Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
    22.
    发明授权
    Exhaust apparatus and vacuum pumping unit including the exhaust apparatus 失效
    排气装置和真空泵单元包括排气装置

    公开(公告)号:US5480286A

    公开(公告)日:1996-01-02

    申请号:US217699

    申请日:1994-03-25

    CPC classification number: H01J41/14 H01J41/18

    Abstract: An exhaust apparatus and a high vacuum pumping unit including such high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted and, further, in the high vacuum pumping unit, those gas molecules diffused back or desorbed from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.

    Abstract translation: 公开了一种包括这种高真空装置和辅助真空泵的排气装置和高真空泵送装置,其中在真空容器中实现高真空,使得真空容器内的气体分子被离子化并加速而被排出, 此外,在高真空泵送单元中,从真空泵向后扩散或解吸的那些气体分子被离子化并加速以返回到真空泵。

    Exhaust apparatus with vacuum pump
    23.
    发明授权
    Exhaust apparatus with vacuum pump 失效
    排气装置带真空泵

    公开(公告)号:US5326227A

    公开(公告)日:1994-07-05

    申请号:US11783

    申请日:1993-02-01

    CPC classification number: H01J41/14 H01J41/18

    Abstract: An exhaust apparatus and a high vacuum pumping unit including a high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted. In the high vacuum pumping unit, those gas molecules are diffused back or released from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.

    Abstract translation: 公开了一种包括高真空装置和辅助真空泵的排气装置和高真空泵装置,其中在真空容器中实现高真空,使得真空容器内的气体分子被离子化并加速而被排出。 在高真空泵送单元中,这些气体分子被扩散回或从真空泵中释放出来被离子化并加速回到真空泵中。

    Ion pump with direct molecule flow channel through anode

    公开(公告)号:US09960026B1

    公开(公告)日:2018-05-01

    申请号:US14466711

    申请日:2014-08-22

    CPC classification number: H01J41/14 F04B37/14 H01J41/18

    Abstract: An ultra-high vacuum (UHV) system includes a UHV cell and an ion pump to maintain the UHV in the UHV cell. The ion pump has a GCC (glass, ceramic, or crystalline) housing. An interior wall of the ion-pump housing serves as an anode or bears a coating that serves as an anode. At least one cathode is disposed with respect to the housing so that it can cooperate with the anode to form an electric field for establishing a Penning trap. The GCC housing defines a flow channel that extends radially through the anode so that a molecule can flow directly into the most ionizing region of a Penning trap.

    Magnetic traveling-wave vacuum pump
    30.
    发明授权
    Magnetic traveling-wave vacuum pump 失效
    磁力旅行波真空泵

    公开(公告)号:US3708248A

    公开(公告)日:1973-01-02

    申请号:US3708248D

    申请日:1971-04-26

    Inventor: HALDEMAN C

    CPC classification number: H01J41/14

    Abstract: A vacuum pump wherein a a traveling magnetic wave coupled to ionized gas particles propels the particles from the inlet of the pump to the outlet thereof. Gas within the coupling region of the traveling wave is kept ionized by a high temperature electron emitting structure which directs electrons through said region. A roughing and backing pump is provided to bring the pressure in the system down to about 20 mm of mercury at which time the traveling-wave pump takes over.

    Abstract translation: 一种真空泵,其中耦合到电离气体颗粒的行进磁波将颗粒从泵的入口推到其出口。 行波耦合区内的气体通过引导电子通过所述区域的高温电子发射结构而被电离。 提供粗加工和后备泵,以将系统中的压力降低至约20毫米汞柱,此时行波泵接管。

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