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公开(公告)号:US20200105675A1
公开(公告)日:2020-04-02
申请号:US16292348
申请日:2019-03-05
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Chen-Hua Yu , Chun-Lin Lu , Han-Ping Pu , Kai-Chiang Wu
IPC: H01L23/538 , H01L23/00 , H01L23/31 , H01L23/522 , H01L23/528 , H01L25/18 , H01L21/56
Abstract: A package structure includes an insulating encapsulation, at least one semiconductor die, a redistribution circuit structure, and first reinforcement structures. The at least one semiconductor die is encapsulated in the insulating encapsulation. The redistribution circuit structure is located on the insulating encapsulation and electrically connected to the at least one semiconductor die. The first reinforcement structures are embedded in the redistribution circuit structure. A shape of the package structure includes a polygonal shape on a vertical projection along a stacking direction of the insulating encapsulation and the redistribution circuit structure, and the first reinforcement structures are located on and extended along diagonal lines of the package structure.
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公开(公告)号:US20190355694A1
公开(公告)日:2019-11-21
申请号:US16524146
申请日:2019-07-28
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Albert Wan , Ching-Hua Hsieh , Chung-Hao Tsai , Chuei-Tang Wang , Chao-Wen Shih , Han-Ping Pu , Chien-Ling Hwang , Pei-Hsuan Lee , Tzu-Chun Tang , Yu-Ting Chiu , Jui-Chang Kuo
IPC: H01L23/00 , H01L23/66 , H01L21/768 , H01L23/31 , H01L23/538 , H01L21/48 , H01L25/065 , H01L21/56 , H01L25/00
Abstract: A method of manufacturing an integrated fan-out (InFO) package includes at least the following steps. A package array is formed. A dielectric layer having a core layer formed thereon is provided. The core layer includes a plurality of cavities penetrating through the core layer. The dielectric layer and the core layer are attached onto the package array such that the core layer is located between the dielectric layer and the package array. A plurality of first conductive patches is formed on the dielectric layer above the cavities.
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公开(公告)号:US20190355679A1
公开(公告)日:2019-11-21
申请号:US15980764
申请日:2018-05-16
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Kai-Chiang Wu , Han-Ping Pu , Yen-Ping Wang
IPC: H01L23/66 , H01L23/498 , H01L23/544 , H01L23/31 , H01L21/56
Abstract: A package structure includes a chip package and an antenna package. The chip package includes at least one semiconductor die and a first insulating encapsulation encapsulating the at least one semiconductor die. The antenna package is located on and electrically coupled to the chip package. The antenna package includes metallic patterns embedded in a second insulating encapsulation, wherein each of the metallic patterns has a first surface, a second surface opposite to the first surface and a side surface connecting the first surface and the second surface, wherein the first surface and the side surface of each of the metallic patterns are covered by the second insulating encapsulation, and the second surface is levelled and coplanar with a third surface of the second insulating encapsulation.
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公开(公告)号:US20190333877A1
公开(公告)日:2019-10-31
申请号:US15965995
申请日:2018-04-30
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Albert Wan , Ching-Hua Hsieh , Chao-Wen Shih , Han-Ping Pu , Meng-Tse Chen , Sheng-Hsiang Chiu
IPC: H01L23/66 , H01L23/522 , H01L21/56 , H01L23/31
Abstract: A semiconductor device including a chip package, a dielectric structure and a first antenna pattern is provided. The dielectric structure disposed on the chip package and includes a cavity and a vent in communication with the cavity. The first antenna pattern disposed on the dielectric structure, wherein the chip package is electrically coupled to the first antenna pattern, and the cavity of the dielectric structure is disposed between the chip package and the first antenna pattern. A manufacturing method of a semiconductor device is also provided.
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公开(公告)号:US20190096828A1
公开(公告)日:2019-03-28
申请号:US15717940
申请日:2017-09-28
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Kai-Chiang Wu , Chun-Lin Lu , Chao-Wen Shih , Han-Ping Pu , Nan-Chin Chuang
Abstract: A semiconductor package structure including an encapsulation body, an RFIC chip, a first antenna structure, and a second antenna structure is provided. The RFIC chip may be embedded in the encapsulation body. The first antenna structure may be disposed at a lateral side of the RFIC chip, electrically connected to the RFIC chip, and include a first conductor layer and a plurality of first patches opposite to the first conductor layer. The second antenna structure may be stacked on the RFIC chip, electrically connected to the RFIC chip, and include a second conductor layer and a plurality of second patches opposite to the second conductor layer. The first patches and the second patches are located at a surface of the encapsulation body. A first distance between the first conductor layer and the first patches is different from a second distance between the second conductor layer and the second patches.
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公开(公告)号:US20190067220A1
公开(公告)日:2019-02-28
申请号:US15690287
申请日:2017-08-30
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Albert Wan , Chung-Shi Liu , Chao-Wen Shih , Han-Ping Pu , Chien-Ling Hwang
Abstract: A package structure in accordance with some embodiments may include an RFIC chip, a redistribution circuit structure, a backside redistribution circuit structure, an isolation film, a die attach film, and an insulating encapsulation. The redistribution circuit structure and the backside redistribution circuit structure are disposed at two opposite sides of the RFIC chip and electrically connected to the RFIC chip. The isolation film is disposed between the backside redistribution circuit structure and the RFIC chip. The die attach film is disposed between the RFIC chip and the isolation film. The insulating encapsulation encapsulates the RFIC chip and the isolation film between the redistribution circuit structure and the backside redistribution circuit structure. The isolation film may have a coefficient of thermal expansion lower than the insulating encapsulation and the die attach film.
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公开(公告)号:US20170149404A1
公开(公告)日:2017-05-25
申请号:US14948477
申请日:2015-11-23
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Ming Hsien Tsai , Chien-Min Lin , Fu-Lung Hsueh , Han-Ping Pu , Sa-Lly Liu , Sen-Kuei Hsu
IPC: H03H1/00 , H03H7/01 , H01L29/93 , H01L23/528 , H01L23/522
CPC classification number: H03H1/0007 , H01L23/5223 , H01L23/5225 , H01L23/5227 , H01L23/5286 , H01L29/93 , H03H7/0115
Abstract: An integrated circuit (IC) die for electromagnetic band gap (EBG) noise suppression is provided. A power mesh and a ground mesh are stacked within a back end of line (BEOL) region overlying a semiconductor substrate, and an inductor is arranged over the power and ground meshes. The inductor comprises a plurality of inductor segments stacked upon one another and connected end to end to define a length of the inductor. A capacitor underlies the power and ground meshes, and is connected in series with the inductor. Respective terminals of the capacitor and the inductor are respectively coupled to the power and ground meshes. A method for manufacturing the IC die is also provided.
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公开(公告)号:US20220013494A1
公开(公告)日:2022-01-13
申请号:US16924192
申请日:2020-07-09
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Ching-Yu Huang , Han-Ping Pu , Ming-Kai Liu , Ting-Chu Ko , Yung-Ping Chiang , Chang-Wen Huang , Yu-Sheng Hsieh
IPC: H01L25/065 , H01L25/18 , H01L23/00 , H01L23/373 , H01L25/00
Abstract: A memory device including a first semiconductor die and a memory cube mounted on and connected with the first semiconductor die is described. The memory cube includes multiple stacked tiers, and each tier of the multiple stacked tiers includes second semiconductor dies laterally wrapped by an encapsulant and a redistribution structure disposed on the second semiconductor dies and the encapsulant. The second semiconductor dies of the multiple stacked tiers are electrically connected with the first semiconductor die through the redistribution structures in the multiple stacked tiers. Each redistribution structure in the multiple stacked tiers includes redistribution patterns, the redistribution structure closest to the first semiconductor die further includes a thermally conductive layer connected to the first semiconductor die, wherein a material of the redistribution patterns in the multiple stacked tiers is different from a material of the thermally conductive layer of the redistribution structure closest to the first semiconductor die, and the thermally conductive layer is electrically isolated from the second semiconductor dies in the multiple stacked tiers and the first semiconductor die.
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公开(公告)号:US11127708B2
公开(公告)日:2021-09-21
申请号:US16676439
申请日:2019-11-07
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Ming-Kai Liu , Han-Ping Pu , Ting-Chu Ko , Yung-Ping Chiang , Chang-Wen Huang , Yu-Sheng Hsieh
IPC: H01L23/00 , H01L25/10 , H01L23/538
Abstract: Provided are a package structure and a method of manufacturing the same. The method includes the following processes. A die is provided. An encapsulant is formed laterally aside the die. A first dielectric layer is formed on the encapsulant and the die. A first redistribution layer is formed to penetrate through the first dielectric layer to connect to the die, the first redistribution layer includes a first via embedded in the first dielectric layer and a first trace on the first dielectric layer and connected to the first via. The first via and the first trace of the first redistribution layer are formed separately.
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公开(公告)号:US20210202354A1
公开(公告)日:2021-07-01
申请号:US16897300
申请日:2020-06-10
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Lipu Kris Chuang , Chung-Shi Liu , Han-Ping Pu , Hsin-Yu Pan , Ming-Kai Liu , Ting-Chu Ko
IPC: H01L23/48 , H01L25/065 , H01L23/31 , H01L23/367 , H01L21/56 , H01L21/48
Abstract: A memory device including a base chip and a memory cube mounted on and connected with the base chip is described. The memory cube includes multiple stacked tiers, and each tier of the multiple stacked tiers includes semiconductor chips laterally wrapped by an encapsulant and a redistribution structure. The semiconductor chips of the multiple stacked tiers are electrically connected with the base chip through the redistribution structures in the multiple stacked tiers. The memory cube includes a thermal path structure extending through the multiple stacked tiers and connected to the base chip. The thermal path structure has a thermal conductivity larger than that of the encapsulant. The thermal path structure is electrically isolated from the semiconductor chips in the multiple stacked tiers and the base chip.
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