Method for improving the intermediate dielectric profile, particularly
for non-volatile memories
    341.
    发明授权
    Method for improving the intermediate dielectric profile, particularly for non-volatile memories 失效
    用于改善中间介质轮廓的方法,特别是用于非易失性存储器

    公开(公告)号:US6104058A

    公开(公告)日:2000-08-15

    申请号:US898155

    申请日:1997-07-22

    CPC classification number: H01L27/11521 H01L27/115

    Abstract: A method for improving the intermediate dielectric profile, particularly for non-volatile memories constituted by a plurality of cells, including the following steps: forming field oxide regions and drain active area regions on a substrate; forming word lines on the field oxide regions; depositing oxide to form oxide wings that are adjacent to the word lines; opening, by masking, source regions and the drain active area regions, keeping the field oxide regions that separate one memory cell from the other, inside the memory, covered with resist; and removing field oxide in the source regions and removing oxide wings from both sides of the word lines.

    Abstract translation: 一种用于改善中间介质轮廓的方法,特别是用于由多个单元构成的非易失性存储器,包括以下步骤:在衬底上形成场氧化物区域和漏极活性区域区域; 在场氧化物区域上形成字线; 沉积氧化物以形成与字线相邻的氧化物翼; 通过掩蔽来源区域和漏极有源区域区域,保持在抗蚀剂覆盖的存储器内部的一个存储单元与另一个存储单元分离的场氧化物区域; 并且去除源区域中的场氧化物并从字线的两侧去除氧化物翼。

    Memory cell for EEPROM devices, and corresponding fabricating process
    343.
    发明授权
    Memory cell for EEPROM devices, and corresponding fabricating process 失效
    EEPROM器件的存储单元及相应的制造工艺

    公开(公告)号:US6080626A

    公开(公告)日:2000-06-27

    申请号:US996923

    申请日:1997-12-23

    CPC classification number: H01L27/11521 H01L27/11524

    Abstract: A memory cell of the EEPROM type formed on a semiconductor material substrate having a first conductivity type includes a drain region having a second conductivity type and extending at one side of a gate oxide region which includes a thin tunnel oxide region. The memory cell also includes a region of electric continuity having the second conductivity type, being formed laterally and beneath the thin tunnel oxide region, and partly overlapping the drain region. The region of electric continuity is produced by implantation at a predetermined angle of inclination.

    Abstract translation: 形成在具有第一导电类型的半导体材料基板上的EEPROM型存储单元包括具有第二导电类型的漏极区域,并且在包括薄隧道氧化物区域的栅极氧化物区域的一侧延伸。 存储单元还包括具有第二导电类型的电连续性区域,横向形成在薄隧道氧化物区域下方,并且部分地与漏极区域重叠。 通过以预定的倾斜角度的注入产生电连续性的区域。

    Single feature size MOS technology power device

    公开(公告)号:US6064087A

    公开(公告)日:2000-05-16

    申请号:US739466

    申请日:1996-10-29

    Abstract: A MOS technology power device comprises a semiconductor material layer of a first conductivity type, a conductive insulated gate layer covering the semiconductor material layer, and a plurality of elementary functional units. The conductive insulated gate layer includes a first insulating material layer placed above the semiconductor material layer, a conductive material layer placed above the first insulating material layer, and a second insulating material layer placed above the conductive material layer. Each elementary functional unit includes an elongated body region of a second conductivity type formed in the semiconductor material layer. Each elementary functional unit further includes an elongated window in the insulated gate layer extending above the elongated body region. Each elongated body region includes a source region doped with dopants of the first conductivity type, intercalated with a portion of the elongated body region wherein no dopant of the first conductivity type are provided. The MOS technology power device further includes a plurality of insulating material sidewall spacers disposed above the semiconductor material layer along elongated edges of each elongated window to seal the edges of each elongated window in the insulated gate layer from a source metal layer disposed over the insulated gate layer and the semiconductor material layer. The source metal layer contacts each body region and each source region through each elongated window along the length of the elongated body region.

    Process for the fabrication of integrated circuits with contacts
self-aligned to active areas
    345.
    发明授权
    Process for the fabrication of integrated circuits with contacts self-aligned to active areas 失效
    用于制造具有自动对准到有源区域的触点的集成电路的工艺

    公开(公告)号:US6057191A

    公开(公告)日:2000-05-02

    申请号:US877335

    申请日:1997-06-17

    Inventor: Maurizio Moroni

    CPC classification number: H01L21/28512 H01L21/26586

    Abstract: A process for the manufacturing of integrated circuits provides for forming contacts between a conductive material layer and first doped regions of a semiconductor substrate in a self-aligned manner to edges of an insulating material layer which defines active areas of the integrated circuit wherein the doped regions are formed, and second doped regions of the same conductivity type as the first doped regions under the first doped regions, the second doped regions extending partially under the edges of the insulating material layer to prevent short-circuits between the conductive material layer and the semiconductor substrate. The second doped regions are formed by means of implantation of dopants along directions slanted with respect to an orthogonal direction to a surface of the semiconductor substrate at angles and with an energy sufficiently high to make the dopants penetrate in the semiconductor material deeper than the first doped regions and under the edges of the insulating material layer.

    Abstract translation: 用于制造集成电路的工艺提供了以自对准的方式在导电材料层和半导体衬底的第一掺杂区之间形成接触,该绝缘材料层定义了集成电路的有源区,其中掺杂区 以及与第一掺杂区域下方的第一掺杂区域相同的导电类型的第二掺杂区域,第二掺杂区域部分地延伸在绝缘材料层的边缘下方,以防止导电材料层和半导体之间的短路 基质。 第二掺杂区域通过沿着相对于半导体衬底的表面的正交方向以角度倾斜并且以足够高的能量倾斜的方式形成掺杂剂,以使掺杂剂在半导体材料中比第一掺杂 区域和绝缘材料层的边缘下方。

    "> DMOS transistor protected against
    346.
    发明授权
    DMOS transistor protected against "snap-back" 失效
    DMOS晶体管保护不受“快照”

    公开(公告)号:US6043532A

    公开(公告)日:2000-03-28

    申请号:US965840

    申请日:1997-11-07

    Abstract: The DMOS transistor includes an n drain region, a p body region which forms, with the drain region, a junction having at least one edge portion with a small radius of curvature, an n+ source region which delimits a channel in the body region, p+ body contact regions, a gate electrode, a source and body electrode, and a drain electrode. To prevent the "snap-back" phenomenon when the junction is reverse biased with the source, body and gate electrodes short-circuited, a p+ region is associated with each of the edge portions having a small radius of curvature and is arranged so as to be closer to the associated edge portion than any part of the source region.

    Abstract translation: DMOS晶体管包括n个漏极区域,其与漏极区域形成具有至少一个具有小曲率半径的边缘部分的接合部的p体区域,限定身体区域中的通道的n +源极区域,p +体 接触区域,栅极电极,源极和主体电极以及漏极电极。 为了防止当源极,主体和栅极短路时结在反向偏置时的“回扣”现象,p +区与每个具有小曲率半径的边缘部分相关联,并且布置成 比源区域的任何部分更靠近相关联的边缘部分。

    Integrated structure with device having a preset reverse conduction
threshold
    347.
    发明授权
    Integrated structure with device having a preset reverse conduction threshold 失效
    具有预设反向导通阈值的装置的集成结构

    公开(公告)号:US6020623A

    公开(公告)日:2000-02-01

    申请号:US984910

    申请日:1997-12-04

    Inventor: Giorgio Chiozzi

    CPC classification number: H01L29/866 H01L27/0783 H01L29/0808 H01L29/735

    Abstract: An integrated structure is made in a chip of semiconductor material inside an insulated N type region extending from a surface of the chip. The structure comprises a Zener diode formed by a P type first region extending from the surface inside the insulated region and by a second region of type N extending from the surface inside the first region. These regions form between themselves a buried junction, in which the structure further includes a lateral bipolar transistor having an emitter region provided by the first region.

    Abstract translation: 在从芯片的表面延伸的绝缘N型区域内的半导体材料的芯片中形成一体的结构。 该结构包括由绝缘区域内的表面延伸的P型第一区域和从第一区域内的表面延伸的N型第二区域形成的齐纳二极管。 这些区域在它们之间形成掩埋结,其中结构还包括具有由第一区域提供的发射极区域的横向双极晶体管。

    BiCMOS negative charge pump
    349.
    发明授权
    BiCMOS negative charge pump 失效
    BiCMOS负电荷泵

    公开(公告)号:US06016073A

    公开(公告)日:2000-01-18

    申请号:US965068

    申请日:1997-11-05

    CPC classification number: H02M3/073

    Abstract: A charge pump includes a plurality of stages connected in series between a reference potential and an output terminal of the charge pump. The plurality of stages includes a first group of stages, proximate to the reference potential, and a second group of stages proximate to the output terminal of the charge pump. Each stage of the first group includes a pass-transistor with first and second terminals respectively connected to an input and an output of the stage, and a first capacitor with a first plate connected to the output of the stage and a second plate driven by a digital signal switching between the reference voltage and a positive voltage. Each stage of the second group includes a junction diode having a first electrode connected to an input of the stage and a second electrode connected to an output of the stage, and a second capacitor having a first plate connected to the output of the stage and a second plate driven by a digital signal switching between the reference voltage and the voltage supply.

    Abstract translation: 电荷泵包括串联连接在电荷泵的参考电位和输出端之间的多个级。 多个级包括靠近参考电位的第一组级,以及靠近电荷泵输出端的第二组级。 第一组的每个级包括通过晶体管,其中第一和第二端子分别连接到级的输入端和输出端,第一电容器具有连接到级的输出端的第一板和由第一板驱动的第二板 数字信号在参考电压和正电压之间切换。 第二组的每一级包括结二极管,其具有连接到该级的输入的第一电极和连接到该级的输出的第二电极,以及一第二电容器,该第二电容器具有连接到该级的输出的第一电极和 第二板由参考电压和电压源之间的数字信号切换驱动。

    Process for forming an integrated circuit comprising non-volatile memory
cells and side transistors and corresponding IC
    350.
    发明授权
    Process for forming an integrated circuit comprising non-volatile memory cells and side transistors and corresponding IC 失效
    用于形成包括非易失性存储单元和侧晶体管和相应IC的集成电路的工艺

    公开(公告)号:US6004847A

    公开(公告)日:1999-12-21

    申请号:US667097

    申请日:1996-06-20

    CPC classification number: H01L27/11526 H01L27/105 H01L27/11546

    Abstract: A process for forming an integrated circuit includes at least one matrix of non-volatile memory cells having an intermediate dielectric multilayer including at least a lower dielectric material layer and an upper silicon oxide layer. The integrated circuit includes at least one transistor simultaneously formed in zones peripheral to the matrix and having a gate dielectric of a first thickness. After formation of the floating gate with a gate oxide layer and a polycrystalline silicon layer and the formation of the lower dielectric material layer, the process includes removal of said layers from the peripheral zones of the matrix; deposition of said upper silicon oxide layer over the memory cells, and over the substrate in the areas of the peripheral transistors; and formation of a first silicon oxide layer at least in the areas of the peripheral transistors. A second transistor type can be formed having a gate dielectric of a second thickness, thinner than said first thickness, in successive steps.

    Abstract translation: 一种用于形成集成电路的工艺包括至少一个非易失性存储单元阵列,其具有至少包含下介电材料层和上氧化硅层的中间介电层。 该集成电路包括至少一个晶体管,同时形成在基体周边的区域中,并且具有第一厚度的栅极电介质。 在形成具有栅极氧化物层和多晶硅层的浮置栅极和形成下部电介质材料层之后,该工艺包括从基体的周边区域去除所述层; 所述上氧化硅层沉积在所述存储单元上,并在所述外围晶体管的区域中的衬底上; 以及至少在周边晶体管的区域中形成第一氧化硅层。 第二晶体管类型可以在连续的步骤中形成具有比所述第一厚度更薄的第二厚度的栅极电介质。

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