's display screen for high video image resolution when used as a monitor for graphics and/or character display. In another group of electron beams, the beam forming portion of the electron gun provides electron beams having a larger diameter and current for increased video image brightness when used as a television receiver. Each group of electron beams includes a plurality of horizontally aligned electron beams, with each beam providing one of the primary colors of red, green, or blue. More than one group of horizontally aligned electron beams may be simultaneously directed onto the CRT's display screen for either tracing out a common horizontal scan line for increased video image brightness or for simultaneously tracing out separate scan lines to allow for reduced horizontal scan frequency. A monochrome arrangement directs either a selectable single larger diameter electron beam or a single smaller diameter electron beam onto the CRT's display screen.

摘要翻译： 彩色阴极射线管（CRT）包括能够以两种或多种模式操作的多光束电子枪，用作电视接收机显示器或用作高分辨率视频监视器。 电子枪将多个电子束引导到CRT的显示屏上，电子束以两个或更多个组排列。 在一组电子束中，当用作图形和/或字符显示器的监视器时，电子枪的光束形成部分提供具有减小的CRT显示屏上的斑点尺寸的小直径电子束，用于高视频图像分辨率。 在另一组电子束中，当用作电视接收机时，电子枪的波束形成部分提供具有较大直径和电流的电子束，以增加视频图像亮度。 每组电子束包括多个水平排列的电子束，每个光束提供红色，绿色或蓝色的原色之一。 可以将多于一组的水平对准的电子束同时引导到CRT的显示屏上，以便跟踪公共水平扫描线以增加视频图像亮度，或者同时追踪单独的扫描线以允许减小的水平扫描频率。 单色布置将可选择的单个更大直径的电子束或单个更小直径的电子束引导到CRT的显示屏上。

公开(公告)号：US5394054A

公开(公告)日：1995-02-28

申请号：US92961

申请日：1993-07-19

申请人： Hsing-Yao Chen ,  Sen-Su Tsai

发明人： Hsing-Yao Chen ,  Sen-Su Tsai

IPC分类号： H01J29/48 ,  H01J29/51

CPC分类号： H01J29/485 ,  H01J29/484

摘要： An electron gun such as used in a cathode ray tube (CRT) includes an Einzel lens having charged G3, G4 and G5 grids for focusing an electron beam on the CRT's display screen. The G3, G4 and G5 grids are cylindrical and have the same inner diameter, with their respective longitudinal axes colinear and aligned with the electron beam axis. Where T is the thickness of a grid and L is the G3-G4 or G4-G5 spacing, or gap, shielding against stray electrostatic fields within the grids arising from stray electrons on either a grid-supporting glass bead or on the inner surface of the CRT's neck portion is provided by maintaining the relationship 3.0.gtoreq.T/L.gtoreq.0.75. Another embodiment employs thinner grids having a thickness t with outward turned end flanges, or folded edges, disposed about facing edges of adjacent grids having a thickness T, where T>t and the above-stated relationship of T/L is maintained. A common inner diameter of each grid facilitates alignment of the grids using a cylindrical mandrel disposed within and supporting the grids during electron gun assembly.

摘要翻译： 诸如在阴极射线管（CRT）中使用的电子枪包括具有充电的G3，G4和G5格栅的Einzel透镜，用于将电子束聚焦在CRT显示屏上。 G3，G4和G5格栅是圆柱形的并且具有相同的内径，它们各自的纵轴线与电子束轴线对准。 其中T是网格的厚度，L是G3-G4或G4-G5间距或间隙，屏蔽由网格支撑的玻璃珠或内表面上的杂散电子产生的网格内的杂散静电场 通过维持关系3.0> / = T / L> / = 0.75来提供CRT的颈部。 另一实施例采用具有厚度t的较薄的栅格，其具有向外转动的端部凸缘或折叠边缘，其设置在具有厚度T的相邻格栅的相对边缘周围，其中保持T> t和上述T / L的关系。 每个栅格的共同内径有助于使用在电子枪组装期间设置在其内并支撑栅格的圆柱形心轴对准栅格。