PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
    21.
    发明申请
    PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS 审中-公开
    微波投影曝光装置的投影目标

    公开(公告)号:US20090225296A1

    公开(公告)日:2009-09-10

    申请号:US12467879

    申请日:2009-05-18

    申请人: Juergen Fischer

    发明人: Juergen Fischer

    IPC分类号: G03B27/54

    CPC分类号: G03F7/70825 G03F7/70266

    摘要: A projection objective of a microlithographic projection exposure apparatus has a plurality of optical elements, for example lenses or mirrors. The objective furthermore includes an actuator for exerting a mechanical force that deforms a selected optical element of the projection objective. A manipulator modifies the spatial position of one of the optical elements as a function of the force exerted by the actuator.

    摘要翻译: 微光刻投影曝光装置的投影物镜具有多个光学元件,例如透镜或反射镜。 此外,该目的还包括用于施加使所选投影物镜的所选择的光学元件变形的机械力的致动器。 操纵器根据由致动器施加的力的函数来修改光学元件中的一个的空间位置。

    PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
    22.
    发明申请
    PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS 有权
    微波投影曝光装置的投影目标

    公开(公告)号:US20070036494A1

    公开(公告)日:2007-02-15

    申请号:US11464934

    申请日:2006-08-16

    申请人: Juergen Fischer

    发明人: Juergen Fischer

    IPC分类号: G02B6/36

    CPC分类号: G03F7/70825 G03F7/70266

    摘要: A projection objective of a microlithographic projection exposure apparatus has a plurality of optical elements, for example lenses or mirrors. The objective furthermore includes an actuator for exerting a mechanical force that deforms a selected optical element of the projection objective. A manipulator modifies the spatial position of one of the optical elements as a function of the force exerted by the actuator.

    摘要翻译: 微光刻投影曝光装置的投影物镜具有多个光学元件,例如透镜或反射镜。 此外,该目的还包括用于施加使所选投影物镜的所选择的光学元件变形的机械力的致动器。 操纵器根据由致动器施加的力的函数来修改光学元件中的一个的空间位置。

    Fiber-reinforced materials
    23.
    发明授权
    Fiber-reinforced materials 失效
    纤维增强材料

    公开(公告)号:US4649080A

    公开(公告)日:1987-03-10

    申请号:US731719

    申请日:1985-05-08

    摘要: Fiber-reinforced materials are produced by a process in which a heat-stable thermoplastic aromatic polyether A which contains reactive groups, preferably nitrile groups and/or sulfur bridges and/or arylthio or alkylthio groups, if necessary together with a heat-stable thermoplastic polymer B which does not contain any reactive groups, is applied onto reinforcing fibers, the resulting semi-finished product is molded and, in the molding obtained, the plastic matrix is crosslinked so that the glass transition temperature increases and it becomes virtually insoluble.

    摘要翻译: 纤维增强材料是通过一种方法制备的,其中如果必要,含有反应性基团,优选腈基和/或硫桥基和/或芳硫基或烷硫基的热稳定的热塑性芳族聚醚A与热稳定的热塑性聚合物 不含任何反应性基团的B被施加到增强纤维上,所得到的半成品被模塑,并且在获得的模制品中,塑料基质被交联,使得玻璃化转变温度升高并且几乎不溶解。

    Implement for Processing, Particularly Sealing, Ground Surfaces Under Water, Particularly Bottoms and Embankments of Waterways, Particularly Canals, a Method for Setting Up the Same, a Method for Moving the Same, a Method for Sealing Ground Surfaces Using the Same, and the Like
    24.
    发明申请
    Implement for Processing, Particularly Sealing, Ground Surfaces Under Water, Particularly Bottoms and Embankments of Waterways, Particularly Canals, a Method for Setting Up the Same, a Method for Moving the Same, a Method for Sealing Ground Surfaces Using the Same, and the Like 有权
    在水下,特别是水下特别是底部和路堤上的处理,特别是密封的实施,特别是运河的方法,其设置方法,使用其的地面的密封方法等

    公开(公告)号:US20110091289A1

    公开(公告)日:2011-04-21

    申请号:US12988478

    申请日:2009-03-13

    申请人: Juergen Fischer

    发明人: Juergen Fischer

    IPC分类号: E02D13/00 E02D7/28

    摘要: A working apparatus for processing, especially sealing, underwater bed areas, especially banks and bottoms of waterways, especially canals, a process for setting up said apparatus, a process for moving said apparatus and uses of said apparatus are described. The working apparatus comprises a plurality of polygonal hollow pipes arranged in parallel side by side and at least substantially without gaps, the upper ends of which form a horizontal, at least substantially flat working platform, wherein each hollow pipe has on its outer wall at least one projection extending substantially horizontally with a flange disposed on its outer end and extending vertically and at least one corresponding flange insertion aperture with a slot immediately above it which runs vertically and extends as far as the upper end of the hollow pipe, the flange insertion aperture being disposed further away from the upper end of the hollow pipe than the projection with the flange and being of greater horizontal dimensions than the slot, and wherein neighbouring hollow pipes are in engagement with one another via a respective projection on one of the hollow pipes with a corresponding slot in the other of the hollow pipes, such that the hollow pipes cannot be moved relative to one another in the horizontal direction and only at the outer edge of the working platform can at least one hollow pipe be pulled out individually in the vertically upward direction.

    摘要翻译: 描述了用于处理,特别是密封水下床区域,特别是水道的堤坝和底部的工作装置,特别是运河,用于设置所述装置的过程,用于移动所述装置的过程和所述装置的用途。 工作装置包括多个平行并排并且至少基本上没有间隙布置的多边形中空管,其上端形成水平的,至少基本平坦的工作平台,其中每个中空管至少在其外壁上至少 一个突起基本上水平地延伸,凸缘设置在其外端上并且垂直延伸,并且至少一个对应的凸缘插入孔具有在其上方的垂直延伸的槽,并延伸到中空管的上端,凸缘插入孔 被布置成比具有凸缘的突起更远离中空管的上端,并且具有比槽更大的水平尺寸,并且其中相邻的中空管经由其中一个中空管上的相应突起彼此接合, 在另一个中空管中的相应的狭槽,使得中空管不能相对移动 在水平方向上彼此相对,并且仅在工作平台的外边缘处可以在垂直向上的方向上分别拉出至少一个中空管。

    Projection objective of a microlithographic projection exposure apparatus
    26.
    发明授权
    Projection objective of a microlithographic projection exposure apparatus 有权
    微光刻投影曝光装置的投影目标

    公开(公告)号:US07545482B2

    公开(公告)日:2009-06-09

    申请号:US11464934

    申请日:2006-08-16

    申请人: Juergen Fischer

    发明人: Juergen Fischer

    IPC分类号: G03B27/54 G03B27/70

    CPC分类号: G03F7/70825 G03F7/70266

    摘要: A projection objective of a microlithographic projection exposure apparatus has a plurality of optical elements, for example lenses or mirrors. The objective furthermore includes an actuator for exerting a mechanical force that deforms a selected optical element of the projection objective. A manipulator modifies the spatial position of one of the optical elements as a function of the force exerted by the actuator.

    摘要翻译: 微光刻投影曝光装置的投影物镜具有多个光学元件,例如透镜或反射镜。 此外,该目的还包括用于施加使所选投影物镜的所选择的光学元件变形的机械力的致动器。 操纵器根据由致动器施加的力的函数来修改光学元件中的一个的空间位置。

    Telecommunication system and method for transmitting data
    27.
    发明授权
    Telecommunication system and method for transmitting data 有权
    用于传输数据的电信系统和方法

    公开(公告)号:US07356037B1

    公开(公告)日:2008-04-08

    申请号:US09857821

    申请日:1999-02-10

    IPC分类号: H04L12/28

    摘要: A telecommunication system includes a base station, a router allocated to the base station, and several subscriber stations that are connected to the base station via an access network. Subscriber station routers set up a telecommunication link with the base station router. The base station router controls the variable transfer rates that are allocated to a telecommunication link between the base station and the subscriber station. The access network is only loaded with the transfer bandwidth that is actually required for data transmission.

    摘要翻译: 电信系统包括基站,分配给基站的路由器和经由接入网络连接到基站的多个用户站。 用户站路由器与基站路由器建立电信链路。 基站路由器控制分配给基站和用户站之间的电信链路的可变传输速率。 接入网络只加载数据传输实际需要的传输带宽。

    Backplane having a wired coupling between card slots
    28.
    发明申请
    Backplane having a wired coupling between card slots 审中-公开
    背板具有卡插槽之间的有线耦合

    公开(公告)号:US20070025094A1

    公开(公告)日:2007-02-01

    申请号:US10564688

    申请日:2004-07-09

    IPC分类号: H05K7/10

    摘要: A backplane for establishing a signal connection between a plurality of cards comprises a support for signaling lines and a plurality of card slots located on the support in a predefined sequence for connecting a card. A plurality of signal-carrier contacts is located at each card slot according to a same pattern. At the card slots, at least two positions of contacts are defined such that a contact at one of these two positions, referred to as the 0-th position, of each card slot that has a successor in the sequence is connected to a contact at the other position of the successor card slot, referred to as the first position, via the backplane.

    摘要翻译: 用于在多个卡之间建立信号连接的背板包括以预定义的顺序用于连接卡的信号线和位于支撑上的多个卡槽的支撑。 根据相同的图案,多个信号载体触点位于每个卡槽处。 在卡插槽处,定义了至少两个触点位置,使得在序列中具有后继者的每个卡槽的称为第0位的这两个位置之一处的触点连接到触点 后继卡槽的另一个位置,被称为第一位置,通过背板。

    Optical element mount comprising an optical element holding frame
    30.
    发明授权
    Optical element mount comprising an optical element holding frame 失效
    光学元件安装件包括光学元件保持框架

    公开(公告)号:US06538829B2

    公开(公告)日:2003-03-25

    申请号:US09930778

    申请日:2001-08-14

    IPC分类号: G02B702

    摘要: An adjusting optical element mount (1) serves for the position of two components (2a, 2b) in relation to one another, in particular of two carrier elements for optical elements, such as mirrors or lenses, in particular as an axial and/or angle manipulator for lithography lenses. The components (2a, 2b) can be adjusted in relation to one another via the action of force (F, T). Each of the components (2a, 2b) has at least three hinges (4a, 4b, 4c, 4d, 5a, 5b, 5c, 5d). Each of the hinges (4a, 4b, 4c, 4d) of one component (2a) is connected in each case to a corresponding hinge (5a, 5b, 5c, 5d) of the respectively other component (2b) to form a pair of hinges (7a, 7b, 7c, 7d) via a lever element (6a, 6b, 6c, 6d) in each case. Each of the pairs of hinges (7a, 7b, 7c, 7d) is connected in each case to at least one lever (8a, 8b, 8c, 8d; 13, 13′) of at least one of the adjacent pairs of hinges (7a, 7b, 7c, 7d) via the at least one lever (8a, 8b, 8c, 8d; 13, 13′)and at least one further hinge (9, 9′; 9a, 9b; 9a′, 9b′) in each case.

    摘要翻译: 调整光学元件安装件(1)用于两个部件(2a,2b)相对于彼此的位置,特别是用于光学元件的两个载体元件,例如镜子或透镜,特别是作为轴向和/或 用于光刻镜片的角度操纵器。 组件(2a,2b)可以通过力(F,T)的作用相对于彼此进行调节。 每个部件(2a,2b)具有至少三个铰链(4a,4b,4c,4d,5a,5b,5c,5d)。 一个部件(2a)的每个铰链(4a,4b,4c,4d)在每种情况下都连接到相应的其它部件(2b)的铰链(5a,5b,5c,5d),以形成一对 在各种情况下经由杠杆元件(6a,6b,6c,6d)的铰链(7a,7b,7c,7d)。 每对铰链(7a,7b,7c,7d)中的每一对连接在至少一个杠杆(8a,8b,8c,8 / BO