Positive photosensitive resin composition, process for its preparation, and semiconductor devices
    1.
    发明授权
    Positive photosensitive resin composition, process for its preparation, and semiconductor devices 失效
    正型感光性树脂组合物,其制备方法及半导体装置

    公开(公告)号:US06908717B2

    公开(公告)日:2005-06-21

    申请号:US10415234

    申请日:2001-10-09

    摘要: The present invention provides a positve photosensitive resin composition of high sensitivity which can form a pattern of high resolution and high residual film ration and which can give a cured film superior in mechanical properties, adhesivity and water absorptivity. That is, the present invention lies in a positive photosensitve resin compostion comprising 100 parts by weight of an alkali-soluble resin, 1 to 100 parts by weight of a photosensitve diazoquinone compound (B) and a filler (C), characterized in that content F of the filler (C) represented by the following formula is 2 to 70% by weight. F=filler(C)/[alkali-soluble resing+filler (C)]

    摘要翻译: 本发明提供一种高灵敏度的阳离子感光性树脂组合物,其可以形成高分辨率和高残留膜比例的图案,并且可以得到机械性能,粘合性和吸水性优异的固化膜。 也就是说,本发明在于包含100重量份的碱溶性树脂,1至100重量份的光敏重氮醌化合物(B)和填料(C)的正光敏树脂组合物,其特征在于,含量 由下式表示的填料(C)的F为2〜70重量%。 F =填料(C)/ [碱溶性填料+填料(C)] <?在线配方说明=“In-line-formula”=“ 在线公式“end =”tail“?>

    Layered films formed by controlled phase segregation
    9.
    发明授权
    Layered films formed by controlled phase segregation 有权
    通过控制相分离形成的层状膜

    公开(公告)号:US07241707B2

    公开(公告)日:2007-07-10

    申请号:US11060843

    申请日:2005-02-17

    IPC分类号: H01L21/469

    摘要: Multiple-layer films in integrated circuit processing may be formed by the phase segregation of a single composition formed above a semiconductor substrate. The composition is then induced to phase segregate into at least a first continuous phase and a second continuous phase. The composition may be formed of two or more components that phase segregate into different continuous layers. The composition may also be a single component that breaks down upon activation into two or more components that phase segregate into different continuous layers. Phase segregation may be used to form, for example, a sacrificial light absorbing material (SLAM) and a developer resistant skin, a dielectric layer and a hard mask, a photoresist and an anti-reflective coating (ARC), a stress buffer coating and a protective layer on a substrate package, and light interference layers.

    摘要翻译: 集成电路处理中的多层膜可以通过在半导体衬底上形成的单一组合物的相分离来形成。 然后将组合物诱导相分离成至少第一连续相和第二连续相。 组合物可以由相分离成不同连续层的两种或更多种组分形成。 组合物还可以是单一组分,其在活化时分解成两个或多个相分离成不同连续层的组分。 相分离可以用于形成例如牺牲光吸收材料(SLAM)和显影剂抗性皮肤,电介质层和硬掩模,光致抗蚀剂和抗反射涂层(ARC),应力缓冲涂层和 衬底封装上的保护层,以及光干涉层。

    Energy harvesting molecules and photoresist technology
    10.
    发明授权
    Energy harvesting molecules and photoresist technology 失效
    能量收集分子和光刻胶技术

    公开(公告)号:US07235344B2

    公开(公告)日:2007-06-26

    申请号:US10881475

    申请日:2004-06-30

    摘要: A composition including a first moiety; and a different second moiety capable of harvesting energy from an external source, wherein the second moiety is positioned such that energy harvested at the second moiety may be transferred to the first moiety. An article of manufacture including a film including a first moiety and a different second moiety capable of harvesting energy from an external source, wherein the second moiety is positioned such that collectively the first and second moieties have an electron capture cross-section greater than the electron capture cross-section of the first moiety alone. A method including forming a film on a substrate including a first moiety and a different second moiety; exposing the film to photonic or charged particle radiation; and patterning the film.

    摘要翻译: 包含第一部分的组合物; 以及能够从外部源收获能量的不同的第二部分,其中第二部分被定位成使得在第二部分收获的能量可以转移到第一部分。 包括包括第一部分和能够从外部源收集能量的不同第二部分的膜的制品,其中所述第二部分被定位成使得所述第一部分和所述第二部分的电子捕获截面大于所述电子 仅捕获第一部分的横截面。 一种方法,包括在包括第一部分和不同的第二部分的基底上形成膜; 将膜暴露于光子或带电粒子辐射; 并构图。