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公开(公告)号：US10527512B2
公开(公告)日：2020-01-07
申请号：US15783894
申请日：2017-10-13
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Alberto Pagani , Bruno Murari , Marco Ferrera , Domenico Giusti , Daniele Caltabiano
Abstract: A pressure sensor with double measuring scale includes: a flexible body designed to undergo deflection as a function of a the pressure; piezoresistive transducers for detecting the deflection; a first focusing region designed to concentrate, during a first operating condition, a first value of the pressure in a first portion of the flexible body so as to generate a deflection of the first portion of the flexible body; and a second focusing region designed to concentrate, during a second operating condition, a second value of said pressure in a second portion of the flexible body so as to generate a deflection of the second portion of the flexible body. The piezoresistive transducers correlate the deflection of the first portion of the flexible body to the first pressure value and the deflection of the second portion of the flexible body to the second pressure value.
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22.发明授权公开(公告)号：US10175474B2
公开(公告)日：2019-01-08
申请号：US15165547
申请日：2016-05-26
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico Giusti , Roberto Carminati , Massimiliano Merli
Abstract: A micromechanical device includes a tiltable structure that is rotatable about a first rotation axis. The tiltable structure is coupled to a fixed structure through an actuation structure of a piezoelectric type. The actuation structure is formed by spring elements having a spiral shape. The spring elements each include actuation arms extending transversely to the first rotation axis. Each actuation arm carries a respective piezoelectric band of piezoelectric material. The actuation arms are divided into two sets with the piezoelectric bands thereof biased in phase opposition to obtain rotation in opposite directions of the tiltable structure about the first rotation axis.
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公开(公告)号：US20180236445A1
公开(公告)日：2018-08-23
申请号：US15726169
申请日：2017-10-05
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico Giusti , Mauro Pasetti
CPC classification number: B41J2/14233 , B41J2/04541 , B41J2/04581 , B41J2/14201 , B41J2002/14241 , B41J2002/1437 , B41J2002/14459 , B41J2202/13
Abstract: A microfluidic device, having a containment body accommodating a plurality of ejecting elements arranged adjacent to each other. Each ejecting element has a liquid inlet, a containment chamber, a piezoelectric actuator and an ejection nozzle. The piezoelectric actuators of each ejecting element are connected to a control unit configured to generate actuation signals and to be integrated in the containment body.
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公开(公告)号：US20180190895A1
公开(公告)日：2018-07-05
申请号：US15638195
申请日：2017-06-29
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico Giusti , Anna Alessandri
CPC classification number: H01L41/0953 , B81B3/0018 , G02B26/0833 , H01G5/18 , H01G5/38 , H01H2057/006 , H01L41/094 , H01L41/0946 , H02N2/043 , H02N2/046
Abstract: A MEMS actuator device of a piezoelectric type formed on a substrate, with a base unit including a base beam element having a main extension in a extension plane and a thickness in a thickness direction perpendicular to the extension plane, smaller than the main extension. A piezoelectric region extends over the beam element. An anchor region is rigid to the base beam element and to the substrate. A base constraint structure is connected to one end of the base beam element and is configured to allow a deformation of the base beam element in the extension plane and substantially reduce a deformation of the base beam element in the thickness direction.
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25.发明申请公开(公告)号：US20170343430A1
公开(公告)日：2017-11-30
申请号：US15464869
申请日：2017-03-21
Applicant: STMicroelectronics S.r.l.
Inventor： Daniele Caltabiano , Mohammad Abbasi Gavarti , Bruno Murari , Roberto Brioschi , Domenico Giusti
IPC: G01L1/18
CPC classification number: G01L1/18 , G01L1/04 , G01L9/0041
Abstract: A load-sensing device is arranged in a package forming a chamber. The package has a deformable substrate configured, in use, to be deformed by an external force. A sensor unit is positioned in direct contact with the deformable substrate and is configured to detect deformations of the deformable substrate. An elastic element within of the chamber is arranged to act between the package and the sensor unit to generate, on the sensor unit, a force keeping the sensor unit in contact with the deformable substrate. The deformable substrate may be a base of the package, and the elastic element may be a metal lamina arranged between the lid of the package and the sensor unit. The sensor unit may be a semiconductor die integrating piezoresistors.
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Patent Agency Ranking
26.发明申请公开(公告)号：US20170155879A1
公开(公告)日：2017-06-01
申请号：US15162367
申请日：2016-05-23
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico Giusti , Roberto Carminati
CPC classification number: H04N9/3135 , B81B3/0045 , G02B7/1821 , G02B26/0858 , G02B26/101 , G02B26/105 , H04N9/3173
Abstract: A MEMS device includes a fixed structure and a mobile structure with a reflecting element coupled to the fixed structure through at least a first deformable structure and a second deformable structure. Each of the first and second deformable structures includes a respective number of main piezoelectric elements, with the main piezoelectric elements of the first and second deformable structures configured to be electrically controlled for causing oscillations of the mobile structure about a first axis and a second axis, respectively. The first deformable structure further includes a respective number of secondary piezoelectric elements configured to be controlled so as to vary a first resonance frequency of the mobile structure about the first axis.
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公开(公告)号：US20170151784A1
公开(公告)日：2017-06-01
申请号：US15191154
申请日：2016-06-23
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico Giusti , Lorenzo Colombo , Carlo Luigi Prelini , Mauro Cattaneo
CPC classification number: B41J2/14201 , B41J2/14233 , B41J2/1607 , B41J2/161 , B41J2/1623 , B41J2/1626 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2002/14241 , B41J2002/14411 , B41J2202/12
Abstract: A fluid ejection device, comprising: a first semiconductor body including an actuator, which is operatively coupled to a chamber for containing the fluid and is configured to cause ejection of the fluid; and a channel for inlet of the fluid, which extends in a first direction and has a section having a first dimension; and a second semiconductor body, which is coupled to the first semiconductor body and has an ejection nozzle configured to expel the fluid. The second semiconductor body further comprises a first restriction channel, which is fluidically coupled to the inlet channel, extends in a second direction orthogonal to the first direction and has a respective section with a second dimension smaller than the first dimension so as to form a restriction between the inlet channel and the chamber.
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公开(公告)号：US09561650B2
公开(公告)日：2017-02-07
申请号：US14976445
申请日：2015-12-21
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico Giusti , Daniele Prati
CPC classification number: B41J2/14064 , B41J2/14056 , B41J2/14072 , B41J2/1412 , B41J2/14129 , B41J2002/14403 , B41J2202/11 , Y10T29/49352
Abstract: The present disclosure is directed to a microfluidic die that includes a first larger heater and a second smaller heater is a single chamber. The first heater is configured to form a primary bubble that ejects fluid from a nozzle associated with the chamber. The second heater is configured to form a secondary bubble to prevent blow back caused when the primary bubble bursts and ejects fluid from the nozzle. The first and second heater may be coupled to a single input trace and a single ground trace.
Abstract translation: 本公开涉及包括第一较大加热器并且第二较小加热器是单室的微流体管芯。 第一加热器被配置成形成从与腔室相关联的喷嘴喷出流体的初级气泡。 第二加热器构造成形成二次气泡，以防止当初级泡沫从喷嘴中喷出并喷射流体时引起的回吹。 第一和第二加热器可以耦合到单个输入迹线和单个接地迹线。
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公开(公告)号：US11971284B2
公开(公告)日：2024-04-30
申请号：US17204664
申请日：2021-03-17
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Gabriele Gattere , Francesco Rizzini , Luca Guerinoni , Lorenzo Corso , Domenico Giusti
IPC: G01F1/84
CPC classification number: G01F1/8472 , G01F1/8404
Abstract: Embodiments of a Coriolis-force-based flow sensing device and embodiments of methods for manufacturing embodiments of the Coriolis-force-based flow sensing device, comprising the steps of: forming a driving electrode; forming, on the driving electrode, a first sacrificial region; forming, on the first sacrificial region, a first structural portion with a second sacrificial region buried therein; forming openings for selectively etching the second sacrificial region; forming, within the openings, a porous layer having pores; removing the second sacrificial region through the pores of the porous layer, forming a buried channel; growing, on the porous layer and not within the buried channel, a second structural portion that forms, with the first structural region, a structural body; selectively removing the first sacrificial region thus suspending the structural body on the driving electrode.
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30.发明授权公开(公告)号：US11818957B2
公开(公告)日：2023-11-14
申请号：US16746676
申请日：2020-01-17
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico Giusti , Irene Martini
CPC classification number: H10N30/2047 , B81B2201/032 , B81B2203/0127
Abstract: A MEMS optical device having an optically active portion and an actuation portion adjacent to each other. The MEMS optical device includes a body, a piezoelectric actuator, and a cap. The body is formed by a substrate, housing a cavity containing a fluid and by a deformable region fixed to the substrate, suspended over the cavity and forming a membrane. The piezoelectric actuator extends on the deformable region at the actuation portion and is protected by the cap, which is coupled to the body at the actuation portion and defines a chamber that houses the piezoelectric actuator.
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