Vacuum pumping arrangement
    21.
    发明授权

    公开(公告)号:US11187222B2

    公开(公告)日:2021-11-30

    申请号:US16462615

    申请日:2017-11-23

    申请人: Edwards Limited

    摘要: A vacuum pumping arrangement comprises a first pump which has a first inlet and a first outlet. The first inlet is fluidly connected to a first common pumping line. The first common pumping line includes a plurality of first pumping line inlets each of which is fluidly connectable to a least one process chamber within a group of process chambers that form a semiconductor fabrication tool. The vacuum pumping arrangement also includes a reserve pump which has a reserve inlet and a reserve outlet. The reserve inlet is selectively fluidly connectable to each process chamber within the group of process chambers that form the semiconductor fabrication tool. The vacuum pumping arrangement additionally includes a controller which is configured to selectively fluidly isolate the pump from one or more given process chambers and selectively fluidly connect the reserve pump with the said one or more given process chambers.

    GAS LIFT COMPRESSOR SYSTEM AND METHOD FOR SUPPLYING COMPRESSED GAS TO MULTIPLE WELLS

    公开(公告)号:US20210348604A1

    公开(公告)日:2021-11-11

    申请号:US17384250

    申请日:2021-07-23

    发明人: Will Nelle

    摘要: A high pressure gas lift compressor system and method of using the system for supplying compressed gas to multiple wells are provided. The system includes a compressor having multiple compressor cylinders. Each cylinder has its own gas inlet line and dedicated gas outlet line that supplies compressed gas from that cylinder directly to a wellbore to provide artificial gas lift. Each cylinder also has its own control valve upstream of the cylinder to control the suction pressure to the cylinder. A desired gas flow rate to each well may be input, and the control valve is adjusted accordingly to achieve the flow rate. By inputting a flow rate for each separate cylinder, the flow rate to each well may be independently controlled.

    Gas Compressor
    23.
    发明申请

    公开(公告)号:US20210348603A1

    公开(公告)日:2021-11-11

    申请号:US17286233

    申请日:2019-09-10

    摘要: An object of the present invention is to realize inexpensive and simple compressor number control of gas compressors. In order to achieve the above object, there is provided a gas compressor set as a master gas compressor that performs compressor number control on N slave gas compressors, the compressor including: a communication I/F that is communicable with the slave gas compressors; and a control unit. When one cycle of communication with the N slave gas compressors in N communication sets is defined as a total compressor number communication cycle, in an initial total compressor number communication cycle, in first to Nth communication sets, the control unit transmits a first response request to each of first to Nth slave gas compressors, and when the control unit receives a response from the slave gas compressors, the control unit determines that communication connection with the slave gas compressors has succeeded, and when the control unit receives no response from the slave gas compressors, the control unit determines that communication connection with the slave gas compressors has failed. In second and following total compressor number communication cycles, the control unit transmits a second response request to the slave gas compressors, with which the communication connection has succeeded, in each of the communication sets, and transmits the first response request to the slave gas compressors, with which the communication connection has failed, at different timings.

    Dual-pump outflowing liquid container

    公开(公告)号:US11155399B2

    公开(公告)日:2021-10-26

    申请号:US17160357

    申请日:2021-01-27

    发明人: Debin Yan Shenzhou Li

    摘要: The present disclosure provides a dual-pump outflowing liquid container, comprising an outer tube, an inner tube and a pump core mechanism, wherein the pump core mechanism includes a pump core mounting seat, the first vacuum pump, the second vacuum pump and a pressing head, the embedding connector is connected to the inner tube embedding mounting hole in a sealing manner, the pump core mounting seat is detachably connected to the top end of the outer tube, the first pump core mounting hole corresponds to the first pump core intercommunication hole, the second pump core mounting hole corresponds to the second pump core intercommunication hole, the pressing head is slidably connected to the pump core mounting seat, a passage inlet of the first outflowing liquid passage is abutting with a pump outlet of the first vacuum pump in a sealing manner.

    Development of a higher-level model

    公开(公告)号:US11136974B2

    公开(公告)日:2021-10-05

    申请号:US14776387

    申请日:2014-03-14

    摘要: A method for controlling and/or monitoring a compressor system is provided. The compressor system includes one or more compressors and one or more peripheral devices. The compressors and peripheral devices are arranged or connected in a predetermined configuration. The compressor system is controlled and/or monitored by a control/monitoring unit. The method involves creating one or more derived models on the basis of one or more initial models of the compressor system that are based on a P&I diagram. The derived models take into account the operative interrelationships among the individual compressors and peripheral devices, and optionally also dynamic processes. The one or more derived models form the basis for subsequent control, monitoring, diagnosis or evaluation routines.

    Booster system
    27.
    发明授权

    公开(公告)号:US11022369B2

    公开(公告)日:2021-06-01

    申请号:US16060352

    申请日:2016-02-09

    摘要: A booster system for increasing pressure of an object gas includes: a first compression unit that compresses the object gas to intermediate pressure equal to or higher than the critical pressure and lower than the target pressure and generates an intermediate supercritical fluid; a cooling unit that cools the intermediate supercritical fluid with a cooling medium and generates an intermediate supercritical pressure liquid; a liquid extracting and pressure reducing unit that extracts a part of the intermediate supercritical pressure liquid; a flow regulating valve that regulates a flow rate of the extracted part of the intermediate supercritical pressure liquid; a second compression unit that increases pressure of the rest of the intermediate supercritical pressure liquid to be equal to or higher than the target pressure; and a pressure sensor that detects pressure of the intermediate supercritical pressure liquid.

    Suction line arrangement for multiple compressor system

    公开(公告)号:US10941772B2

    公开(公告)日:2021-03-09

    申请号:US15445137

    申请日:2017-02-28

    摘要: A compressor includes a shell assembly and a compression mechanism disposed within the shell assembly. The shell assembly includes first and second end caps. A suction chamber is disposed within the shell assembly between the first end cap and the second end cap. A discharge chamber and oil sump may be disposed within the shell assembly. The shell assembly includes at least one suction opening into the suction chamber. A distributor is in communication with one of the suction openings. Plugs may sealingly engage another one of the suction openings. The distributor includes an inlet path and first and second outlet paths. A suction line is coupled to the inlet path. The suction line includes at least first and second portions. A first plane bisecting the second portion along a length of the second portion is perpendicular to a second plane that bisects the first and second outlet paths.