LEED FOR SEM
    21.
    发明申请

    公开(公告)号:US20160071690A1

    公开(公告)日:2016-03-10

    申请号:US14888414

    申请日:2014-05-14

    Inventor: Tsumoru SHINTAKE

    Abstract: A low energy electron diffraction (LEED) detection module (100) includes: a first vacuum chamber for receiving diffracted electrons from a specimen (109); a larger second vacuum chamber connected to the first vacuum chamber to receive the diffracted electrons that have been transported through the first vacuum chamber; a two-dimensional electron detector disposed in the second vacuum chamber to detect the diffracted electrons; a potential shield (106) disposed generally along an inner surface of the first vacuum chamber and an inner surface of the second vacuum chamber; a magnetic lens (105) to expand a beam of the diffracted electrons that have been transported through the first vacuum chamber towards the two-dimensional electron detector; and a generally plane-shaped energy filter (103) to repel electrons having an energy lower than the probe beam (203) of electrons that impinges on the specimen (109).

    Abstract translation: 低能电子衍射(LEED)检测模块(100)包括:用于从样品(109)接收衍射电子的第一真空室; 连接到第一真空室的较大的第二真空室,以接收已经传送通过第一真空室的衍射电子; 设置在第二真空室中以检测衍射电子的二维电子检测器; 大致沿第一真空室的内表面设置的电位屏蔽件(106)和第二真空室的内表面; 用于将已经通过第一真空室传送的衍射电子束朝向二维电子检测器扩大的磁性透镜(105); 和大致平面状的能量过滤器(103),以排斥能量低于碰撞在样本(109)上的电子的探针光束(203)的能量的电子。

    Aberration correction apparatus that corrects spherical aberration of charged particle apparatus
    24.
    发明授权
    Aberration correction apparatus that corrects spherical aberration of charged particle apparatus 有权
    校正带电粒子装置的球面像差的畸变校正装置

    公开(公告)号:US08035086B2

    公开(公告)日:2011-10-11

    申请号:US12379442

    申请日:2009-02-23

    Abstract: To provide an aberration correction configuration that can realize both an aberration correction function for a long focus and an aberration correction function for a short focus. While having a conventional aberration correction apparatus configuration that has two rotationally symmetric lenses arranged between two multipole lenses, three rotationally symmetric lenses are disposed between an objective lens and a multipole lens instead of the conventional arrangement in which two rotationally symmetric lenses are disposed therebetween. When using the objective lens with a long focal length, aberrations are corrected using two rotationally symmetric lenses among three rotationally symmetric lenses disposed between the objective lens and the multipole lens. When using the objective lens with a short focal length, e.g. for high resolution observation, aberrations are corrected using two rotationally symmetric lenses of a different combination to those used for a long focus, among the three rotationally symmetric lenses disposed between the objective lens and the multipole lens. (See FIG. 3)

    Abstract translation: 提供能够实现长焦点的像差校正功能和短焦点的像差校正功能的像差校正配置。 在具有布置在两个多极透镜之间的两个旋转对称透镜的常规像差校正装置配置的同时,三个旋转对称透镜设置在物镜和多极透镜之间,而不是其中设置两个旋转对称透镜的常规布置。 当使用具有长焦距的物镜时,使用设置在物镜和多极镜头之间的三个旋转对称透镜之中的两个旋转对称透镜校正像差。 当使用具有短焦距的物镜时,例如, 对于高分辨率观察,在物镜和多极透镜之间设置的三个旋转对称透镜中,使用与用于长焦距的不同组合的两个旋转对称透镜来校正像差。 (参照图3)

    Ultra-low noise cryogenic microwave amplification

    公开(公告)号:US11677206B2

    公开(公告)日:2023-06-13

    申请号:US16806874

    申请日:2020-03-02

    CPC classification number: H01S1/02

    Abstract: Embodiments of the microwave amplification system are described. In an embodiment, a microwave amplification system includes a microwave amplifier that contains a paramagnetic material with an impurity. The impurity has a plurality of nuclear spin and electron spin-based energy levels. The system includes an input to receive a pumping signal which is transmitted to the microwave amplifier to cause a population inversion in the impurity and excite it to one of the nuclear spin and electron spin-based energy levels. The system further includes another input to receive an input signal to be amplified by the microwave amplifier, the input signal having a lower power than the pumping signal. Once transmitted to the microwave amplifier, the input signal is amplified by the excited state of the impurity in the microwave amplifier thereby generating an amplified signal.

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