Electron multiplier electrode and terahertz radiation source using the same
    34.
    发明授权
    Electron multiplier electrode and terahertz radiation source using the same 有权
    电子倍增器电极和太赫兹辐射源使用相同

    公开(公告)号:US07768181B2

    公开(公告)日:2010-08-03

    申请号:US12007186

    申请日:2008-01-08

    IPC分类号: H01J1/62

    CPC分类号: H01J43/04

    摘要: Provided are an electron multiplier electrode using a secondary electron extraction electrode and a terahertz radiation source using the electron multiplier electrode. The electron multiplier electrode includes: a cathode; an emitter disposed on the cathode and extracting electron beams; a gate electrode for switching the electron beams, the gate electrode being disposed on the cathode to surround the emitter; and a secondary electron extraction electrode disposed on the gate electrode and including a secondary electron extraction layer extracting secondary electrons due to collision of the electron beams.

    摘要翻译: 提供了使用二次电子提取电极和使用电子倍增器电极的太赫兹辐射源的电子倍增器电极。 电子倍增器电极包括:阴极; 设置在阴极上并提取电子束的发射器; 用于切换电子束的栅电极,栅电极设置在阴极上以围绕发射极; 以及二次电子提取电极,设置在栅电极上,并且包括由于电子束的碰撞而提取二次电子的二次电子提取层。

    Mask used for LIGA process, method of manufacturing the mask, and method of manufacturing microstructure using LIGA process
    36.
    发明申请
    Mask used for LIGA process, method of manufacturing the mask, and method of manufacturing microstructure using LIGA process 有权
    用于LIGA工艺的掩模,制造掩模的方法以及使用LIGA工艺制造微结构的方法

    公开(公告)号:US20080166640A1

    公开(公告)日:2008-07-10

    申请号:US11896273

    申请日:2007-08-30

    IPC分类号: G03C5/00 B05D5/06

    摘要: A mask used for a Lithographie, Galvanofomung, and Abformung (LIGA) process, a method for manufacturing the mask, and a method for manufacturing a microstructure using a LIGA process. The method for manufacturing the microstructure using the LIGA process contemplates forming a substrate for the microstructure, a plurality of photosensitive layers, each photosensitive layer having a plating hole and an aligning pinhole, and an aligning pin capable of being inserted into the aligning pinhole, with the aligning pinholes of the photosensitive layers being formed in corresponding positions, and repeating a process of stacking the photosensitive layer on the substrate for the microstructure and a process of forming a plating layer by plating the plating hole of the stacked photosensitive layer with a metal for a number of times corresponding to the number of the photosensitive layers, and when the photosensitive layers are stacked on the substrate for the structure, the photosensitive layers being aligned with one another by inserting the aligning pin into the aligning pinholes of all the photosensitive layers stacked on the substrate for the microstructure to penetrate all the photosensitive layers.

    摘要翻译: 用于石版印刷,Galvanofomung和Abformung(LIGA)工艺的掩模,用于制造掩模的方法以及使用LIGA工艺制造微结构的方法。 使用LIGA方法制造微结构的方法考虑形成用于微结构的基底,多个感光层,每个感光层具有电镀孔和对准针孔,以及能够插入到对准针孔中的对准销, 感光层的对准针孔形成在相应的位置上,并且重复将用于微结构的基板上的感光层层叠的工艺和通过用金属镀覆层叠的感光层的电镀孔来形成镀层的工艺 对应于感光层的数量的次数,并且当感光层堆叠在用于结构的基板上时,感光层通过将对准销插入到所有感光层的对准针孔中而彼此对准 在基板上用于微结构穿透 将感光层。

    Composite for paste including carbon nanotubes, electron emitting device using the same, and manufacturing method thereof
    39.
    发明授权
    Composite for paste including carbon nanotubes, electron emitting device using the same, and manufacturing method thereof 失效
    包含碳纳米管的糊状复合物,使用其的电子发射器件及其制造方法

    公开(公告)号:US06825595B2

    公开(公告)日:2004-11-30

    申请号:US10302899

    申请日:2002-11-25

    IPC分类号: H01J130

    摘要: Provided are a composite for paste including carbon nanotubes (CNTs), an electron emitting device using the same, and a manufacturing method thereof. The provided composite for paste includes 5 to 40 parts by weight of CNTs, 5 to 50 parts by weight of alkali metal silicate, and 1 to 20 parts by weight of a binder. The provided electron emitting device includes electron emitting tips, which are located on cathode electrodes in wells and formed of the composite for paste including 5 to 40 parts by weight of CNTs, 5 to 50 parts by weight of alkali metal silicate, and 1 to 20 parts by weight of a binder. The electron emitting device has excellent stability and durability and uniformly emits electrons from a large area, thereby improving the overall performance of an apparatus using the electron emitting device.

    摘要翻译: 提供了包括碳纳米管(CNT)的糊状物的复合材料,使用该复合材料的电子发射器件及其制造方法。 所提供的糊状复合物包括5至40重量份的CNT,5至50重量份的碱金属硅酸盐和1至20重量份的粘合剂。 所提供的电子发射装置包括电子发射尖端,它们位于阱中的阴极上,由包含5至40重量份的CNT,5至50重量份的碱金属硅酸盐和1至20个 重量份的粘合剂。 电子发射器件具有优异的稳定性和耐久性,并且从大面积均匀地发射电子,从而提高使用电子发射器件的装置的整体性能。