METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESSING
    31.
    发明申请
    METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESSING 审中-公开
    半导体加工方法与装置

    公开(公告)号:US20100221915A1

    公开(公告)日:2010-09-02

    申请号:US12776235

    申请日:2010-05-07

    Abstract: A method and apparatus for semiconductor processing is disclosed. In one embodiment, a method of transporting a wafer within a cluster tool, comprises placing the wafer into a first segment of a vacuum enclosure, the vacuum enclosure being attached to a processing chamber and a factory interface. The wafer is transported to a second segment of the vacuum enclosure using a vertical transport mechanism, wherein the second segment is above or below the first segment.

    Abstract translation: 公开了一种用于半导体处理的方法和装置。 在一个实施例中,一种在群集工具内传送晶片的方法包括将晶片放置在真空封壳的第一段中,真空外壳附接到处理室和工厂接口。 使用垂直传送机构将晶片传送到真空外壳的第二部分,其中第二部分在第一部分之上或之下。

    Techniques for clustering a set of objects
    32.
    发明授权
    Techniques for clustering a set of objects 有权
    聚集一组对象的技术

    公开(公告)号:US07752233B2

    公开(公告)日:2010-07-06

    申请号:US11731008

    申请日:2007-03-29

    CPC classification number: G06F17/3071 G06F17/30625 G06K9/6224

    Abstract: Described are techniques for clustering a data set of objects. Divide phase processing is performed to partition the data set into two or more partitions forming a hierarchy of the objects. Merge phase processing may be performing using the hierarchy to determine one or more disjoint clusters of objects of the data set. Optional preprocessing may be performed to determine weights for one or more features of an object.

    Abstract translation: 描述了用于聚类对象的数据集的技术。 执行分割相位处理以将数据集划分成形成对象的层次结构的两个或更多个分区。 可以使用层级来执行合并阶段处理以确定数据集的对象的一个​​或多个不相交的集群。 可以执行可选的预处理以确定对象的一个​​或多个特征的权重。

    Method and apparatus for semiconductor processing
    33.
    发明授权
    Method and apparatus for semiconductor processing 有权
    用于半导体处理的方法和装置

    公开(公告)号:US07748944B2

    公开(公告)日:2010-07-06

    申请号:US11929357

    申请日:2007-10-30

    Abstract: A method and apparatus for semiconductor processing is disclosed. In one embodiment, a method of transporting a wafer within a cluster tool, comprises placing the wafer into a first segment of a vacuum enclosure, the vacuum enclosure being attached to a processing chamber and a factory interface. The wafer is transported to a second segment of the vacuum enclosure using a vertical transport mechanism, wherein the second segment is above or below the first segment.

    Abstract translation: 公开了一种用于半导体处理的方法和装置。 在一个实施例中,一种在群集工具内传送晶片的方法包括将晶片放置在真空封壳的第一段中,真空外壳附接到处理室和工厂接口。 使用垂直传送机构将晶片传送到真空外壳的第二部分,其中第二部分在第一部分之上或之下。

    Multiple test probe system and method
    37.
    发明授权
    Multiple test probe system and method 失效
    多种测试探针系统及方法

    公开(公告)号:US06653853B1

    公开(公告)日:2003-11-25

    申请号:US10066391

    申请日:2002-02-01

    Applicant: David Cheng

    Inventor: David Cheng

    CPC classification number: G01R31/2887

    Abstract: A multiple test probe system is disclosed. The multiple test probe system includes a support and a mount pivotally coupled to the support. The mount is capable of pivoting to a number of testing positions. A number of probe assemblies are coupled to the mount and associated with a corresponding number of testing positions. The probe assemblies include a number of electrical contacts coupled to a number of wires in a probe bus regardless of a testing position of the mount. The multiple test probe system further includes an indexing device coupled to the mount to cause the mount to move between the testing positions, whereby the indexing device is a multiple linear actuator assembly.

    Abstract translation: 公开了一种多重测试探针系统。 多个测试探针系统包括支撑件和枢转地联接到支撑件的安装件。 该安装座能够枢转到多个测试位置。 多个探针组件耦合到安装件并与相应数量的测试位置相关联。 探针组件包括耦合到探针总线中的多个电线的多个电触头,而与安装座的测试位置无关。 多重测试探针系统还包括联接到安装件的分度装置,以使安装件在测试位置之间移动,由此分度装置是多线性致动器组件。

    Multiple test probe system
    39.
    发明授权
    Multiple test probe system 失效
    多个测试探针系统

    公开(公告)号:US06366103B1

    公开(公告)日:2002-04-02

    申请号:US09348751

    申请日:1999-07-06

    Applicant: David Cheng

    Inventor: David Cheng

    CPC classification number: G01R31/2887

    Abstract: A multiple test probe system is disclosed. The multiple test probe system includes a support and a mount pivotally coupled to the support. The mount is capable of pivoting to a number of testing positions. A number of probe assemblies are coupled to the mount and associated with a corresponding number of testing positions. The probe assemblies include a number of electrical contacts coupled to a number of wires in a probe bus regardless of a testing position of the mount. The multiple test probe system further includes an actuator coupled to the mount to cause the mount to move between the testing positions.

    Abstract translation: 公开了一种多重测试探针系统。 多个测试探针系统包括支撑件和枢转地联接到支撑件的安装件。 该安装座能够枢转到多个测试位置。 多个探针组件耦合到安装件并与相应数量的测试位置相关联。 探针组件包括耦合到探针总线中的多个电线的多个电触头,而与安装座的测试位置无关。 多个测试探针系统还包括联接到安装件的致动器,以使安装件在测试位置之间移动。

    Method and apparatus for measuring thickness of semiconductor substrates
    40.
    发明授权
    Method and apparatus for measuring thickness of semiconductor substrates 失效
    用于测量半导体衬底厚度的方法和装置

    公开(公告)号:US6154041A

    公开(公告)日:2000-11-28

    申请号:US258066

    申请日:1999-02-26

    Applicant: David Cheng

    Inventor: David Cheng

    CPC classification number: G01R27/02 G01B7/06 G01R31/2648

    Abstract: A method and apparatus for measuring sheet resistance and thickness of thin films and substrates. A four-point probe assembly engages the surface of a film on a substrate, and the thickness of the substrate is determined from the point of contact between the probes and film. A measuring apparatus then outputs a voltage waveform which applies a voltage to probes of the probe assembly. An inverter inverts the voltage and provides the inverted voltage on another probe of the probe assembly, thus inducing a current in these probes of the four point probe and through the surface of the film. Two other probes measure a voltage in the film created by the current. The voltages on the current probes provide a voltage close to zero at the other probes, thus allowing these other probes to measure voltages with greater precision. The current created by the voltage waveform and the voltage created across the inner probes are measured for each voltage level of the waveform. A sheet resistance of the film is determined by calculating the slope of a least square fit line of the measured current and voltage. The sheet resistance is proportional to the slope of the least square line. The thickness of the film is calculated by dividing the film resistivity by the calculated sheet resistance.

    Abstract translation: 一种用于测量薄膜和薄膜的薄层电阻和厚度的方法和装置。 四点探头组件接合衬底上的膜的表面,并且从探针和膜之间的接触点确定衬底的厚度。 然后,测量装置输出对探针组件的探头施加电压的电压波形。 逆变器反转电压并在探针组件的另一个探针上提供反相电压,从而在四点探针的这些探针中并通过膜的表面引起电流。 另外两个探头测量由电流产生的电影中的电压。 电流探头上的电压在其他探头上提供接近零的电压,从而允许其他探头以更高的精度测量电压。 针对波形的每个电压电平测量由电压波形产生的电流和内部探针产生的电压。 通过计算测量的电流和电压的最小二乘拟合线的斜率来确定膜的薄层电阻。 薄层电阻与最小二乘线的斜率成比例。 通过将膜电阻率除以计算的薄层电阻来计算膜的厚度。

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