公开(公告)号：US06752584B2

公开(公告)日：2004-06-22

申请号：US09875300

申请日：2001-06-05

申请人： Daniel J. Woodruff ,  Randy Harris

发明人： Daniel J. Woodruff ,  Randy Harris

IPC分类号： B66C2300

CPC分类号： B25J5/02 ,  B25J9/042 ,  B25J18/02 ,  H01L21/67173 ,  H01L21/67259 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/67769 ,  H01L21/67781 ,  H01L21/68707 ,  Y10T74/20317

摘要： Transfer devices for handling microelectronic workpieces, apparatus for processing microelectronic workpieces, and methods for manufacturing and using such transfer devices. One embodiment of a transfer device includes a transport unit configured to move along a linear track and a lift assembly carried by the transport unit. The transfer device can also include an arm assembly having an arm actuator carried by the lift assembly to move along a lift path and an arm carried by the arm actuator to rotate about the lift path. The arm can include a first extension projecting from one side of the lift path and a second extension projecting from another side of the lift path. The arm actuator can rotate the arm about the lift path. The transfer device can also include a first end-effector and a second end-effector. The first end-effector is rotatably coupled to the first section of the arm to rotate about a first rotation axis, and the second end-effector is rotatably coupled to the second extension of the arm to rotate about a second rotation axis. The first and second rotation axes can be generally parallel to the lift path, which itself can be substantially vertical, and the first and second end-effectors can be at different elevations relative to the arm.

摘要翻译： 用于处理微电子工件的转移装置，用于处理微电子工件的装置，以及用于制造和使用这种转移装置的方法。 传送装置的一个实施例包括传送单元，其构造成沿着线性轨道和由传送单元承载的升降组件移动。 传送装置还可以包括臂组件，其具有由提升组件承载的臂致动器，以沿着提升路径移动，以及由臂致动器承载的臂围绕提升路径旋转。 臂可以包括从提升路径的一侧突出的第一延伸部和从提升路径的另一侧突出的第二延伸部。 手臂致动器可以围绕提升路径旋转手臂。 转移装置还可以包括第一末端执行器和第二末端执行器。 第一端部执行器可旋转地联接到臂的第一部分以围绕第一旋转轴线旋转，并且第二端部执行器可旋转地联接到臂的第二延伸部以围绕第二旋转轴线旋转。 第一和第二旋转轴线可以大致平行于提升路径，其本身可以是大致垂直的，并且第一和第二端部执行器可以相对于臂处于不同的高度。

公开(公告)号：US06464109B1

公开(公告)日：2002-10-15

申请号：US09826657

申请日：2001-04-05

申请人： Randy Harris

发明人： Randy Harris

IPC分类号： B67D564

CPC分类号： G01F11/026 ,  B05C17/01

摘要： A caulking gun and support device comprises a base member for providing stability to the device and for mounting over a surface. A supporting arm extends upwardly from the base member. A caulking gun for receiving a receptacle containing caulking material is mounted on the supporting arm. An adjustment mechanism for selectively positioning and securing the caulking gun is also provided.

摘要翻译： 铆接枪和支撑装置包括用于提供对装置的稳定性并用于安装在表面上的基座构件。 支撑臂从基部构件向上延伸。 用于接收容纳铆接材料的容器的铆接枪安装在支撑臂上。 还提供了一种用于选择性地定位和固定铆接枪的调节机构。

公开(公告)号：US20060009047A1

公开(公告)日：2006-01-12

申请号：US11056704

申请日：2005-02-11

申请人： Paul Wirth ,  Jeffry Davis ,  Randy Harris

发明人： Paul Wirth ,  Jeffry Davis ,  Randy Harris

IPC分类号： H01L21/00

CPC分类号： H01L21/67173 ,  H01L21/67098 ,  H01L21/67196 ,  H01L21/67775

摘要： A modular apparatus for thermally processing a microelectronic workpiece is provided. The modular apparatus comprises a mounting module having a rotatable carousel assembly configured to support at least one workpiece. A driver is coupled to the carousel assembly and rotates the carousel assembly, moving the workpiece between a loading station, a heating station and a cooling station. The thermal processing modular apparatus has a front docking unit for removeably connecting it to a load/unload module and a rear docking unit for removeably connecting it to a wet chemical processing tool, or another tool for otherwise processing a workpiece. A transport system (i.e., robot) services the modular tool units that can be automatically calibrated to work with individual processing components of the tool units.

摘要翻译： 提供了一种用于热处理微电子工件的模块化装置。 模块化装置包括安装模块，该安装模块具有构造成支撑至少一个工件的可旋转转盘组件。 驱动器联接到转盘组件并旋转转盘组件，在加载站，加热站和冷却站之间移动工件。 热处理模块化装置具有用于可移除地将其连接到装载/卸载模块的前对接单元和用于将其可移除地连接到湿式化学处理工具的后对接单元，或用于另外处理工件的另一工具。 运输系统（即，机器人）为可自动校准的模块化工具单元提供服务，以与工具单元的各个处理部件一起工作。

公开(公告)号：US20050061438A1

公开(公告)日：2005-03-24

申请号：US10860593

申请日：2004-06-03

申请人： Jeffry Davis ,  Randy Harris

发明人： Jeffry Davis ,  Randy Harris

IPC分类号： B01D63/00 ,  C23F1/00 ,  C25D17/00 ,  G01M3/04

CPC分类号： H01L21/6723 ,  B01D61/425 ,  C25D17/00 ,  H01L21/67005 ,  H01L21/6719 ,  H01L21/67742 ,  H01L21/68707

摘要： An integrated tool that enables wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These tools are expected to reduce the down time associated with repairing or maintaining processing chambers and/or lift-rotate units so that the tools can maintain a high throughput. Several aspects of these tools are particularly useful for applications that have stringent performance requirements because components are more likely to require maintenance more frequently, and reducing the down time associated with maintaining such components will significantly enhance the integrated tool.

摘要翻译： 集成的工具，使湿化学处理室，提升 - 旋转单元和其他硬件能够快速互换，而无需重新校准运输系统或其他组件到更换项目。 预计这些工具可以减少与修理或维护处理室和/或提升旋转单元相关联的停机时间，从而使工具能够保持高通量。 这些工具的几个方面对于具有严格性能要求的应用程序特别有用，因为组件更有可能需要更频繁的维护，并且减少与维护这些组件相关联的停机时间将显着增强集成工具。

公开(公告)号：US20050034809A1

公开(公告)日：2005-02-17

申请号：US10861240

申请日：2004-06-03

申请人： Daniel Woodruff ,  Jeffry Davis ,  Randy Harris ,  David Mattson ,  James Erickson ,  Matthew Egloff

发明人： Daniel Woodruff ,  Jeffry Davis ,  Randy Harris ,  David Mattson ,  James Erickson ,  Matthew Egloff

IPC分类号： B24B20060101 ,  C12N15/31 ,  C23F1/00 ,  H01L21/00

CPC分类号： H01L21/6719

摘要： An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These tools are expected to reduce the down time associated with repairing or maintaining processing chambers and/or lift-rotate units so that the tools can maintain a high throughput. Several aspects of these tools are particularly useful for applications that have stringent performance requirements because components are more likely to require maintenance more frequently, and reducing the down time associated with maintaining such components will significantly enhance the integrated tool.

摘要翻译： 集成的工具和自动校准系统，使湿化学处理室，提升 - 旋转单元和其他硬件能够快速互换，而无需重新校准运输系统或其他组件到更换项目。 预计这些工具可以减少与修理或维护处理室和/或提升旋转单元相关联的停机时间，从而使工具能够保持高通量。 这些工具的几个方面对于具有严格性能要求的应用程序特别有用，因为组件更有可能需要更频繁的维护，并且减少与维护这些组件相关联的停机时间将显着增强集成工具。

公开(公告)号：US06749391B2

公开(公告)日：2004-06-15

申请号：US10080910

申请日：2002-02-22

申请人： Daniel J. Woodruff ,  Randy Harris

发明人： Daniel J. Woodruff ,  Randy Harris

IPC分类号： B66C2300

CPC分类号： H01L21/67173 ,  B25J5/02 ,  B25J9/042 ,  B25J18/02 ,  C25D7/123 ,  C25D17/001 ,  H01L21/67259 ,  H01L21/67742 ,  H01L21/67769 ,  H01L21/67781 ,  H01L21/68707

摘要： Microelectronic workpiece transfer devices and methods for using such transfer devices. One embodiment of a transfer device includes a transport unit configured to move along a linear track and a lift assembly carried by the transport unit. The transfer device can also include an arm assembly having an arm actuator carried by the lift assembly to move along a lift path and an arm carried by the arm actuator to rotate about the lift path. The arm can include an extension projecting from one side of the lift path. The arm actuator can rotate the arm about the lift path. The transfer device can also include a first end-effector and a second end-effector. The end-effectors are rotatably coupled to the extension of the arm and can rotate independently about a common axis, with the first and second end-effectors at different elevations relative to the arm.

摘要翻译： 微电子工件传送装置和使用这种传送装置的方法。 传送装置的一个实施例包括传送单元，其构造成沿着线性轨道和由传送单元承载的升降组件移动。 传送装置还可以包括臂组件，其具有由提升组件承载的臂致动器，以沿着提升路径移动，以及由臂致动器承载的臂围绕提升路径旋转。 臂可以包括从升降路径的一侧突出的延伸部。 手臂致动器可以围绕提升路径旋转手臂。 转移装置还可以包括第一末端执行器和第二末端执行器。 端部执行器可旋转地联接到臂的延伸部并且可以围绕公共轴线独立地旋转，第一和第二端部执行器相对于臂处于不同的高度。

公开(公告)号：US06749390B2

公开(公告)日：2004-06-15

申请号：US09875428

申请日：2001-06-05

申请人： Daniel J. Woodruff ,  Randy Harris

发明人： Daniel J. Woodruff ,  Randy Harris

IPC分类号： B66C2300

CPC分类号： H01L21/67173 ,  B25J5/02 ,  H01L21/6723 ,  H01L21/67259 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/67769 ,  H01L21/67781 ,  H01L21/68707 ,  Y10T74/20317

摘要： Transfer devices for handling microelectronic workpieces, apparatus for processing microelectronic workpieces, and methods for manufacturing and using such transfer devices. One embodiment of a transfer device includes a transport unit configured to move along a linear track and a lift assembly carried by the transport unit. The transfer device can also include an arm assembly having an arm actuator carried by the lift assembly to move along a lift path and an arm carried by the arm actuator to rotate about the lift path. The arm can include a first extension projecting from one side of the lift path and a second extension projecting from another side of the lift path. The arm actuator can rotate the arm about the lift path. The transfer device can also include a first end-effector and a second end-effector. The first end-effector is rotatably coupled to the first section of the arm to rotate about a first rotation axis, and the second end-effector is rotatably coupled to the second extension of the arm to rotate about a second rotation axis. The first and second rotation axes can be generally parallel to the lift path, which itself can be substantially vertical, and the first and second end-effectors can be at different elevations relative to the arm.

摘要翻译： 用于处理微电子工件的转移装置，用于处理微电子工件的装置，以及制造和使用这种转移装置的方法。 传送装置的一个实施例包括传送单元，其构造成沿着线性轨道和由传送单元承载的升降组件移动。 传送装置还可以包括臂组件，其具有由提升组件承载的臂致动器，以沿着提升路径移动，以及由臂致动器承载的臂围绕提升路径旋转。 臂可以包括从提升路径的一侧突出的第一延伸部和从提升路径的另一侧突出的第二延伸部。 手臂致动器可以围绕提升路径旋转手臂。 转移装置还可以包括第一末端执行器和第二末端执行器。 第一端部执行器可旋转地联接到臂的第一部分以围绕第一旋转轴线旋转，并且第二端部执行器可旋转地联接到臂的第二延伸部以围绕第二旋转轴线旋转。 第一和第二旋转轴线可以大致平行于提升路径，其本身可以是大致垂直的，并且第一和第二端部执行器可以相对于臂处于不同的高度。

公开(公告)号：US06575689B2

公开(公告)日：2003-06-10

申请号：US10159879

申请日：2002-05-29

申请人： Randy Harris ,  David Peterson ,  Jeffry Davis

发明人： Randy Harris ,  David Peterson ,  Jeffry Davis

IPC分类号： B65B2102

CPC分类号： H01L21/67057 ,  Y10S134/902 ,  Y10S414/135 ,  Y10S414/138

摘要： A process system for processing semiconductor wafers includes a stocker module, and immersion module, and a process module. A process robot moves on a lateral rail to transfer wavers between the modules. The immersion module is separated from the other modules, to avoid transmission of vibration. Immersion tanks are radially positioned within the immersion module, to provide a compact design. An immersion robot moves batches of wafers on an end effector between the immersion tanks. The end effector may be detachable from the immersion robot, so that the immersion robot can move a second batch of wafers, while the first batch of wafers undergoes an immersion process.