摘要:
The present invention provides a high frequency device in which stabilization of a DC bias voltage applied to an electrostatic drive type vibrator is attempted and a power supply device which can supply a stable DC bias voltage.Also, the present invention provides a communication apparatus including a filter by means of aforesaid high frequency device.The high frequency device of the present invention has a high frequency signal device which includes an electrostatic type vibrator operated by being applied with a DC bias voltage and is formed by being added with a circuit having a function of stabilizing the DC bias voltage between a pad supplying the DC bias voltage and the vibrator.The power supply device is a power supply device serving for a drive of a high frequency vibration device and is formed by being added with a circuit having a function of stabilizing a DC bias voltage.The communication apparatus of the present invention is formed by using a filter according to aforesaid high frequency device as a filter.
摘要:
The present invention provides a microresonator including a plurality of resonator elements arranged on a plurality of columns on a substrate. The resonator elements each have an input electrode, an output electrode, and a diaphragm that extends in a certain direction, and each pass a signal of a certain frequency. The plurality of resonator elements includes a plurality of first resonator elements arranged on first columns that are located on every other column of the plurality of columns, and having a first phase, and a plurality of second resonator elements arranged on second columns that are located on every other column, other than the first columns, of the plurality of columns, and having a second phase that is an opposite phase of the first phase.
摘要:
A microresonator includes a beam-type resonator element in which a beam that is an oscillating portion of the resonator element has a high-resistance portion or an insulating portion.
摘要:
The present invention provides a semiconductor composite device including a semiconductor device formed on or in a substrate, an insulating film formed on the substrate so as to cover the semiconductor device, a micro electro mechanical portion formed on the insulating film, and a wiring layer connected to the semiconductor device and the micro electro mechanical portion.
摘要:
The present invention provides a microresonator including a plurality of resonator elements arranged on a plurality of columns on a substrate. The resonator elements each have an input electrode, an output electrode, and a diaphragm that extends in a certain direction, and each pass a signal of a certain frequency. The plurality of resonator elements includes a plurality of first resonator elements arranged on first columns that are located on every other column of the plurality of columns, and having a first phase, and a plurality of second resonator elements arranged on second columns that are located on every other column, other than the first columns, of the plurality of columns, and having a second phase that is an opposite phase of the first phase.
摘要:
A small high frequency device that is able to inhibit generation of an eddy current and a parasitic capacity and shows superior high frequency characteristics is provided. The high frequency device includes: a substrate having a depression; a dielectric layer over the substrate; and a plurality of electronic devices which are provided in the dielectric layer or on the dielectric layer, and at least one of which is opposed to the depression.
摘要:
A filter device configured with a plurality of micro-resonators and having a wide specific bandwidth. The filter device is configured as having a plurality of beam-structured, micro-resonators (15), (16), (17), (18) electrically connected in a lattice-forming manner between two input terminals (11), (12) for balanced input and two output terminals (13), (14) for balanced output, each of the plurality of micro-resonators (15), (16), (17), (18) being composed of a resonator group including a plurality of resonators differed in resonance frequency.
摘要:
An electro mechanical device including: a main body of an electro mechanical device having a lower electrode and a movable member; an overcoat film sealing the main body of the electro mechanical device by maintaining a space, wherein a support post is provided between the overcoat film and the movable member.
摘要:
A functional device in which the functional portion is not influenced by events in film forming, and thereby the reliability of the device can be improved is provided. The functional device includes a substrate, one or a plurality of functional portions formed on a surface of the substrate, a sealing layer that forms a space around the functional portion, and has one or a plurality of apertures sealed with a filling material, and one or a plurality of walls formed between the functional portion and the aperture without separating the space.
摘要:
A filter device configured with a plurality of micro-resonators and having a wide specific bandwidth. The filter device is configured as having a plurality of beam-structured, micro-resonators (15),(16),(17),(18) electrically connected in a lattice-forming manner between two input terminals (11),(12) for balanced input and two output terminals (13),(14) for balanced output, each of the plurality of micro-resonators (15),(16),(17),(18) being composed of a resonator group including a plurality of resonators differed in resonance frequency.