公开(公告)号：US07609805B2

公开(公告)日：2009-10-27

申请号：US11896273

申请日：2007-08-30

申请人： Chan-wook Baik ,  Yong-wan Jin ,  Gun-sik Park ,  Jong-min Kim ,  Young-min Shin ,  Jin-kyu So

发明人： Chan-wook Baik ,  Yong-wan Jin ,  Gun-sik Park ,  Jong-min Kim ,  Young-min Shin ,  Jin-kyu So

IPC分类号： G21K5/00

CPC分类号： G03F7/00 ,  G03F1/22 ,  G03F9/7053 ,  G03F9/7076

摘要： A mask used for a Lithographie, Galvanofomung, and Abformung (LIGA) process, a method for manufacturing the mask, and a method for manufacturing a microstructure using a LIGA process. The method for manufacturing the microstructure using the LIGA process contemplates forming a substrate for the microstructure, a plurality of photosensitive layers, each photosensitive layer having a plating hole and an aligning pinhole, and an aligning pin capable of being inserted into the aligning pinhole, with the aligning pinholes of the photosensitive layers being formed in corresponding positions, and repeating a process of stacking the photosensitive layer on the substrate for the microstructure and a process of forming a plating layer by plating the plating hole of the stacked photosensitive layer with a metal for a number of times corresponding to the number of the photosensitive layers, and when the photosensitive layers are stacked on the substrate for the structure, the photosensitive layers being aligned with one another by inserting the aligning pin into the aligning pinholes of all the photosensitive layers stacked on the substrate for the microstructure to penetrate all the photosensitive layers.

摘要翻译： 用于石版印刷，Galvanofomung和Abformung（LIGA）工艺的掩模，用于制造掩模的方法以及使用LIGA工艺制造微结构的方法。 使用LIGA方法制造微结构的方法考虑形成用于微结构的基底，多个感光层，每个感光层具有电镀孔和对准针孔，以及能够插入到对准针孔中的对准销， 感光层的对准针孔形成在相应的位置上，并且重复将用于微结构的基板上的感光层层叠的工艺和通过用金属镀覆层叠的感光层的电镀孔来形成镀层的工艺 对应于感光层的数量的次数，并且当感光层堆叠在用于结构的基板上时，感光层通过将对准销插入到所有感光层的对准针孔中而彼此对准 在基板上用于微结构穿透 感光层。

公开(公告)号：US20080166640A1

公开(公告)日：2008-07-10

申请号：US11896273

申请日：2007-08-30

申请人： Chan-wook Baik ,  Yong-wan Jin ,  Gun-sik Park ,  Jong-min Kim ,  Young-min Shin ,  Jin-kyu So

发明人： Chan-wook Baik ,  Yong-wan Jin ,  Gun-sik Park ,  Jong-min Kim ,  Young-min Shin ,  Jin-kyu So

IPC分类号： G03C5/00 ,  B05D5/06

CPC分类号： G03F7/00 ,  G03F1/22 ,  G03F9/7053 ,  G03F9/7076

摘要： A mask used for a Lithographie, Galvanofomung, and Abformung (LIGA) process, a method for manufacturing the mask, and a method for manufacturing a microstructure using a LIGA process. The method for manufacturing the microstructure using the LIGA process contemplates forming a substrate for the microstructure, a plurality of photosensitive layers, each photosensitive layer having a plating hole and an aligning pinhole, and an aligning pin capable of being inserted into the aligning pinhole, with the aligning pinholes of the photosensitive layers being formed in corresponding positions, and repeating a process of stacking the photosensitive layer on the substrate for the microstructure and a process of forming a plating layer by plating the plating hole of the stacked photosensitive layer with a metal for a number of times corresponding to the number of the photosensitive layers, and when the photosensitive layers are stacked on the substrate for the structure, the photosensitive layers being aligned with one another by inserting the aligning pin into the aligning pinholes of all the photosensitive layers stacked on the substrate for the microstructure to penetrate all the photosensitive layers.

摘要翻译： 用于石版印刷，Galvanofomung和Abformung（LIGA）工艺的掩模，用于制造掩模的方法以及使用LIGA工艺制造微结构的方法。 使用LIGA方法制造微结构的方法考虑形成用于微结构的基底，多个感光层，每个感光层具有电镀孔和对准针孔，以及能够插入到对准针孔中的对准销， 感光层的对准针孔形成在相应的位置上，并且重复将用于微结构的基板上的感光层层叠的工艺和通过用金属镀覆层叠的感光层的电镀孔来形成镀层的工艺 对应于感光层的数量的次数，并且当感光层堆叠在用于结构的基板上时，感光层通过将对准销插入到所有感光层的对准针孔中而彼此对准 在基板上用于微结构穿透 将感光层。

公开(公告)号：US20110090025A1

公开(公告)日：2011-04-21

申请号：US12659176

申请日：2010-02-26

申请人： Chan-wook Baik ,  Seung-ho Bak ,  Jong-min Kim ,  Gun-sik Park

发明人： Chan-wook Baik ,  Seung-ho Bak ,  Jong-min Kim ,  Gun-sik Park

IPC分类号： H03H5/00

CPC分类号： H01Q15/006

摘要： An electromagnetic wave transmission filter may include a substrate and one or more coils. The one or more coils may be at least partly disposed in an opening through the substrate. An electromagnetic camera may include an electromagnetic wave detector array, including a plurality of detector cells for detecting electromagnetic waves, and an electromagnetic wave transmission filter disposed in front of the electromagnetic wave detector array to provide each of the detector cells with an electromagnetic wave of a certain wavelength. The electromagnetic wave transmission filter may includes a substrate and a plurality of coils. At least one of the plurality of coils may be at least partly disposed in each of a plurality of openings through the substrate.

摘要翻译： 电磁波传输滤波器可以包括基板和一个或多个线圈。 一个或多个线圈可以至少部分地设置在通过基板的开口中。 电磁摄像机可以包括电磁波检测器阵列，其包括用于检测电磁波的多个检测器单元，以及设置在电磁波检测器阵列之前的电磁波传输滤波器，以向每个检测器单元提供电磁波 一定的波长。 电磁波传输滤波器可以包括基板和多个线圈。 多个线圈中的至少一个可以至少部分地设置在穿过基底的多个开口中的每一个中。

公开(公告)号：US08421013B2

公开(公告)日：2013-04-16

申请号：US12659176

申请日：2010-02-26

申请人： Chan-wook Baik ,  Seung-ho Bak ,  Jong-min Kim ,  Gun-sik Park

发明人： Chan-wook Baik ,  Seung-ho Bak ,  Jong-min Kim ,  Gun-sik Park

IPC分类号： G01J1/00

CPC分类号： H01Q15/006

摘要： An electromagnetic wave transmission filter may include a substrate and one or more coils. The one or more coils may be at least partly disposed in an opening through the substrate. An electromagnetic camera may include an electromagnetic wave detector array, including a plurality of detector cells for detecting electromagnetic waves, and an electromagnetic wave transmission filter disposed in front of the electromagnetic wave detector array to provide each of the detector cells with an electromagnetic wave of a certain wavelength. The electromagnetic wave transmission filter may includes a substrate and a plurality of coils. At least one of the plurality of coils may be at least partly disposed in each of a plurality of openings through the substrate.

摘要翻译： 电磁波传输滤波器可以包括基板和一个或多个线圈。 一个或多个线圈可以至少部分地设置在通过基板的开口中。 电磁摄像机可以包括电磁波检测器阵列，其包括用于检测电磁波的多个检测器单元，以及设置在电磁波检测器阵列之前的电磁波传输滤波器，以向每个检测器单元提供电磁波 一定的波长。 电磁波传输滤波器可以包括基板和多个线圈。 多个线圈中的至少一个可以至少部分地设置在穿过基底的多个开口中的每一个中。

公开(公告)号：US20080164798A1

公开(公告)日：2008-07-10

申请号：US12007186

申请日：2008-01-08

申请人： Chan-wook Baik ,  Yong-wan Jin ,  Sun-il Kim ,  Min-jong Bae

发明人： Chan-wook Baik ,  Yong-wan Jin ,  Sun-il Kim ,  Min-jong Bae

IPC分类号： H01J43/04 ,  G21G4/00

CPC分类号： H01J43/04

摘要： Provided are an electron multiplier electrode using a secondary electron extraction electrode and a terahertz radiation source using the electron multiplier electrode. The electron multiplier electrode includes: a cathode; an emitter disposed on the cathode and extracting electron beams; a gate electrode for switching the electron beams, the gate electrode being disposed on the cathode to surround the emitter; and a secondary electron extraction electrode disposed on the gate electrode and including a secondary electron extraction layer extracting secondary electrons due to collision of the electron beams.

摘要翻译： 提供了使用二次电子提取电极和使用电子倍增器电极的太赫兹辐射源的电子倍增器电极。 电子倍增器电极包括：阴极; 设置在阴极上并提取电子束的发射器; 用于切换电子束的栅电极，栅电极设置在阴极上以围绕发射极; 以及二次电子提取电极，设置在栅电极上，并且包括由于电子束的碰撞而提取二次电子的二次电子提取层。

公开(公告)号：US07768181B2

公开(公告)日：2010-08-03

申请号：US12007186

申请日：2008-01-08

申请人： Chan-wook Baik ,  Yong-wan Jin ,  Sun-il Kim ,  Min-jong Bae

发明人： Chan-wook Baik ,  Yong-wan Jin ,  Sun-il Kim ,  Min-jong Bae

IPC分类号： H01J1/62

CPC分类号： H01J43/04

摘要： Provided are an electron multiplier electrode using a secondary electron extraction electrode and a terahertz radiation source using the electron multiplier electrode. The electron multiplier electrode includes: a cathode; an emitter disposed on the cathode and extracting electron beams; a gate electrode for switching the electron beams, the gate electrode being disposed on the cathode to surround the emitter; and a secondary electron extraction electrode disposed on the gate electrode and including a secondary electron extraction layer extracting secondary electrons due to collision of the electron beams.

摘要翻译： 提供了使用二次电子提取电极和使用电子倍增器电极的太赫兹辐射源的电子倍增器电极。 电子倍增器电极包括：阴极; 设置在阴极上并提取电子束的发射器; 用于切换电子束的栅电极，栅电极设置在阴极上以围绕发射极; 以及二次电子提取电极，设置在栅电极上，并且包括由于电子束的碰撞而提取二次电子的二次电子提取层。

公开(公告)号：US07755273B2

公开(公告)日：2010-07-13

申请号：US11798612

申请日：2007-05-15

申请人： Deuk-seok Chung ,  Yong-chul Kim ,  Yong-wan Jin ,  Sun-il Kim ,  Ho-suk Kang ,  Chan-wook Baik

发明人： Deuk-seok Chung ,  Yong-chul Kim ,  Yong-wan Jin ,  Sun-il Kim ,  Ho-suk Kang ,  Chan-wook Baik

IPC分类号： H01J1/62

CPC分类号： H01J29/04 ,  H01J31/127 ,  H01J2201/30469

摘要： A field emission device and its method of manufacture includes: a substrate; a plurality of cathode electrodes formed on the substrate and having slot shaped cathode holes to expose the substrate; emitters formed on the substrate exposed through each of the cathode holes and separated from both side surfaces of the cathode holes, the emitters being formed along a lengthwise direction of the cathode holes; an insulating layer formed on the substrate to cover the cathode electrodes and having insulating layer holes communicating with the cathode holes; and a plurality of gate electrodes formed on the insulating layer and having gate holes communicating with the insulating layer holes.

摘要翻译： 场致发射器件及其制造方法包括：衬底; 多个阴极电极，形成在基板上，并具有用于露出基板的狭槽形阴极孔; 所述发光体形成在所述基板上，通过所述阴极孔露出并从所述阴极孔的两侧面分离，所述发射体沿着所述阴极孔的长度方向形成; 绝缘层，形成在所述基板上以覆盖所述阴极并具有与所述阴极孔连通的绝缘层孔; 以及形成在绝缘层上并具有与绝缘层孔连通的栅极孔的多个栅电极。

公开(公告)号：US20080111464A1

公开(公告)日：2008-05-15

申请号：US11798612

申请日：2007-05-15

申请人： Deuk-seok Chung ,  Yong-chul Kim ,  Yong-wan Jin ,  Sun-il Kim ,  Ho-suk Kang ,  Chan-wook Baik

发明人： Deuk-seok Chung ,  Yong-chul Kim ,  Yong-wan Jin ,  Sun-il Kim ,  Ho-suk Kang ,  Chan-wook Baik

IPC分类号： H01J3/02 ,  H01J9/00

CPC分类号： H01J29/04 ,  H01J31/127 ,  H01J2201/30469

摘要： A field emission device and its method of manufacture includes: a substrate; a plurality of cathode electrodes formed on the substrate and having slot shaped cathode holes to expose the substrate; emitters formed on the substrate exposed through each of the cathode holes and separated from both side surfaces of the cathode holes, the emitters being formed along a lengthwise direction of the cathode holes; an insulating layer formed on the substrate to cover the cathode electrodes and having insulating layer holes communicating with the cathode holes; and a plurality of gate electrodes formed on the insulating layer and having gate holes communicating with the insulating layer holes.

摘要翻译： 场致发射器件及其制造方法包括：衬底; 多个阴极电极，形成在基板上，并具有用于露出基板的狭槽形阴极孔; 所述发光体形成在所述基板上，通过所述阴极孔露出并从所述阴极孔的两侧面分离，所述发射体沿着所述阴极孔的长度方向形成; 绝缘层，形成在所述基板上以覆盖所述阴极并具有与所述阴极孔连通的绝缘层孔; 以及形成在绝缘层上并具有与绝缘层孔连通的栅极孔的多个栅电极。

公开(公告)号：US08437075B2

公开(公告)日：2013-05-07

申请号：US13095100

申请日：2011-04-27

申请人： Chan-wook Baik ,  Jong-min Kim ,  Chang-won Lee

发明人： Chan-wook Baik ,  Jong-min Kim ,  Chang-won Lee

IPC分类号： H01Q15/0086 ,  G02B1/002

CPC分类号： G02F1/21 ,  G02F1/218 ,  G02F2202/30 ,  G02F2203/13 ,  H01P1/2005 ,  H01P7/082 ,  H01Q15/0026 ,  H01Q15/0086

摘要： A metamaterial structure is provided, including a substrate and a plurality of resonators that are provided on different surfaces of the substrate or different layers of the substrate. The resonators have resonance characteristics different from each other, and the metamaterial structure has a permittivity, a permeability, and a refractive index respectively different from those of the substrate in a predetermined frequency bandwidth.

摘要翻译： 提供超材料结构，其包括衬底和设置在衬底的不同表面或衬底的不同层上的多个谐振器。 谐振器具有彼此不同的共振特性，并且超材料结构在预定频率带宽中具有分别不同于衬底的介电常数，磁导率和折射率。

公开(公告)号：US08638035B2

公开(公告)日：2014-01-28

申请号：US12805002

申请日：2010-07-07

申请人： Chan-wook Baik ,  Joo-ho Lee ,  Hyung-bin Son

发明人： Chan-wook Baik ,  Joo-ho Lee ,  Hyung-bin Son

IPC分类号： H01J7/24

CPC分类号： H01J25/34 ,  H01J25/02

摘要： A terahertz radiation source includes: a cathode configured to emit an electron beam, an anode configured to focus the electron beam emitted from the cathode; a collector facing the cathode and configured to collect the emitted electron beam focused by the anode; an oscillating circuit positioned between the anode and the collector and configured to convert energy of a passing electron beam into electromagnetic wave energy; and an output unit connected to the oscillating circuit and configured to externally emit the electromagnetic wave energy.

摘要翻译： 太赫兹辐射源包括：被配置为发射电子束的阴极，配置成聚焦从阴极发射的电子束的阳极; 面对阴极并且被配置为收集由阳极聚焦的发射电子束的集电体; 位于所述阳极和所述集电极之间并被配置为将通过的电子束的能量转换成电磁波能量的振荡电路; 以及连接到所述振荡电路并被配置为从外部发射所述电磁波能量的输出单元。