公开(公告)号：US20110031441A1

公开(公告)日：2011-02-10

申请号：US12905673

申请日：2010-10-15

申请人： Che-Hsiung Hsu ,  Christopher P. Junk ,  Frank P. Uckert ,  Mark F. Teasley ,  Andrew Edward Feiring ,  Charles J. Dubois ,  Zhen-Yu Yang ,  Viacheslav A. Petrov ,  Natalie Daoud ,  Amy Qi Han

发明人： Che-Hsiung Hsu ,  Christopher P. Junk ,  Frank P. Uckert ,  Mark F. Teasley ,  Andrew Edward Feiring ,  Charles J. Dubois ,  Zhen-Yu Yang ,  Viacheslav A. Petrov ,  Natalie Daoud ,  Amy Qi Han

IPC分类号： H01B1/12

CPC分类号： H01B1/127 ,  C08L23/26 ,  C08L65/00 ,  C08L73/02 ,  C09D165/00 ,  C09D179/02 ,  H01B1/128 ,  C08L2666/04 ,  C08L27/00

摘要： There are provided electrically conducting polymer compositions comprising an electrectically conductive polymer or copolymer and an organic solvent wettable fluorinated acid polymer. Electrically conductive polymer materials are derived from thiophene, pyrrole, aniline and polycyclic heteroaromatic precursor monomers. Non-conductive polymers derived from alkenyl, alkynyl, arylene, and heteroarylene precursor monomers. The organic-solvent wettable fluorinated acid polymer is fluorinated or highly fluorinated and may be colloid-forming. Acidic groups include carboxylic acid groups, sulfonic acid groups, sulfonimide groups, phosphoric acid groups, phosphonic acid groups, and combinations thereof. The compositions can be used in organic electronic devices.

摘要翻译： 提供了包含电导电聚合物或共聚物和有机溶剂可湿性氟化聚合物的导电聚合物组合物。 导电聚合物材料衍生自噻吩，吡咯，苯胺和多环杂芳族前体单体。 衍生自烯基，炔基，亚芳基和亚杂芳基前体单体的非导电聚合物。 有机溶剂可湿性氟化酸聚合物是氟化的或高度氟化的，可以是胶体形成。 酸性基团包括羧酸基团，磺酸基团，磺酰亚胺基团，磷酸基团，膦酸基团及其组合。 组合物可用于有机电子器件。

公开(公告)号：US07834209B2

公开(公告)日：2010-11-16

申请号：US11447825

申请日：2006-06-06

申请人： Christopher P. Junk ,  Mark Andrew Harmer ,  Andrew Edward Feiring ,  Frank Leonard Schadt, III ,  Zoe Schnepp

发明人： Christopher P. Junk ,  Mark Andrew Harmer ,  Andrew Edward Feiring ,  Frank Leonard Schadt, III ,  Zoe Schnepp

IPC分类号： C07C309/02 ,  C07C315/00

CPC分类号： G03F7/0045 ,  C07C303/32 ,  C07C309/10 ,  C07C381/12 ,  G03F7/0046 ,  G03F7/0392 ,  G03F7/0397

摘要： Hydrofluoroalkanesulfonates of the general formula R—O—CXH—CX2—SO3M, where R is selected from the group consisting of alkyl groups, functionalized alkyl groups, and alkenyl groups; X is selected from the group consisting of hydrogen and fluorine with the proviso that at least one X is fluorine; and M is a cation, are made by reacting fluorovinyl ether with aqueous sulfite solution. Organic onium hydrofluoroalkanesulfonates are useful as ionic liquids and photoacid generators.

摘要翻译： 通式为R-O-CXH-CX2-SO3M的氢氟烷基磺酸盐，其中R选自烷基，官能化烷基和链烯基; X选自氢和氟，条件是至少一个X是氟; 并且M是阳离子，通过使氟乙烯基醚与亚硫酸盐水溶液反应而制成。 有机鎓氢氟烷基磺酸盐可用作离子液体和光酸产生剂。

公开(公告)号：US20090291283A1

公开(公告)日：2009-11-26

申请号：US12124488

申请日：2008-05-21

申请人： Roman B. Larichev ,  Andrew Edward Feiring

发明人： Roman B. Larichev ,  Andrew Edward Feiring

IPC分类号： B32B27/32 ,  C08F214/18

CPC分类号： C08J5/18 ,  B32B27/08 ,  B32B27/304 ,  B32B27/322 ,  B32B2307/546 ,  B32B2307/558 ,  B32B2307/702 ,  B32B2307/704 ,  C08J2327/12

摘要： Provided are free standing films of copolymers of 1,2,3,3,3-pentafluoropropylene and tetrafluoroethylene, and processes for preparing the films.

摘要翻译： 提供了1,2,3,3,3-五氟丙烯和四氟乙烯的共聚物的自立膜以及制备膜的方法。

公开(公告)号：US07507522B2

公开(公告)日：2009-03-24

申请号：US11578278

申请日：2005-05-17

申请人： Michael Karl Crawford ,  Hoang Vi Tran ,  Frank Leonard Schadt, III ,  Fredrick Claus Zumsteg, Jr. ,  Andrew Edward Feiring ,  Michael Fryd

发明人： Michael Karl Crawford ,  Hoang Vi Tran ,  Frank Leonard Schadt, III ,  Fredrick Claus Zumsteg, Jr. ,  Andrew Edward Feiring ,  Michael Fryd

IPC分类号： G03F7/004

CPC分类号： C08F214/18 ,  C07C33/44 ,  C07C43/1781 ,  C07C43/196 ,  C07C2602/42 ,  C07C2603/62 ,  C07C2603/86 ,  C08F214/26 ,  C08F220/18 ,  C08F220/26 ,  C08F232/08 ,  G03F7/0046 ,  G03F7/0395 ,  Y10S430/106 ,  Y10S430/108

摘要： The present invention relates to novel unsaturated polycyclic compounds containing two fluoroalcohol substitutents. This invention also relates to homopolymers and copolymers derived from such unsaturated polycyclic compounds. The copolymers are useful for photoimaging compositions and, in particular, photoresist compositions (positive-working and/or negative-working) for imaging in the production of semiconductor devices. The polymers are especially useful in photoresist compositions having high UV transparency (particularly at short wavelengths, e.g., 157 nm) which are useful as base resins in resists and potentially in many other applications.

摘要翻译： 本发明涉及含有两个氟代醇取代基的新型不饱和多环化合物。 本发明还涉及衍生自这种不饱和多环化合物的均聚物和共聚物。 共聚物可用于光成像组合物，特别是用于制造半导体器件的成像的光致抗蚀剂组合物（正性和/或负性）。 聚合物特别适用于具有高UV透明度（特别是短波长，例如157nm）的光致抗蚀剂组合物，其可用作抗蚀剂中的基础树脂并且潜在地在许多其它应用中。

公开(公告)号：US07019092B2

公开(公告)日：2006-03-28

申请号：US10502839

申请日：2003-02-26

申请人： Andrew Edward Feiring ,  Frank L. Schadt, III ,  Gary Newton Taylor

发明人： Andrew Edward Feiring ,  Frank L. Schadt, III ,  Gary Newton Taylor

IPC分类号： C08F16/12

CPC分类号： G03F7/0392 ,  G03F7/0046 ,  G03F7/0395 ,  G03F7/0397

摘要： Fluorinated copolymers useful in photoresist compositions and associated processes for microlithography are described. These copolymers are comprised of a fluoroalcohol or protected fluoroalcohol functional group which simultaneously imparts high ultraviolet (UV) transparency and developability in basic media to these materials and a repeat unit derived from an acrylate monomer containing a fluoroalkyl group or a hydroxyl substituted alkyl group. The materials of this invention have high UV transparency, particularly at 193 and 157 nm, which makes them highly useful for lithography at these short wavelengths.

摘要翻译： 描述了用于光致抗蚀剂组合物和用于微光刻的相关工艺的氟化共聚物。 这些共聚物由氟代醇或受保护的氟代醇官能团构成，其同时赋予这些材料在碱性介质中高的紫外线（UV）透明性和显影性，以及衍生自含有氟代烷基或羟基取代的烷基的丙烯酸酯单体的重复单元。 本发明的材料具有高的UV透明度，特别是在193和157nm，这使得它们在这些短波长下对光刻非常有用。

公开(公告)号：US06790587B1

公开(公告)日：2004-09-14

申请号：US09959077

申请日：2001-10-17

申请人： Andrew Edward Feiring ,  Jerald Feldman ,  Frank Leonard Schadt, III

发明人： Andrew Edward Feiring ,  Jerald Feldman ,  Frank Leonard Schadt, III

IPC分类号： G03F7004

CPC分类号： C08F214/18 ,  C08F214/186 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/038 ,  G03F7/039 ,  G03F7/0395 ,  Y10S430/108

摘要： Fluorinated polymers, photoresists and associated processes for microlithography are described. These polymers and photoresists are comprised of a fluoroalcohol functional group which simultaneously imparts high ultraviolet (UV) transparency and developability in basic media to these materials. The materials of this invention have high UV transparecy, particularly at short wavelengths, e.g., 157 nm, which makes them highly useful for lithography at these short wavelengths.

摘要翻译： 描述了用于微光刻的氟化聚合物，光致抗蚀剂和相关工艺。 这些聚合物和光致抗蚀剂由氟代醇官能团构成，其同时赋予这些材料在基本介质中高的紫外（UV）透明度和显影性。 本发明的材料具有高的UV透明度，特别是在短波长例如157nm，这使得它们在这些短波长下对于光刻非常有用。

公开(公告)号：US06399729B1

公开(公告)日：2002-06-04

申请号：US09450106

申请日：1999-11-29

申请人： William Brown Farnham ,  Andrew Edward Feiring ,  Patrick Edward Lindner

发明人： William Brown Farnham ,  Andrew Edward Feiring ,  Patrick Edward Lindner

IPC分类号： C08F11418

CPC分类号： C08F14/18 ,  C08F2/38

摘要： Chain transfer agents that are chlorine-free and liquid under polymerization conditions, useful for fluoromonomer polymerization, have the following formula: R1—O—R2. They are superior to common chain transfer agents such as chloroform in being safer and environmentally benign. They are also superior to gaseous chain transfer agents such as ethane because they do not enter the fluoromonomer gas recycle streams and so do not complicate the analysis and purification of those streams.

摘要翻译： 在聚合条件下无氯和液态的可用于含氟单体聚合的链转移剂具有以下结构式：它们比常规的链转移剂如氯仿在更安全和环境友好方面优越。 它们还优于气态链转移剂如乙烷，因为它们不进入含氟单体气体循环流，因此不会使这些流的分析和纯化复杂化。

公开(公告)号：US08568616B2

公开(公告)日：2013-10-29

申请号：US12905673

申请日：2010-10-15

申请人： Che-Hsiung Hsu ,  Christopher P. Junk ,  Frank P. Uckert ,  Mark F. Teasley ,  Andrew Edward Feiring ,  Charles J. Dubois ,  Viacheslav A. Petrov ,  Natalie Daoud ,  Amy Qi Han

发明人： Che-Hsiung Hsu ,  Christopher P. Junk ,  Frank P. Uckert ,  Mark F. Teasley ,  Andrew Edward Feiring ,  Charles J. Dubois ,  Zhen-Yu Yang ,  Viacheslav A. Petrov ,  Natalie Daoud

IPC分类号： H01B1/00 ,  C08G75/00 ,  C08G73/00

CPC分类号： H01B1/127 ,  C08L23/26 ,  C08L65/00 ,  C08L73/02 ,  C09D165/00 ,  C09D179/02 ,  H01B1/128 ,  C08L2666/04 ,  C08L27/00

摘要： There are provided electrically conducting polymer compositions comprising an electrectically conductive polymer or copolymer and an organic solvent wettable fluorinated acid polymer. Electrically conductive polymer materials are derived from thiophene, pyrrole, aniline and polycyclic heteroaromatic precursor monomers. Non-conductive polymers derived from alkenyl, alkynyl, arylene, and heteroarylene precursor monomers. The organic-solvent wettable fluorinated acid polymer is fluorinated or highly fluorinated and may be colloid-forming. Acidic groups include carboxylic acid groups, sulfonic acid groups, sulfonimide groups, phosphoric acid groups, phosphonic acid groups, and combinations thereof. The compositions can be used in organic electronic devices.

摘要翻译： 提供了包含电导电聚合物或共聚物和有机溶剂可湿性氟化聚合物的导电聚合物组合物。 导电聚合物材料衍生自噻吩，吡咯，苯胺和多环杂芳族前体单体。 衍生自烯基，炔基，亚芳基和亚杂芳基前体单体的非导电聚合物。 有机溶剂可湿性氟化酸聚合物是氟化的或高度氟化的，可以是胶体形成。 酸性基团包括羧酸基团，磺酸基团，磺酰亚胺基团，磷酸基团，膦酸基团及其组合。 组合物可用于有机电子器件。

公开(公告)号：US08535556B2

公开(公告)日：2013-09-17

申请号：US12161842

申请日：2007-03-26

申请人： Thomas J. Leck ,  Nandini C. Mouli ,  Jon Lee Howell ,  Velliyur Nott Mallikarjuna Rao ,  Andrew Edward Feiring ,  Viacheslav A. Petrov ,  Allen Capron Sievert ,  Mario Joseph Nappa ,  Barbara Haviland Minor ,  Ekaterina N. Swearingen ,  Schmitz Corneille ,  Deepak Perti

发明人： Thomas J. Leck ,  Nandini C. Mouli ,  Jon Lee Howell ,  Velliyur Nott Mallikarjuna Rao ,  Andrew Edward Feiring ,  Viacheslav A. Petrov ,  Allen Capron Sievert ,  Mario Joseph Nappa ,  Barbara Haviland Minor ,  Ekaterina N. Swearingen ,  Schmitz Corneille ,  Deepak Perti

IPC分类号： C09K5/04

CPC分类号： C09K5/045 ,  C09K2205/122

摘要： The present invention relates to compositions comprising iodotrifluoromethane and an effective amount of at least one stabilizer selected from the group consisting of hindered phenols, thiophosphates, butylated triphenylphosphorothionates, organo phosphates, phosphites, aryl alkyl ethers, terpenes, terpenoids, epoxides, fluorinated epoxides, oxetanes, ascorbic acid, thiols, lactones, thioethers, amines, nitromethane, alkylsilanes, benzophenone derivatives, aryl sulfides, divinyl terephalic acid, diphenyl terephalic acid, ionic liquids, and mixtures thereof. These stabilized iodotrifluoromethane compositions may be useful as working fluids in multiple applications including cooling apparatus, such as refrigeration, air-conditioning, chillers, and heat pumps.

摘要翻译： 本发明涉及包含三氟甲烷和有效量的至少一种选自受阻酚，硫代磷酸酯，丁基化三苯基硫代磷酸酯，有机磷酸酯，亚磷酸酯，芳基烷基醚，萜烯，萜类化合物，环氧化物，氟化环氧化物，氧杂环丁烷 ，抗坏血酸，硫醇，内酯，硫醚，胺，硝基甲烷，烷基硅烷，二苯甲酮衍生物，芳基硫醚，二乙烯基对苯二酸，二苯基对苯二酸，离子液体及其混合物。 这些稳定的三氟甲烷组合物可用作多种应用中的工作流体，包括冷却装置，例如制冷，空调，冷却器和热泵。

公开(公告)号：US20110039203A1

公开(公告)日：2011-02-17

申请号：US12909119

申请日：2010-10-21

申请人： CHRISTOPHER P. JUNK ,  MARK ANDREW HARMER ,  ANDREW EDWARD FEIRING ,  FRANK LEONARD SCHADT, III ,  ZOE SCHNEPP

发明人： CHRISTOPHER P. JUNK ,  MARK ANDREW HARMER ,  ANDREW EDWARD FEIRING ,  FRANK LEONARD SCHADT, III ,  ZOE SCHNEPP

IPC分类号： G03F7/004 ,  C07C309/10

CPC分类号： G03F7/0045 ,  C07C303/32 ,  C07C309/10 ,  C07C381/12 ,  G03F7/0046 ,  G03F7/0392 ,  G03F7/0397

摘要： Hydrofluoroalkanesulfonates of the general formula R—O—CXH—CX2—SO3M, where R is selected from the group consisting of alkyl groups, functionalized alkyl groups, and alkenyl groups; X is selected from the group consisting of hydrogen and fluorine with the proviso that at least one X is fluorine; and M is a cation, are made by reacting fluorovinyl ether with aqueous sulfite solution. Organic onium hydrofluoroalkanesulfonates are useful as ionic liquids and photoacid generators.

摘要翻译： 通式为R-O-CXH-CX2-SO3M的氢氟烷基磺酸盐，其中R选自烷基，官能化烷基和链烯基; X选自氢和氟，条件是至少一个X是氟; 并且M是阳离子，通过使氟乙烯基醚与亚硫酸盐水溶液反应而制成。 有机鎓氢氟烷基磺酸盐可用作离子液体和光酸产生剂。