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21.发明授权公开(公告)号：US06396046B1
公开(公告)日：2002-05-28
申请号：US09643228
申请日：2000-08-22
IPC分类号： H01L2700
CPC分类号： H01L27/14663 , H01L27/14609 , H01L27/14623
摘要： A light block material disposed over the photosensitive region of a switching device (e.g., TFT) of a radiation imager is disclosed. The light block material prevents optical photons emitted from a scintillator from passing into the switching device and being absorbed. Cross-talk and noise in the imager are thereby reduced. Also, non-linear pixel response and spurious signals passing to readout electronics are avoided. Optionally, opaque caps comprising the same light block material may be included in the imager structure. The caps cover contact vias filled with a common electrode and located in the contact finger region of the imager. The integrity of the filled vias is thereby maintained during subsequent processing. Also disclosed is a radiation imager containing these structures.
摘要翻译： 公开了一种设置在辐射成像器的开关装置（例如TFT）的感光区域上的光阻材料。 光阻止材料防止从闪烁体发出的光子光子进入开关装置并被吸收。 因此，成像器中的串扰和噪声被降低。 此外，避免了非线性像素响应和传递到读出电子装置的寄生信号。 可选地，包含相同的光块材料的不透明盖可以包括在成像器结构中。 帽盖覆盖填充有公共电极并位于成像器的接触指状区域中的接触通孔。 从而在随后的处理期间保持填充的通孔的完整性。 还公开了包含这些结构的辐射成像仪。
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公开(公告)号：US06392254B1
公开(公告)日：2002-05-21
申请号：US09468895
申请日：1999-12-22
IPC分类号： H01L2904
CPC分类号： H01L27/14692 , H01L27/14603 , H01L27/14609 , H01L27/14623 , H01L27/14663
摘要： A radiation imager is disclosed that is resistant to degradation due to moisture by either contact pad corrosion, guard ring corrosion or by photodiode leakage. A contact pad of a large area imager is disclosed that is formed into three distinct and electrically connected regions. The resulting structure of the contact pad regions forms reliable contact that is resistant to corrosion damage. Also disclosed is a data line of an imager, or a display, the resistance of which is reduced by patterning an aluminum (Al) line on top of a transistor island structure, with the formed data line preferably being encapsulated. In addition, a guard ring having first and second regions and photosensitive element are disclosed. The second region comprises an electrical contact between ITO and underlying metal and a second tier which acts as a moisture barrier and is preferably disposed at the corner of the guard ring and separated from the contact pads of the imager in such a manner as to minimize corrosion. The photosensitive element has a multitier passivation layer disposed between the top contact layer and an amorphous silicon photosensor island except for a selected contact area on the top surface of the photosensor island, where the top contact layer is in electrical contact with the amorphous silicon material of the photosensor island. The passivation layer includes a first tier inorganic barrier layer which is disposed at least over the sidewalls of the photosensor island.
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23.发明授权Radiation imager with single passivation dielectric for transistor and diode 失效具有用于晶体管和二极管的单个钝化电介质的辐射成像仪
公开(公告)号：US5399884A
公开(公告)日：1995-03-21
申请号：US149888
申请日：1993-11-10
IPC分类号： H01L21/77 , H01L21/84 , H01L27/12 , H01L27/146 , H01L27/15 , H01L29/786 , H01L31/10 , H01L27/14
CPC分类号： H01L27/14643 , H01L27/1214
摘要： A radiation imager includes a photosensor array having a plurality of individually addressable pixels, each pixel having a photosensor island and an associated thin film transistor (TFT) disposed to selectively electrically couple the photosensor island to a predetermined address line. In each pixel a single common passivation layer is disposed over the TFT and the photosensor island such that the passivation layer is adjacent to both the outer surfaces of the TFT and portions of the photosensor island. In a method of fabricating a photosensor array as described above, after depositon of a source-drain metal layer, the layer is left unpatterned until after the photosensor island has been formed. In the formation of the photosensor island the source-drain metal layer serves as an etch stop to protect the TFT. Following formation of the photosensor island, the source-drain metal layer is patterned to form source and drain electrodes and fabrication of the TFT is completed. The single common passivation layer is then deposited over both the TFT and the photosensor island.
摘要翻译： 辐射成像仪包括具有多个可独立寻址的像素的光电传感器阵列，每个像素具有光电传感器岛和相关联的薄膜晶体管（TFT），用于选择性地将光电传感器岛电耦合到预定的地址线。 在每个像素中，单个公共钝化层设置在TFT和光电传感器岛上，使得钝化层与TFT的外表面和光电传感器岛的两个部分相邻。 在如上所述的制造光电传感器阵列的方法中，在源极 - 漏极金属层沉积之后，该层被保持未图案化，直到形成光电传感器岛为止。 在光电传感器岛的形成中，源极 - 漏极金属层用作蚀刻停止以保护TFT。 在形成光电传感器岛之后，对源极 - 漏极金属层进行图案化以形成源极和漏极并完成TFT的制造。 然后将单个公共钝化层沉积在TFT和光电传感器岛上。
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公开(公告)号：US5303282A
公开(公告)日：1994-04-12
申请号：US31450
申请日：1993-03-15
申请人： Robert F. Kwasnick , Ching-Yeu Wei
发明人： Robert F. Kwasnick , Ching-Yeu Wei
IPC分类号： G21K1/02
CPC分类号： G21K1/02
摘要： A collimator for use in an imaging system with a radiation point source has a plurality of channels formed therein along longitudinal axes aligned with selected orientation angles that correspond to the direct beam path from the radiation source to the radiation detectors. The collimator comprises a photosensitive material coated with a radiation absorbent material. The cross-sectional shape of the channels corresponds to the cross-sectional shape of the radiation detecting area of the detector element adjoining the channel, and the sidewalls of the channel are smooth along their length. The collimator may be fabricated by forming a mask on a photosensitive collimator substrate, exposing the photosensitive substrate to light beams traveling along a path corresponding to a direct path of radiation from the radiation source to the detector elements in the assembled array, etching the collimator substrate to form channels therein along the exposed area of the substrate, and coating the substrate with a radiation absorbent material.
摘要翻译： 用于具有辐射点源的成像系统中的准直器具有沿着与从与辐射源到辐射探测器的直接光束路径相对应的所选定向角度的纵向轴线形成的多个通道。 准直器包括涂覆有辐射吸收材料的感光材料。 通道的横截面形状对应于邻近通道的检测器元件的辐射检测区域的横截面形状，并且通道的侧壁沿其长度是平滑的。 可以通过在光敏准直器基板上形成掩模来制造准直器，将感光基板暴露于沿着对应于辐射源的辐射源的直接路径到组装阵列中的检测器元件的路径传播的光束，蚀刻准直器基板 沿着衬底的暴露区域形成通道，并用辐射吸收材料涂覆衬底。
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25.发明授权Fabrication method and structure for field isolation in field effect transistors on integrated circuit chips 失效集成电路芯片中场效应晶体管的场隔离制造方法和结构
公开(公告)号：US4942449A
公开(公告)日：1990-07-17
申请号：US173918
申请日：1988-03-28
IPC分类号： H01L21/76 , H01L21/316 , H01L21/762 , H01L29/78
CPC分类号： H01L21/76202 , H01L21/76224
摘要： A method for forming a field oxide isolation region for a field effect transistor for use in integrated circuit chip devices includes process steps which preserve planarity while at the same time providing an increased degree of radiation hardness. The bird's beak region of the device is provided with both thermally grown and deposited oxide layers in a planarity preserving process.
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公开(公告)号：US07926176B2
公开(公告)日：2011-04-19
申请号：US11254181
申请日：2005-10-19
CPC分类号： B81C1/00007 , H01L24/95 , H01L2224/95085 , H01L2924/01005 , H01L2924/01013 , H01L2924/01015 , H01L2924/01027 , H01L2924/01029 , H01L2924/0103 , H01L2924/01032 , H01L2924/01033 , H01L2924/01047 , H01L2924/01049 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/10329 , H01L2924/1305 , H01L2924/13055 , H01L2924/13091 , H01L2924/19041 , Y10T29/4902 , Y10T29/4913 , Y10T29/494 , Y10T29/49401 , H01L2924/00
摘要： A fluidic assembly method includes dispersing a number of functional blocks in a fluid to form a slurry. Each of the functional blocks includes at least one element and a patterned magnetic film comprising at least one region. The fluidic assembly method further includes immersing at least a portion of an article in the fluid. The article includes a substrate, a number of receptor sites disposed on the substrate and a number of magnetic receptors, each of the magnetic receptors being disposed within a respective one of the receptor sites. A method of manufacturing an assembly includes disposing a number of functional blocks over at least a portion of an article, agitating the functional blocks relative to the article and assembling at least a subset of the functional blocks to the magnetic receptors on the article.
摘要翻译： 流体组装方法包括将许多功能块分散在流体中以形成浆料。 每个功能块包括至少一个元件和包括至少一个区域的图案化磁性膜。 流体组装方法还包括将物品的至少一部分浸入流体中。 该制品包括底物，设置在基底上的许多受体位点和多个磁性受体，每个磁性受体设置在相应的一个受体部位内。 制造组件的方法包括在制品的至少一部分上设置多个功能块，相对于制品搅动功能块，并将功能块的至少一个子集组装到制品上的磁性受体上。
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公开(公告)号：US07521685B2
公开(公告)日：2009-04-21
申请号：US11334718
申请日：2006-01-18
申请人： William Hennessy , Jeffrey Shaw , Ching-Yeu Wei , Yun Li
发明人： William Hennessy , Jeffrey Shaw , Ching-Yeu Wei , Yun Li
IPC分类号： G01T1/20 , H01L27/148
CPC分类号： G01T1/2018
摘要： A structured scintillator and a detection system employing structured scintillators. More specifically, a structured scintillator comprising a scintillator material having a plurality of isolated structures is disclosed. The structures may be conical in shape. The structures may be formed on a substantially transparent material layer which has been patterned to form a plurality of isolated regions. The structures may be formed on top of the isolated regions to provide isolated scintillator structures having space therebetween. The isolated regions and scintillator structures may be aligned with underlying detection devices.
摘要翻译： 结构化闪烁体和采用结构闪烁体的检测系统。 更具体地，公开了一种包括具有多个隔离结构的闪烁体材料的结构闪烁体。 结构可以是圆锥形的。 该结构可以形成在基本上透明的材料层上，该层被图案化以形成多个隔离区域。 可以在隔离区域的顶部上形成结构以提供在其间具有间隔的隔离的闪烁体结构。 隔离区域和闪烁体结构可以与底层检测装置对准。
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28.发明申请DIRECT CSI SCINTILLATOR COATING FOR IMPROVED DIGITAL X-RAY DETECTOR ASSEMBLY LONGEVITY 有权改进的数字X射线探测器的直接CSI扫描仪涂层组件长度公开(公告)号：US20050285045A1
公开(公告)日：2005-12-29
申请号：US10719117
申请日：2003-11-21
申请人： Charles Baumgartner , David Fobare , Michael DeJule , Ching-Yeu Wei , William Hennessy , Robert Wojnarowski
发明人： Charles Baumgartner , David Fobare , Michael DeJule , Ching-Yeu Wei , William Hennessy , Robert Wojnarowski
IPC分类号： G01T1/20 , G01T1/161 , G01T1/202 , G01T1/24 , G01T1/29 , H01L27/14 , H01L31/0216 , H01L31/09 , H04N5/32
CPC分类号： G01T1/2928 , G01T1/2002
摘要： The present invention provides an X-ray detector assembly and a fabrication method, where the X-ray detector assembly comprises a scintillator material disposed on a detector matrix array disposed on a detector substrate; an encapsulating coating disposed on the scintillator material; a moisture resistant cover disposed over the detector substrate and the encapsulating coating, and an adhesive material disposed between the detector substrate and the moisture resistant cover so as to form a moisture vapor barrier. The adhesive material is disposed so that it is not in contact with the encapsulating coating. The fabrication method of the X-ray detector assembly includes the steps of disposing the encapsulating coating on the scintillator material and a portion of the detector substrate and removing the encapsulating coating from the portion of the detector substrate.
摘要翻译： 本发明提供一种X射线检测器组件和制造方法，其中X射线检测器组件包括设置在设置在检测器基板上的检测器矩阵阵列上的闪烁体材料; 设置在闪烁体材料上的封装涂层; 设置在检测器基板和封装涂层之上的防潮盖，以及设置在检测器基板和防潮盖之间的粘合材料，以形成湿气阻挡层。 粘合剂材料被设置成使其不与封装涂层接触。 X射线检测器组件的制造方法包括以下步骤：将封装涂层设置在闪烁体材料和检测器基板的一部分上，并从检测器基板的部分移除封装涂层。
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公开(公告)号：US06465861B1
公开(公告)日：2002-10-15
申请号：US09468896
申请日：1999-12-22
IPC分类号： H01L3100
CPC分类号： H01L27/14692 , H01L27/14603 , H01L27/14609 , H01L27/14623 , H01L27/14663
摘要： A radiation imager is disclosed that is resistant to degradation due to moisture by either contact pad corrosion, guard ring corrosion or by photodiode leakage. A contact pad of a large area imager is disclosed that is formed into three distinct and electrically connected regions. The resulting structure of the contact pad regions forms reliable contact that is resistant to corrosion damage. Also disclosed is a data line of an imager, or a display, the resistance of which is reduced by patterning an aluminum (Al) line on top of a transistor island structure, with the formed data line preferably being encapsulated. In addition, a guard ring having first and second regions and photosensitive element are disclosed. The second region comprises an electrical contact between ITO and underlying metal and a second tier which acts as a moisture barrier and is preferably disposed at the corner of the guard ring and separated from the contact pads of the imager in such a manner as to minimize corrosion. The photosensitive element has a multitier passivation layer disposed between the top contact layer and an amorphous silicon photosensor island except for a selected contact area on the top surface of the photosensor island, where the top contact layer is in electrical contact with the amorphous silicon material of the photosensor island. The passivation layer includes a first tier inorganic barrier layer which is disposed at least over the sidewalls of the photosensor island.
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公开(公告)号：US06414315B1
公开(公告)日：2002-07-02
申请号：US09411299
申请日：1999-10-04
IPC分类号： G01T1202
CPC分类号： G01T1/2018
摘要： A radiation imager includes a light sensitive imaging array, a barrier layer formed over the light sensitive imaging array, a continuous polymer layer formed over the barrier layer, and a scintillator formed directly on the continuous polymer layer. The continuous polymer layer improves the adherence of the scintillator by reducing delamination especially under adverse environmental conditions.
摘要翻译： 辐射成像仪包括光敏成像阵列，在光敏成像阵列上形成的阻挡层，形成在阻挡层上的连续聚合物层，以及直接形成在连续聚合物层上的闪烁体。 连续聚合物层通过减少分层改善闪烁体的粘附，特别是在不利的环境条件下。
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