摘要:
Provided is a method wherein a multi-anode detector is used for the purpose of detecting scattered light from a wafer, data obtained from the detector (multi-anode) for detecting defects is used, the shape of a beam radiated to the wafer, a rotational shift between the radius direction and the beam long side, and the like are calculated, and the optical axis of the irradiation beam is adjusted. Furthermore, the method is provided with a technique which feeds back the correction quantities for rotation and amplitude to inspection signal data, on the basis of the correction data, and corrects inspection data. Since fine correction with the adjustment of an optics system and signal processing is made possible, positional accuracy of defect inspection and accuracy of defect level (defect size) are improved.
摘要:
A receiver allows a user to select received data before de-spreading or symbol data after de-spreading according to various factors when data is simultaneously received via multiple channels and to store the selected data, reduces the capacity of the storage memory, and enhances the degree of freedom of the timing of de-spreading processing. Storing the received data in the storage memory not in the form of symbol data produced after de-spreading but in the form of received data before de-spreading. This reduces the capacity of the storage memory and enhances the degree of the freedom of the timing of the de-spreading process.
摘要:
One code is generated by combining (including addition) 2 or more codes, correlation detection method which detects the correlation by multiplying such a generated code by the reception data. In communication system based on W-CDMA method, first spreading code (a·Cp) obtained by multiplying primary synchronization code with a predetermined coefficient and second spreading code (a·Cs) obtained by multiplying secondary synchronization code with a predetermined coefficient are added. Then, the third spreading code (a·Cp+a·Cs) obtained from such an addition is multiplied by the reception data, and correlation value is obtained after integrating the multiplication results. Thus, it is determined whether the reception data has been subjected to STTD diversity.
摘要:
The pilot signal reception method of the present invention irregularly receives pilot symbols. That is, the pilot signal reception method performs irregular reception processing such as randomizing reception timings or changing reception timings according to reception situations as appropriate to reduce influences of fading. Randomization of reception timings is implemented by generating random timings using a random timing generation circuit.
摘要:
A reader/writer (RW) requires identification information pieces of respective plural IC cards (A, B, C). The plural IC cards return the respective identification information pieces in response to the requirement by the reader/writer. Logical addresses are assigned to some IC cards among the plural IC cards respectively to cause the reader/writer to select them in response to the return of the identification information pieces by the plural IC cards. The IC cards selected by the reader/writer are controlled. The reader/writer cancels the assignment of the logical address to one of the selected IC cards. The logical address, the assignment of which has been canceled by the reader/writer, is assigned to an IC card among the plural IC cards to which any logical address has not been assigned yet. The IC card to which the logical address has just been assigned is controlled.
摘要:
The pattern line width of a coil is partially widened in a predetermined dimension and wiring patterns of a coil on the surface side and a coil on the rear side are arranged so as not to be in overlapped positions. Consequently, a direct current resistance of the coil can be reduced and an adverse influence by a self resonance of the coil on a communication can be reduced.
摘要:
An amplitude detecting circuit (1) includes a simple digital filter (2) having a structure corresponding to a part where the energy is concentrated in the full impulse response of a signal processing digital filter (3). Concretely, for example, the amplitude detecting circuit (1) (simple digital filter (2)) includes only four central taps having coefficients of large absolute values and considerably affecting on the output amplitude among sixteen taps of the signal processing digital filter (3). By the amplitude detecting circuit (1), the amplitude of an output signal of the signal processing digital filter (3) can approximately be detected.
摘要:
A cell signal processing circuit is provided which is capable of precisely extracting a timing signal and a cell synchronizing signal. The cell signal processing circuit is principally composed of a signal adder circuit for adding a dummy signal comprising bit signals in a direct current balanced state to an end portion of respective inputted time series cell signals, and a separator circuit for separating and outputting the time series cell signals. Each dummy signal being composed of the same number of bits "0" and "1" is added to input signals in the form of time series cells such that signal cells are exchanged at a time of a bit "0" in the dummy signal. An optical switch apparatus using the cell signal processing circuit as an optical switch array is also provided which includes a photoelectric converter for converting the time series optical cell signal to an electric signal, a clock recovery circuit for extracting a clock signal from an output from the photoelectric converter, a cell synchronization circuit for extracting a cell synchronizing signal from the output from the photoelectric converter, and a decision circuit for deciding between signals in the output from the photoelectric converter by the use of the clock signal. The optical switch apparatus of the invention is simple and is not influenced by data loss and jitter.
摘要:
An electron beam lithography system having a contour resolving circuit for resolving original pattern data which is transferred from a host computer into contour portion pattern data and inner portion pattern data in accordance with the designated dimension, for adding flag data to enable the contour portion pattern data and the inner portion pattern data to be discriminated to the resolved pattern data, and for outputting the resolved pattern data with the flag data. By adding the flag data, the contour portion pattern data and inner portion pattern data can be easily discriminated. The operation to change the electron beam irradiation dose in accordance with the contour portion pattern and inner portion pattern can be fairly easily executed. A pattern can be drawn at a high accuracy while preventing a deformation of the drawn figure due to the proximity effect. A data processing amount in the computer can be reduced. A data transfer amount from the host computer can be also reduced. Thus, an electron beam lithography system having a high throughput can be realized.
摘要:
A graphic display apparatus for generating a vector comprises registers for storing a value R of a vector discrimination, a positive increment P and a negative increment N, and flip-flops for storing magnitude information of .DELTA.X, .DELTA.Y, and .DELTA.X and .DELTA.Y. An address counter of a refresh memory is counted up or down in accordance with the contents of those flip-flops. A control circuit for updating the value R of the vector discrimination is also provided, so that the vector can be generated at a high speed. The registers and the flip-flops are constructed in two stages so that data for generating the next vector can be prepared while the current vector is generated.