Configuration of interfaces for a location detection system and application
    31.
    发明授权
    Configuration of interfaces for a location detection system and application 有权
    配置位置检测系统和应用程序的接口

    公开(公告)号:US09269221B2

    公开(公告)日:2016-02-23

    申请号:US11939427

    申请日:2007-11-13

    IPC分类号: G06F7/00 G07F17/32

    摘要: A system and method provides efficient and highly reliable customer and asset tracking. A Personal Digital Key (PDK) is associated with and carried by a user or fixed to an asset. The PDK wirelessly communicates with a receiver/decoder circuit (RDC) that can be coupled to a variety of electronic devices. The RDC authenticates the PDK based on received data and stores information to track customers and provide improved service. The RDC can be coupled to or integrated with a variety of electronic devices. The operation of the electronic device is determined based on an identification code of the detected PDK and an identification code of the RDC. The electronic device, the PDK or both can be configured with a personalized user interface and execute specific functions based on stored state information associated with the PDK and RDC identification codes.

    摘要翻译: 系统和方法提供高效可靠的客户和资产跟踪。 个人数字密钥(PDK)与用户相关联并由用户承载或固定资产。 PDK与可以耦合到各种电子设备的接收机/解码器电路(RDC)无线通信。 RDC根据接收到的数据对PDK进行认证,并存储信息以跟踪客户并提供改进的服务。 RDC可以耦合到或与各种电子设备集成。 基于检测到的PDK的识别码和RDC的识别码来确定电子设备的操作。 电子设备,PDK或两者可以配置有个性化用户界面,并且基于与PDK和RDC识别码相关联的存储状态信息执行特定功能。

    EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers
    32.
    发明授权
    EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers 有权
    EUV高通量检测系统,用于在图案化的EUV掩模,掩模毛坯和晶片上进行缺陷检测

    公开(公告)号:US08553217B2

    公开(公告)日:2013-10-08

    申请号:US12812950

    申请日:2010-06-18

    IPC分类号: G01N21/00

    摘要: Inspection of EUV patterned masks, blank masks, and patterned wafers generated by EUV patterned masks requires high magnification and a large field of view at the image plane. An EUV inspection system can include a light source directed to an inspected surface, a detector for detecting light deflected from the inspected surface, and an optic configuration for directing the light from the inspected surface to the detector. In particular, the detector can include a plurality of sensor modules. Additionally, the optic configuration can include a plurality of mirrors that provide magnification of at least 100× within an optical path less than 5 meters long. In one embodiment, the optical path is approximately 2-3 meters long.

    摘要翻译: 对EUV图案化掩模,空白掩模和由EUV图案化掩模生成的图案化晶片的检查需要高倍率和在图像平面上的大视场。 EUV检查系统可以包括指向检查表面的光源,用于检测从被检查表面偏转的光的检测器和用于将来自被检查表面的光引导到检测器的光学配置。 特别地,检测器可以包括多个传感器模块。 另外,光学配置可以包括在小于5米长的光路内提供至少100倍的放大倍数的多个反射镜。 在一个实施例中,光路大约2-3米长。

    Integrated Multi-Channel Analog Front End And Digitizer For High Speed Imaging Applications
    33.
    发明申请
    Integrated Multi-Channel Analog Front End And Digitizer For High Speed Imaging Applications 有权
    用于高速成像应用的集成多通道模拟前端和数字转换器

    公开(公告)号:US20130194445A1

    公开(公告)日:2013-08-01

    申请号:US13364308

    申请日:2012-02-01

    IPC分类号: H04N5/228

    摘要: A module for high speed image processing includes an image sensor for generating a plurality of analog outputs representing an image and a plurality of HDDs for concurrently processing the plurality of analog outputs. Each HDD is an integrated circuit configured to process in parallel a predetermined set of the analog outputs. Each channel of the HDD can include an AFE for conditioning a signal representing one sensor analog output, an ADC for converting a conditioned signal into a digital signal, and a data formatting block for calibrations and formatting the digital signal for transport to an off-chip device. The HDDs and drive electronics are combined with the image sensor into one package to optimize signal integrity and high dynamic range, and to achieve high data rates through use of synchronized HDD channels. Combining multiple modules results in a highly scalable imaging subsystem optimized for inspection and metrology applications.

    摘要翻译: 用于高速图像处理的模块包括用于产生表示图像的多个模拟输出的图像传感器和用于同时处理多个模拟输出的多个HDD。 每个HDD是被配置为并行处理预定的一组模拟输出的集成电路。 HDD的每个通道可以包括用于调节表示一个传感器模拟输出的信号的AFE,用于将经调节的信号转换成数字信号的ADC,以及用于校准和格式化数字信号以传送到芯片外的数据格式化块 设备。 HDD和驱动电子设备与图像传感器组合成一个封装,以优化信号完整性和高动态范围,并通过使用同步的HDD通道实现高数据速率。 组合多个模块可实现高度可扩展的成像子系统,以优化检测和计量应用。

    Anti-Reflective Coating For Sensors Suitable For High Throughput Inspection Systems
    34.
    发明申请
    Anti-Reflective Coating For Sensors Suitable For High Throughput Inspection Systems 审中-公开
    适用于高通量检测系统的传感器的防反射涂层

    公开(公告)号:US20100301437A1

    公开(公告)日:2010-12-02

    申请号:US12476190

    申请日:2009-06-01

    申请人: David L. Brown

    发明人: David L. Brown

    IPC分类号: H01L31/0216

    摘要: A sensor for capturing light at the ultraviolet (UV) or the deep UV wavelength includes a multi-layer anti-reflective coating (ARC). In a two-layer ARC, the first layer is formed on either the substrate or the circuitry layer, and the second layer is formed on the first layer and receives the light as an incident light beam. Notably, the first layer is at least twice as thick as the second layer, thereby minimizing an electrical field at a substrate surface due to charge trapping in the ARC. In a four-layer ARC, the third layer is formed on the second layer and the fourth layer is formed on the third layer. The first and third layers may be formed from the same material, and the second and fourth layers may be formed from materials having same/similar indexes of refraction. In this case, the first layer is at least twice as thick as any of the second, third, or fourth layers.

    摘要翻译: 用于在紫外(UV)或深紫外波长下捕获光的传感器包括多层抗反射涂层(ARC)。 在两层ARC中,第一层形成在衬底或电路层上,第二层形成在第一层上并接收作为入射光束的光。 值得注意的是,第一层的厚度至少是第二层的两倍,从而由于ARC中的电荷捕获而使衬底表面的电场最小化。 在四层ARC中,第三层形成在第二层上,第四层形成在第三层上。 第一层和第三层可以由相同的材料形成,并且第二层和第四层可以由具有相同/相似折射率的材料形成。 在这种情况下,第一层的厚度至少是第二层,第三层或第四层中的任一层的两倍。

    High-speed high-efficiency solid-state electron detector
    35.
    发明授权
    High-speed high-efficiency solid-state electron detector 有权
    高速高效固态电子探测器

    公开(公告)号:US07714300B1

    公开(公告)日:2010-05-11

    申请号:US11711552

    申请日:2007-02-26

    IPC分类号: G01T1/00

    摘要: One embodiment relates to a solid-state charged-particle detector. The detector includes a PIN diode and a conductive coating on the front-side of the PIN diode, wherein the front-side receives incident charged particles to be detected. In addition, the detector includes a metal layer on the backside of the PIN diode and electrical connections to the metal layer and to the conductive coating. Other embodiment are also disclosed.

    摘要翻译: 一个实施方案涉及固态带电粒子检测器。 检测器包括PIN二极管和PIN二极管前侧的导电涂层,其中前侧接收待检测的入射带电粒子。 此外,检测器包括在PIN二极管背面的金属层和与金属层和导电涂层的电连接。 还公开了其他实施例。

    Method and apparatus for simultaneous high-speed acquisition of multiple images
    36.
    发明授权
    Method and apparatus for simultaneous high-speed acquisition of multiple images 有权
    同时高速采集多幅图像的方法和装置

    公开(公告)号:US07528943B2

    公开(公告)日:2009-05-05

    申请号:US11318715

    申请日:2005-12-27

    IPC分类号: G01N21/00

    CPC分类号: G01N21/95607

    摘要: A method and apparatus for simultaneous high-speed inspection and acquisition of multiple data channels is provided. The method and apparatus enables inspecting semiconductor wafers and reticles and comprises converting a single image region into two image sections, reorienting one image into a transposed configuration enabling simultaneous scanning of two inspected object locations with a single sensor, and controlling acquisition parameters for a second image by using information collected from a first image in a feedback arrangement. The design provides a dual-linear or time-delay-integration sensor operating in a split readout configuration mode to simultaneously provide data from two regions of the sensor using two sets of readout circuitry.

    摘要翻译: 提供了用于同时高速检查和获取多个数据信道的方法和装置。 该方法和装置能够检测半导体晶片和标线,并且包括将单个图像区域转换成两个图像部分,将一个图像重新定向为转置配置,使得能够利用单个传感器同时扫描两个检查对象位置,并且控制第二图像的获取参数 通过使用从反馈安排中的第一图像收集的信息。 该设计提供了以分离读出配置模式工作的双线性或时间延迟积分传感器,以使用两组读出电路同时从传感器的两个区域提供数据。

    Configuration of Interfaces for a Location Detection System and Application
    37.
    发明申请
    Configuration of Interfaces for a Location Detection System and Application 有权
    位置检测系统和应用接口的配置

    公开(公告)号:US20080150678A1

    公开(公告)日:2008-06-26

    申请号:US11939427

    申请日:2007-11-13

    IPC分类号: G05B19/00

    摘要: A system and method provides efficient and highly reliable customer and asset tracking. A Personal Digital Key (PDK) is associated with and carried by a user or fixed to an asset. The PDK wirelessly communicates with a receiver/decoder circuit (RDC) that can be coupled to a variety of electronic devices. The RDC authenticates the PDK based on received data and stores information to track customers and provide improved service. The RDC can be coupled to or integrated with a variety of electronic devices. The operation of the electronic device is determined based on an identification code of the detected PDK and an identification code of the RDC. The electronic device, the PDK or both can be configured with a personalized user interface and execute specific functions based on stored state information associated with the PDK and RDC identification codes.

    摘要翻译: 系统和方法提供高效可靠的客户和资产跟踪。 个人数字密钥(PDK)与用户相关联并由用户承载或固定资产。 PDK与可以耦合到各种电子设备的接收机/解码器电路(RDC)无线通信。 RDC根据接收到的数据对PDK进行认证,并存储信息以跟踪客户并提供改进的服务。 RDC可以耦合到或与各种电子设备集成。 基于检测到的PDK的识别码和RDC的识别码来确定电子设备的操作。 电子设备,PDK或两者可以配置有个性化用户界面,并且基于与PDK和RDC识别码相关联的存储状态信息执行特定功能。

    Power generation utilizing tire pressure changes
    39.
    发明授权
    Power generation utilizing tire pressure changes 有权
    发电利用轮胎压力变化

    公开(公告)号:US07260984B2

    公开(公告)日:2007-08-28

    申请号:US11245485

    申请日:2005-10-05

    IPC分类号: B60C23/02

    CPC分类号: B60C23/0411

    摘要: A method of powering one or more electronic devices in a tire monitoring system using a tire pressure based energy scavenger is provided. With this method, a tire is rotated on a surface to generate pressure changes within the tire. These pressure changes are then converted into electrical energy with a transducer and the energy is stored. The electrical energy or stored electrical energy can then be used to power one or more electronic devices in a tire monitoring system, such as a tire pressure sensor, temperature sensor, acceleration profile sensor, and/or a tire wear monitor. A tire monitoring system with a tire pressure based energy scavenger is also provided.

    摘要翻译: 提供一种使用轮胎压力能量清除剂在轮胎监测系统中为一个或多个电子设备供电的方法。 利用该方法,轮胎在表面上旋转以在轮胎内产生压力变化。 然后,这些压力变化用换能器转换成电能并储存能量。 然后可以使用电能或存储的电能来为轮胎监测系统中的一个或多个电子设备供电,例如轮胎压力传感器,温度传感器,加速度曲线传感器和/或轮胎磨损监测器。 还提供了一种具有基于轮胎压力的能量清除剂的轮胎监测系统。