Semiconductor Wafer And Semiconductor Device
    22.
    发明申请
    Semiconductor Wafer And Semiconductor Device 失效
    半导体晶圆和半导体器件

    公开(公告)号:US20080090176A1

    公开(公告)日:2008-04-17

    申请号:US11665543

    申请日:2005-10-20

    IPC分类号: G03C1/73

    摘要: Disclosed is a semiconductor wafer which is characterized in that a resin layer composed of a resin composition containing a cyclic olefin resin (A) having an epoxy group and a photoacid generator (B) is arranged on a surface on which a circuit element is formed, and the residual stress of the resin layer after curing is 1-20 MPa. Also disclosed is a semiconductor device comprising such a semiconductor wafer.

    摘要翻译: 公开了一种半导体晶片,其特征在于,在其上形成有电路元件的表面上设置由包含环氧基的环烯烃树脂(A)和光酸产生剂(B)的树脂组合物构成的树脂层, 固化后树脂层的残余应力为1-20MPa。 还公开了包括这种半导体晶片的半导体器件。

    Organic electroluminescence device comprising a silver alloy anode and method of manufacturing the same
    23.
    发明授权
    Organic electroluminescence device comprising a silver alloy anode and method of manufacturing the same 有权
    包含银合金阳极的有机电致发光器件及其制造方法

    公开(公告)号:US07285905B2

    公开(公告)日:2007-10-23

    申请号:US10399030

    申请日:2002-06-25

    IPC分类号: H01J1/62

    摘要: Provided are an organic electroluminescence device capable of enhancing reflectance of an anode, thereby resulting in improved light-emitting efficiency and a method of manufacturing the same. An anode (12), a thin film layer for hole injection (13), an insulating layer (14), an organic layer (15) including a luminescent layer (15C) and a cathode (16) including a semi-transparent electrode (16A) are laminated in order on a substrate (11). The anode (12) comprises silver which is a metal with high reflectance or an alloy including silver, and the thin film layer for hole injection (13) comprises chromium oxide or the like. Light generated in the luminescent layer (15C) is multiply reflected between the anode (12) and the semi-transparent electrode (16A) to be emitted from the cathode (16). As the reflectance of the anode (12) is enhanced, the light generated in the luminescent layer (15C) can be efficiently emitted. An alloy comprised in the anode (12) preferably includes silver, palladium and copper, and a silver content is preferably 50% by mass or over.

    摘要翻译: 提供能够提高阳极反射率的有机电致发光器件,从而提高发光效率及其制造方法。 阳极(12),用于空穴注入的薄膜层(13),绝缘层(14),包括发光层(15C)的有机层(15)和包括半透明电极 (16A)依次层叠在基板(11)上。 阳极(12)包括银,其是具有高反射率的金属或包括银的合金,并且用于空穴注入的薄膜层(13)包括氧化铬等。 在发光层(15C)中产生的光在阳极(12)和半透明电极(16A)之间被反射,从阴极(16)发射。 随着阳极(12)的反射率增强,可以有效地发射在发光层(15C)中产生的光。 包含在阳极(12)中的合金优选包括银,钯和铜,并且银含量优选为50质量%以上。

    Photosensitive compositions based on polycyclic polymers
    24.
    发明授权
    Photosensitive compositions based on polycyclic polymers 有权
    基于多环聚合物的光敏组合物

    公开(公告)号:US07022790B2

    公开(公告)日:2006-04-04

    申请号:US10465511

    申请日:2003-06-19

    IPC分类号: C08F10/00

    摘要: A copolymer composition including a copolymer having repeat units of structural formula I: where X is selected from —CH2—, —CH2—CH2— and O; m is an integer from 0 to 5; and each occurrence of R1–R4 are independently selected from H; C1 to C25 linear, branched, and cyclic alkyl, aryl, aralkyl, alkaryl, alkenyl and alkynyl that can include one or more hetero atoms selected from O, N, and Si; a group that contains an epoxy functionality; —(CH2)nC(O)OR5; —(CH2)nC(O)OR6; —(CH2)nOR6; —(CH2)nOC(O)R6; —(CH2)nC(O)R6; —(CH2)nOC(O)OR6; and any combination of two of R1, R2, R3, and R4 linked together by a linking group. A portion of the repeat units having structural formula I contain at least one epoxy functional pendant group. The copolymer composition can be included with a material that photonically forms a catalyst in a photodefinable dielectric composition, which can be used to form a photodefinable layer on a substrate.

    摘要翻译: 一种共聚物组合物,其包含具有结构式I的重复单元的共聚物:其中X选自-CH 2 - , - CH 2 -CH 2 > - 和O; m是0至5的整数; 并且每次出现的R 1 -R 4独立地选自H; C 1至C 25直链,支链和环状的烷基,芳基,芳烷基,烷芳基,烯基和炔基,其可以包括一个或多个选自O,N, 和Si; 含有环氧官能团的基团; - (CH 2)2 C(O)OR 5; - (CH 2)2 C(O)OR 6; - (CH 2 2)n - 或 - 6 - - (CH 2)n OC(O)R 6; - (CH 2 CH 2)n C(O)R 6; - (CH 2)n OC(O)OR 6; 并且R 1,R 2,R 3,R 4和R 4中的两个的任何组合通过 连接组。 具有结构式I的重复单元的一部分含有至少一个环氧官能侧基。 该共聚物组合物可以包含在可光致定影的电介质组合物中光子形成催化剂的材料,该组合物可用于在基底上形成光可定义层。

    Photosensitive compositions based on polycyclic polymers for low stress, high temperature films
    25.
    发明申请
    Photosensitive compositions based on polycyclic polymers for low stress, high temperature films 审中-公开
    基于用于低应力,高温膜的多环聚合物的光敏组合物

    公开(公告)号:US20060020068A1

    公开(公告)日:2006-01-26

    申请号:US11105494

    申请日:2005-04-14

    IPC分类号: C08G18/66 C08F132/08

    摘要: Vinyl addition polymer compositions, methods for forming such compositions, methods for using such compositions to form microelectronic and optoelectronic devices are provided. The vinyl addition polymer encompassed by such compositions has a polymer backbone having two or more distinct types of repeat units derived from norbornene-type monomers independently selected from monomers of Formula I: wherein each of X, m, R1, R2, R3, and R4 is as defined herein and wherein a first type of repeat unit is derived from a glycidyl ether substituted norbornene monomer and a second type of repeat unit is derived from an aralkyl substituted norbornene monomer.

    摘要翻译: 提供乙烯基加成聚合物组合物,形成这种组合物的方法,使用这种组合物形成微电子和光电子器件的方法。 由这种组合物包含的乙烯基加成聚合物具有聚合物主链,其具有两种或更多种不同类型的衍生自独立地选自式I的单体的降冰片烯型单体的重复单元:其中X,m,R 1, >,R 2,R 3和R 4如本文所定义,并且其中第一类型的重复单元衍生自缩水甘油醚 取代的降冰片烯单体和第二类型的重复单元衍生自芳烷基取代的降冰片烯单体。

    Method of manufacturing photo mask, mask pattern shape evaluation apparatus, method of judging photo mask defect corrected portion, photo mask defect corrected portion judgment apparatus, and method of manufacturing a semiconductor device
    26.
    发明申请
    Method of manufacturing photo mask, mask pattern shape evaluation apparatus, method of judging photo mask defect corrected portion, photo mask defect corrected portion judgment apparatus, and method of manufacturing a semiconductor device 失效
    光掩模的制造方法,掩模图案形状评价装置,光掩模缺陷校正部的判断方法,光掩模缺陷校正部判定装置以及半导体装置的制造方法

    公开(公告)号:US20050238221A1

    公开(公告)日:2005-10-27

    申请号:US11110915

    申请日:2005-04-21

    CPC分类号: G06T7/0006 G06T2207/30148

    摘要: According to an aspect of the invention, there is provided a method comprising detecting a defect of a pattern formed on the photo mask, acquiring a pattern image of a first region on the photo mask, extracting a pattern contour from the pattern image to acquire pattern contour extracted data, producing first graphic data based on the pattern contour extracted data and a pixel size, acquiring pattern data including the first region and corresponding to a second region from design data, producing second graphic data from the pattern data, replacing the second graphic data with the first graphic data to produce third graphic data only in a region where the first graphic data is superimposed upon the second graphic data, producing transfer patterns of pattern shapes represented by the second and third graphic data, and comparing the transfer patterns to judge whether or not the defect needs to be corrected.

    摘要翻译: 根据本发明的一个方面,提供了一种方法,包括检测在光掩模上形成的图案的缺陷,获取光掩模上的第一区域的图案图像,从图案图像中提取图案轮廓以获取图案 轮廓提取数据,基于模式轮廓提取数据和像素尺寸产生第一图形数据,从设计数据获取包括第一区域并对应于第二区域的图案数据,从图案数据生成第二图形数据,替换第二图形 具有第一图形数据的数据,仅在第一图形数据叠加在第二图形数据上的区域中产生第三图形数据,产生由第二图形数据和第三图形数据表示的图案形状的转印图案,并比较转印图案以判断 是否需要纠正缺陷。

    Positive photosensitive resin composition, process for its preparation, and semiconductor devices
    27.
    发明授权
    Positive photosensitive resin composition, process for its preparation, and semiconductor devices 失效
    正型感光性树脂组合物,其制备方法及半导体装置

    公开(公告)号:US06908717B2

    公开(公告)日:2005-06-21

    申请号:US10415234

    申请日:2001-10-09

    摘要: The present invention provides a positve photosensitive resin composition of high sensitivity which can form a pattern of high resolution and high residual film ration and which can give a cured film superior in mechanical properties, adhesivity and water absorptivity. That is, the present invention lies in a positive photosensitve resin compostion comprising 100 parts by weight of an alkali-soluble resin, 1 to 100 parts by weight of a photosensitve diazoquinone compound (B) and a filler (C), characterized in that content F of the filler (C) represented by the following formula is 2 to 70% by weight. F=filler(C)/[alkali-soluble resing+filler (C)]

    摘要翻译: 本发明提供一种高灵敏度的阳离子感光性树脂组合物,其可以形成高分辨率和高残留膜比例的图案,并且可以得到机械性能,粘合性和吸水性优异的固化膜。 也就是说,本发明在于包含100重量份的碱溶性树脂,1至100重量份的光敏重氮醌化合物(B)和填料(C)的正光敏树脂组合物,其特征在于,含量 由下式表示的填料(C)的F为2〜70重量%。 F =填料(C)/ [碱溶性填料+填料(C)] <?在线配方说明=“In-line-formula”=“ 在线公式“end =”tail“?>

    Exhaust gas analyzer and modal mass analysis method by gas trace process
using the analyzer thereof
    29.
    发明授权
    Exhaust gas analyzer and modal mass analysis method by gas trace process using the analyzer thereof 失效
    废气分析仪和采用气体追踪法的模式质量分析方法

    公开(公告)号:US6112574A

    公开(公告)日:2000-09-05

    申请号:US27610

    申请日:1998-02-23

    IPC分类号: G01F1/704 G01M15/10 G01N7/00

    CPC分类号: G01M15/104 G01F1/704

    摘要: An exhaust gas analyzer for measuring a dry-based concentration and a dry-based flow rate of exhaust gas from a vehicle has a trace gas supply source for providing a trace gas to the vehicle at a supply rate, a flow rate controller for controlling the supply rate of the trace gas, a exhaust gas sampling passage in communication with an exhaust pipe of the vehicle for sampling the exhaust gas from the vehicle, a dehumidifier disposed on the exhaust gas sampling passage, a trace gas detector disposed on the exhaust gas sampling passage for measuring the trace gas, and a gas analyzer disposed on the exhaust gas sampling passage for measuring a component to be measured in the exhaust gas. The trace gas detector and the gas analyzer are disposed downstream from the dehumidifier and in parallel on the exhaust gas sampling passage.

    摘要翻译: 用于测量来自车辆的废气浓度的干基浓度和干基流量的排气分析器具有用于以供给速度向车辆提供痕量气体的微量气体供给源,用于控制车辆的流量控制器 痕量气体的供给速度,与车辆的排气管连通的排气采样通道,用于对来自车辆的废气进行取样,设置在排气采样通道上的除湿器,设置在排气采样管上的痕量气体检测器 用于测量痕量气体的通道和设置在排气采样通道上的气体分析器,用于测量废气中待测量的组分。 痕量气体检测器和气体分析器设置在除湿器的下游并且并排设置在排气采样通道上。

    Gas-filled discharge tube
    30.
    发明授权
    Gas-filled discharge tube 失效
    充气放电管

    公开(公告)号:US5352953A

    公开(公告)日:1994-10-04

    申请号:US861732

    申请日:1992-04-01

    CPC分类号: H01T1/00 H01T13/04 H01T13/462

    摘要: A gas-filled discharge tube includes a tubular body formed of an electrically insulating material, and has engaging portions respectively at opposite ends thereof. A pair of electrode bases are provided; at least one of the electrode bases is formed of an electrically conducting thin metal sheet, airtightly adhered to the respective open ends. A pair of discharge electrodes are provided; the discharge electrodes have flange portions which are engaged with the respective engaging portions and sandwiched between the tubular body and the respective electrode bases. One of the electrode bases is formed with a gas filling bore by a laser beam for filling an inert gas. The gas filling bore is welded by the laser beam after the inert gas is filled in the tubular body, so as to seal and enclose the inert gas therein.

    摘要翻译: 气体充放电管包括由电绝缘材料形成的管状体,并且在其相对端分别具有接合部。 提供一对电极基座; 电极基体中的至少一个由导电薄金属片形成,气密地粘附到相应的开口端。 设置一对放电电极; 放电电极具有与相应的接合部分接合并夹在管状体和各个电极基体之间的凸缘部分。 其中一个电极基座由用于填充惰性气体的激光束形成有气体填充孔。 在惰性气体填充到管体中之后,通过激光束焊接气体填充孔,以便将惰性气体密封并包封在其中。