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    High-sensitivity, z-axis micro-electro-mechanical detection structure, in particular for an MEMS accelerometer
    23.
    发明授权
    High-sensitivity, z-axis micro-electro-mechanical detection structure, in particular for an MEMS accelerometer 有权
    高灵敏度，z轴微机电检测结构，特别适用于MEMS加速度计

    公开(公告)号：US09513310B2

    公开(公告)日：2016-12-06

    申请号：US14220979

    申请日：2014-03-20

    Applicant: STMicroelectronics S.r.l.

    Inventor： Leonardo Baldasarre ,  Alessandro Tocchio ,  Sarah Zerbini

    IPC: G01P15/125 ,  G01P15/08

    CPC classification number: G01P15/125 ,  G01P2015/0831 ,  G01P2015/0837

    Abstract: A z-axis micro-electro-mechanical detection structure, having a substrate defining a plane and a suspended mass carried by two anchorage elements. The suspended mass includes a translating mass, suspended over the substrate, mobile in a transverse direction to the plane and arranged between the anchorage elements and two tilting masses, each of which is supported by the anchorage elements through respective elastic anchorage elements so as to be able to rotate with respect to respective oscillation axes. The oscillation axes are parallel to each other to enable a translation movement of the translating mass. Fixed electrodes face at a distance the tilting masses or the translating mass so as to be able to detect displacement of the suspended mass as a result of external forces. Elastic supporting elements are arranged between the translating mass and the tilting masses to enable relative rotation between the translating mass and the tilting masses.

    Abstract translation: z轴微电子机械检测结构，其具有限定平面的基板和由两个锚固元件承载的悬架。 悬挂质量包括悬挂在基板上的平移质量块，在横向方向移动到平面并且布置在锚固元件和两个倾斜块之间，每个倾斜块通过相应的弹性锚固元件由锚固元件支撑，以便是 能够相对于各个摆动轴线旋转。 振荡轴线彼此平行，以便平移质量的平移运动。 固定电极面对倾斜质量或平移质量的距离，以便能够检测由于外力而导致的悬浮质量的位移。 弹性支撑元件设置在平移质量块和倾斜质量块之间，以实现平移质量块与倾斜质量块之间的相对旋转。

    Microelectromechanical gyroscope with rotary driving motion and improved electrical properties
    24.
    发明授权
    Microelectromechanical gyroscope with rotary driving motion and improved electrical properties 有权

    公开(公告)号：US09470526B2

    公开(公告)日：2016-10-18

    申请号：US14266676

    申请日：2014-04-30

    Applicant: STMicroelectronics S.r.l.

    Inventor： Luca Coronato ,  Gabriele Cazzaniga ,  Sarah Zerbini

    IPC: G01C19/56 ,  G01C19/5712

    CPC classification number: G01C19/56 ,  G01C19/5712 ,  Y10T29/49002

    Abstract: An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.

    High sensitivity microelectromechanical sensor with driving motion
    25.
    再颁专利
    High sensitivity microelectromechanical sensor with driving motion 有权
    具有驱动运动的高灵敏度微机电传感器

    公开(公告)号：USRE45792E1

    公开(公告)日：2015-11-03

    申请号：US14062687

    申请日：2013-10-24

    Applicant: STMicroelectronics S.r.l.

    Inventor： Luca Coronato ,  Alessandro Balzelli Ludovico ,  Sarah Zerbini

    IPC: G01C19/56 ,  G01C19/5712

    CPC classification number: G01C19/5712 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/0828

    Abstract: A driving mass of an integrated microelectromechanical structure is moved with a rotary motion about an axis of rotation, and a sensing mass is connected to the driving mass via elastic supporting elements so as to perform a detection movement in the presence of an external stress. The driving mass is anchored to an anchorage arranged along the axis of rotation by elastic anchorage elements. An opening is provided within the driving mass and the sensing mass is arranged within the opening. The elastic supporting and anchorage elements render the sensing mass fixed to the driving mass in the rotary motion, and substantially decoupled from the driving mass in the detection movement. The detection movement is a rotation about an axis lying in a plane. The sensing mass has, in plan view, a non-rectangular shape; in particular, the sensing mass has a radial geometry and, in plan view, the overall shape of a radial annulus sector.

    Abstract translation: 集成微电子机械结构的驱动质量以围绕旋转轴线的旋转运动移动，并且感测质量块经由弹性支撑元件连接到驱动质量块，以便在存在外部应力的情况下执行检测运动。 驱动质量块通过弹性锚固元件锚固到沿旋转轴线布置的锚固件。 在驱动质量块内提供一个开口，并且传感块布置在开口内。 弹性支撑和锚固元件使得感测质量在旋转运动中固定到驱动质量块，并且在检测运动中基本上与驱动质量分离。 检测运动是围绕位于平面中的轴的旋转。 在平面图中，感测质量具有非矩形形状; 特别地，感测质量具有径向几何形状，并且在平面图中是径向环形扇区的整体形状。

    MICROELECTROMECHANICAL GYROSCOPE WITH ROTARY DRIVING MOTION AND IMPROVED ELECTRICAL PROPERTIES
    26.
    发明申请
    MICROELECTROMECHANICAL GYROSCOPE WITH ROTARY DRIVING MOTION AND IMPROVED ELECTRICAL PROPERTIES 审中-公开
    具有旋转驱动运动的微电子陀螺仪和改进的电气特性

    公开(公告)号：US20140230548A1

    公开(公告)日：2014-08-21

    申请号：US14266676

    申请日：2014-04-30

    Applicant: STMicroelectronics S.r.l.

    Inventor： Luca Coronato ,  Gabriele Cazzaniga ,  Sarah Zerbini

    IPC: G01C19/56

    CPC classification number: G01C19/56 ,  G01C19/5712 ,  Y10T29/49002

    Abstract: An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.

    Abstract translation: 集成的微机电结构设置有：具有衬底和框架的管芯，在其内部限定检测区域，并具有沿第一轴线延伸的第一侧面; 固定在基板上的驱动质量块，设置在检测区域中，并被设计成在垂直轴线的致动运动的平面内旋转; 以及第一对和第二对第一感测质量块，其通过弹性支撑元件悬挂在驱动质量块内，以便在致动运动中相对于其固定，以便执行从平面中的旋转检测移动 响应于第一角速度; 其中第一对的第一感测质量和第二对的第一感测质量体在相对于第一轴线具有相反符号的非零倾斜的相应方向上对齐。

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