公开(公告)号：US06223591B1

公开(公告)日：2001-05-01

申请号：US09200437

申请日：1998-11-27

申请人： Katsushi Nakano

发明人： Katsushi Nakano

IPC分类号： G01B528

CPC分类号： G01Q60/38 ,  G01Q20/02 ,  Y10S977/851

摘要： A probe microscope including a probe needle arrangement having a probe needle part, and a detection part connected to, and formed along the same axis as, the probe needle part; a displacement detector that detects changes in a condition of the probe needle part; and a movement device that drives the probe needle arrangement relative to a sample surface to be measured.

摘要翻译： 一种探针显微镜，包括具有探针针部的探针配置，以及与所述探针针部连接并形成在与所述探针针部相同的轴上的检测部; 位移检测器，其检测所述探针针部的状态的变化; 以及相对于要测量的样品表面驱动探针针布置的运动装置。

公开(公告)号：US06167753A

公开(公告)日：2001-01-02

申请号：US09226830

申请日：1999-01-07

申请人： Dong Chen ,  Edwin Flecha ,  James Michael Hammond ,  Kenneth Gilbert Roessler

发明人： Dong Chen ,  Edwin Flecha ,  James Michael Hammond ,  Kenneth Gilbert Roessler

IPC分类号： G01B734

CPC分类号： G01Q60/34 ,  G01Q60/30 ,  G01R29/0878 ,  G01R31/303 ,  Y10S977/851 ,  Y10S977/852

摘要： A scanning probe microscope operates in the manner of an atomic force microscope during intermittent periods of scanning motion, in which a sample surface is driven so that a scan line on the surface is moved past a probe tip being vibrated in engagement with the surface. Between these intermittent periods of scanning motion, the vibrating probe tip is moved out of engagement with the sample surface, so that the amplitude and phase shift of probe tip vibrations are determined by the gradient of a force field extending outward from the sample surface. Such a force field is established when the probe tip is attracted by, or repelled from, a magnetic or electric field at or near the sample surface. For each sample point, the system stores data representing the height of the sample surface and the force field.

公开(公告)号：US6094972A

公开(公告)日：2000-08-01

申请号：US123146

申请日：1998-07-27

申请人： Masatoshi Yasutake ,  Akira Inoue ,  Fumiki Sakai ,  Kazutoshi Watanabe ,  Tatsuya Miyatani

发明人： Masatoshi Yasutake ,  Akira Inoue ,  Fumiki Sakai ,  Kazutoshi Watanabe ,  Tatsuya Miyatani

IPC分类号： G01B21/30 ,  G01B5/00 ,  G01B7/34 ,  G01N37/00 ,  G01Q30/04 ,  G01Q60/24 ,  G01Q60/34 ,  G01B5/28

CPC分类号： G01Q10/06 ,  B82Y35/00 ,  G01Q30/04 ,  G01Q60/32 ,  Y10S977/851

摘要： An xy scanning unit produces a scanning signal along an x-direction and a scanning signal along a y-direction, which are determined by a contour of a sample to be monitored, scanning time of the x-direction, and a pixel number of the x-direction, supplied from a CPU. Then, the xy scanning unit outputs these scanning signals along the x-direction and the y-direction to a piezoelectric scanning apparatus. On the other hand, a second oscillator outputs a sine wave signal having a frequency determined by the scanning time of the x-direction and the pixel number of the x-direction to a second piezoelectric plate. A sample/hold circuit holds observation data of a probe at such timing after preselected time has passed since the output of the second oscillator becomes maximum, and then outputs the held observation data to a differential amplifier and a P.I control system. An output signal Q of the P.I control system is applied to a z-fine-moving electrode of the piezoelectric scanning apparatus, and also is converted into a digital signal by an A/D converter. This digital signal is stored into a memory in a sampling manner.

摘要翻译： xy扫描单元产生沿着x方向的扫描信号和沿着y方向的扫描信号，其由待监视的样本的轮廓，x方向的扫描时间和x方向的像素数确定 x方向，由CPU提供。 然后，xy扫描单元将这些扫描信号沿x方向和y方向输出到压电扫描装置。 另一方面，第二振荡器输出具有由x方向的扫描时间和x方向的像素数确定的频率的正弦波信号到第二压电板。 采样/保持电路在从第二振荡器的输出变为最大之后经过预选时间之后的这样的定时保持探测器的观测数据，然后将保持的观测数据输出到差分放大器和P.I控制系统。 P.I控制系统的输出信号Q被施加到压电扫描装置的z-微细电极上，并且还通过A / D转换器转换成数字信号。 该数字信号以采样方式存储到存储器中。

公开(公告)号：US06079254A

公开(公告)日：2000-06-27

申请号：US72230

申请日：1998-05-04

申请人： Dong Chen ,  Edwin Flecha ,  James Michael Hammond ,  Kenneth Gilbert Roessler

发明人： Dong Chen ,  Edwin Flecha ,  James Michael Hammond ,  Kenneth Gilbert Roessler

IPC分类号： G01B21/30 ,  G01B7/34 ,  G01N37/00 ,  G01Q60/34 ,  G01B5/28

CPC分类号： G01Q60/34 ,  B82Y35/00 ,  Y10S977/851

摘要： The vibrating probe of a scanning force microscope is brought into engagement with a sample surface in an initial approach process moving the probe toward the sample surface until the amplitude of probe vibration at an excitation frequency is measurably affected by forces between the tip and the sample, and then in a final approach process in which a change in vibration amplitude caused by a dithering vibration superimposed on the excitation vibration exceeds a pre-determined threshold limit. The excitation frequency is reduced if the phase angle of vibrations exceeds another limit, and the amplitude of the excitation driving function is increased as the amplitude or tip vibration falls below a setpoint. During approach and scanning, vibration amplitude is measured through a demodulator having an intermediate reference signal locked in phase with the tip motion signal.

摘要翻译： 扫描力显微镜的振动探针在初始逼近过程中与样品表面接合，使探针朝向样品表面移动，直到探针振动在激发频率处的振幅受到尖端和样品之间的力的可测量影响， 然后在叠加在激励振动上的由抖动振动引起的振动振幅的变化超过预定阈值的最终进近过程中。 如果振动的相位角超过另一极限，则励磁频率降低，激励驱动功能的振幅随振幅或尖端振动下降到设定点以下而增加。 在接近和扫描期间，通过具有与尖端运动信号同相锁定的中间参考信号的解调器来测量振幅。

公开(公告)号：US5992226A

公开(公告)日：1999-11-30

申请号：US74541

申请日：1998-05-08

申请人： John-Bruce DeVault Green ,  Gil U Lee

发明人： John-Bruce DeVault Green ,  Gil U Lee

IPC分类号： G01B21/30 ,  G01B5/00 ,  G01B5/30 ,  G01Q30/02 ,  G01Q60/24 ,  G01Q60/42 ,  G01N27/00

CPC分类号： G01Q60/42 ,  B82Y35/00 ,  Y10S977/849 ,  Y10S977/851 ,  Y10S977/853 ,  Y10S977/863

摘要： A sample support member for atomic force microscopy of intermolecular interactions includes a sample support base having a plurality of protrusions, each protrusion having an apical substrate region or tip that has been chemically modified by the immobilization thereon of a sample compound or of a linking compound that is capable of binding a sample compound. A reference compound support member has a surface region having at least one reference compound immobilized thereon.The relative position and orientation of the reference compound support member and the substrate support member are controlled to select a particular protrusion and to cause an interaction between a reference compound immobilized on the surface region of the free end of the cantilever and the sample compound immobilized on the apical substrate area of the selected protrusion. A physical parameter associated with the interaction between the reference compound and the sample compound can be measured.

摘要翻译： 用于分子间相互作用的原子力显微镜的样品支撑构件包括具有多个突起的样品支撑基底，每个突起具有通过其上固定化样品化合物或连接化合物进行化学修饰的顶端基底区域或尖端， 能够结合样品化合物。 参考化合物支撑构件具有固定有至少一个参考化合物的表面区域。 控制参考化合物支撑构件和基板支撑构件的相对位置和取向以选择特定的突起并且使固定在悬臂自由端的表面区域上的参考化合物与固定在悬臂梁上的样品化合物之间的相互作用 所选突起的顶端基底面积。 可以测量与参考化合物和样品化合物之间的相互作用相关的物理参数。

公开(公告)号：US5932876A

公开(公告)日：1999-08-03

申请号：US956703

申请日：1997-10-24

申请人： Philipp Niedermann

发明人： Philipp Niedermann

IPC分类号： G01Q20/04 ,  G01B7/34 ,  G01Q10/06 ,  G01Q60/16 ,  G01Q70/08 ,  H01J37/26

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  G01B7/34 ,  G01Q70/06 ,  Y10S977/851 ,  Y10S977/86 ,  Y10S977/861 ,  Y10S977/863 ,  Y10S977/872

摘要： A tunnel effect sensor, suitable for determining the topography of a surface, arm for exploring the profile of a surface of the sample by scanning it along two axes. The arm includes a tactile point that can be moved in a direction normal to the surface to be explored and a tunnel point near a tunnel electrode attached to the substrate. A control loop controls the distance between the tunnel point and its electrode. The position of the feeler arm is adjusted by means of the control loop and two actuators operating on the feeler arm in opposite directions. The feeler arm can therefore effect a virtual pivoting movement about the tunnel point. As a result, the sample-holder does not need to be moved along the measurement axis during measurements. Applications include atomic force microscopes.

摘要翻译： 隧道效应传感器，适用于确定表面的形貌，臂用于通过沿着两个轴扫描来探测样品表面的轮廓。 臂包括可沿垂直于要探索的表面的方向移动的触觉点和附接到基底的隧道电极附近的隧道点。 控制回路控制隧道点与其电极之间的距离。 探测臂的位置通过控制回路和两个在相反方向上操作在探测臂上的致动器进行调节。 因此，探测器臂可以实现围绕隧道点的虚拟枢转运动。 因此，在测量过程中，样品架不需要沿测量轴移动。 应用包括原子力显微镜。

公开(公告)号：US5856617A

公开(公告)日：1999-01-05

申请号：US922210

申请日：1997-09-02

申请人： Bruce Alvin Gurney ,  Harry Jonathon Mamin ,  Daniel Rugar ,  Virgil Simon Speriosu

发明人： Bruce Alvin Gurney ,  Harry Jonathon Mamin ,  Daniel Rugar ,  Virgil Simon Speriosu

IPC分类号： G01B7/24 ,  G01B7/34 ,  G01Q20/00 ,  G01Q60/24 ,  G11B9/00 ,  G01R33/02

CPC分类号： G01Q20/04 ,  B82Y35/00 ,  G11B9/1409 ,  G11B9/1418 ,  Y10S977/849 ,  Y10S977/851 ,  Y10S977/863 ,  Y10S977/873

摘要： An atomic force microscope (AFM) uses a spin valve magnetoresistive strain gauge formed on the AFM cantilever to detect deflection of the cantilever. The spin valve strain gauge operates in the absence of an applied magnetic field. The spin valve strain gauge is formed on the AFM cantilever as a plurality of films, one of which is a free ferromagnetic layer that has nonzero magnetostriction and whose magnetic moment is free to rotate in the presence of an applied magnetic field. In the presence of an applied stress to the free ferromagnetic layer due to deflection of the cantilever, an angular displacement of the magnetic moment of the free ferromagnetic layer occurs, which results in a change in the electrical resistance of the spin valve strain gauge. Electrical resistance detection circuitry coupled to the spin valve strain gauge is used to determine cantilever deflection.

摘要翻译： 原子力显微镜（AFM）使用形成在AFM悬臂上的自旋阀磁阻应变仪来检测悬臂的偏转。 自旋阀应变计在没有施加磁场的情况下工作。 自旋阀应变计形成在AFM悬臂上作为多个膜，其中之一是具有非零磁致伸缩的自由铁磁层，并且在施加的磁场的存在下其磁矩自由旋转。 在由于悬臂的偏转而对自由铁磁层施加的应力的存在下，发生自由铁磁层的磁矩的角位移，这导致自旋阀应变计的电阻的变化。 耦合到自旋阀应变仪的电阻检测电路用于确定悬臂偏转。

公开(公告)号：US5831961A

公开(公告)日：1998-11-03

申请号：US603890

申请日：1996-02-22

申请人： Kunihiro Sakai ,  Katsunori Hatanaka ,  Takahiro Oguchi ,  Akihiko Yamano ,  Shunichi Shido

发明人： Kunihiro Sakai ,  Katsunori Hatanaka ,  Takahiro Oguchi ,  Akihiko Yamano ,  Shunichi Shido

IPC分类号： G01R1/06 ,  G01B7/34 ,  G01N37/00 ,  G01Q10/06 ,  G01Q30/04 ,  G01Q60/10 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/14 ,  G11B21/04 ,  G11B7/00

CPC分类号： G11B9/1436 ,  B82Y10/00 ,  G01Q80/00 ,  G11B21/04 ,  Y10S977/849 ,  Y10S977/851 ,  Y10S977/869 ,  Y10S977/881 ,  Y10S977/947

摘要： In an information processing apparatus, at least one of recording and reproduction of information is performed while two-dimensionally scanning a recording medium with a probe, utilizing a physical phenomenon occurring between the probe and the medium. The apparatus includes a scanning mechanism for effecting relative movement between the probe and the medium so as to translate the probe as drawing a circular or elliptic locus on the medium and a recording and/or reproducing circuit for performing at least one of the recording and reproduction of information, utilizing the physical phenomenon during the relative movement.

摘要翻译： 在信息处理装置中，利用在探针和介质之间发生的物理现象，利用探针二维地扫描记录介质，进行信息的记录和再现中的至少一个。 该装置包括用于实现探针和介质之间的相对移动的扫描机构，以便在介质上绘制圆形或椭圆形轨迹并将探头平移，以及用于执行记录和再现中的至少一个的记录和/或再现电路 的信息，利用相对运动期间的物理现象。

公开(公告)号：US5812516A

公开(公告)日：1998-09-22

申请号：US475465

申请日：1995-06-07

申请人： Hiroyasu Nose ,  Toshimitsu Kawase ,  Akihiko Yamano

发明人： Hiroyasu Nose ,  Toshimitsu Kawase ,  Akihiko Yamano

IPC分类号： G01Q90/00 ,  G06K17/00 ,  G01Q60/24 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/14

CPC分类号： B82Y10/00 ,  G11B9/14 ,  G11B9/1445 ,  Y10S977/851

摘要： An information recording system includes a recording medium, and a probe electrode provided at a location opposed to the recording surface of the recording medium. The probe electrode is capable of recording on the recording medium by application of a voltage between the probe electrode and the recording medium. An elastic member supports the probe electrode for motion relative to a base member arranged perpendicular to the recording surface. The distance between the recording surface and the probe electrode is adjustable by a mechanism provided for that purpose. The displacement of the probe electrode caused by an interatomic force acting between the recording medium and the probe electrode is detected, and a displacement signal based on the detected displacement is output. A control circuit feeds back the displacement signal so that the probe electrode can move back to its original position.

摘要翻译： 信息记录系统包括记录介质和设置在与记录介质的记录表面相对的位置处的探针电极。 探针电极能够通过在探针电极和记录介质之间施加电压而在记录介质上进行记录。 弹性构件支撑探针电极，用于相对于垂直于记录表面布置的基底构件的运动。 记录表面和探针电极之间的距离可通过为此目的提供的机构来调节。 检测由作用在记录介质和探针电极之间的原子间力引起的探针电极的位移，并且输出基于检测到的位移的位移信号。 控制电路反馈位移信号，使得探针电极可以移回到其原始位置。

公开(公告)号：US5804709A

公开(公告)日：1998-09-08

申请号：US718339

申请日：1996-10-03

申请人： Jean-Philippe M. Bourgoin ,  Matthew B. Johnson ,  Bruno Michel

发明人： Jean-Philippe M. Bourgoin ,  Matthew B. Johnson ,  Bruno Michel

IPC分类号： G01B21/30 ,  G01B7/34 ,  G01L1/04 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/06 ,  G01Q20/00 ,  G01Q30/00 ,  G01Q60/04 ,  G01Q60/26 ,  G01Q60/30 ,  G01Q60/32 ,  G01Q60/34 ,  H01J37/28 ,  H01L21/66

CPC分类号： G01Q60/34 ,  B82Y35/00 ,  G01Q10/06 ,  G01Q60/04 ,  G01Q60/30 ,  G01Q60/32 ,  G01Q70/06 ,  Y10S977/732 ,  Y10S977/849 ,  Y10S977/851 ,  Y10S977/852 ,  Y10S977/875 ,  Y10S977/949 ,  Y10S977/954

摘要： A new method and an apparatus for measuring the deflection of or the force exerted upon a cantilever-type micromechanical element is presented which is based on detecting radiation emitted from the gap between the cantilever (220) and a second surface (230, 231). The radiation, while occurring spontaneously at high frequencies when appropriately biasing the cantilever and the second surface by a voltage, can be enlarged by using external energy sources. The new method and apparatus is also applied to surface investigation, particularly to dopant profiling.

摘要翻译： PCT No.PCT / EP95 / 00431 Sec。 371日期：1996年10月3日 102（e）日期1996年10月3日PCT提交1995年2月7日PCT公布。 第WO96 / 24819号公报 日期1996年8月15日提出了一种用于测量施加在悬臂式微机械元件上的偏转或力的新方法和装置，其基于检测从悬臂（220）和第二表面（220）之间的间隙发射的辐射 230,231）。 当通过使用外部能量源来适当地偏置悬臂和第二表面的电压时，辐射自发地在高频时发生。 新的方法和装置也适用于表面研究，特别是掺杂剂分析。