High-throughput direct-write electron-beam exposure system and method
    21.
    发明授权
    High-throughput direct-write electron-beam exposure system and method 失效
    高通量直写电子束曝光系统及方法

    公开(公告)号:US5969362A

    公开(公告)日:1999-10-19

    申请号:US30653

    申请日:1998-02-05

    摘要: An electron-beam exposure system includes: (1) a stage for supporting a wafer, (2) a planar electron-beam source that emits multiple electron beamlets toward the stage, (3) an electric-field generator for forming an electric field to accelerate the electrons in the electron beamlets, (4) a magnetic-field generator for forming a magnetic flux in the space between the planar electron-beam source and the wafer stage. The magnetic filed generator is structured and arranged such that the magnetic flux formed thereby is (1) substantially evenly distributed within a plane perpendicular to the optical axis, and (2) of increasing flux density, ranging from a first density in the vicinity of the planar electron-beam source, to a second density (greater than the first density) in the vicinity of the wafer stage. The electrons in the electron beamlets follow the lines of magnetic flux such that the beamlet width is decreased at the stage compared to the beamlet width at the planar electron-beam source. The electron beamlets are preferably individually switchable, on and off, by word lines and bit lines on the planar electron-beam source. To form a desired pattern on a wafer surface, the stage is moved through a small area, while the electron beamlets are modulated as needed to write the desired pattern.

    摘要翻译: 电子束曝光系统包括:(1)用于支撑晶片的台,(2)朝向平台发射多个电子束的平面电子束源,(3)用于形成电场的电场发生器 加速电子束中的电子,(4)用于在平面电子束源和晶片台之间的空间中形成磁通量的磁场发生器。 磁场发生器的结构和布置使得由此形成的磁通量是(1)在垂直于光轴的平面内基本上均匀分布,以及(2)增加磁通密度,范围从第 平面电子束源在晶片台附近达到第二密度(大于第一密度)。 电子束中的电子遵循磁通线,使得在与平面电子束源处的子束宽度相比较的阶段,子束宽度减小。 电子子束优选地可以通过平面电子束源上的字线和位线单独地切换,打开和关闭。 为了在晶片表面上形成期望的图案,将载物台移动通过小的区域,同时根据需要对电子束进行调制以写入期望的图案。

    Magnetic resonance imaging apparatus with temperature measurement
function
    22.
    发明授权
    Magnetic resonance imaging apparatus with temperature measurement function 失效
    具有温度测量功能的磁共振成像装置

    公开(公告)号:US5916161A

    公开(公告)日:1999-06-29

    申请号:US713430

    申请日:1996-09-13

    IPC分类号: G01R33/48 A61B5/00 A61B5/055

    CPC分类号: A61B5/015 A61B5/055

    摘要: A magnetic resonance imaging apparatus capable of measuring a temperature increase due to an application of RF magnetic fields for data acquisition purpose, and notifying an information on the measured temperature increase regularly to an operator, so as to secure the safety of a body to be examined. In this magnetic resonance imaging apparatus, the image data acquisition operation is controlled to acquire a phase information associated with a temperature change in an interior of the body to be examined, by displacing either an observation start timing or a radio frequency magnetic field application timing for a prescribed magnetic resonance signal in the magnetic resonance signal sequence from a normal timing for acquiring image data.

    摘要翻译: 一种磁共振成像装置,其能够测量由于应用RF磁场而导致的温度升高以用于数据采集目的,并且向操作者通知关于所测量的温度升高的信息,以确保要检查的身体的安全性 。 在该磁共振成像装置中,控制图像数据获取操作,通过将观察开始定时或射频磁场施加定时移位,来取得与被检体内部的温度变化相关的相位信息, 从用于获取图像数据的正常定时的磁共振信号序列中规定的磁共振信号。

    Integrated semiconductor laser apparatus
    23.
    发明授权
    Integrated semiconductor laser apparatus 失效
    集成半导体激光装置

    公开(公告)号:US5787105A

    公开(公告)日:1998-07-28

    申请号:US589125

    申请日:1996-01-22

    摘要: An integrated semiconductor laser apparatus is constructed in such an arrangement that a core layer is located in the proximity of an active layer so as to be in an evanescent-field area of light propagating in the active layer and that a carrier concentration of a second cladding layer is higher than that of a first cladding layer. Thus, most evanescent waves of light propagating in the core layer propagate in the first cladding layer of the low carrier concentration. Since the rate of evanescent waves absorbed by carriers is very low, the integrated semiconductor laser apparatus can propagate the light with small losses.

    摘要翻译: 以这样的结构构成集成半导体激光装置,其中芯层位于有源层附近,以便处于在有源层中传播的光的消逝场区域中,并且第二包层的载流子浓度 层高于第一覆层的层。 因此,在芯层中传播的大部分消逝的光在低载流子浓度的第一包层中传播。 由于载流子吸收的ev逝波速度非常低,所以集成半导体激光装置可以以较小的损耗传播光。

    Magnetic resonance imaging system
    24.
    发明授权
    Magnetic resonance imaging system 失效
    磁共振成像系统

    公开(公告)号:US5208534A

    公开(公告)日:1993-05-04

    申请号:US564328

    申请日:1990-08-08

    摘要: A magnetic resonance imaging system includes a magnetic field applying section for applying a static field, gradient field pulses, and an RF field to an object to be examined, a signal detecting section, including a homogeneous coil and a plurality of surface coils arranged to surround a desired region of the object, for detecting magnetic resonance signals from the object through the homogeneous coil and the surface coils, and an image data processing section for obtaining an image of the desired region by synthesizing image data based on the magnetic resonance signals respectively detected by the surface coils upon weighting/adding processing. The system uses differential surface coils as the surface coils. A magnetic resonance signal is detected through the homogeneous coil within the same time interval in which magnetic resonance signals are detected through the surface coils. Weighting functions for weighting/adding processing of image data are determined on the basis of these magnetic resonance signals.

    Magnetic field generating system for magnetic resonance imaging system
    25.
    发明授权
    Magnetic field generating system for magnetic resonance imaging system 失效
    用于磁共振成像系统的磁场产生系统

    公开(公告)号:US4905316A

    公开(公告)日:1990-02-27

    申请号:US136337

    申请日:1987-12-22

    申请人: Kazuya Okamoto

    发明人: Kazuya Okamoto

    摘要: A magnetic field generating system for use in a magnetic resonance imaging system to apply a static magnetic field and additionally a gradient field and a high frequency field to a body under examination in order to excite a magnetic resonance and to collect magnetic resonance data about the magnetic resonance. The field generating system comprises a superconducting including magnet a superconducting coil for generating the static magnetic field, a gradient coil for generating the gradient field and a high frequency coil for generating the high frequency field. At least part of the superconducting magnet is made of a metal member, and at least part of the metal member is interposed between the superconducting coil the gradient coil provided with non-conductive sections for impeding an eddy current.

    摘要翻译: 一种用于磁共振成像系统的磁场产生系统,用于向被检体内施加静磁场和附加梯度场和高频场,以便激发磁共振并收集有关磁共振的磁共振数据 谐振。 场产生系统包括超导,包括磁体,用于产生静磁场的超导线圈,用于产生梯度场的梯度线圈和用于产生高频场的高频线圈。 超导磁体的至少一部分由金属构件制成,并且金属构件的至少一部分插入在超导线圈之间,设置有用于阻止涡流的非导电部分的梯度线圈。

    RF coil assembly for MRI using differently shaped and/or sized coils
    27.
    发明授权
    RF coil assembly for MRI using differently shaped and/or sized coils 有权
    用于MRI的RF线圈组件使用不同形状和/或尺寸的线圈

    公开(公告)号:US08841911B2

    公开(公告)日:2014-09-23

    申请号:US13405699

    申请日:2012-02-27

    IPC分类号: G01V3/00 G01R33/3415

    CPC分类号: G01R33/3415

    摘要: A radio frequency coil assembly is provided that includes a first radio frequency coil for receiving a magnetic resonance signal from a tested body; a second radio frequency coil for receiving a magnetic resonance signal from the tested body; and a third radio frequency coil for receiving a magnetic resonance signal from the tested body and having a shape that is different from that of at least one of the first and second radio frequency coils so as to increase local sensitivity in an image-picked-up region.

    摘要翻译: 提供了一种射频线圈组件,其包括用于从测试体接收磁共振信号的第一射频线圈; 第二射频线圈,用于从所测试的身体接收磁共振信号; 以及第三射频线圈,用于从所测试的身体接收磁共振信号,并具有不同于第一和第二射频线圈中的至少一个的形状,以增加拍摄的图像中的局部灵敏度 地区。

    Transport Method and Transport Apparatus
    28.
    发明申请
    Transport Method and Transport Apparatus 审中-公开
    运输方式和运输设备

    公开(公告)号:US20130274915A1

    公开(公告)日:2013-10-17

    申请号:US13916149

    申请日:2013-06-12

    IPC分类号: H01L21/677

    摘要: Provided is a transport method comprising judging whether there is a possibility that misalignment greater than or equal to a threshold value occurs between substrates to be layered that are held by a pair of substrate holders aligned and stacked by an aligning section, the misalignment occurring when the pair of substrate holders is transported from the aligning section to a pressure applying section; and if the judgment indicates that there is the possibility of misalignment, transporting the pair of substrate holders to a region other than the pressure applying section. Whether there is the possibility of misalignment may be judged based on acceleration of the substrate holders. Whether there is the possibility of misalignment may be judged based on acceleration of a transporting section that transports the substrate holders. Whether there is the possibility of misalignment may be judged based on relative positions of the substrate holders. Whether there is the possibility of misalignment may be judged based on relative positions of (i) a transporting section that transports the pair of substrate holders and (ii) one of the pair of substrate holders.

    摘要翻译: 提供了一种传送方法,包括判断是否存在由被对准部对准和堆叠的一对基板保持器保持的要分层的基板之间的大于或等于阈值的偏移的可能性, 一对基板支架从对准部分输送到压力施加部分; 并且如果判断表示存在不对准的可能性,则将一对基板保持器传送到除压力施加部以外的区域。 可以基于基板保持器的加速度判断是否存在未对准的可能性。 可以基于输送基板保持器的输送部的加速度判断是否存在未对准的可能性。 可以基于基板保持器的相对位置来判断是否存在未对准的可能性。 可以基于(i)输送一对基板保持器的输送部和(ii)一对基板保持件中的一个的相对位置来判断是否存在未对准的可能性。

    Transport method and transport apparatus
    29.
    发明授权
    Transport method and transport apparatus 有权
    运输方式和运输设备

    公开(公告)号:US08489227B2

    公开(公告)日:2013-07-16

    申请号:US13548287

    申请日:2012-07-13

    摘要: Provided is a transport method comprising judging whether there is a possibility that misalignment greater than or equal to a threshold value occurs between substrates to be layered that are held by a pair of substrate holders aligned and stacked by an aligning section, the misalignment occurring when the pair of substrate holders is transported from the aligning section to a pressure applying section; and if the judgment indicates that there is the possibility of misalignment, transporting the pair of substrate holders to a region other than the pressure applying section. Whether there is the possibility of misalignment may be judged based on at least one of an acceleration of the substrate holders, an acceleration of a transporting section that transports the substrate holders, relative positions of the substrate holders, or relative positions of the transporting section and one of the pair of substrate holders.

    摘要翻译: 提供了一种传送方法,包括判断是否存在由被对准部对准和堆叠的一对基板保持器保持的要分层的基板之间的大于或等于阈值的偏移的可能性, 一对基板支架从对准部分输送到压力施加部分; 并且如果判断表示存在不对准的可能性,则将一对基板保持器传送到除压力施加部以外的区域。 是否存在未对准的可能性可以基于基板保持器的加速度,输送基板保持器的输送部分的加速度,基板保持器的相对位置或输送部分的相对位置和 一对基板支架之一。

    DESIGN WORKFLOW CONSTRUCTION APPARATUS, DESIGN WORKFLOW CONSTRUCTION METHOD, DESIGN SYSTEM, DESIGN METHOD, DESIGN WORKFLOW CONSTRUCTION PROGRAM, AND COMPUTER READABLE RECORDING MEDIUM IN WHICH DESIGN WORKFLOW CONSTRUCTION PROGRAM IS STORED
    30.
    发明申请
    DESIGN WORKFLOW CONSTRUCTION APPARATUS, DESIGN WORKFLOW CONSTRUCTION METHOD, DESIGN SYSTEM, DESIGN METHOD, DESIGN WORKFLOW CONSTRUCTION PROGRAM, AND COMPUTER READABLE RECORDING MEDIUM IN WHICH DESIGN WORKFLOW CONSTRUCTION PROGRAM IS STORED 有权
    设计工作流施工设备,设计工作流程施工方法,设计系统,设计方法,设计工作流程构造程序和设计工作流程构建程序存储的计算机可读记录介质

    公开(公告)号:US20120053905A1

    公开(公告)日:2012-03-01

    申请号:US13201854

    申请日:2010-02-16

    IPC分类号: G06F17/50

    CPC分类号: G06Q10/06 G06Q10/0633

    摘要: A design system (1) is provided with a function of acquiring a design specification of an object to be designed and an evaluation index for evaluating a value of the object to be designed in the design specification; a function of acquiring profile data of the object to be designed; a function (design order determining section (12)) of extracting entity design elements and important design variables from the profile data and prioritizing the entity design elements and the important design variables so as to construct a design workflow; a function (evaluation approach construction section (13)) of constructing an evaluation formula for performance/evaluation of a design result of each of the entity design elements in conformity with the design workflow; a function of finding an appropriate solution by performing automatic optimization while evaluating the design result with use of the evaluation index in accordance with the design workflow with which the evaluation formula is associated; and a function of outputting the appropriate solution thus found. This allows the object to be designed to be parametrically handled, and makes it possible to create a design workflow for efficiently finding an optimum design solution by properly combining a series of design elements and to find an appropriate solution with the use of the design workflow.

    摘要翻译: 设计系统(1)具有获取要设计的对象的设计规范和评估设计规范中要设计的对象的值的评估指标的功能; 获取要设计的对象的简档数据的功能; 从简档数据中提取实体设计元素和重要设计变量的功能(设计顺序确定部分(12)),并对实体设计元素和重要设计变量进行优先排序,从而构建设计工作流程; (评估方法构建部(13)),其根据设计工作流程构建用于对每个实体设计元素的设计结果进行性能/评估的评估公式; 通过根据与评估公式相关联的设计工作流程使用评估指数来评估设计结果,通过执行自动优化来找到适当的解决方案的功能; 以及输出由此找到的适当解决方案的功能。 这允许将对象设计为参数化处理,并且可以创建设计工作流,以通过适当地组合一系列设计元素来有效地找到最佳设计解决方案,并使用设计工作流程找到适当的解决方案。