公开(公告)号：US20060122565A1

公开(公告)日：2006-06-08

申请号：US11141730

申请日：2005-05-31

Applicant: Chee Kooi

Inventor： Chee Kooi

IPC: A61M5/00

CPC classification number: B81B3/0024 ,  A61M5/16881 ,  A61M5/1723 ,  A61M2205/0266 ,  B81B2201/018 ,  B81B2201/045 ,  B81B2201/054 ,  H01H2037/008 ,  Y10T137/8242

Abstract: Briefly, in accordance with one embodiment of the invention, a switch structure or the like such as a valve, motor, or optical switch, may be constructed based on a thermoresponsive polymer. At a first temperature the thermoresponsive polymer may be in a first volume state, and at a second temperate the thermoresponsive polymer may be in a second volume state. The change in volume of the thermoresponsive polymer may be operative to push or pull the mechanical structures of the switch, valve, motor, optical switch, and so on, to effectuate operation of the structures.

Abstract translation: 简而言之，根据本发明的一个实施例，可以基于热能聚合物来构造诸如阀，电动机或光开关的开关结构等。 在第一温度下，热可聚合物可以处于第一体积状态，而在第二温度下，热可聚合物可以处于第二体积状态。 热反应聚合物的体积变化可以用于推动或拉动开关，阀门，电动机，光学开关等的机械结构，以实现结构的操作。

公开(公告)号：US20060072180A1

公开(公告)日：2006-04-06

申请号：US10527731

申请日：2004-06-25

Applicant: Masaya Tamura ,  Shinji Kobayashi

Inventor： Masaya Tamura ,  Shinji Kobayashi

IPC: G02B26/08

CPC classification number: G02B6/358 ,  B81B3/0051 ,  B81B2201/033 ,  B81B2201/045 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3544 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3584 ,  G02B26/0833 ,  H02N1/008

Abstract: A buckling actuator has a connecting section of a supporting beam that is provided with a rotatable supporter for allowing a movable member to be stably maintained at one of two switch positions. A substrate, stationary members, rotatable supporters, and supporting beams support a movable member in a shiftable manner in a y-axis direction, such that the movable member can be shifted between first and second switch positions. Moreover, the rotatable supporters are each provided with arm portions which extend in a radial fashion and support the corresponding supporting beam in a rotatable manner. When the movable member is being shifted, each supporting beam scan be rotated without having to bend a corresponding end by a significant amount. Thus, a large barrier ΔE of potential energy of the movable member is set between the first and second switch positions. The movable member can therefore be stably maintained at each of the switch positions even when electric power is not supplied to electrodes. Furthermore, each arm portion prevents the movable member from being displaced in an x-axis direction.

Abstract translation: 弯曲致动器具有支撑梁的连接部分，该连接部分设置有用于允许可动构件稳定地保持在两个开关位置之一的可旋转支撑件。 基板，固定构件，旋转支撑件和支撑梁在y轴方向上以可移动的方式支撑可移动构件，使得可移动构件能够在第一和第二开关位置之间移动。 此外，旋转的支撑件各自设置有以径向方式延伸并以可旋转方式支撑相应的支撑梁的臂部分。 当可移动部件正在移动时，每个支撑梁扫描被旋转，而不必将相应的端部弯曲大量。 因此，在第一和第二开关位置之间设置可动构件的势能的大阻挡DeltaE。 因此，即使不向电极供电，也可以将可动构件稳定地维持在开关位置的各个位置。 此外，每个臂部防止可动构件在x轴方向上移位。

公开(公告)号：US20060027839A1

公开(公告)日：2006-02-09

申请号：US11243550

申请日：2005-10-04

Applicant: Hiromu Ishii ,  Yasuyuki Tanabe ,  Katsuyuki Machida ,  Masami Urano ,  Shouji Yagi ,  Tomomi Sakata

Inventor： Hiromu Ishii ,  Yasuyuki Tanabe ,  Katsuyuki Machida ,  Masami Urano ,  Shouji Yagi ,  Tomomi Sakata

IPC: H01L29/80

CPC classification number: B81B3/0008 ,  B81B2201/045 ,  B81C2201/112

Abstract: In a micromachine according to this invention, a polyimide film is formed on the surface of each electrode. The polyimide film is formed as follows. A substrate having each electrode and a counterelectrode are dipped in an electrodeposition polyimide solution, and a positive voltage is applied to the electrode. A material dissolved in the electrodeposition polyimide solution is deposited on a surface of the positive-voltage-applied electrode that is exposed in the solution, thus forming a polyimide film on the surface.

Abstract translation: 在根据本发明的微型机器中，在每个电极的表面上形成聚酰亚胺膜。 聚酰亚胺膜如下形成。 将具有每个电极和反电极的基板浸渍在电沉积聚酰亚胺溶液中，并向电极施加正电压。 溶解在电沉积聚酰亚胺溶液中的材料沉积在暴露在溶液中的正电压施加电极的表面上，从而在表面上形成聚酰亚胺膜。

公开(公告)号：US20050167769A1

公开(公告)日：2005-08-04

申请号：US11096840

申请日：2005-03-30

Applicant: John Dunec ,  Eric Peeters ,  Armin Volkel ,  Michel Rosa ,  Dirk DeBruyker ,  Thomas Hantschel

Inventor： John Dunec ,  Eric Peeters ,  Armin Volkel ,  Michel Rosa ,  Dirk DeBruyker ,  Thomas Hantschel

IPC: B81B3/00 ,  G02B26/08 ,  G01P15/125

CPC classification number: B81B3/0008 ,  B81B3/0021 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0118 ,  B81B2203/058 ,  G02B26/0841 ,  H02N1/002

Abstract: A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode moves too close to the fixed electrode. By repositioning the fixed electrode from being directly underneath the moving electrode, a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.

公开(公告)号：US20050162730A1

公开(公告)日：2005-07-28

申请号：US11082881

申请日：2005-03-18

Applicant: Osamu Tsuboi ,  Satoshi Ueda ,  Yoshihiro Mizuno ,  Ippei Sawaki ,  Fumio Yamagishi

Inventor： Osamu Tsuboi ,  Satoshi Ueda ,  Yoshihiro Mizuno ,  Ippei Sawaki ,  Fumio Yamagishi

IPC: B81B3/00 ,  B81C1/00 ,  G02B26/08 ,  G11B7/09 ,  G02B26/00

CPC classification number: B81C1/00142 ,  B81B3/0078 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0136 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C1/00396 ,  G02B26/0841 ,  Y10S359/904

Abstract: A method is provided for making a micromirror unit which includes a frame, a mirror forming base, and bridges connecting the frame to the mirror forming base. The method includes the following steps. First, a first mask pattern is formed on a substrate for masking portions of the substrate which are processed into the frame and the mirror forming base. Then, a second mask pattern is formed on the substrate for masking portions of the substrate which are processed into the bridges. Then, the substrate is subjected to a first etching process with the first and the second mask patterns present as masking means. Then, the second mask pattern is removed selectively. Then, the substrate is subjected to a second etching process with the first mask pattern present as masking means. Finally, the first mask pattern is removed.

公开(公告)号：US06891650B2

公开(公告)日：2005-05-10

申请号：US10755339

申请日：2004-01-13

Applicant: Yoshihiro Mizuno ,  Satoshi Ueda ,  Osamu Tsuboi ,  Ippei Sawaki ,  Hisao Okuda ,  Fumio Yamagishi ,  Norinao Kouma

Inventor： Yoshihiro Mizuno ,  Satoshi Ueda ,  Osamu Tsuboi ,  Ippei Sawaki ,  Hisao Okuda ,  Fumio Yamagishi ,  Norinao Kouma

IPC: B01D53/88 ,  B01J8/04 ,  B81B3/00 ,  B81C1/00 ,  C01B3/16 ,  G02B26/08

CPC classification number: G02B26/0841 ,  B01D53/885 ,  B01J8/0453 ,  B01J8/0496 ,  B01J2208/00212 ,  B01J2208/00309 ,  B01J2208/025 ,  B81B2201/045 ,  B81B2203/0136 ,  B81C1/00142 ,  B81C1/00626 ,  B81C2201/0142 ,  C01B3/16 ,  C01B2203/0288 ,  C01B2203/045 ,  C01B2203/0485 ,  Y10S359/904

Abstract: A method of making a micromirror unit is provided. In accordance with the method, a micromirror unit is made from a material substrate having a multi-layer structure composed of silicon layers and at least one intermediate layer. The resulting micromirror unit includes a mirror forming base, a frame and a torsion bar. The method includes the following steps. First, a pre-torsion bar is formed by subjecting one of the silicon layers to etching. The obtained pre-torsion bar is rendered smaller in thickness than the mirror forming base and is held in contact with the intermediate layer. Then, the desired torsion bar is obtained by removing the intermediate layer contacting with the pre-torsion bar.

Abstract translation: 提供了制造微镜单元的方法。 根据该方法，微镜单元由具有由硅层和至少一个中间层构成的多层结构的材料基板制成。 所得到的微镜单元包括反射镜形成基座，框架和扭杆。 该方法包括以下步骤。 首先，通过使一个硅层进行蚀刻来形成预扭杆。 所获得的预扭杆的厚度比反射镜形成基座的厚度小，并与中间层保持接触。 然后，通过去除与预扭杆接触的中间层来获得所需的扭力杆。

公开(公告)号：US20050052723A1

公开(公告)日：2005-03-10

申请号：US10895290

申请日：2004-07-21

Applicant: Shin-Ichiro Watanabe ,  Koji Horio ,  Kenichi Muta ,  Masayoshi Esashi

Inventor： Shin-Ichiro Watanabe ,  Koji Horio ,  Kenichi Muta ,  Masayoshi Esashi

IPC: G02B26/02 ,  B81B3/00 ,  G02B26/00

CPC classification number: B81B3/0037 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/0136 ,  B81B2203/051

Abstract: An electrostatic comb drive actuator, characterized in that plural outer suspended elastic beams 2a and 2b are disposed in parallel to and outside plural inner suspended elastic beams 1a and 1b disposed in parallel to each other; the ends of the inner suspended elastic beams and the outer suspended elastic beams on both sides are connected with end connecting beams 3a and 3b; the outer suspended elastic beams are supported at their centers on a board 5; the inner suspended elastic beams are connected with each other at their centers by means of a working section 6; a movable comb electrode 7 is supported on the working section; and a fixed comb electrode 8 is supported on the board.

Abstract translation: 一种静电梳驱动致动器，其特征在于，多个外悬置弹性梁2a和2b平行于彼此平行布置的多个内悬置弹性梁1a和1b平行设置; 内侧悬臂弹簧梁的端部和两侧的外侧悬臂弹性梁与末端连接梁3a，3b连接; 外侧悬臂弹性梁在其中心支撑在板5上; 内部悬吊弹性梁通过工作部分6在其中心处相互连接; 可动梳状电极7被支撑在工作部分上; 并且固定梳状电极8被支撑在板上。

公开(公告)号：US20050046980A1

公开(公告)日：2005-03-03

申请号：US10962445

申请日：2004-10-13

Applicant: Yoshihiro Mizuno ,  Satoshi Ueda ,  Osamu Tsuboi ,  Ippei Sawaki ,  Hisao Okuda ,  Norinao Kouma ,  Hiromitsu Soneda ,  Fumio Yamagishi

Inventor： Yoshihiro Mizuno ,  Satoshi Ueda ,  Osamu Tsuboi ,  Ippei Sawaki ,  Hisao Okuda ,  Norinao Kouma ,  Hiromitsu Soneda ,  Fumio Yamagishi

IPC: B81B3/00 ,  B81C1/00 ,  G02B26/08 ,  G02B7/182 ,  G02F1/29

CPC classification number: G02B26/0841 ,  B81B2201/045 ,  B81B2203/0136 ,  B81C1/00182 ,  B81C2203/0109 ,  Y10S359/904

Abstract: A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.

Abstract translation: 微镜单元包括承载镜部分的移动部分，框架和将移动部件连接到框架的扭杆。 移动部件，框架和扭杆从材料基板形成为一体。 框架包括比移动部分更厚的部分。

公开(公告)号：US06859577B2

公开(公告)日：2005-02-22

申请号：US09891760

申请日：2001-06-25

Applicant: Chuang-Chia Lin

Inventor： Chuang-Chia Lin

IPC: B81B3/00 ,  G02B26/08 ,  G02B6/42 ,  G02B6/26

CPC classification number: B81B3/0008 ,  B81B2201/045 ,  B81B2203/058 ,  G02B26/0841

Abstract: A method and apparatus are described for reducing stiction in a MEMS device having a movable element and a substrate. The method generally comprises providing the substrate with an anti-stiction member and interposing the anti-stiction member between the moveable element and the substrate. The apparatus generally comprises an anti-stiction member that is interposable between the moveable element and the substrate. Another embodiment of the invention of the invention is directed to a MEMS device, comprising: a substrate, a moveable element moveably coupled to the substrate, and an anti-stiction member that is interposable between the moveable element and the substrate. A further embodiment of the invention is directed to an optical switch having one or more moveable elements moveably coupled to a substrate, and an anti-stiction member that is interposable between at least one of the moveable elements and the substrate. The anti-stiction member may be in the form of a flexible cantilevered structure that overhangs the moveable element. Actuating the moveable element causes the anti-stiction member to flex and snap into place between the moveable element and the substrate. An additional embodiment of the invention is directed to a method of fabricating a MEMS device. The method proceeds by providing a silicon-on-insulator (SOI) substrate; defining a moveable element from a device layer of the SOI substrate; and depositing a flexible material over the device layer and the moveable element. One or more portions of the flexible material overhang the moveable element, whereby the flexible material forms one or more anti-stiction members.

Abstract translation: 描述了一种用于减小具有可移动元件和基板的MEMS器件中的静摩擦的方法和装置。 该方法通常包括向基板提供抗静电部件并将抗静电部件插入在可移动元件和基板之间。 该装置通常包括可移动元件和基板之间的抗静电构件。 本发明的另一个实施例涉及一种MEMS装置，其包括：基板，可移动地联接到基板的可移动元件以及可移动元件和基板之间的抗静电元件。 本发明的另一实施例涉及一种光开关，其具有可移动地耦合到基板的一个或多个可移动元件，以及可移动到至少一个可移动元件和基板之间的抗静电元件。 防静电构件可以是悬垂于可移动元件的柔性悬臂结构的形式。 激活可移动元件使得抗静电元件弯曲并卡入到​​可移动元件和基板之间的位置。 本发明的另一实施例涉及制造MEMS器件的方法。 该方法通过提供绝缘体上硅（SOI）衬底; 从SOI衬底的器件层限定可移动元件; 以及将柔性材料沉积在所述器件层和所述可移动元件上。 柔性材料的一个或多个部分伸出可移动元件，由此柔性材料形成一个或多个防静电构件。

公开(公告)号：US06850354B2

公开(公告)日：2005-02-01

申请号：US10261089

申请日：2002-09-30

Applicant: Dennis S. Greywall

Inventor： Dennis S. Greywall

IPC: B81C1/00 ,  B81C3/00 ,  G02B26/08 ,  G02B26/00

CPC classification number: G02B26/0841 ,  B81B2201/045 ,  B81B2203/058 ,  B81C1/00198

Abstract: A MEMS device for an optical switch may be fabricated using a single wafer, which alleviates the alignment problem associated with a two-piece prior art design. The device has a movable plate, which may act as a mirror, supported on a stationary substrate. The plate rotates with respect to the substrate in response to a voltage applied to a stationary electrode rigidly connected to the substrate. Additional movable and/or stationary electrodes may be implemented to enable bidirectional rotation of the plate. Electrodes may be arranged with respect to each other and/or the plate to form a fringe-field (FF) actuator, which may alleviate the snap-down problem associated with the prior art design. Multiple MEMS devices of the invention may be arrayed in a single integrated structure to form a linear, radial, or two-dimensional array of mirrors.

Abstract translation: 可以使用单个晶片制造用于光学开关的MEMS装置，其减轻与两件式现有技术设计相关联的对准问题。 该装置具有可移动的板，其可以用作支撑在固定基板上的反射镜。 响应于施加到刚性地连接到衬底的固定电极的电压，板相对于衬底旋转。 可以实现附加的可移动和/或固定电极以使板的双向旋转。 电极可以相对于彼此和/或板布置以形成边缘场（FF）致动器，其可以减轻与现有技术设计相关联的塌陷问题。 本发明的多个MEMS器件可以被排列成单个整体结构以形成反射镜的线性，径向或二维阵列。