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21.发明授权公开(公告)号：US06269696B1
公开(公告)日：2001-08-07
申请号：US09483326
申请日：2000-01-14
IPC分类号： G01P1508
CPC分类号： G01P15/097 , G01P1/006 , G01P2015/0828
摘要： A temperature compensated oscillating accelerometer with force multiplier includes a support substrate; a tuning fork suspended above the substrate; a primary anchor device connected between the tuning fork and substrate; a proof mass having an input axis; a force multiplier interconnected between the proof mass and the tuning fork; and a force multiplier anchor connected to the substrate and disposed at approximately the same area along the input axis as the primary anchor for offsetting the opposing effects of thermal expansion and stiffness in response to variations in temperature.
摘要翻译： 具有力乘数的温度补偿振荡加速度计包括支撑衬底; 悬挂在基板上方的音叉; 连接在音叉和基板之间的主锚装置; 具有输入轴的检验质量块; 在力量乘法器之间相互连接的证明质量块和音叉; 以及连接到基板并且沿着与主锚相关的输入轴线大致相同的区域设置的力乘数锚，用于抵消温度变化引起的热膨胀和刚度的相反影响。
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22.发明授权Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices 失效拆分电极以最小化电荷瞬变，电机幅度失配误差，以及音叉陀螺仪和其他设备中垂直平移的灵敏度
公开(公告)号：US5911156A
公开(公告)日：1999-06-08
申请号：US805013
申请日：1997-02-24
IPC分类号： G01C19/5719 , G01C19/00
CPC分类号： G01C19/5719
摘要： A micromechanical tuning fork gyroscope having two center electrodes is disclosed. The two center electrodes are excited with bias potentials of opposite polarity. The oppositely biased center electrodes provide electrical symmetry across the gyroscope and thereby reduce charge transients and sensitivity to vertical translation. Currents injected directly into the proof masses are equal and opposite and thus cancel. Motor lift forces acting on the proof masses and interleaved electrodes are equal, and hence the proof masses move in pure translation, thereby reducing in-phase bias. Further, any pure translation normal to the plane of the gyroscope does effect sense axis output signals.
摘要翻译： 公开了一种具有两个中心电极的微机械音叉陀螺仪。 两个中心电极被相反极性的偏置电位激发。 相对偏置的中心电极在陀螺仪之间提供电对称性，从而减少电荷瞬变和对垂直平移的敏感性。 直接注入到质量块中的电流相等且相反，从而取消。 作用在证明质量块和交错电极上的电动机提升力相等，因此证明质量块以纯平移运动，从而减少同相偏差。 此外，垂直于陀螺仪平面的任何纯平移都会影响感测轴输出信号。
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23.发明授权
公开(公告)号：US5635739A
公开(公告)日：1997-06-03
申请号：US428531
申请日：1995-04-25
申请人： Paul Grieff , Burton Boxenhorn , Marc S. Weinberg
发明人： Paul Grieff , Burton Boxenhorn , Marc S. Weinberg
IPC分类号： G01C19/5719 , G01P15/08 , H01L29/82
CPC分类号： G01C19/5719 , G01P15/0802 , G01P15/0888 , G01P2015/0814 , G01P2015/0831 , Y10S73/01
摘要： A micromechanical accelerometer comprises a mass of monocrystalline silicon in which a substantially symmetrical plate attached to a silicon frame by flexible linkages is produced by selective etching. The plate has a plurality of apertures patterned and etched therethrough to speed further etching and freeing of the plate and flexible linkages, suspending them above a void etched beneath. The plate is capable of limited motion about an axis created by the flexible linkages. An accelerometer comprised of a substantially symmetrical, linkage supported plate configuration is implemented as an angular accelerometer paired with an auxiliary linear accelerometer, which is used to compensate for the linear sensitivity of the angular sensor, to achieve an instrument that is insensitive to linear acceleration and responds to angular acceleration.
摘要翻译： 微机械加速度计包括大量单晶硅，其中通过选择性蚀刻产生通过柔性连接件附接到硅框架的基本上对称的板。 该板具有图案化并通过其蚀刻的多个孔，以进一步蚀刻和释放板和柔性连接件，将它们悬挂在蚀刻在下面的空隙之上。 该板能够围绕由柔性连杆产生的轴限制运动。 由基本上对称的连接支撑板结构构成的加速度计被实现为与辅助线性加速度计配对的角加速度计，其用于补偿角度传感器的线性灵敏度，以实现对线性加速度不敏感的仪器， 响应角加速度。
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公开(公告)号：US5357817A
公开(公告)日：1994-10-25
申请号：US511230
申请日：1990-04-19
申请人： Marc S. Weinberg
发明人： Marc S. Weinberg
CPC分类号： G01C19/42 , G01C21/18 , Y10T74/1221
摘要： A three axis, single degree of freedom gyroscope based rate sensing platform has restraining torque developed for the platform from a feedback loop that includes electronics that decouples individual gyroscope outputs from the rate inputs that correspond to axes other than the input axis for that gyroscope and provides an enhanced frequency response. The outputs from the various gyroscopes are processed in a compensator that estimates the platform rates on independent axes using either a Kalman filter estimator or a matrix inverse of the matrix equation of motion between platform input rate and gyroscope output. High bandwidth performance is obtained by an increased stiffness and prefiltering of the gyro torque inputs.
摘要翻译： 基于三轴，单自由度陀螺仪的速率感测平台具有针对平台从反馈回路开发的约束扭矩，该反馈回路包括将各个陀螺仪输出与对应于该陀螺仪的输入轴的轴的速率输入分离的电子装置，并提供 增强的频率响应。 来自各种陀螺仪的输出在补偿器中进行处理，该补偿器使用卡尔曼滤波器估计器或平台输入速率和陀螺仪输出之间的运动矩阵方程的矩阵逆估计独立轴上的平台速率。 通过增加陀螺仪转矩输入的刚度和预滤波可获得高带宽性能。
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公开(公告)号：US5349855A
公开(公告)日：1994-09-27
申请号：US870414
申请日：1992-04-07
IPC分类号： G01C19/5719 , G01P15/08 , H03H9/02 , G01P9/04
CPC分类号： G01C19/5719 , G01P15/0802 , G01R33/0286 , H03H9/02259 , G01P2015/0814 , H03H2009/02354 , H03H2009/02496
摘要： A microfabricated tuning fork rate sensitive structure and drive electronics in which vibrational forces are communicated through a set of meshing drive and driven finger electrodes associated with each of two vibrating elements. The vibrating elements are supported in a rotatable assembly between first and second support electrodes which are in turn suspended by flexures for rotation about an axis passing through the flexures and through a point midway between the vibrating elements. Additional masses are formed onto the vibrating elements to improve overall sensor sensitivity. Sense electrodes for detecting capacitive changes between the support electrodes and the sense electrodes are positioned at each end of the support electrodes. Drive electronics are connected between the driven fingers of the vibrating elements and the drive electrode fingers which mesh with them to cause vibration. Excitation is provided between the support electrodes and the sense electrodes. Any change in signal resulting from rotation of the assembly and the resulting variation in capacitance between the support electrodes and the sense electrodes is sensed as a measure of inertial rate. A torque loop may be additionally formed using the sense electrodes in order to re-torque the assembly to a neutral position in a torque-to-balance loop.
摘要翻译： 微调音叉速率敏感结构和驱动电子设备，其中振动力通过与两个振动元件中的每一个相关联的一组啮合驱动和被驱动的手指电极而传递。 振动元件被支撑在第一和第二支撑电极之间的可旋转组件中，第一和第二支撑电极又通过弯曲部悬挂，以便绕穿过弯曲部的轴线并通过振动元件之间的中心点旋转。 附加的质量形成在振动元件上以提高传感器的灵敏度。 用于检测支撑电极和感测电极之间的电容变化的感测电极位于支撑电极的每个端部。 驱动电子设备连接在振动元件的被驱动的指状物和与其啮合的驱动电极指状物以引起振动。 在支撑电极和感测电极之间提供激励。 由组件的旋转引起的信号的任何改变以及所产生的支撑电极和感测电极之间的电容变化被感测为惯性速率的量度。 可以使用感测电极另外形成扭矩环，以便在扭矩平衡回路中将组件重新扭转到中立位置。
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公开(公告)号：US5060039A
公开(公告)日：1991-10-22
申请号：US314453
申请日：1989-02-22
申请人： Marc S. Weinberg , Paul Greiff
发明人： Marc S. Weinberg , Paul Greiff
IPC分类号： G01C19/5719
CPC分类号： G01P15/132 , G01C19/5719 , G01P15/125
摘要： An accelerometer fabricated by micromachining techniques from a crystaline precursor. The accelerometer is formed in a body of a semiconductor crystal such as silicon by doping portions to an etch resistant condition and etching a cavity around them to release a resiliently suspended multi legged member. A conductor is formed in one of the legs. A permanent magnet is placed with opposite polarity poles on either side of the leg and the acceleration displacement of the member sensed from which a current is developed through the leg conductor to restore the member position and provide an output indication of acceleration.
摘要翻译： 通过微结晶技术从结晶前体制造的加速度计。 加速度计通过将部分掺杂到耐蚀刻状态而形成在诸如硅的半导体晶体的主体中，并且蚀刻其周围的空腔以释放弹性悬挂的多腿构件。 导体形成在一条腿中。 永磁体被放置成在腿的任一侧上具有相反的极性极，并且感测到的构件的加速度位移通过腿导体从该位置产生电流，以恢复构件位置并提供加速度的输出指示。
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公开(公告)号：US4566458A
公开(公告)日：1986-01-28
申请号：US553952
申请日：1983-11-21
申请人： Marc S. Weinberg
发明人： Marc S. Weinberg
CPC分类号： A63B71/12 , A41C3/10 , A41C3/14 , A63B2071/1208
摘要： A thorax protector, designed for optimal protection of the breasts such that forces directed at it are distributed along the lines of support of the rib cage, includes rigid cups and inner liners with anatomically contoured shapes.
摘要翻译： 一种胸部保护器，设计用于最佳保护乳房，使得引导到其上的力沿肋骨支撑线分布，包括具有解剖学轮廓形状的刚性杯和内衬。
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公开(公告)号：US07468138B2
公开(公告)日：2008-12-23
申请号：US11496229
申请日：2006-07-31
IPC分类号： H04R17/00
CPC分类号： G01N29/022 , G01L9/0025 , G01N2291/0423 , G01N2291/0427 , Y10T29/42
摘要： A method for manufacturing a flexural plate wave sensor, the method including the steps of depositing an etch-stop layer over a substrate, depositing a membrane layer over said etch stop layer, depositing a piezoelectric layer over said membrane layer, forming a comb pattern with drive teeth which span across an entire length of the piezoelectric layer on said piezoelectric layer, etching a cavity through the substrate, the cavity having substantially parallel interior walls, and removing a portion of the etch stop layer between the cavity and the membrane layer to expose a portion of the membrane layer.
摘要翻译： 一种用于制造弯曲板波传感器的方法，所述方法包括以下步骤：在衬底上沉积蚀刻停止层，在所述蚀刻停止层上沉积膜层，在所述膜层上沉积压电层，形成具有 驱动齿跨越所述压电层上的压电层的整个长度，通过衬底蚀刻空腔，空腔具有基本上平行的内壁，以及去除腔和膜层之间的一部分蚀刻停止层以暴露 膜层的一部分。
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29.发明授权公开(公告)号：US07402425B2
公开(公告)日：2008-07-22
申请号：US10791108
申请日：2004-03-02
IPC分类号： C12M1/34
CPC分类号： G01N33/54373 , G01N27/227 , G01N27/3276 , G01N2291/02863 , Y10S436/806
摘要： Electrostatic capacitance measurements are used to detect chemical or biological analytes, or chemical interactions, with great sensitivity. A diaphragm is coated with a material capable of selectively interacting with an analyte of interest, and interaction of the analyte with the coating exerts stresses tangential to the diaphragm's surface. These stresses cause diaphragm displacements that are sensed as varying capacitance.
摘要翻译： 静电电容测量用于高灵敏度地检测化学或生物分析物或化学相互作用。 膜片涂有能够与感兴趣的分析物选择性相互作用的材料，分析物与涂层的相互作用产生与膜片表面相切的应力。 这些应力会导致膜片位移被感测为变化的电容。
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公开(公告)号：US07109633B2
公开(公告)日：2006-09-19
申请号：US10675398
申请日：2003-09-30
IPC分类号： H01L41/08
CPC分类号： G01N29/022 , G01L9/0025 , G01N2291/0423 , G01N2291/0427 , Y10T29/42
摘要： A flexural plate wave sensor including a flexural plate having a length and a width and a comb pattern over the flexural plate with drive teeth disposed across the entire length of the flexural plate to reduce the number of eigenmodes excited in the plate and thereby simplifying the operation and design of the flexure plate wave sensor.
摘要翻译： 一种弯曲板式波片传感器，其包括弯曲板上的长度和宽度的弯曲板以及弯曲板上的梳状图案，驱动齿设置在弯曲板的整个长度上，以减少板中激发的本征模的数量，从而简化了操作 和挠性板波传感器的设计。
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