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31 条记录 (耗时 0.026 秒)

    Micromachine and method of producing the same
    1.
    发明申请
    Micromachine and method of producing the same 失效
    微机械及其制造方法

    公开(公告)号：US20060049895A1

    公开(公告)日：2006-03-09

    申请号：US10537132

    申请日：2003-11-25

    申请人： Masahiro Tada ,  Takashi Kinoshita ,  Shun Mitarai ,  Yasuyuki Ito

    发明人： Masahiro Tada ,  Takashi Kinoshita ,  Shun Mitarai ,  Yasuyuki Ito

    IPC分类号： H03H9/00

    CPC分类号： H03H3/0072 ,  H03H9/2405 ,  H03H2009/02511

    摘要： Disclosed is a micromachine as a high-frequency filter which includes a high Q value and is suitable for higher frequency bands. The micromachine (1) includes an output electrode (7) formed on a substrate (5), an interlayer insulating film (9) which covers the substrate (5) and includes an opening (9a) whose bottom is the output electrode (7), and a beltlike resonator electrode (11) so formed on the interlayer insulating film (9) as to traverse above the space (A) in the opening (9a), with the resonator electrode (11) being concave toward the opening (9a) along the side wall of the opening (9a).

    摘要翻译： 公开了作为高频滤波器的微机械，其包括高Q值并且适用于较高频带。 微机械（1）包括形成在基板（5）上的输出电极（7），覆盖基板（5）的层间绝缘膜（9），其中底部是输出电极（7） ）和形成在层间绝缘膜（9）上的带状谐振器电极（11），以横越开口（9a）中的空间（A）上方，谐振器电极（11）朝向开口凹入 9a）沿着开口（9a）的侧壁。

    Process for fabricating micromachine
    2.
    发明授权
    Process for fabricating micromachine 有权
    微机械制造工艺

    公开(公告)号：US08268660B2

    公开(公告)日：2012-09-18

    申请号：US10551271

    申请日：2004-04-02

    申请人： Masahiro Tada ,  Takashi Kinoshita ,  Masahiro Tanaka ,  Masanari Yamaguchi ,  Shun Mitarai ,  Koji Naniwada

    发明人： Masahiro Tada ,  Takashi Kinoshita ,  Masahiro Tanaka ,  Masanari Yamaguchi ,  Shun Mitarai ,  Koji Naniwada

    IPC分类号： H01L21/00

    CPC分类号： H03H3/0072 ,  B81B7/0012

    摘要： A method for manufacturing a micromachine is provided which can remove a sacrifice layer and can perform sealing without using a specific packaging technique. In a method for manufacturing a micromachine (1) including an oscillator (4), a step of forming a sacrifice layer around a movable portion of the oscillator (4); a step of covering a sacrifice layer with an overcoat film (8), followed by the formation of a penetrating hole (10) reaching the sacrifice layer in the overcoat layer (8); a step of performing sacrifice-layer etching for removing the sacrifice layer using the penetrating hole (10) in order to form a space around the movable portion; and a step of performing a film-formation treatment at a reduced pressure following the sacrifice-layer etching so as to seal the penetrating hole (10).

    摘要翻译： 提供了一种制造微机械的方法，其可以去除牺牲层并且可以在不使用特定包装技术的情况下进行密封。 在制造包括振荡器（4）的显微机械（1）的方法中，在振荡器（4）的可移动部分周围形成牺牲层的步骤; 用覆盖膜（8）覆盖牺牲层的步骤，然后形成到达覆盖层（8）中的牺牲层的穿透孔（10）; 使用所述贯通孔（10）进行牺牲层蚀刻去除所述牺牲层以在所述可动部分周围形成空间的步骤; 以及在牺牲层蚀刻之后在减压下进行成膜处理以密封穿透孔（10）的步骤。

    Functional device, semiconductor device, and electronic device
    4.
    发明授权
    Functional device, semiconductor device, and electronic device 有权
    功能器件，半导体器件和电子器件

    公开(公告)号：US07701021B2

    公开(公告)日：2010-04-20

    申请号：US11849584

    申请日：2007-09-04

    申请人： Shun Mitarai ,  Masahiro Tada

    发明人： Shun Mitarai ,  Masahiro Tada

    IPC分类号： H01L23/28

    CPC分类号： B81B7/0038 ,  B81B2201/0271 ,  B81C2203/0145

    摘要： A functional device in which the functional portion is not influenced by events in film forming, and thereby the reliability of the device can be improved is provided. The functional device includes a substrate, one or a plurality of functional portions formed on a surface of the substrate, a sealing layer that forms a space around the functional portion, and has one or a plurality of apertures sealed with a filling material, and one or a plurality of walls formed between the functional portion and the aperture without separating the space.

    摘要翻译： 功能部件不受膜成型中的事件的影响，能够提高装置的可靠性。 所述功能元件包括基板，形成在所述基板的表面上的一个或多个功能部，形成在所述功能部周围的空间的密封层，并且具有用填充材料密封的一个或多个孔，以及一个 或形成在功能部分和孔之间的多个壁而不分离空间。

    High Frequency Device, Power Supply Device and Communication Apparatus
    7.
    发明申请
    High Frequency Device, Power Supply Device and Communication Apparatus 有权
    高频设备，电源设备和通信设备

    公开(公告)号：US20080272749A1

    公开(公告)日：2008-11-06

    申请号：US11570642

    申请日：2005-06-07

    申请人： Masahiro Tanaka ,  Shun Mitarai ,  Masahiro Tada ,  Koji Naniwada

    发明人： Masahiro Tanaka ,  Shun Mitarai ,  Masahiro Tada ,  Koji Naniwada

    IPC分类号： G05F3/08

    CPC分类号： H03H9/2463 ,  H03H3/0073 ,  H03H3/0075 ,  H03H9/2426 ,  H03H9/505 ,  H03H9/525

    摘要： The present invention provides a high frequency device in which stabilization of a DC bias voltage applied to an electrostatic drive type vibrator is attempted and a power supply device which can supply a stable DC bias voltage.Also, the present invention provides a communication apparatus including a filter by means of aforesaid high frequency device.The high frequency device of the present invention has a high frequency signal device which includes an electrostatic type vibrator operated by being applied with a DC bias voltage and is formed by being added with a circuit having a function of stabilizing the DC bias voltage between a pad supplying the DC bias voltage and the vibrator.The power supply device is a power supply device serving for a drive of a high frequency vibration device and is formed by being added with a circuit having a function of stabilizing a DC bias voltage.The communication apparatus of the present invention is formed by using a filter according to aforesaid high frequency device as a filter.

    摘要翻译： 本发明提供了一种高频器件，其中尝试施加到静电驱动型振动器的DC偏置电压的稳定化，以及可以提供稳定的DC偏置电压的电源装置。 此外，本发明提供一种通过上述高频装置包括滤波器的通信装置。 本发明的高频装置具有高频信号装置，该高频信号装置包括通过施加直流偏置电压而工作的静电型振动器，并且通过添加具有使垫片之间的直流偏置电压稳定的功能的电路而形成 提供直流偏置电压和振动器。 电源装置是用于高频振动装置的驱动的电源装置，并且通过添加具有稳定DC偏置电压的功能的电路而形成。 本发明的通信装置通过使用根据上述高频装置的滤波器作为滤波器来形成。

    Microresonator, manufacturing method, and electronic apparatus
    8.
    发明授权
    Microresonator, manufacturing method, and electronic apparatus 有权
    微谐振器，制造方法和电子设备

    公开(公告)号：US07286027B2

    公开(公告)日：2007-10-23

    申请号：US11264344

    申请日：2005-10-04

    申请人： Masahiro Tada ,  Masahiro Tanaka ,  Shun Mitarai ,  Koji Naniwada

    发明人： Masahiro Tada ,  Masahiro Tanaka ,  Shun Mitarai ,  Koji Naniwada

    IPC分类号： H03H9/24 ,  H03H9/46 ,  H03H3/007

    CPC分类号： H03H3/0072 ,  H03H9/02259 ,  H03H9/02433 ,  H03H9/2463 ,  H03H9/462 ,  H03H9/525 ,  H03H2009/02511

    摘要： The present invention provides a microresonator including a plurality of resonator elements arranged on a plurality of columns on a substrate. The resonator elements each have an input electrode, an output electrode, and a diaphragm that extends in a certain direction, and each pass a signal of a certain frequency. The plurality of resonator elements includes a plurality of first resonator elements arranged on first columns that are located on every other column of the plurality of columns, and having a first phase, and a plurality of second resonator elements arranged on second columns that are located on every other column, other than the first columns, of the plurality of columns, and having a second phase that is an opposite phase of the first phase.

    摘要翻译： 本发明提供一种微谐振器，其包括布置在基板上的多个列上的多个谐振元件。 谐振器元件各自具有沿一定方向延伸的输入电极，输出电极和隔膜，并且每个通过特定频率的信号。 多个谐振器元件包括布置在第一列上的多个第一谐振器元件，该第一谐振器元件位于多个列的每隔一列上并且具有第一相位，以及布置在位于第二列上的第二列上的多个第二谐振元件 多个列中除了第一列之外的每隔一列，并且具有与第一相位相反的相位的第二相位。

    Micromachine and method of producing the same
    9.
    发明授权
    Micromachine and method of producing the same 失效
    微机械及其制造方法

    公开(公告)号：US07212081B2

    公开(公告)日：2007-05-01

    申请号：US10537132

    申请日：2003-11-25

    申请人： Masahiro Tada ,  Takashi Kinoshita ,  Shun Mitarai ,  Yasuyuki Ito

    发明人： Masahiro Tada ,  Takashi Kinoshita ,  Shun Mitarai ,  Yasuyuki Ito

    IPC分类号： H03H9/24 ,  B81B3/00 ,  B81C1/00

    CPC分类号： H03H3/0072 ,  H03H9/2405 ,  H03H2009/02511

    摘要： Disclosed is a micromachine as a high-frequency filter which includes a high Q value and is suitable for higher frequency bands. The micromachine (1) includes an output electrode (7) formed on a substrate (5), an interlayer insulating film (9) which covers the substrate (5) and includes an opening (9a) whose bottom is the output electrode (7), and a beltlike resonator electrode (11) so formed on the interlayer insulating film (9) as to traverse above the space (A) in the opening (9a), with the resonator electrode (11) being concave toward the opening (9a) along the side wall of the opening (9a).

    摘要翻译： 公开了作为高频滤波器的微机械，其包括高Q值并且适用于较高频带。 微机械（1）包括形成在基板（5）上的输出电极（7），覆盖基板（5）的层间绝缘膜（9），其中底部是输出电极（7） ）和形成在层间绝缘膜（9）上的带状谐振器电极（11），以横越开口（9a）中的空间（A）上方，谐振器电极（11）朝向开口凹入 9a）沿着开口（9a）的侧壁。