Abstract:
A dielectric multilayer structure of a microelectronic device, in which a leakage current characteristic and a dielectric constant are improved, is provided in an embodiment. The dielectric multilayer structure includes a lower dielectric layer, which is made of amorphous silicate (M1-xSixOy) or amorphous silicate nitride (M1-xSixOyNz), and an upper dielectric layer which is formed on top of the lower dielectric layer and which is made of amorphous metal oxide (M'Oy) or amorphous metal oxynitride (M'OyNz).
Abstract:
A semiconductor package using a chip-embedded interposer substrate is provided. The chip-embedded interposer substrate includes a chip including a plurality of chip pads; a substrate having the chip mounted thereon and including a plurality of redistribution pads for redistributing the chip pads; bonding wires for connecting the chip pads to the redistribution pads; a protective layer having via holes for exposing the redistribution pads while burying the chip and the substrate; and vias connected to the redistribution pads through the via holes. The semiconductor package including chips of various sizes is fabricated using the chip-embedded interposer substrate.
Abstract:
A pillar-type field effect transistor having low leakage current is provided. The pillar-type field effect transistor includes a semiconductor pillar, a gate insulating layer formed on a portion of a surface of the semiconductor pillar, a gate electrode formed on the gate insulating layer, and source/drain regions formed on portions of the semiconductor pillar where the gate electrode is not formed, in which the gate electrode includes a first gate electrode, a second gate electrode, and an inter-gate insulating layer, in which the first gate electrode has a work function higher than that of the second gate electrode, in which the inter-gate insulating layer is formed between the first gate electrode and the second gate electrode, and in which the first gate electrode and the second gate electrode are electrically connected by a contact or a metal interconnection line. A portion of the second gate electrode having the work function lower than that of the first gate electrode is overlapped by the drain region. Accordingly, the gate electrode of the pillar-type FET is formed using a material having a high work function, so that the threshold voltage can be increased and the work function of the portion of the gate electrode overlapped by the drain region can be decreased. Therefore, gate induced drain leakage is reduced, so that off-state leakage current can likewise be greatly reduced.
Abstract:
A data encoding/decoding method in a multiple antenna communication system is provided. In the multiple antenna communication system, a transmitting end includes an encoder for performing Space Time Block Code (STBC) encoding on certain symbols among Transmit (Tx) symbols, a multiplexer for performing spatial multiplexing on the rest of symbols among the Tx symbols, and a transmitter for transmitting the STBC encoded symbols and the spatial-multiplexed symbols through a plurality of antennas.