公开(公告)号：US06186090B1

公开(公告)日：2001-02-13

申请号：US09262515

申请日：1999-03-04

Applicant: Buddy R. Dotter, II ,  Joachim Doehler ,  Timothy Ellison ,  Masatsugo Izu ,  Herbert C. Ovshinsky

Inventor： Buddy R. Dotter, II ,  Joachim Doehler ,  Timothy Ellison ,  Masatsugo Izu ,  Herbert C. Ovshinsky

IPC: C23C1600

CPC classification number: H01J37/32192 ,  C23C14/562 ,  C23C16/0245 ,  C23C16/511 ,  C23C16/545

Abstract: Apparatus and method for the vacuum deposition of at least two different layers of thin film material onto a substrate by two different vacuum deposition processes. Also disclosed is a novel linear applicator for using microwave enhanced CVD to uniformly deposit a thin film of material over an elongated substrate.

Abstract translation: 通过两种不同的真空沉积工艺将至少两层薄膜材料真空沉积到衬底上的装置和方法。 还公开了一种用于使用微波增强CVD在细长衬底上均匀沉积材料薄膜的新型线性涂布器。

公开(公告)号：US5743970A

公开(公告)日：1998-04-28

申请号：US571338

申请日：1995-12-13

Applicant: Wolodymyr Czubatjy ,  Joachim Doehler

Inventor： Wolodymyr Czubatjy ,  Joachim Doehler

IPC: H01L31/042 ,  B29C45/14 ,  H01L31/048

CPC classification number: B29C45/14639 ,  H01L31/048 ,  B29L2031/3481 ,  Y02E10/50

Abstract: A photovoltaic module which includes at least one photovoltaic cell which is encapsulated in a non-reacted, injection molded polymeric material, thereby forming an environmental seal around the cell. The photovoltaic cell(s) are incorporated into a photovoltaic panel having front and back sides and edges forming a perimeter, and also includes means for external electrical connection to the photovoltaic cell. The non-reacted injection molded polymeric material encapsulating the panel may form useful structures, such as shingles, blocks, cases, or boxes.

Abstract translation: 一种光伏模块，其包括至少一个光伏电池，其被封装在未反应的注模聚合物材料中，从而在电池周围形成环境密封。 光伏电池被并入到具有前侧和后侧以及形成周边的边缘的光伏面板中，并且还包括用于外部电连接到光伏电池的装置。 封装面板的未反应的注塑聚合物材料可以形成有用的结构，例如瓦片，块，壳或盒。

公开(公告)号：US5223308A

公开(公告)日：1993-06-29

申请号：US780658

申请日：1991-10-18

Applicant: Joachim Doehler

Inventor： Joachim Doehler

IPC: C03B37/018 ,  C23C16/04 ,  C23C16/511

CPC classification number: C23C16/511 ,  C03B37/0183 ,  C23C16/045 ,  Y02P40/57

Abstract: A method for the low temperature, microwave enhanced, chemical vacuum deposition of thin film material onto a surface of a hollow member by creating a sub-atmospheric pressure condition adjacent the surface to be coated while maintaining the applicator through which microwave energy is introduced at substantially atmospheric pressure.

Abstract translation: 一种低温微波增强化学真空沉积薄膜材料到中空构件的表面上的方法，该方法是通过在保持基本上引入微波能量的施加器的同时产生邻近待涂覆表面的次大气压力条件 气压。

公开(公告)号：US5132652A

公开(公告)日：1992-07-21

申请号：US439057

申请日：1989-11-20

Applicant: Joachim Doehler ,  Buddie Dotter, II. ,  Jeffrey M. Kirsko ,  Lester R. Peedin

Inventor： Joachim Doehler ,  Buddie Dotter, II. ,  Jeffrey M. Kirsko ,  Lester R. Peedin

IPC: H01P1/08

CPC classification number: H01P1/08

Abstract: A window assembly for transmitting relatively high power microwave energy from a waveguide, held at substantially atmospheric pressure levels, into a microwave reaction chamber at sub-atmospheric pressure levels. The window assembly provides for the transmission of microwave energy to generate a glow discharge plasma without suffering from catastrophic failure as a result of excessive temperature and pressure conditions.

Abstract translation: 一种窗口组件，用于将基本上大气压力水平的波导的相对较高功率的微波能量传送到低于大气压力水平的微波反应室。 窗口组件提供微波能量的传输以产生辉光放电等离子体，而不会由于过度的温度和压力条件而遭受灾难性故障。

公开(公告)号：US4937094A

公开(公告)日：1990-06-26

申请号：US373300

申请日：1989-06-29

Applicant: Joachim Doehler ,  Stephen J. Hudgens ,  Stanford R. Ovshinsky ,  Buddie Dotter, II ,  Lester R. Peedin ,  Jeffrey M. Krisko ,  Annette Krisko

Inventor： Joachim Doehler ,  Stephen J. Hudgens ,  Stanford R. Ovshinsky ,  Buddie Dotter, II ,  Lester R. Peedin ,  Jeffrey M. Krisko ,  Annette Krisko

IPC: C23C16/44 ,  C23C16/452 ,  C23C16/455

CPC classification number: C23C16/4551 ,  C23C16/452 ,  C23C16/455 ,  C23C16/45514

Abstract: A method of forming a high flux of activated species, such as ions, of an energy transferring gas by employing a substantial pressure differential between a first conduit in which the energy transferring gas is introduced into a vacuumized enclosure and the background pressure which exits in said enclosure. In one embodiment, the flow rate of the energy transferring gas flowing through said first conduit, when taken in conjunction with said pressure differential, causes the high flux to activated species of the energy transferring gas to collide with a precursor deposition/etchant gas, remotely introduced into the enclosure through a second conduit, for forming deposition/etchant species therefrom. In an alternate embodiment, the pressure differential causes those activated species, themselves, to be either deposited upon or etched away from the surface of a remotely positioned substrate.

Abstract translation: 一种通过在其中将能量转移气体引入抽真空的外壳中的第一导管和在所述真空室中退出的背景压力之间的实质压差来形成能量转移气体的高通量活化物质如离子的方法， 外壳。 在一个实施例中，当与所述压力差相结合时，流过所述第一导管的能量转移气体的流速导致能量转移气体的活化物质与前体沉积/蚀刻剂气体的远距离碰撞 通过第二导管引入外壳，用于从其形成沉积/蚀刻剂物质。 在替代实施例中，压差使得这些活化物质本身沉积在或远离远离定位的基底的表面上蚀刻。

公开(公告)号：US4931756A

公开(公告)日：1990-06-05

申请号：US179617

申请日：1988-04-08

Applicant: Joachim Doehler ,  Buddie Dotter, II ,  Jeffrey M. Krisko ,  Lester R. Peedin

Inventor： Joachim Doehler ,  Buddie Dotter, II ,  Jeffrey M. Krisko ,  Lester R. Peedin

IPC: H05H1/46 ,  C23C14/22 ,  C23C16/50 ,  C23C16/511 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/31 ,  H01P1/08

CPC classification number: H01P1/08

Abstract: A window assembly for transmitting relatively high power microwave energy from a waveguide, held at substantially atmospheric pressure levels, into a microwave reaction chamber at sub-atmospheric pressure levels. The window assembly provides for the transmission of microwave energy to generate a glow discharge plasma without suffering from catastrophic failure as a result of excessive temperature and pressure conditions.

Abstract translation: 一种窗口组件，用于将基本上大气压力水平的波导的相对较高功率的微波能量传送到低于大气压力水平的微波反应室。 窗口组件提供微波能量的传输以产生辉光放电等离子体，而不会由于过度的温度和压力条件而遭受灾难性故障。

公开(公告)号：US4664951A

公开(公告)日：1987-05-12

申请号：US760856

申请日：1985-07-31

Applicant: Joachim Doehler

Inventor： Joachim Doehler

IPC: C23C16/54 ,  H01L21/677 ,  C23C16/00

CPC classification number: C23C16/545 ,  H01L21/67787

Abstract: A method of providing for corrective laterally movement of a web of substrate material which is adapted to continuously move in a longitudinal direction through a vapor deposition processor without substantially buckling or tensioning either of the longitudinal edges thereof. The lateral displacement is accomplished without buckling or tensioning the edges of the web despite the fact that the web is magnetically urged into a generally planar path of travel as it moves through the deposition regions of the processor.

Abstract translation: 一种提供衬底材料幅材的校正横向运动的方法，其适于在纵向方向上连续移动通过气相沉积处理器，而基本上不弯曲或张紧其纵向边缘。 横向位移的实现是在没有弯曲或拉紧幅材的边缘的情况下，尽管当幅材移动通过处理器的沉积区域时，幅材被磁力推动到大致平面的行进路径中。

公开(公告)号：US4479455A

公开(公告)日：1984-10-30

申请号：US475289

申请日：1983-03-14

Applicant: Joachim Doehler ,  Kevin R. Hoffman ,  Timothy D. Laarman ,  Gary M. DiDio ,  Therese McDonough

Inventor： Joachim Doehler ,  Kevin R. Hoffman ,  Timothy D. Laarman ,  Gary M. DiDio ,  Therese McDonough

IPC: H01L31/04 ,  C23C16/44 ,  C23C16/455 ,  C23C16/50 ,  C23C16/54 ,  H01L21/205 ,  C23C13/10

CPC classification number: C23C16/545 ,  C23C16/455 ,  C23C16/45578 ,  C23C16/50

Abstract: A process gas introduction and channeling system for use with apparatus adapted to produce photovoltaic devices by depositing semiconductor layers onto continuously moving substrate material. The deposition apparatus preferably includes at least one deposition chamber having (1) a region in which process gases are decomposed and (2) a manifold from which process gases are introduced to flow through the downstream decomposition region. In the preferred embodiment, as the process gases flow through the decomposition region, they are disassociated and recombined under the influence of an electromagnetic field. The species and combinations of process gases thus formed are deposited onto the substrate material. The process gas introduction and channeling system described herein, is adapted to direct the process gases introduced into each of the at least one deposition chamber to pass through the decomposition region thereof in a direction substantially parallel to the direction of travel of the substrate material, whereby substantially uniform semiconductor layers are deposited atop the entire surface of the substrate material.

Abstract translation: 一种用于与通过将半导体层沉积到连续移动的衬底材料上来生产光伏器件的设备一起使用的工艺气体引入和沟道系统。 沉积设备优选地包括至少一个沉积室，其具有（1）处理气体被分解的区域和（2）从其引入工艺气体以流过下游分解区域的歧管。 在优选实施例中，当工艺气体流过分解区域时，它们在电磁场的影响下被解离并重组。 如此形成的工艺气体的种类和组合被沉积到基底材料上。 本文所述的工艺气体引入和引导系统适于引导引入到至少一个沉积室中的每一个的工艺气体沿着基本上平行于衬底材料的行进方向的方向通过其分解区域，由此 在衬底材料的整个表面上沉积基本均匀的半导体层。

公开(公告)号：US5374313A

公开(公告)日：1994-12-20

申请号：US47975

申请日：1993-04-14

Applicant: Joachim Doehler

Inventor： Joachim Doehler

IPC: C23C16/54 ,  H01L21/205 ,  H01L31/04 ,  C23C16/50

CPC classification number: C23C16/545

Abstract: Disclosed herein is an improved gas gate for interconnecting regions of differing gaseous composition and/or pressure. The gas gate includes a narrow, elongated passageway through which substrate material is adapted to move between said regions and inlet means for introducing a flow of non-contaminating sweep gas into a central portion of said passageway. The gas gate is characterized in that the height of the passageway and the flow rate of the sweep gas therethrough provides for transonic flow of the sweep gas between the inlet means and at least one of the two interconnected regions, thereby effectively isolating one region, characterized by one composition and pressure, from another region, having a differing composition and/or pressure, by decreasing the mean-free-path length between collisions of diffusing species within the transonic flow region. The gas gate preferably includes a manifold at the juncture point where the gas inlet means and the passageway interconnect.

Abstract translation: 本文公开了一种用于互连不同气体组成和/或压力的区域的改进气门。 气门包括窄的细长通道，衬底材料通过该通道适于在所述区域和入口装置之间移动，用于将无污染的吹扫气体流引入所述通道的中心部分。 气门的特征在于，通道的高度和吹扫气体的流速提供了吹扫气体在入口装置和两个互连区域中的至少一个之间的跨音速流动，从而有效地隔离了一个区域，其特征在于 通过减少跨音速流动区域内的扩散物质的碰撞之间的平均自由程长度，通过一个组成和压力来自具有不同组成和/或压力的另一个区域。 气门优选地在气体入口装置和通道互连的接合处包括歧管。

公开(公告)号：US5126635A

公开(公告)日：1992-06-30

申请号：US679362

申请日：1991-04-02

Applicant: Joachim Doehler ,  Buddie Dotter, II ,  Jeffrey M. Krisko ,  Lester R. Peedin

Inventor： Joachim Doehler ,  Buddie Dotter, II ,  Jeffrey M. Krisko ,  Lester R. Peedin

IPC: H01P1/08

CPC classification number: H01P1/08

Abstract: A window assembly for transmitting relatively high power microwave energy from a waveguide, held at substantially atmospheric pressure levels, into a microwave reaction chamber at sub-atmospheric pressure levels. The window assembly provides for the transmission of microwave energy to generate a glow discharge plasma without suffering from catastrophic failure as a result of excessive temperature and pressure conditions.

Abstract translation: 一种窗口组件，用于将基本上大气压力水平的波导的相对较高功率的微波能量传送到低于大气压力水平的微波反应室。 窗口组件提供微波能量的传输以产生辉光放电等离子体，而不会由于过度的温度和压力条件而遭受灾难性故障。