公开(公告)号：US6018395A

公开(公告)日：2000-01-25

申请号：US766928

申请日：1996-12-16

申请人： Makiko Mori ,  Shunichi Uzawa ,  Kunitaka Ozawa ,  Hirohisa Ohta ,  Noriyuki Nose

发明人： Makiko Mori ,  Shunichi Uzawa ,  Kunitaka Ozawa ,  Hirohisa Ohta ,  Noriyuki Nose

IPC分类号： G03F9/00 ,  G01B11/00

CPC分类号： G03F9/70

摘要： An alignment method useable with an original having a pattern and a substrate having a surface area on which the pattern of the original is printed. The alignment method comprises detecting plural marks, calculating plural times, the amount of rotational deviation on the basis of different combinations of marks, calculating the quantity of rotational correction of the original and the substrate by using the computed rotational deviations, and aligning on the basis of the calculated quantity of the rotational deviation.

摘要翻译： 可用于具有图案的原稿的对准方法和具有印刷原稿图案的表面积的基板。 对准方法包括基于不同的标记组合来检测多个标记，多次计算旋转偏差量，通过使用计算出的旋转偏差来计算原件和基板的旋转校正量，并基于 的计算量的旋转偏差。

公开(公告)号：US5742386A

公开(公告)日：1998-04-21

申请号：US799879

申请日：1997-02-13

申请人： Noriyuki Nose ,  Minoru Yoshii ,  Kyoichi Miyazaki ,  Toshihiko Tsuji ,  Seiji Takeuchi

发明人： Noriyuki Nose ,  Minoru Yoshii ,  Kyoichi Miyazaki ,  Toshihiko Tsuji ,  Seiji Takeuchi

IPC分类号： G01N21/88 ,  G01N21/47 ,  G01N21/94 ,  G01N21/956 ,  G03F7/20 ,  H01L21/027 ,  G01N21/00

CPC分类号： G01N21/4738 ,  G01N21/94 ,  G01N21/956

摘要： An apparatus for detecting foreign matter on a substrate includes an optical system for projecting a light beam onto a pellicle and a pattern surface, a first detector for detecting scattered light from foreign matter on the pattern surface, a second detector for detecting information relating to the reflectivity or the transmittance of the pellicle by detecting a light beam reflected by the pellicle, and a correction unit for correcting an output signal from the first detector using an output signal from the second detector.

摘要翻译： 用于检测基板上的异物的装置包括：用于将光束投射到防护薄膜组件和图案表面上的光学系统;用于检测来自图案表面上异物的散射光的第一检测器，用于检测与图案表面有关的信息的第二检测器; 通过检测由防护薄膜组件反射的光束来检测防护薄膜组件的反射率或透射率;以及校正单元，用于使用来自第二检测器的输出信号来校正来自第一检测器的输出信号。

公开(公告)号：US5585923A

公开(公告)日：1996-12-17

申请号：US314444

申请日：1994-09-28

申请人： Noriyuki Nose ,  Takeshi Miyachi ,  Kenji Saitoh ,  Koichi Sentoku ,  Takahiro Matsumoto

发明人： Noriyuki Nose ,  Takeshi Miyachi ,  Kenji Saitoh ,  Koichi Sentoku ,  Takahiro Matsumoto

IPC分类号： G03F7/20 ,  G03F9/00 ,  G01B9/02

CPC分类号： G03F7/70633 ,  G03F9/70

摘要： A method and apparatus for measuring the relative positional deviation between first and second diffraction gratings formed on an object includes determining the relative positional deviation of the first and second diffraction gratings while detecting and correcting an error produced in relation to detection of the positional deviation of the first and second diffraction gratings.

摘要翻译： 用于测量形成在物体上的第一和第二衍射光栅之间的相对位置偏差的方法和装置包括确定第一和第二衍射光栅的相对位置偏差，同时检测和校正相对于检测到的位置偏差的检测产生的误差 第一和第二衍射光栅。

公开(公告)号：US5333050A

公开(公告)日：1994-07-26

申请号：US675277

申请日：1991-03-26

申请人： Noriyuki Nose ,  Kenji Saitoh ,  Koichi Sentoku ,  Minoru Yoshii

发明人： Noriyuki Nose ,  Kenji Saitoh ,  Koichi Sentoku ,  Minoru Yoshii

IPC分类号： G03F7/20 ,  G03F9/00 ,  G01B11/02

CPC分类号： G03F7/70633 ,  G03F9/7049

摘要： Disclosed is a method and apparatus for measuring a relative positional deviation between a first pattern and a second pattern, printed on an article such as a semiconductor wafer at different moments, the measurement being based on detection of interference of diffraction lights from at least one of the first and second printed patterns.

摘要翻译： 公开了一种用于测量在不同时刻印刷在诸如半导体晶片的物品上的第一图案和第二图案之间的相对位置偏差的方法和装置，该测量是基于检测衍射光从至少一个 第一和第二印刷图案。

公开(公告)号：US5200800A

公开(公告)日：1993-04-06

申请号：US892732

申请日：1992-05-29

申请人： Shigeyuki Suda ,  Kenji Saitoh ,  Minoru Yoshii ,  Noriyuki Nose

发明人： Shigeyuki Suda ,  Kenji Saitoh ,  Minoru Yoshii ,  Noriyuki Nose

IPC分类号： G03F9/00

CPC分类号： G03F9/7076

摘要： A method of detecting a position of a substrate having an alignment mark includes the steps of projecting a radiation beam from an optical head to the alignment mark such that the alignment mark produces a signal beam on the basis of which the position of the substrate is detected, forming a reference mark on the substrate at a position different from that of the alignment mark, projecting a radiation beam from the optical head to the reference mark, such that the reference mark produces a reference beam, detecting the relative positional deviation of the optical head relative to the reference mark on the basis of the produced reference beam, and adjusting the relative position of the optical head and the alignment mark on the basis of the detected relative positional deviation and, after the adjustment, detecting the position of the substrate on the basis of the produced signal beam.

摘要翻译： 检测具有对准标记的基板的位置的方法包括以下步骤：将来自光学头的辐射束投射到对准标记，使得对准标记产生信号光束，基于该信号光束检测基板的位置 在与所述对准标记不同的位置的基板上形成参考标记，将来自所述光学头的辐射束投射到所述基准标记，使得所述基准标记产生参考光束，检测所述光学器件的相对位置偏差 基于所生成的参考光束相对于参考标记的头部，并且基于检测到的相对位置偏差来调整光学头和对准标记的相对位置，并且在调整之后，检测基板的位置 产生信号光束的基础。

公开(公告)号：US5148037A

公开(公告)日：1992-09-15

申请号：US675059

申请日：1991-03-26

申请人： Shigeyuki Suda ,  Sakae Houryu ,  Noriyuki Nose

发明人： Shigeyuki Suda ,  Sakae Houryu ,  Noriyuki Nose

IPC分类号： G01B11/00 ,  G01B11/14 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30

CPC分类号： G03F9/7049

摘要： A method and apparatus for detecting a positional relationship between first and second objects is disclosed, which includes a light source for projecting light to the first and second objects, a photodetecting system for detecting light from one of the first and second objects irradiated with the light from the light source, the detecting system being operable to detect first light whose position of incidence upon a predetermined plane is dependent upon the positional relationship of the first and second objects in a direction along the interval therebetween and in a direction perpendicular to the interval, second light whose position of incidence upon the predetermined plane is dependent upon the positional relationship of the first and second objects in the direction of the interval therebetween, and third light whose position of incidence upon the predetermined plane is independent of the positional relationship of the first and second objects in both the direction of the interval and the direction perpendicular to the interval, and a positional relationship detecting system for detecting the positional relationship of the first and second objects in the direction of the interval and the direction perpendicular to the interval, on the basis of the detection by the photodetecting system.

公开(公告)号：US4887897A

公开(公告)日：1989-12-19

申请号：US306225

申请日：1989-02-03

申请人： Noriyuki Nose ,  Yukichi Niwa

发明人： Noriyuki Nose ,  Yukichi Niwa

IPC分类号： A61B3/02 ,  A61B3/103

CPC分类号： A61B3/103

摘要： An eye examining apparatus has an eye examining lens of an elastic material opposed to an eye to be examined, and control means for causing the marginal portion of the eye examining lens to protrude or sink to thereby change the lens surface of the eye examining lens.

摘要翻译： 眼睛检查装置具有与要检查的眼睛相对的弹性材料的眼睛检查透镜，以及用于使眼睛检查透镜的边缘部分突出或下沉从而改变眼睛检查透镜的透镜表面的控制装置。

公开(公告)号：US4691982A

公开(公告)日：1987-09-08

申请号：US709300

申请日：1985-03-07

申请人： Yukuo Nishimura ,  Mamoru Miyawaki ,  Noriyuki Nose ,  Takashi Nakagiri

发明人： Yukuo Nishimura ,  Mamoru Miyawaki ,  Noriyuki Nose ,  Takashi Nakagiri

IPC分类号： G02B6/124 ,  G02B6/34 ,  G02B6/10

CPC分类号： G02B6/124 ,  G02B6/34

摘要： An optical coupler of good efficiency can be prepared at a low cost by making an optical waveguide and a grating of the optical coupler of a monomolecular layer or a monomolecular built-up film.

摘要翻译： 通过制造光波导和单分子层或单分子组合膜的光耦合器的光栅，可以以低成本制备效率高的光耦合器。

公开(公告)号：US4595290A

公开(公告)日：1986-06-17

申请号：US283233

申请日：1981-07-14

申请人： Noriyuki Nose ,  Kiyonobu Endo

发明人： Noriyuki Nose ,  Kiyonobu Endo

IPC分类号： G02B27/10 ,  G03B7/099 ,  G01J1/42

CPC分类号： G02B27/108 ,  G02B27/1086 ,  G03B7/09976

摘要： This invention provides a device for measuring light incident on an optical system. This device includes an optical system defining an optical path, a beam splitter and a photo detector. The beam splitter has a relief type diffraction lattice having a plurality of semireflecting surfaces periodically arranged and included in a transparent body. The diffraction lattice is arranged to split a portion of the incident light by its effect of reflection/diffraction and its beam splitting efficiency having a predetermined distribution within the lattice area. The diffracted light from the diffraction lattice is directed to the photo detector.

摘要翻译： 本发明提供一种用于测量入射在光学系统上的光的装置。 该装置包括限定光路的光学系统，分束器和光电检测器。 分束器具有浮雕型衍射晶格，其具有周期性排列并包含在透明体中的多个半反射面。 衍射栅格被布置成通过其反射/衍射效应将入射光的一部分分离，并且其分光效率在晶格区域内具有预定的分布。 来自衍射晶格的衍射光被引导到光电检测器。

公开(公告)号：US4265522A

公开(公告)日：1981-05-05

申请号：US33687

申请日：1979-04-26

申请人： Kazuya Matsumoto ,  Susumu Matsumura ,  Noriyuki Nose ,  Youichi Okuno

发明人： Kazuya Matsumoto ,  Susumu Matsumura ,  Noriyuki Nose ,  Youichi Okuno

IPC分类号： G03B17/20 ,  G03H1/00 ,  G03H1/04 ,  G03H1/22

CPC分类号： G03H1/22 ,  G03H1/0248 ,  G03H1/0406 ,  G03H1/0408 ,  G03H1/2249 ,  G03H1/265 ,  G03H2001/221 ,  G03H2001/2231 ,  G03H2001/2234 ,  G03H2001/2284 ,  G03H2001/2615 ,  G03H2210/20 ,  G03H2222/34 ,  G03H2227/02 ,  G03H2240/11

摘要： A camera having a holographic indicator in which a reconstructed image of hologram and an image of an object formed by an image forming optical system are formed on the same plane, so that the reconstructed image and the object's image can be observed at the same diopter through a common observation optical system.

摘要翻译： 具有全息指示器的照相机，其中在同一平面上形成全息图的重建图像和由图像形成光学系统形成的物体的图像，使得可以以相同的屈光度来观察重建图像和物体的图像 常见的观察光学系统。