摘要:
By using a high purity target as a target, using a single gas, argon (Ar), as a sputtering gas, setting the substrate temperature at 300° C. or less, setting the sputtering power from 1 kW to 9 kW, and setting the sputtering gas pressure from 1.0 Pa to 3.0 Pa, the film stress of a film is made from −1×1010 dyn/cm2 to 1×1010 dyn/cm2. By thus using a conducting film in which the amount of sodium contained within the film is equal to or less than 0.03 ppm, preferably equal to or less than 0.01 ppm, and having a low electrical resistivity (equal to or less than 40 μΩ·cm), as a gate wiring material and a material for other wirings of a TFT, the operating performance and the reliability of a semiconductor device provided with the TFT can be increased.
摘要翻译:通过使用高纯度靶作为目标,使用单一气体氩(Ar)作为溅射气体,将衬底温度设定在300℃以下,将溅射功率设定为1kW至9kW,并设定 溅射气体压力为1.0Pa至3.0Pa,膜的膜应力由-1×10 10 / cm 2至1×10 10 / > dyn / cm 2。 通过这样使用导电膜,其中膜中所含的钠的量等于或小于0.03ppm,优选等于或小于0.01ppm,并具有低电阻率(等于或小于40μΩ·cm ),作为栅极布线材料和TFT的其他配线的材料,可以提高设置有TFT的半导体器件的操作性能和可靠性。
摘要:
By using a high purity target as a target, using a single gas, argon (Ar), as a sputtering gas, setting the substrate temperature at 300° C. or less, setting the sputtering power from 1 kW to 9 kW, and setting the sputtering gas pressure from 1.0 Pa to 3.0 Pa, the film stress of a film is made from −1×1010 dyn/cm2 to 1×1010 dyn/cm2. By thus using a conducting film in which the amount of sodium contained within the film is equal to or less than 0.03 ppm, preferably equal to or less than 0.01 ppm, and having a low electrical resistivity (equal to or less than 40 &mgr;&OHgr;·cm), as a gate wiring material and a material for other wirings of a TFT, the operating performance and the reliability of a semiconductor device provided with the TFT can be increased.
摘要翻译:通过使用高纯度靶作为目标,使用单一气体氩(Ar)作为溅射气体,将衬底温度设定在300℃以下,将溅射功率设定为1kW至9kW,并设定 溅射气体压力为1.0Pa至3.0Pa,膜的膜应力由-1×10 10 dyn / cm 2至1×10 10 dyn / cm 2制成。 通过这样使用导电膜,其中膜中所含的钠的量等于或小于0.03ppm,优选等于或小于0.01ppm,并具有低电阻率(等于或小于40μΩ·cm ),作为栅极布线材料和TFT的其他配线的材料,可以提高设置有TFT的半导体器件的操作性能和可靠性。
摘要:
Disclosed is a production method of a lithium tetrafluoroborate solution for use as a lithium battery electrolytic solution, including: a reaction step of forming lithium tetrafluoroborate by reaction of lithium fluoride and boron trifluoride in a chain carbonate ester solvent and thereby obtaining a reaction solution of the lithium tetrafluoroborate dissolved in the chain carbonate ester solvent; a water removal step of adding a water removing agent to the reaction solution; an acidic impurity removal step of removing an acidic impurity component from the reaction solution by concentrating the reaction solution after the water removal step; and a dilution step of diluting the concentrated solution after the acidic impurity removal step. It is possible by this method to obtain the lithium tetrafluoroborate solution whose acidic impurity content and water content are reduced to be 50 mass ppm or lower and 15 mass ppm or lower, respectively.
摘要:
There is provided a method for producing an electrolyte solution for lithium ion batteries, in which lithium hexafluorophosphate is used as an electrolyte, comprising the steps of (a) reacting phosphorus trichloride, chlorine and lithium chloride in a nonaqueous organic solvent; and (b) reacting a reaction product of the step (a) formed in the solvent, with hydrogen fluoride.
摘要:
Disclosed is a production method of a lithium tetrafluoroborate solution for use as a lithium battery electrolytic solution, including: a reaction step of forming lithium tetrafluoroborate by reaction of lithium fluoride and boron trifluoride in a chain carbonate ester solvent and thereby obtaining a reaction solution of the lithium tetrafluoroborate dissolved in the chain carbonate ester solvent; a water removal step of adding a water removing agent to the reaction solution; an acidic impurity removal step of removing an acidic impurity component from the reaction solution by concentrating the reaction solution after the water removal step; and a dilution step of diluting the concentrated solution after the acidic impurity removal step. It is possible by this method to obtain the lithium tetrafluoroborate solution whose acidic impurity content and water content are reduced to be 50 mass ppm or lower and 15 mass ppm or lower, respectively.
摘要:
Disclosed is a container that is capable of maintaining articles requiring thermal management at a prescribed temperature without being influenced by the outside air temperature, and that is capable of storing and transporting the articles. The constant-temperature storage container is equipped with a heat-insulating box, and two or more types of cold-storing materials or heat-storing materials disposed therein; has a latent-heat first cold-storing or heat-storing material (a) disposed in a solid state adjacent to an article being kept cool or warm, and a latent-heat second cold-storing or heat-storing material (b) disposed in a molten state on the exterior of the first cold-storing or heat-storing material (a); and the solidifying and melting temperature of the first cold-storing or heat-storing material (a) exceeds 0° C. The constant-temperature storage container is capable of maintaining the article being kept cool or warm in an arbitrary temperature range exceeding 0° C. for long periods of time.
摘要:
In a structure where an electronic component is mounted on a glass base material, an external electrode is provided on an opposite side to the component mounted on the base, and a through electrode and the base are welded to each other at a temperature equal to or higher than a glass softening point, electrical conduction is ensured between the electronic component and the external electrode. An electronic device includes a base, a through electrode which pass through the base and has a metal film formed on both end surfaces after an insulating material on the surface is removed by polishing, an electronic component which is provided on one surface of the through electrode through a connection portion, an external electrode which is provided on an opposite side to a side of the base on which the electronic component is provided, and a cap which protects the electronic component on the base.
摘要:
To provide an improved solderability for mounting an electronic component onto a circuit board, a package of an electronic component (1) is formed by bonding together a base (3) made of glass and a lid (2). Outer electrodes (8) and (18) are formed on a bottom surface of the base (3), and the outer electrodes (8) and (18) are respectively connected to through electrodes (7) and (17). The outer electrodes (8) and (18) each have a laminated structure of three CrAu layers, that is, from a Cr layer (first layer) to an Au layer (sixth layer). When the outer electrodes (8) and (18) are soldered onto a circuit board, the Au layers as the second, fourth, and sixth layers are dissolved into solder, whereas the Cr layers as the third and fifth layers, which hardly form an intermetallic compound with solder, are separated to remain in solder.
摘要:
A control system includes a remote control apparatus and a controlled apparatus controlled by the remote control apparatus. The controlled apparatus is connected to first and second external apparatuses. The controlled apparatus includes a receiving unit and a control unit. The receiving unit receives a remote control signal from the remote control apparatus. The control unit (a) selects one of the first and second external apparatuses according to the remote control signal, (b) checks an operating state of the selected external apparatus before the controlled apparatus transmits a control command corresponding to the remote control signal to the selected external apparatus, and (c) controls the controlled apparatus to transmit the control command to the selected external apparatus if it is determined from the checked operating state that the control command can be transmitted to the selected external apparatus.
摘要:
A laser diode which can be easily assembled at low material cost is provided. A first light emitting device having a laser structure on a substrate, a second light emitting device having laser structures on a substrate, and a support base are provided. The first light emitting device and the second light emitting device are layered in this order on the support base in a manner that the respective laser structures of the first light emitting device and the second light emitting device are opposed to each other. A substrate side of the first light emitting device and a laser structure side of the second light emitting device are electrically connected to the support base.