Method for manufacturing silicon carbide semiconductor device
    26.
    发明授权
    Method for manufacturing silicon carbide semiconductor device 有权
    碳化硅半导体器件的制造方法

    公开(公告)号:US07763504B2

    公开(公告)日:2010-07-27

    申请号:US12071186

    申请日:2008-02-19

    Abstract: A manufacturing method of a silicon carbide semiconductor device includes the steps of: preparing a semiconductor substrate including a silicon carbide substrate, a drift layer and a first semiconductor layer; forming a plurality of first trenches in a cell portion; forming a gate layer on an inner wall of each first trench by an epitaxial growth method; forming a first insulation film on the surface of the semiconductor substrate; forming a gate electrode on the first insulation film for connecting to the gate layer electrically; forming a source electrode on the first insulation film for connecting to the first semiconductor layer in the cell portion; and forming a drain electrode connected to the silicon carbide substrate electrically.

    Abstract translation: 碳化硅半导体器件的制造方法包括以下步骤:制备包括碳化硅衬底,漂移层和第一半导体层的半导体衬底; 在单元部分中形成多个第一沟槽; 通过外延生长法在每个第一沟槽的内壁上形成栅极层; 在所述半导体衬底的表面上形成第一绝缘膜; 在所述第一绝缘膜上形成用于电连接到所述栅极层的栅电极; 在所述第一绝缘膜上形成用于连接到所述单元部分中的所述第一半导体层的源电极; 以及电连接到所述碳化硅衬底的漏电极。

    Modular force sensor
    27.
    发明授权
    Modular force sensor 有权
    模块式力传感器

    公开(公告)号:US07752920B2

    公开(公告)日:2010-07-13

    申请号:US11553303

    申请日:2006-10-26

    Abstract: A modular force sensor apparatus, method, and system are provided to improve force and torque sensing and feedback to the surgeon performing a telerobotic surgery. In one embodiment, a modular force sensor includes a tube portion including a plurality of strain gauges, a proximal tube portion for operably coupling to a shaft of a surgical instrument that may be operably coupled to a manipulator arm of a robotic surgical system, and a distal tube portion for proximally coupling to a wrist joint coupled to an end portion.

    Abstract translation: 提供了一种模块式力传感器装置,方法和系统,以改善对外科医生执行远程外科手术的力和转矩检测和反馈。 在一个实施例中,模块化力传感器包括包括多个应变计的管部分,用于可操作地联接到外科器械的轴的近侧管部分,其可操作地联接到机器人手术系统的操纵臂,以及 用于向近侧联接到联接到端部的腕关节的远端管部分。

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