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公开(公告)号：US6094972A
公开(公告)日：2000-08-01
申请号：US123146
申请日：1998-07-27
CPC分类号： G01Q10/06 , B82Y35/00 , G01Q30/04 , G01Q60/32 , Y10S977/851
摘要： An xy scanning unit produces a scanning signal along an x-direction and a scanning signal along a y-direction, which are determined by a contour of a sample to be monitored, scanning time of the x-direction, and a pixel number of the x-direction, supplied from a CPU. Then, the xy scanning unit outputs these scanning signals along the x-direction and the y-direction to a piezoelectric scanning apparatus. On the other hand, a second oscillator outputs a sine wave signal having a frequency determined by the scanning time of the x-direction and the pixel number of the x-direction to a second piezoelectric plate. A sample/hold circuit holds observation data of a probe at such timing after preselected time has passed since the output of the second oscillator becomes maximum, and then outputs the held observation data to a differential amplifier and a P.I control system. An output signal Q of the P.I control system is applied to a z-fine-moving electrode of the piezoelectric scanning apparatus, and also is converted into a digital signal by an A/D converter. This digital signal is stored into a memory in a sampling manner.
摘要翻译： xy扫描单元产生沿着x方向的扫描信号和沿着y方向的扫描信号，其由待监视的样本的轮廓，x方向的扫描时间和x方向的像素数确定 x方向，由CPU提供。 然后，xy扫描单元将这些扫描信号沿x方向和y方向输出到压电扫描装置。 另一方面，第二振荡器输出具有由x方向的扫描时间和x方向的像素数确定的频率的正弦波信号到第二压电板。 采样/保持电路在从第二振荡器的输出变为最大之后经过预选时间之后的这样的定时保持探测器的观测数据，然后将保持的观测数据输出到差分放大器和P.I控制系统。 P.I控制系统的输出信号Q被施加到压电扫描装置的z-微细电极上，并且还通过A / D转换器转换成数字信号。 该数字信号以采样方式存储到存储器中。
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公开(公告)号：US06215121B1
公开(公告)日：2001-04-10
申请号：US09124128
申请日：1998-07-29
申请人： Masamichi Fujihira , Masatoshi Yasutake , Tatsuya Miyatani , Toshihiko Sakuhara , Kazutoshi Watanabe
发明人： Masamichi Fujihira , Masatoshi Yasutake , Tatsuya Miyatani , Toshihiko Sakuhara , Kazutoshi Watanabe
IPC分类号： G01N1316
CPC分类号： G01Q60/32 , Y10S977/851
摘要： A signal having a resonant frequency of a cantilever is output by a first oscillator, and supplied to a vibrating element and a control unit to oscillate a probe. A low frequency signal having a large amplitude is output by a second oscillator and supplied to a piezoelectric scanning apparatus. The probe is periodically and relatively moved with respect to the sample between a position where the sample surface is penetrated by the probe and another position where the probe does not penetrate the sample surface and is outside the range of atomic forces caused by the sample. During this movement, the probe movement may be analyzed to obtain a plurality of physical characteristics about the sample, e.g., hardness information of the sample, surface shape information, information related to an adsorption layer of the sample, and information related to physical qualities (for example, electromagnetic field, adsorption force, surface reaction force, electric double layer force in fluid) irradiated from the sample surface along a depth direction.
摘要翻译： 具有悬臂的共振频率的信号由第一振荡器输出，并被提供给振动元件和控制单元以使探头振荡。 具有大振幅的低频信号由第二振荡器输出并提供给压电扫描装置。 探针在样品表面被探针穿透的位置与探针不穿透样品表面的另一个位置之间相对于样品周期性地相对移动并且处于由样品引起的原子力范围之外。 在该移动期间，可以分析探针运动以获得关于样品的多个物理特性，例如样品的硬度信息，表面形状信息，与样品的吸附层相关的信息，以及与物理性质相关的信息（ 例如从样品表面沿着深度方向照射的电磁场，吸附力，表面反作用力，流体中的双电层力）。
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公开(公告)号：US07373806B2
公开(公告)日：2008-05-20
申请号：US10925049
申请日：2004-08-24
IPC分类号： G01B5/28
CPC分类号： G01Q10/065 , G01Q60/32
摘要： A scanning probe microscope has a probe tip for undergoing a scanning operation to scan a sample surface in X- and Y-directions parallel to the sample surface and for undergoing movement in a Z-direction vertical to the sample surface. A vibration unit vibrates the probe tip at a vibration frequency that resonates with of forcedly vibrates the probe tip. An observation unit collects observational data from the sample surface when the probe tip is in proximity or contact with the sample surface. A detection unit detects a variation in the state of vibration of the probe tip when the probe tip is in proximity or contact with the sample surface during a scanning operation. A control controls scanning of the probe tip in the X- and Y-directions and movement of the probe tip in the Z-direction, and controls scanning of the probe tip in a direction parallel to the sample surface after the observational data is collected from the sample surface and until the probe tip reached a next observation position in the X- and Y-direction. During a scanning operation, the control unit controls the probe tip to move in the Z-direction away from the sample surface only when the detection unit detects a variation in the state of vibration of the probe tip.
摘要翻译： 扫描探针显微镜具有用于进行扫描操作的探针尖端，以在与样品表面平行的X和Y方向上扫描样品表面，并且在垂直于样品表面的Z方向上进行移动。 振动单元以与谐振的振动频率振动探针尖端，强制地振动探针尖端。 当探头尖端接近或与样品表面接触时，观察单元从样品表面收集观察数据。 检测单元在扫描操作期间当探针尖端接近或接触样品表面时检测探针尖端的振动状态的变化。 控制器控制探针尖端沿X方向和Y方向的扫描以及探针尖端沿Z方向的移动，并且在从观察数据收集之后控制探针尖端在与样品表面平行的方向上的扫描 样品表面，直到探针尖端到达X和Y方向的下一个观察位置。 在扫描操作期间，只有当检测单元检测到探针尖端的振动状态的变化时，控制单元才控制探针尖端沿Z方向移动离开样品表面。
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公开(公告)号：US20050050947A1
公开(公告)日：2005-03-10
申请号：US10925049
申请日：2004-08-24
CPC分类号： G01Q10/065 , G01Q60/32
摘要： There are disclosed a scanning probe microscope and scanning method capable of reducing or avoiding damage due to collision between a probe tip and a sample, shortening the measuring time, improving the throughput and measuring accuracy, and collecting observational data such as topographic data about the sample surface without being affected by an adhesive water layer. The microscope has a vibration unit for vibrating the probe tip, an observation unit for collecting observational data when the tip is in proximity or contact with the sample surface, a detector for detecting a variation in the state of vibration of the tip when it is in proximity or contact with the sample surface, and a control unit for controlling movement of the tip in X- and Y-directions parallel to the sample surface and in a Z-direction vertical to the sample surface. After collecting the observational data, the control unit scans the tip in a direction parallel to the sample surface until a next observation position in the X- or Y-direction is reached. During the scanning, if a variation in the state of vibration of the tip is detected, the control unit moves the tip in the Z-direction away from the sample surface.
摘要翻译： 公开了一种扫描探针显微镜和扫描方法，其能够减少或避免由于探针尖端和样品之间的碰撞而引起的损伤，缩短测量时间，提高吞吐量和测量精度，并且收集观测数据，例如样品的地形数据 表面不受粘合剂水层的影响。 显微镜具有用于使探针尖端振动的振动单元，用于当尖端接近样品表面时收集观察数据的观察单元，用于检测尖端在其中处于振动状态时的变化的检测器 与样品表面接近或接触;以及控制单元，用于控制尖端在平行于样品表面的X和Y方向以及垂直于样品表面的Z方向上的移动。 在收集观察数据之后，控制单元沿与样品表面平行的方向扫描尖端，直到到达X或Y方向的下一个观察位置。 在扫描期间，如果检测到尖端的振动状态的变化，则控制单元将尖端沿Z方向移动离开样品表面。
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5.发明申请公开(公告)号：US20070278177A1
公开(公告)日：2007-12-06
申请号：US11809518
申请日：2007-06-01
申请人： Kazushige Kondo , Masatoshi Yasutake , Takuya Nakaue , Osamu Takaoka , Atsushi Uemoto , Kazutoshi Watanabe , Yoshiteru Shikakura
发明人： Kazushige Kondo , Masatoshi Yasutake , Takuya Nakaue , Osamu Takaoka , Atsushi Uemoto , Kazutoshi Watanabe , Yoshiteru Shikakura
摘要： Under the condition that the height is fixed at a target height by turning off a feedback control system of a Z piezoelectric actuator of a cantilever of an atomic force microscope having a probe, which is harder than a processed material, flexure and twisting of the cantilever when carrying out mechanical processing while selectively repeating scanning only on the processed area (in the case of detecting flexure, parallel with the cantilever and in the case of detecting twisting, vertical with the cantilever) is monitored by a quadrant photodiode position sensing detector and the processing is repeated till a flexure amount or a twisting amount, namely, till an elastic deformation amount of the cantilever becomes not more than a determined threshold. It is not necessary to carry out scanning of the observation in obtaining the height information for detection of an end point, so that it is possible to improve a throughput of processing.
摘要翻译： 通过关闭具有探针的原子力显微镜的悬臂的Z型压电致动器的反馈控制系统，该高度被固定在目标高度的条件下，其比加工材料更硬，悬臂的弯曲和扭曲 当在被处理区域（在检测弯曲的情况下，与悬臂平行的情况下，并且在检测到扭转的情况下，与悬臂垂直的情况下）进行机械处理时，通过象限光电二极管位置感测检测器监视 重复加工直到挠曲量或扭转量，即直到悬臂的弹性变形量变得不大于确定的阈值。 在获得用于检测终点的高度信息时，不需要进行观察的扫描，从而可以提高处理的吞吐量。
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公开(公告)号：US07442925B2
公开(公告)日：2008-10-28
申请号：US11370006
申请日：2006-03-04
申请人： Masatoshi Yasutake , Takuya Nakaue , Kazutoshi Watanabe , Osamu Takaoka , Atsushi Uemoto , Naoya Watanabe , Yoshiteru Shikakura
发明人： Masatoshi Yasutake , Takuya Nakaue , Kazutoshi Watanabe , Osamu Takaoka , Atsushi Uemoto , Naoya Watanabe , Yoshiteru Shikakura
IPC分类号： G01N13/16
CPC分类号： G01N23/225 , G01Q60/34
摘要： The present invention provides a working method using a scanning probe which can enhance a working speed and prolong a lifetime of the probe. The present invention provides the working method using a scanning probe which works a sample by performing the relative scanning of a probe supported on a cantilever on the sample at a predetermined scanning speed. The working method can work the object to be worked while forcibly and relatively vibrating the probe in the direction orthogonal to or parallel to a working surface of the sample at low frequency of 100 to 1000 Hz.
摘要翻译： 本发明提供一种使用扫描探针的工作方法，其可以提高工作速度并延长探针的寿命。 本发明提供了使用扫描探针的工作方法，该扫描探针通过以预定扫描速度执行支撑在样品上的悬臂上的探针的相对扫描来对样品进行工作。 该工作方法可以在100至1000Hz的低频下，以与样品的工作表面正交或平行的方向强制地相对振动探针，从而对被加工物进行加工。
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公开(公告)号：US20060219901A1
公开(公告)日：2006-10-05
申请号：US11370006
申请日：2006-03-04
申请人： Masatoshi Yasutake , Takuya Nakaue , Kazutoshi Watanabe , Osamu Takaoka , Atsushi Uemoto , Naoya Watanabe , Yoshiteru Shikakura
发明人： Masatoshi Yasutake , Takuya Nakaue , Kazutoshi Watanabe , Osamu Takaoka , Atsushi Uemoto , Naoya Watanabe , Yoshiteru Shikakura
CPC分类号： G01N23/225 , G01Q60/34
摘要： The present invention provides a working method using a scanning probe which can enhance a working speed and prolong a lifetime of the probe. The present invention provides the working method using a scanning probe which works a sample by performing the relative scanning of a probe supported on a cantilever on the sample at a predetermined scanning speed. The working method can work the object to be worked while forcibly and relatively vibrating the probe in the direction orthogonal to or parallel to a working surface of the sample at low frequency of 100 to 1000 Hz.
摘要翻译： 本发明提供一种使用扫描探针的工作方法，其可以提高工作速度并延长探针的寿命。 本发明提供了使用扫描探针的工作方法，该扫描探针通过以预定扫描速度执行支撑在样品上的悬臂上的探针的相对扫描来对样品进行工作。 该工作方法可以在100至1000Hz的低频下，以与样品的工作表面正交或平行的方向强制地相对振动探针，从而对被加工物进行加工。
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8.发明授权Manufacturing method of piezoelectric film element, piezoelectric film element and piezoelectric device 有权压电薄膜元件，压电薄膜元件和压电元件的制造方法公开(公告)号：US09166142B2
公开(公告)日：2015-10-20
申请号：US13567157
申请日：2012-08-06
IPC分类号： H01L41/332 , H01L41/08 , H01L41/047 , H01G5/18 , H01L41/09 , H01L41/187
CPC分类号： H01L41/332 , H01G5/18 , H01L41/047 , H01L41/0477 , H01L41/0805 , H01L41/094 , H01L41/1873
摘要： A manufacturing method of a piezoelectric film element includes forming a piezoelectric film including a lead-free alkali niobate based compound having a perovskite structure represented by a compositional formula of (K1-XNaX)NbO3 on a substrate, and dry-etching the piezoelectric film by using a low-pressure plasma including a fluorine system reactive gas.
摘要翻译： 压电薄膜元件的制造方法包括在基板上形成具有由（K1-XNaX）NbO3组成式表示的钙钛矿结构的无铅碱铌酸酯系化合物的压电膜，并通过以下方式对压电膜进行干法蚀刻 使用包含氟系反应气体的低压等离子体。
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公开(公告)号：US08860286B2
公开(公告)日：2014-10-14
申请号：US13577405
申请日：2011-02-15
IPC分类号： H01L41/187 , H01L41/08 , H01L41/316
CPC分类号： H01L41/0805 , H01L41/1873 , H01L41/316
摘要： Disclosed are a piezoelectric thin film element and a piezoelectric thin film device which have improved piezoelectric properties and high performance and can be produced in improved yields. The piezoelectric thin film element (1) comprises: a substrate (10), and a piezoelectric thin film (40) which is arranged on the substrate (10), has at least one crystal structure represented by general formula (NaxKyLiz)NbO3 (0≦x≦1, 0≦y≦1, 0≦z≦0.2, x+y+z=1) and selected from the group consisting of pseudo-cubic crystal, a hexagonal crystal, and an orthorhombic crystal, and contains an inert gas element at a ratio of 80 ppm or less by mass.
摘要翻译： 公开了一种压电薄膜元件和压电薄膜器件，其具有改进的压电性能和高性能，并且可以以提高的产率制造。 压电薄膜元件（1）包括：基板（10）和布置在基板（10）上的压电薄膜（40），具有至少一个由通式（NaxKyLiz）NbO 3（0＆nlE）表示的晶体结构 ; x＆nlE; 1,0，nlE; y＆nlE; 1,0，nlE; z＆nlE; 0.2，x + y + z = 1），选自假立方晶体，六方晶体和正交晶体， 气体元素的比例为80ppm以下。
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公开(公告)号：US08569294B2
公开(公告)日：2013-10-29
申请号：US12282396
申请日：2007-03-14
申请人： Kenji Fukunaga , Toshiyuki Kohara , Kazutoshi Watanabe , Yoshihiro Usui , Fumiaki Uehara , Satoshi Yokoshima , Daiki Sakai , Shin-ichi Kusaka , Kazuki Nakayama
发明人： Kenji Fukunaga , Toshiyuki Kohara , Kazutoshi Watanabe , Yoshihiro Usui , Fumiaki Uehara , Satoshi Yokoshima , Daiki Sakai , Shin-ichi Kusaka , Kazuki Nakayama
IPC分类号： A61K31/535
CPC分类号： C07D413/14 , C07D401/04 , C07D401/14 , C07D403/14 , C07D409/14 , C07D453/06 , C07D493/04
摘要： A compound represented by the formula (I), an optically active isomer thereof, or a pharmaceutical acceptable salt thereof: wherein R2 represents a hydrogen or the like; R3 represents methyl group or the like; R20 represents a halogen atom or the like; q represents an integer of 0 to 3; Z represent nitrogen atom, CH, or the like; R4 represents hydrogen or the like; R5 represents hydrogen or the like; R6 represents a substituted alkyloxy and the like; p represents an integer of 0 to 3; X represents bond, CH2, oxygen atom, NH, or the like; any one or more of R5 and R6, R5 and R4, R6 and R4, X and R5, X and R4, X and R6, and R6 and R6 may combine to each other to form a ring, which is used for preventive and/or therapeutic treatment of a disease caused by tau protein kinase 1 hyperactivity such as a neurodegenerative diseases (e.g. Alzheimer disease).
摘要翻译： 由式（I）表示的化合物或其光学活性异构体或其药学上可接受的盐：其中R2表示氢等; R3表示甲基等; R 20表示卤素原子等; q表示0〜3的整数， Z表示氮原子，CH等; R4表示氢等; R5表示氢等; R6表示取代的烷氧基等; p表示0〜3的整数， X表示键，CH2，氧原子，NH等; R 5和R 6，R 5和R 4，R 6和R 4，X和R 5，X和R 4，X和R 6以及R 6和R 6中的任何一个或多个可以彼此结合形成环，其用于预防和/ 或治疗由tau蛋白激酶1多动症如神经变性疾病（例如阿尔茨海默病）引起的疾病。
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