公开(公告)号：US20080299496A1

公开(公告)日：2008-12-04

申请号：US12123902

申请日：2008-05-20

申请人： Yoshiharu Hirakata ,  Hisao Ikeda ,  Takahiro Ibe ,  Shunpei Yamazaki

发明人： Yoshiharu Hirakata ,  Hisao Ikeda ,  Takahiro Ibe ,  Shunpei Yamazaki

IPC分类号： G03F7/00 ,  G03B27/54

CPC分类号： H01L51/0013 ,  B23K26/042 ,  B23K26/0661 ,  B23K26/0732 ,  C23C14/048 ,  H01L27/3218 ,  H01L51/56

摘要： Demands such as higher definition, higher opening aperture, and higher reliability on a full-color flat panel display have been increased. Such demands are big objects in advancing higher definition (increase in the number of pixels) of a light-emitting device and miniaturization of each display pixel pitch with reduction in size of the light-emitting device. An organic compound-containing layer is selectively deposited using a laser beam which passes through openings of a mask. An irradiated substrate provided with a light absorption layer and a material layer containing an organic compound and a deposition substrate provided with first electrodes are placed so as to face each other. The light absorption layer is heated by a laser beam which has passed through the openings of the mask, and the organic compound at a position overlapping with the heated region is vaporized, and accordingly the organic compound is selectively deposited over the deposition substrate.

摘要翻译： 已经提高了在全色平板显示器上的诸如更高清晰度，更高开口孔径和更高可靠性的要求。 这种要求是通过减少发光装置的尺寸来提高发光装置的高清晰度（增加像素数）和每个显示像素间距的小型化的大目标。 使用穿过掩模的开口的激光束选择性地沉积含有机化合物的层。 设置有光吸收层的照射基板和含有有机化合物的材料层和设置有第一电极的沉积基板被放置成彼此面对。 光吸收层被通过掩模开口的激光束加热，与加热区域重叠的位置上的有机化合物被蒸发，因此有机化合物选择性地沉积在沉积基板上。

公开(公告)号：US20080268137A1

公开(公告)日：2008-10-30

申请号：US12055970

申请日：2008-03-26

申请人： Hisao Ikeda ,  Takahiro Ibe ,  Tomoya Aoyama

发明人： Hisao Ikeda ,  Takahiro Ibe ,  Tomoya Aoyama

IPC分类号： B05D5/12 ,  C23C14/34

CPC分类号： C23C14/12 ,  B05D2401/30 ,  C23C14/00 ,  C23C14/042 ,  C23C14/24 ,  C23C14/26 ,  C23C16/4485 ,  H01L51/001 ,  H01L51/0038 ,  H01L51/0042 ,  H01L51/0059 ,  H01L51/006 ,  H05B33/10

摘要： A binder material layer including an evaporation material is formed over a main surface of an evaporation source substrate, a substrate on which a film is formed is placed so that the binder material layer and a main surface thereof face each other, and heat treatment is performed on a rear surface of the evaporation source substrate so that the evaporation material in the binder material layer is heated to be subjected to sublimation or the like, whereby a layer of the evaporation material is formed on the substrate on which a film is formed. When a low molecular material is used for the evaporation material and a high molecular material is used for the binder material, the viscosity can be easily adjusted, and thus, film formation is possible with higher throughput than conventional film formation.

摘要翻译： 在蒸发源基板的主表面上形成包括蒸发材料的粘合剂材料层，其上形成有膜的基板以使粘合剂材料层及其主表面彼此面对，进行热处理 在蒸发源基板的后表面上，使粘合剂材料层中的蒸发材料被加热以进行升华等，从而在其上形成有膜的基板上形成蒸镀材料层。 当将低分子材料用于蒸发材料并且高分子材料用于粘合剂材料时，可以容易地调节粘度，因此成膜可能比常规成膜更高的生产量。

公开(公告)号：US20080233272A1

公开(公告)日：2008-09-25

申请号：US12046612

申请日：2008-03-12

申请人： Takahiro Ibe ,  Hisao Ikeda

发明人： Takahiro Ibe ,  Hisao Ikeda

IPC分类号： B05D5/12 ,  C23C14/24

CPC分类号： H01L51/0008 ,  C23C14/042 ,  C23C14/12 ,  C23C14/246 ,  C23C14/26

摘要： To improve the use efficiency of a vapor-deposition material, reduce the manufacturing cost of a light-emitting device including a layer containing an organic compound, and shorten the manufacturing time for manufacturing a light-emitting device. Inside of a film formation chamber is made in a reduced pressure state, and conductive-surface substrate is energized, so that the conductive-surface substrate is heated rapidly, and a material layer over the conductive-surface substrate is evaporated in a short period of time to be vapor-deposited on a film formation substrate, whereby film formation of the material layer is performed on the film formation substrate. Note that the heating area of the conductive-surface substrate which is rapidly heated is set to be the same size as the film formation substrate so that film formation on one film formation substrate is completed by one heating.

摘要翻译： 为了提高气相沉积材料的使用效率，降低包含含有有机化合物的层的发光装置的制造成本，缩短制造发光装置的制造时间。 在成膜室内形成减压状态，导电性表面基板通电，导电性表面基板迅速加热，导电性表面基板上的材料层在短时间内蒸发 在成膜基板上气相沉积的时间，从而在成膜基板上进行材料层的成膜。 注意，快速加热的导电性表面基板的加热面积被设定为与成膜基板相同的尺寸，从而通过一次加热完成一个成膜基板上的成膜。

公开(公告)号：US08592852B2

公开(公告)日：2013-11-26

申请号：US13111091

申请日：2011-05-19

申请人： Takahiro Ibe ,  Hisao Ikeda

发明人： Takahiro Ibe ,  Hisao Ikeda

IPC分类号： H01L33/00 ,  H01J1/62

CPC分类号： H01L33/00 ,  F21Y2105/00 ,  F21Y2115/15 ,  H01L51/5212 ,  H01L51/5278 ,  H01L2251/5361

摘要： To provide a light-emitting device from which uniform light emission can be obtained by providing an auxiliary wiring; a light-emitting device in which a short circuit between electrodes or between an electrode and an auxiliary wiring, which is attributed to a step caused by the auxiliary wiring, hardly occurs; and a light-emitting device which has high reliability by preventing a short circuit. In an EL light-emitting device including an auxiliary wiring, by covering a step caused by the auxiliary wiring is covered with an insulator, a short circuit between electrodes or between an electrode and the auxiliary wiring, which is attributed to the step caused by the auxiliary wiring, is prevented. Thus, the above objects are achieved.

摘要翻译： 提供一种通过提供辅助布线可以获得均匀发光的发光装置; 几乎不发生归因于辅助布线引起的台阶的电极之间或电极与辅助布线之间的短路的发光装置; 以及通过防止短路而具有高可靠性的发光装置。 在包括辅助布线的EL发光装置中，通过覆盖辅助布线引起的台阶被绝缘体覆盖，电极之间或电极与辅助布线之间的短路，这是由于由 辅助接线。 因此，实现了上述目的。

公开(公告)号：US08313603B2

公开(公告)日：2012-11-20

申请号：US11949217

申请日：2007-12-03

申请人： Hisao Ikeda ,  Tomoya Aoyama ,  Takahiro Ibe ,  Yoshiharu Hirakata ,  Shunpei Yamazaki

发明人： Hisao Ikeda ,  Tomoya Aoyama ,  Takahiro Ibe ,  Yoshiharu Hirakata ,  Shunpei Yamazaki

IPC分类号： C23C14/04 ,  C23C14/08

CPC分类号： B05C11/00 ,  C23C14/042 ,  C23C14/12 ,  C23C14/26 ,  C23C14/28 ,  C23C14/568 ,  H01L51/0081 ,  H01L51/56

摘要： An object is to improve use efficiency of an evaporation material, to reduce manufacturing cost of a light-emitting device, and to reduce manufacturing time needed for a light-emitting device including a layer containing an organic compound. The pressure of a film formation chamber is reduced, a plate is rapidly heated by heat conduction or heat radiation by using a heat source, a material layer on a plate is vaporized in a short time to be evaporated to a substrate on which the material layer is to be formed (formation substrate), and then the material layer is formed on the formation substrate. The area of the plate that is heated rapidly is set to have the same size as the formation substrate and film formation on the formation substrate is completed by one application of heat.

摘要翻译： 本发明的目的在于提高蒸发材料的使用效率，降低发光元件的制造成本，减少含有有机化合物的层的发光元件所需的制造时间。 成膜室的压力减小，通过使用热源的热传导或热辐射快速加热板，在短时间内蒸发板上的材料层以蒸发到其上的材料层 （形成衬底），然后在形成衬底上形成材料层。 将快速加热的板的面积设定为与形成基板相同的尺寸，并且通过一次加热完成在形成基板上的成膜。

公开(公告)号：US08119204B2

公开(公告)日：2012-02-21

申请号：US12055970

申请日：2008-03-26

申请人： Hisao Ikeda ,  Takahiro Ibe ,  Tomoya Aoyama

发明人： Hisao Ikeda ,  Takahiro Ibe ,  Tomoya Aoyama

IPC分类号： B05D3/02

CPC分类号： C23C14/12 ,  B05D2401/30 ,  C23C14/00 ,  C23C14/042 ,  C23C14/24 ,  C23C14/26 ,  C23C16/4485 ,  H01L51/001 ,  H01L51/0038 ,  H01L51/0042 ,  H01L51/0059 ,  H01L51/006 ,  H05B33/10

摘要： A binder material layer including an evaporation material is formed over a main surface of an evaporation source substrate, a substrate on which a film is formed is placed so that the binder material layer and a main surface thereof face each other, and heat treatment is performed on a rear surface of the evaporation source substrate so that the evaporation material in the binder material layer is heated to be subjected to sublimation or the like, whereby a layer of the evaporation material is formed on the substrate on which a film is formed. When a low molecular material is used for the evaporation material and a high molecular material is used for the binder material, the viscosity can be easily adjusted, and thus, film formation is possible with higher throughput than conventional film formation.

摘要翻译： 在蒸发源基板的主表面上形成包括蒸发材料的粘合剂材料层，其上形成有膜的基板以使粘合剂材料层及其主表面彼此面对，进行热处理 在蒸发源基板的后表面上，使粘合剂材料层中的蒸发材料被加热以进行升华等，从而在其上形成有膜的基板上形成蒸镀材料层。 当将低分子材料用于蒸发材料并且高分子材料用于粘合剂材料时，可以容易地调节粘度，因此成膜可能比常规成膜更高的生产量。

公开(公告)号：US20090305445A1

公开(公告)日：2009-12-10

申请号：US12476556

申请日：2009-06-02

申请人： Hisao Ikeda ,  Takahiro Ibe

发明人： Hisao Ikeda ,  Takahiro Ibe

IPC分类号： H01L21/28 ,  H01L21/26 ,  B05D3/06 ,  C08J7/18

CPC分类号： H01L51/0013 ,  H01L27/3211 ,  H01L27/3244 ,  H01L27/3281

摘要： In the present invention, a first substrate which is an evaporation donor substrate is prepared in which a material layer is formed over a patterned reflective layer. A surface of the material layer over the first substrate is irradiated with first light which satisfies one predetermined irradiation condition to pattern the material layer. A surface opposite to the surface of the first substrate is irradiated with second light which satisfies another predetermined irradiation condition to evaporate the patterned material layer onto a second substrate, which is a deposition target substrate. According to the present invention, deterioration of a material included in the material layer can be prevented and a film pattern can be formed on the second substrate with high accuracy.

摘要翻译： 在本发明中，制备作为蒸发供体基板的第一基板，其中在图案化反射层上形成材料层。 用满足一定的照射条件的第一光照射第一基板上的材料层的表面，以对材料层进行图案化。 用满足另一预定照射条件的第二光照射与第一基板的表面相对的表面，以将图案化材料层蒸发到作为沉积靶基板的第二基板上。 根据本发明，可以防止包含在材料层中的材料的劣化，并且可以高精度地在第二基板上形成膜图案。

公开(公告)号：US08821963B2

公开(公告)日：2014-09-02

申请号：US12362105

申请日：2009-01-29

申请人： Koichiro Tanaka ,  Takahiro Ibe ,  Kohei Yokoyama ,  Hisao Ikeda ,  Norifumi Takesue

发明人： Koichiro Tanaka ,  Takahiro Ibe ,  Kohei Yokoyama ,  Hisao Ikeda ,  Norifumi Takesue

IPC分类号： H01L51/00 ,  B41M5/382 ,  B41M5/40 ,  B05D5/12

CPC分类号： H01L51/0013 ,  B05D5/12 ,  B41M5/38214 ,  C23C14/048 ,  H01L51/56

摘要： A first substrate which includes a reflective layer having an opening, a light-absorbing layer, and a material layer formed in contact with the light-absorbing layer over one of surfaces is provided; the surface of the first substrate over which the material layer is formed and a deposition target surface of the second substrate are disposed to face each other; and irradiation with laser light whose repetition rate is greater than or equal to 10 MHz and pulse width is greater than or equal to 100 fs and less than or equal to 10 ns is performed from the other surface side of the first substrate to selectively heat a part of the material layer at a position overlapping with the opening of the reflective layer and deposit the part of the material layer over the deposition target surface of the second substrate.

摘要翻译： 提供一种第一基板，其包括具有开口的反射层，光吸收层和在一个表面上与所述光吸收层接触形成的材料层; 形成材料层的第一基板的表面和第二基板的沉积目标表面相对配置; 并且从第一基板的另一表面侧进行重复频率大于或等于10MHz并且脉冲宽度大于或等于100fs且小于或等于10ns的激光的照射，以选择性地加热 在与反射层的开口重叠的位置处的材料层的一部分，并将材料层的一部分沉积在第二基板的沉积靶表面上。

公开(公告)号：US08796911B2

公开(公告)日：2014-08-05

申请号：US13612966

申请日：2012-09-13

申请人： Junichiro Sakata ,  Takahiro Ibe ,  Hisao Ikeda

发明人： Junichiro Sakata ,  Takahiro Ibe ,  Hisao Ikeda

IPC分类号： H05B33/00 ,  G02F1/1335 ,  G02B27/14

CPC分类号： H01L51/5262 ,  H01L27/3244 ,  H01L27/3281 ,  H01L2251/5323

摘要： There is a problem in a dual emission device emitting light out of both surfaces that an image on the surface and an image on the rear surface are different from each other (either image is mirror-reversed). A dual emission device is disclosed in which either light emitted from the light-emitting device is reflected by glass including a semi-transmissive film to display on glass an image same as another image obtained also from the light-emitting device, and simultaneously, external information can be viewed through the glass. A mirror can be arranged between the dual emission device and the glass including a semitransparent film.

摘要翻译： 在双面发射装置中，从表面发射光，表面上的图像和后表面上的图像彼此不同（任一图像被镜像反转）都存在问题。 公开了一种双发射装置，其中从发光装置发射的光由包括半透射膜的玻璃反射，以在玻璃上显示与从发光装置获得的另一图像相同的图像，同时外部 信息可以通过玻璃看到。 可以在双重发射装置和包括半透明膜的玻璃之间布置反射镜。

公开(公告)号：US08551557B2

公开(公告)日：2013-10-08

申请号：US12166002

申请日：2008-07-01

申请人： Hisao Ikeda ,  Takahiro Ibe ,  Yosuke Sato ,  Kohei Yokoyama

发明人： Hisao Ikeda ,  Takahiro Ibe ,  Yosuke Sato ,  Kohei Yokoyama

IPC分类号： B05D5/06 ,  C23C16/00 ,  H01L21/00

CPC分类号： H01L51/001 ,  C23C14/048 ,  H01L51/0013 ,  H01L51/50

摘要： A method for manufacturing a light-emitting device including a layer containing different evaporation materials, by which a desired layer containing the different evaporation materials is formed easily using a plurality of evaporation materials. A light-emitting device is manufactured in such a manner that a plurality of layers each containing a different evaporation material from each other is stacked over a first substrate; a second substrate which has a first electrode is placed at a position facing the first substrate; the plurality of layers containing evaporation materials is heated to form a layer containing different evaporation materials is formed on the first electrode provided for the second substrate; and a second electrode is formed on the layer containing different evaporation materials.

摘要翻译： 一种发光装置的制造方法，其包括含有不同蒸发材料的层，容易使用多种蒸发材料形成含有不同蒸发材料的所需层。 以这样的方式制造发光器件，使得在第一衬底上堆叠各自包含彼此不同的蒸发材料的多个层; 具有第一电极的第二基板被放置在面向第一基板的位置; 在设置于第二基板的第一电极上形成含有蒸发材料的多个层，以形成含有不同蒸发材料的层; 并且在包含不同蒸发材料的层上形成第二电极。