METHOD AND APPARATUS FOR WAVEFRONT SENSING
    21.
    发明申请

    公开(公告)号:US20180292268A1

    公开(公告)日:2018-10-11

    申请号:US15903489

    申请日:2018-02-23

    Inventor: Seung-Whan Bahk

    CPC classification number: G01J9/0215 G01B9/02 G01J9/02 G01J2009/002 G03F7/706

    Abstract: A method for performing optical wavefront sensing includes providing an amplitude transmission mask having a light input side, a light output side, and an optical transmission axis passing from the light input side to the light output side. The amplitude transmission mask is characterized by a checkerboard pattern having a square unit cell of size Λ. The method also includes directing an incident light field having a wavelength λ to be incident on the light input side and propagating the incident light field through the amplitude transmission mask. The method further includes producing a plurality of diffracted light fields on the light output side and detecting, at a detector disposed a distance L from the amplitude transmission mask, an interferogram associated with the plurality of diffracted light fields. The relation 0

    OPTICAL WAVEFRONT MEASURING DEVICE AND METHOD

    公开(公告)号:US20170146427A1

    公开(公告)日:2017-05-25

    申请号:US15298842

    申请日:2016-10-20

    Inventor: Jen Sheng LIANG

    CPC classification number: G01M11/0257 G01J9/00 G01J2009/002 G02B27/46

    Abstract: In an optical wavefront measuring device, a SLM generates a plurality of different through holes, so that light beams pass through the through holes and form a plurality of light patterns. The distance between an infinite objective lens module and a test lens is adjusted so that the light patterns enter into a wavefront sensor in the form of approximately parallel light after passing through the infinite objective lens module and the test lens. The wavefront sensor captures a plurality of WS images which do not have a fold-over phenomenon according to the light patterns. Computer by using an algorithm to obtain wavefront change information, and then reconstructs a wavefront on the basis of the wavefront change information.

    METHOD AND APPARATUS FOR WAVEFRONT SENSING
    23.
    发明申请
    METHOD AND APPARATUS FOR WAVEFRONT SENSING 有权
    用于波前感测的方法和装置

    公开(公告)号:US20170038261A1

    公开(公告)日:2017-02-09

    申请号:US15209535

    申请日:2016-07-13

    Inventor: Seung-Whan Bahk

    CPC classification number: G01J9/0215 G01B9/02 G01J9/02 G01J2009/002 G03F7/706

    Abstract: A method for performing optical wavefront sensing includes providing an amplitude transmission mask having a light input side, a light output side, and an optical transmission axis passing from the light input side to the light output side. The amplitude transmission mask is characterized by a checkerboard pattern having a square unit cell of size Λ. The method also includes directing an incident light field having a wavelength λ to be incident on the light input side and propagating the incident light field through the amplitude transmission mask. The method further includes producing a plurality of diffracted light fields on the light output side and detecting, at a detector disposed a distance L from the amplitude transmission mask, an interferogram associated with the plurality of diffracted light fields. The relation 0

    Abstract translation: 满足,其中n是大于零的整数。

    METHOD AND APPARATUS FOR MEASURING THE SHAPE OF A WAVE-FRONT OF AN OPTICAL RADIATION FIELD
    25.
    发明申请
    METHOD AND APPARATUS FOR MEASURING THE SHAPE OF A WAVE-FRONT OF AN OPTICAL RADIATION FIELD 有权
    用于测量光学辐射场前波形的方法和装置

    公开(公告)号:US20160018259A1

    公开(公告)日:2016-01-21

    申请号:US14751259

    申请日:2015-06-26

    CPC classification number: G01J1/4257 G01J1/0477 G01J9/00 G01J2009/002

    Abstract: Method for measuring shape of wavefront of optical radiation field generated by radiation source, includes: (a) setting diaphragm positions in pinhole diaphragm having diaphragm opening movable transversely to radiation source's optical axis, wherein a partial beam from radiation field passes through diaphragm opening at each diaphragm position and is imaged on optical sensor by imaging optics device; (b) recording lateral positions of partial beam relative to optical axis of imaging optics device, wherein lateral positions each with one of the diaphragm positions of pinhole diaphragm are recorded by optical sensor, and determining the shape of wavefront from recorded lateral positions of partial beam, wherein beam incidence range of the partial beam which is invariable for all diaphragm positions is set on imaging optics device with a pentaprism arrangement including at least first pentaprism and positioned between pinhole diaphragm and imaging optics device. A wavefront shape measuring device is also described.

    Abstract translation: 用于测量由辐射源产生的光辐射场的波前形状的方法,包括:(a)在具有可横向于辐射源的光轴可移动的光阑开口的针孔光阑中设置光阑位置,其中来自辐射场的部分光束通过每个 通过成像光学装置在光学传感器上成像; (b)记录部分光束相对于成像光学装置的光轴的横向位置,其中每个具有针孔光阑的一个光阑位置的横向位置由光学传感器记录,并且从部分光束的记录横向位置确定波前的形状 其中对于所有光阑位置不变的部分光束的光束入射范围被设置在具有至少第一五棱镜并且定位在针孔光阑和成像光学器件之间的五棱镜布置的成像光学器件上。 还描述了一种波前形状测量装置。

    Measuring apparatus, measuring method, and method of manufacturing an optical component
    26.
    发明授权
    Measuring apparatus, measuring method, and method of manufacturing an optical component 有权
    测量装置,测量方法和制造光学部件的方法

    公开(公告)号:US09091534B2

    公开(公告)日:2015-07-28

    申请号:US13795998

    申请日:2013-03-12

    Abstract: To eliminate influence of undesirable light component from an object when measuring optical characteristics such as shape and wavefront aberration of the object, light from light source (101) is separated by polarization beam splitter (103) into measuring light (L1) that irradiates and travels via the object (108) and is condensed on image plane (P) through microlenses (114a) of microlens array (114), and reference light (L2) that does not irradiate the object and is guided to the image plane by reference light optical system (109). A computer (113) acquires picked-up images sequentially from CCD image sensor (116) arranged on the image plane while changing optical path length of the reference light by movable stage (117), extracts interference light spots generated through interference between signal light component and the reference light from the picked-up images, calculates positions of the interference light spots, and calculates deviation amounts of positions from predetermined reference positions.

    Abstract translation: 为了在测量物体的形状和波面象差等光学特性时,消除来自物体的不良光分量的影响,来自光源(101)的光被偏振分束器(103)分离成照射和行进的测量光(L1) 通过物体(108)通过微透镜阵列(114)的微透镜(114a)在像平面(P)上聚焦,并且通过参考光学光学被引导到图像平面的参考光(L2)不被照射到物体 系统(109)。 计算机(113)在通过移动台(117)改变参考光的光程长度的同时,从布置在图像平面上的CCD图像传感器(116)顺序地获取拾取图像,提取通过信号光分量 和来自拾取图像的参考光,计算干涉光斑的位置,并计算出与预定基准位置的偏移量。

    WAVEFRONT SENSOR
    27.
    发明申请
    WAVEFRONT SENSOR 有权
    WAVEFRONT传感器

    公开(公告)号:US20140313487A1

    公开(公告)日:2014-10-23

    申请号:US14085695

    申请日:2013-11-20

    CPC classification number: A61B3/1015 G01J9/00 G01J2009/002 G01M11/0264

    Abstract: The present invention relates to a wavefront sensor using a pair of screens, each having a two-dimensional array of circular apertures, to achieve Moiré effects, and its use to measure the slope of a wavefront.

    Abstract translation: 本发明涉及使用一对屏幕的波前传感器,每个屏幕具有圆形孔径的二维阵列,以实现莫尔效应,以及用于测量波前斜率的用途。

    APPARATUS AND METHOD OF INFORMATION EXTRACTION FROM ELECTROMAGNETIC ENERGY BASED UPON MULTI-CHARACTERISTIC SPATIAL GEOMETRY PROCESSING
    28.
    发明申请
    APPARATUS AND METHOD OF INFORMATION EXTRACTION FROM ELECTROMAGNETIC ENERGY BASED UPON MULTI-CHARACTERISTIC SPATIAL GEOMETRY PROCESSING 有权
    基于多特征空间几何处理的电磁能量提取信息的方法和方法

    公开(公告)号:US20110299763A1

    公开(公告)日:2011-12-08

    申请号:US13210658

    申请日:2011-08-16

    Abstract: An apparatus for information extraction from electromagnetic energy via multi-characteristic spatial geometry processing to determine three-dimensional aspects. Structure receives the electromagnetic energy, which has a plurality of spatial phase characteristics. Structure separates the plurality of spatial phase characteristics of the received electromagnetic energy. Structure identifies spatially segregated portions of each of the plurality of spatial phase characteristics, with each spatially segregated portion corresponding in a point to point relationship to a spatially segregated portion for each of the other of the plurality of spatial phase characteristics in a group. Structure quantifies each segregated portion to provide a spatial phase metric of each segregated portion for providing a data map of the spatial phase metric of each separated spatial phase characteristic of the plurality of spatial phase characteristics. Structure processes the spatial phase metrics to determine surface contour information for each segregated portion of the data map.

    Abstract translation: 一种用于通过多特征空间几何处理从电磁能量提取信息以确定三维方面的装置。 结构接收具有多个空间相位特性的电磁能。 结构分离接收的电磁能的多个空间相位特性。 结构识别多个空间相位特性中的每一个的空间分离部分,其中每个空间隔离部分对应于一组中的多个空间相位特性中的另一个中的每一个的空间分离部分的点对点关系。 结构量化每个隔离部分以提供每个分离部分的空间相位度量,以提供多个空间相位特性的每个分离空间相位特性的空间相位度量的数据图。 结构处理空间相位度量以确定数据图的每个分离部分的表面轮廓信息。

    Apparatus and method of information extraction from electromagnetic energy based upon multi-characteristic spatial geometry processing
    29.
    发明授权
    Apparatus and method of information extraction from electromagnetic energy based upon multi-characteristic spatial geometry processing 有权
    基于多特征空间几何处理的电磁能量信息提取装置和方法

    公开(公告)号:US08023724B2

    公开(公告)日:2011-09-20

    申请号:US11045703

    申请日:2005-01-28

    Inventor: Blair A. Barbour

    Abstract: An apparatus for information extraction from electromagnetic energy via multi-characteristic spatial geometry processing to determine three-dimensional aspects of an object from which the electromagnetic energy is proceeding. The apparatus receives the electromagnetic energy. The received electromagnetic energy has a plurality of spatial phase characteristics. The apparatus separates the plurality of spatial phase characteristics of the received electromagnetic energy. The apparatus r identifies spatially segregated portions of each spatial phase characteristic, with each spatially segregated portion of each spatial phase characteristic corresponding to a spatially segregated portion of each of the other spatial phase characteristics in a group. The apparatus quantifies each segregated portion to provide a spatial phase metric of each segregated portion for providing a data map of the spatial phase metric of each separated spatial phase characteristic. The apparatus processes the spatial phase metrics to determine surface contour information for each segregated portion of the data map.

    Abstract translation: 一种用于通过多特征空间几何处理从电磁能量提取信息以确定电磁能量正在进行的物体的三维方面的装置。 该装置接收电磁能。 所接收的电磁能具有多个空间相位特性。 该装置分离接收的电磁能的多个空间相位特性。 装置r识别每个空间相位特征的空间分离的部分,每个空间相位特征的每个空间分离的部分对应于一组中的每个其他空间相位特征的空间上分离的部分。 该装置对每个隔离部分进行量化以提供每个分离部分的空间相位度量,以提供每个分离的空间相位特性的空间相位度量的数据图。 该装置处理空间相位度量以确定数据图的每个分离部分的表面轮廓信息。

    Imaging system
    30.
    发明授权
    Imaging system 有权
    成像系统

    公开(公告)号:US07808712B2

    公开(公告)日:2010-10-05

    申请号:US10543685

    申请日:2004-01-27

    CPC classification number: G01J9/00 G01J2009/002

    Abstract: Optical apparatus for simultaneously focussing first and second coaxially spaced object planes in respective separate first and second areas of a common image plane 13 (such as the sensor of a CCD camera) comprises non-diffractive beamsplitter means for receiving light from said object planes along a common path 2 for transmission to said first and second image areas along respective first and second optical paths 3, 4, and reflective or transmissive focussing means 8 arranged to bring said first and second object planes into focus in said first and second areas. The object planes may be differentiated by having different length paths 3,4 (different physical lengths and/or using a differential optical delay), and/or by having different focussing powers in the two paths. In an add-on for a camera, differently curved mirrors of long focal length modify the main camera lens. Polarising optics may be used to separate the two images. The apparatus may be used for 3-D imaging or wavefront analysis.

    Abstract translation: 用于同时聚焦在共同的图像平面13(例如CCD照相机的传感器)的相应单独的第一和第二区域中的第一和第二同轴间隔的物平面的光学装置包括非衍射分束器装置,用于沿着 用于沿着相应的第一和第二光路3,4传输到所述第一和第二图像区域的公共路径2以及布置成使所述第一和第二物体在所述第一和第二区域中聚焦的反射或透射聚焦装置8。 可以通过具有不同的长度路径3,4(不同的物理长度和/或使用差分光学延迟)和/或通过在两个路径中具有不同的聚焦功率来区分对象平面。 在相机的附件中,长焦距不同的曲面镜可以修改主相机镜头。 偏振光学元件可用于分离两个图像。 该装置可用于3-D成像或波前分析。

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