公开(公告)号：US20090025757A1

公开(公告)日：2009-01-29

申请号：US12245740

申请日：2008-10-04

申请人： Joseph Yudovsky ,  Hui Chen ,  Gary Ettinger

发明人： Joseph Yudovsky ,  Hui Chen ,  Gary Ettinger

IPC分类号： B08B3/04

CPC分类号： H01L21/67126 ,  B08B3/02 ,  B08B3/12 ,  B08B13/00 ,  H01L21/67051

摘要： A method of reducing sticking of a door of a semiconductor device processing apparatus is provided. The method comprises providing rinsing fluid to a lid of a semiconductor devise processing chamber so as to rinse particulates therefrom; and sliding a door that is operatively coupled to the lid so as to move between a closed position wherein the door occludes an opening formed in the lid, and an open position wherein the door does not occlude the opening. Numerous other aspects are provided.

摘要翻译： 提供一种降低半导体器件处理装置的门的粘附的方法。 该方法包括向半导体设备处理室的盖子提供冲洗流体以从其中冲洗微粒; 以及滑动可操作地联接到所述盖的门，以便在所述门闭合形成在所述盖中的开口的闭合位置与所述门不闭塞所述开口的打开位置之间移动。 提供了许多其他方面。

公开(公告)号：US07480642B2

公开(公告)日：2009-01-20

申请号：US10478980

申请日：2002-05-27

申请人： Zenya Koono ,  Abolhassani Hassan ,  Hui Chen

发明人： Zenya Koono ,  Abolhassani Hassan ,  Hui Chen

IPC分类号： G06F17/00 ,  G06N5/02

CPC分类号： G06N5/00

摘要： An automatic generation method, program and system to create knowledge, where a pair of parent concept and its children concept, decomposed from the parent concept, are used as elementary process knowledge, and by repeating decompositions of the elementary process knowledge to obtain detailed knowledge for achieving intention or design.

摘要翻译： 一种创建知识的自动生成方法，程序和系统，其中从母体概念分解的父对象概念及其子概念被用作基本过程知识，并且通过重复分解基本过程知识以获得详细知识 实现意图或设计。

公开(公告)号：US20080156360A1

公开(公告)日：2008-07-03

申请号：US11961587

申请日：2007-12-20

申请人： Donald J.K. Olgado ,  Sheshraj L. Tulshibagwale ,  Thomas B. Brezoczky ,  John S. Lewis ,  Ho Seon Shin ,  Hui Chen ,  Roy C. Nangoy

发明人： Donald J.K. Olgado ,  Sheshraj L. Tulshibagwale ,  Thomas B. Brezoczky ,  John S. Lewis ,  Ho Seon Shin ,  Hui Chen ,  Roy C. Nangoy

IPC分类号： B08B3/00

CPC分类号： B08B3/00 ,  B08B3/04 ,  B08B3/12

摘要： Embodiments of the present invention relate to semiconductor device manufacturing, and more particularly to a horizontal megasonic module for cleaning substrates. In one embodiment an apparatus for cleaning a substrate is provided. The apparatus comprises a tank adapted to contain a cleaning fluid, a movable housing having a first side adapted to be placed in the cleaning fluid, a plurality of rotatable rollers coupled to the first side of the housing, the rollers positioned and including grooves to securely hold the substrate in a horizontal orientation, and one or more transducers adapted to direct vibrational energy through the cleaning fluid in the tank toward the substrate, wherein at least one of the transducers directs vibrational energy toward the substrate and substantially parallel to a major surface of the substrate.

摘要翻译： 本发明的实施例涉及半导体器件制造，更具体地涉及用于清洁衬底的水平兆声模块。 在一个实施例中，提供了一种用于清洁基底的装置。 该设备包括适于容纳清洁流体的罐，具有适于放置在清洁流体中的第一侧的可移动壳体，与壳体的第一侧耦合的多个可旋转辊，辊定位并包括槽以牢固地 将所述基板保持在水平方向，以及一个或多个换能器，其适于将振动能量引导通过所述罐中的所述清洁流体朝向所述基板，其中所述换能器中的至少一个将振动能量引向所述基板并基本上平行于 底物。

公开(公告)号：US20080156359A1

公开(公告)日：2008-07-03

申请号：US11963458

申请日：2007-12-21

申请人： DONALD J.K. OLGADO ,  Ho Seon Shin ,  Sheshraj L. Tulshibagwale ,  Roy C. Nangoy ,  Hui Chen ,  Allen L. D'Ambra

发明人： DONALD J.K. OLGADO ,  Ho Seon Shin ,  Sheshraj L. Tulshibagwale ,  Roy C. Nangoy ,  Hui Chen ,  Allen L. D'Ambra

IPC分类号： B08B3/00

CPC分类号： H01L21/67034 ,  H01L21/67028 ,  H01L21/67207

摘要： Embodiments of the invention generally relate to a modular, configurable system in which distinct cleaning and drying modules can be arranged in different combinations selectable by a user of the system. In one embodiment a configurable system for substrate cleaning is provided. The configurable system provides a frame including first and second bays, the first and second bays each adapted to hold one or more cleaning or drying modules, and a transfer area positioned between the first and second bays including a robot adapted to move substrates to and from the one or more modules positioned within the first and second bays, wherein the frame is adapted to hold a user selectable set of one or more cleaning or drying modules in the first and second bays.

摘要翻译： 本发明的实施例一般涉及模块化的可配置系统，其中不同的清洁和干燥模块可以以由系统的用户选择的不同组合来布置。 在一个实施例中，提供了一种用于衬底清洁的可配置系统。 可配置系统提供包括第一和第二托架的框架，每个适于保持一个或多个清洁或干燥模块的第一和第二托架以及定位在第一和第二托架之间的传送区域，包括适于将基板移动到和从 一个或多个模块定位在第一和第二托架内，其中框架适于在第一和第二托架中容纳用户可选择的一个或多个清洁或干燥模块组。

公开(公告)号：US20070133464A1

公开(公告)日：2007-06-14

申请号：US10577670

申请日：2004-10-21

申请人： Hui Chen ,  Ingo Gruber ,  Hui Li ,  Dan Yu

发明人： Hui Chen ,  Ingo Gruber ,  Hui Li ,  Dan Yu

IPC分类号： H04Q7/00

CPC分类号： H04L45/00 ,  H04L45/28 ,  H04W40/24 ,  H04W48/16 ,  H04W88/04 ,  H04W88/08

摘要： In a case where an access point lies outside the direct radio transmission range of a first radio station of a radio communications system, and a routing runs between the first radio station and the access point that includes at least one additional radio station is known to the first radio station and the access point, information can be transmitted from the first radio station to the access point and from the latter to the first radio station via the routing. When the access point receives information relating to an interruption in the known routing from a radio station in the routing, the first radio station downstream of the access point is informed of the interruption in the known routing and subsequently initiates a process for determining a new routing between the first radio station and the access point.

摘要翻译： 在接入点位于无线电通信系统的第一无线电台的直接无线电传输范围之外的情况下，并且在包括至少一个附加无线电台站的第一无线电站和接入点之间的路由运行是已知的 第一无线电站和接入点，信息可以从第一无线电站通过路由从第一无线电台传送到接入点，从后者到第一无线电台。 当接入点在路由中从无线电站接收到与已知路由中断有关的信息时，接入点下游的第一个无线电台被通知已知路由中的中断，随后发起确定新路由的过程 在第一个无线电台和接入点之间。

公开(公告)号：US07217737B2

公开(公告)日：2007-05-15

申请号：US10602617

申请日：2003-06-25

申请人： Hui Chen ,  Aviv Gazit ,  Alexander Levitzki ,  Klaus Peter Hirth ,  Elaina Mann ,  Peng Cho Tang ,  Laura K. Shawver ,  Jianming Tsai

发明人： Hui Chen ,  Aviv Gazit ,  Alexander Levitzki ,  Klaus Peter Hirth ,  Elaina Mann ,  Peng Cho Tang ,  Laura K. Shawver ,  Jianming Tsai

IPC分类号： A61K31/275

CPC分类号： C07D241/52 ,  A61K31/245 ,  A61K31/277 ,  A61K31/415 ,  A61K31/4184 ,  A61K31/4402 ,  A61K31/498 ,  A61K31/517 ,  C07C229/60 ,  C07C255/36 ,  C07C255/37 ,  C07C255/41 ,  C07C255/42 ,  C07C255/66 ,  C07C311/27 ,  C07C317/46 ,  C07C327/44

摘要： The present invention concerns compounds and their use to inhibit the activity of a receptor tyrosine kinase. The invention is preferably used to treat cell proliferative disorders such as cancers characterized by over-activity or inappropriate activity HER2 or EGFR.

摘要翻译： 本发明涉及化合物及其抑制受体酪氨酸激酶活性的用途。 本发明优选用于治疗细胞增殖性疾病，例如以过度活动或不适当活性HER2或EGFR为特征的癌症。

公开(公告)号：US20060254715A1

公开(公告)日：2006-11-16

申请号：US11382828

申请日：2006-05-11

申请人： Joseph Yudoovsky ,  Hui Chen

发明人： Joseph Yudoovsky ,  Hui Chen

IPC分类号： H01L21/306

CPC分类号： H01L21/67028 ,  H01L21/67173 ,  H01L21/67219 ,  H01L21/67742 ,  H01L21/67751

摘要： A substrate handler is provided. In one embodiment, the substrate handler includes a first and second carriage coupled to a rail. A first robot having at least two grippers is attached to the first carrier. A second robot having at least one gripper is coupled to the second carriage. The first carriage is independently positionable along the rail relative to the second carriage. As each carriage has a separate actuator, the movements of the first and second robot are decoupled, thereby allowing increased throughput. The substrate handler is particularly suitable for using in a planarization system having an integrated substrate cleaner.

摘要翻译： 提供衬底处理器。 在一个实施例中，衬底处理器包括联接到轨道的第一和第二托架。 具有至少两个夹持器的第一机器人附接到第一托架。 具有至少一个夹持器的第二机器人联接到第二托架。 第一托架可相对于第二托架沿轨道独立定位。 当每个滑架具有单独的致动器时，第一和第二机器人的运动被解耦，从而允许增加的产量。 衬底处理器特别适合于在具有集成衬底清洁器的平面化系统中使用。

公开(公告)号：US20050176349A1

公开(公告)日：2005-08-11

申请号：US10988647

申请日：2004-11-15

申请人： Alpay Yilmaz ,  Simon Yavelberg ,  Toshikazu Tomita ,  Hui Chen ,  Noel Manto ,  David Lischka ,  Hung Chen

发明人： Alpay Yilmaz ,  Simon Yavelberg ,  Toshikazu Tomita ,  Hui Chen ,  Noel Manto ,  David Lischka ,  Hung Chen

IPC分类号： B24B37/04 ,  B24B49/00

CPC分类号： B24B37/345

摘要： Embodiments of a load cup for transferring a substrate are provided. The load cup includes a pedestal assembly having a substrate support and a de-chucking nozzle. The de-chucking nozzle is positioned to flow a fluid between the polishing head and the back side of a substrate during transfer of the substrate from the polishing head to the substrate support.

摘要翻译： 提供了用于转移衬底的负载杯的实施例。 负载杯包括具有基板支撑件和去夹紧喷嘴的基座组件。 在将基板从抛光头转移到基板支撑件的过程中，去夹紧喷嘴定位成使流体在基板的抛光头和背面之间流动。

公开(公告)号：US20050157300A1

公开(公告)日：2005-07-21

申请号：US10760465

申请日：2004-01-21

申请人： Jiann-Hua Wang ,  Hui Chen ,  Tzu-Chiang Wu ,  Chien-Ho Chuang ,  Tsung-Kai Chuang

发明人： Jiann-Hua Wang ,  Hui Chen ,  Tzu-Chiang Wu ,  Chien-Ho Chuang ,  Tsung-Kai Chuang

IPC分类号： C12M1/34 ,  C12Q1/68 ,  G01N21/64

CPC分类号： G01N21/6456 ,  G01N21/6428 ,  G01N21/6452

摘要： A biochip scanner device includes a light source for emitting a light beam; a light processing unit for focusing the light beam onto the biochip to excite fluorescence from a fluorescent target on the biochip; a filter for filtering off the light beam from the light source; a photomultiplier tube (PMT) for detecting and converting the fluorescence into an electrical signal; and an output device for outputting/displaying the electrical signal detected by the PMT. No conversion of the output signal of the output device into image data is needed. A real-time analysis proceeds while samples are being scanned on the biochip. The biochip scanner device of the present invention reads the electrical signal from PMT directly without processing it into image data and setting lens before the PMT is no longer needed. As a result, the structure of the device is simplified and the cost for production is reduced.

摘要翻译： 生物芯片扫描器装置包括用于发射光束的光源; 光处理单元，用于将光束聚焦到生物芯片上以从生物芯片上的荧光目标激发荧光; 用于滤除来自光源的光束的滤光器; 用于检测和转换荧光成电信号的光电倍增管（PMT）; 以及用于输出/显示由PMT检测的电信号的输出装置。 不需要将输出设备的输出信号转换为图像数据。 在生物芯片上扫描样品时，进行实时分析。 本发明的生物芯片扫描器装置在PMT不再需要之前，直接从PMT读取电信号而不将其处理成图像数据和设置透镜。 结果，简化了装置的结构，降低了生产成本。

公开(公告)号：US20050103561A1

公开(公告)日：2005-05-19

申请号：US10500890

申请日：2003-01-08

申请人： Shuji Endo ,  Estiko Rijanto ,  Hui Chen

发明人： Shuji Endo ,  Estiko Rijanto ,  Hui Chen

IPC分类号： B62D5/04 ,  B62D6/00 ,  B62D101/00 ,  B62D119/00

CPC分类号： B62D5/0463 ,  B62D6/008

摘要： In the electric power steering apparatus which controls a motor that gives a steering assisting force to a steering mechanism based on an electric current controlling value which is computed from a steering assisting command value which has been computed by a computing device based on a steering torque generated in a steering shaft and an electric current value of the motor, provided are a self-aligning torque estimating section which estimates a self-aligning torque by a disturbance observer constitution and a steering torque feedback section which performs definition of a steering reaction force based on a self-aligning torque estimated value which has been estimated by the self-aligning torque estimating section and feeds the steering reaction force back to the steering torque.

摘要翻译： 在电动助力转向装置中，根据由计算装置根据产生的转向转矩计算出的转向辅助指令值计算的电流控制值，控制向转向机构给出转向辅助力的电动机 在转向轴和电动机的电流值中，提供了通过干扰观测器构造来估计自对准转矩的自对准转矩估计部和执行基于转向反作用力的定义的转向转矩反馈部 自对准转矩估计值估计出的自对准转矩估计值，并将转向反作用力反馈到转向转矩。