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公开(公告)号：US20240018960A1
公开(公告)日：2024-01-18
申请号：US18251484
申请日：2021-10-28
Applicant: Edwards Limited
Inventor： Alan Ernest Kinnaird Holbrook , David Bedwell , Nigel Paul Schofield
CPC classification number: F04C18/0215 , F04C18/0292 , F04C29/12 , F04C27/005 , F04C28/24 , F04C29/0021
Abstract: A scroll pump includes an inlet and an outlet, a fixed scroll and an orbiting scroll intermeshed with each other, wherein the fixed scroll and orbiting scroll define a space therebetween. The scroll pump further includes a biasing apparatus configured to bias the orbiting scroll against the fixed scroll, a fluid recirculation channel which extends from the space to the inlet through either the fixed scroll or the orbiting scroll, and a fluid recirculation valve disposed in the fluid recirculation channel. The fluid recirculation valve is configured to permit flow of fluid from the space to the inlet through the fluid recirculation channel or to block flow of fluid through the fluid recirculation channel. The fluid recirculation valve is configured to switch from a closed state to an open state when a pressure differential across the fluid recirculation valve is equal to or exceeds a certain threshold value.
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公开(公告)号：US11719244B2
公开(公告)日：2023-08-08
申请号：US16639528
申请日：2018-08-16
Applicant: Edwards Limited
Inventor： Ian David Stones , Nigel Paul Schofield , Ian Andrew Norton
CPC classification number: F04D17/18 , F04C25/02 , F04C29/0057 , F04C29/0092 , F04C29/124 , F04C2210/22 , F04C2220/10 , F04C2240/10 , F04C2240/20 , F04C2240/40 , F04C2240/50 , F04C2240/603 , F05B2210/12
Abstract: A pump and method for pumping a gas are disclosed. The pump comprises a rotor and a stator. At least one of the rotor or stator comprises at least one liquid opening configured for fluid communication with a liquid source. The liquid opening is configured such that in response to a driving force exerted on liquid from the liquid source a stream of liquid is output from the opening, the stream of liquid forming a liquid blade between the rotor and the stator, gas confined by said stator, said rotor and said liquid blade being driven through said pump from a gas inlet towards a gas outlet.
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公开(公告)号：US20230042886A1
公开(公告)日：2023-02-09
申请号：US17790843
申请日：2021-01-07
Applicant: Edwards Limited
Inventor： Nigel Paul Schofield
Abstract: A vacuum pump, vacuum pump set and method for evacuating a semiconductor processing chamber is disclosed. The vacuum pump is configured for mounting to a semiconductor processing chamber to evacuate the chamber to pressures between 1 mbar and 5×10−2 mbar. The vacuum pump comprises: a rotor rotatably mounted within a stator. The rotor comprises a plurality of angled blades arranged along a helical path from an inlet to an outlet. The stator comprises a plurality of perforated elements arranged to intersect the helical path, the perforations allowing gas molecules travelling along the helical path to pass through the perforated elements. The rotor mounted on a magnetically levitated bearing; and the perforated elements located towards an inlet of the vacuum pump comprise a transparency of more than 40% and the perforated elements located towards an outlet of the vacuum pump comprise a transparency of more than 30%.
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公开(公告)号：US20220397115A1
公开(公告)日：2022-12-15
申请号：US17628784
申请日：2020-07-22
Applicant: Edwards Limited
Inventor： Alan Ernest Kinnaird Holbrook , Nigel Paul Schofield
Abstract: A scroll pump (100, 200) comprising a first scroll comprising a first spiral wall (124, 224); a second scroll comprising a second spiral wall (134, 234), the second spiral wall being intermeshed with the first spiral wall; and a pad (180, 280) formed from a different material to the first and second scrolls, the pad being located between the first and second scrolls radially inwards or outwards of the first and second spiral walls.
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公开(公告)号：US20220299027A1
公开(公告)日：2022-09-22
申请号：US17606277
申请日：2020-04-24
Applicant: Edwards Limited
Inventor： Alan Ernest Kinnaird Holbrook , Nigel Paul Schofield , David Bedwell
Abstract: The invention provides a scroll pump comprising an orbiting scroll and a fixed scroll, wherein the orbital axis of the orbiting scroll is movable in a radial direction relative to the fixed scroll while the orbiting scroll is orbiting about its orbital axis, or wherein the fixed scroll is movable relative to the orbiting scroll in a radial direction while the orbiting scroll is orbiting about its orbital axis.
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Patent Agency Ranking
公开(公告)号：US20220213894A1
公开(公告)日：2022-07-07
申请号：US17606281
申请日：2020-04-24
Applicant: Edwards Limited
Inventor： Alan Ernest Kinnaird Holbrook , Nigel Paul Schofield , David Bedwell
Abstract: The invention provides a crank sleeve for a scroll pump. The crank sleeve has a longitudinal axis and is configured to provide a radially extending crank offset for imparting an orbital path on an orbital scroll of the scroll pump. The crank sleeve further comprises an integrally formed counterbalance for reducing pump vibration extending radially in a direction substantially opposite to the crank offset.
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公开(公告)号：US20220010788A1
公开(公告)日：2022-01-13
申请号：US17297807
申请日：2019-11-27
Applicant: Edwards Limited
Inventor： Nigel Paul Schofield , Christopher Mark Bailey , Michael Andrew Galtry , Andrew David Mann
Abstract: A vacuum exhaust system includes a plurality of low pressure vacuum pumps that operate in a molecular flow region and evacuate a plurality of vacuum chambers. A plurality of chamber valves are positioned between the low pressure vacuum pumps and the plurality of vacuum chambers. A plurality of branch channels are each connected to a corresponding exhaust of the plurality of low pressure vacuum pumps and a main channel is formed from a confluence of the branch channels. An intermediate vacuum pump is connected to the main channel and operates in a viscous flow region. A higher pressure vacuum pump operates in a higher pressure viscous flow region and is connected to an exhaust of the intermediate pressure vacuum pump. A plurality of bypass channels, each having a valve, provide a fluid communication path between at least some of the plurality of vacuum chambers and a higher pressure vacuum pump.
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公开(公告)号：US20190309748A1
公开(公告)日：2019-10-10
申请号：US16309809
申请日：2017-05-25
Applicant: Edwards Limited
Inventor： Nigel Paul Schofield
Abstract: A scroll vacuum pump includes an orbiting scroll having a wall extending axially from an orbiting scroll base towards a fixed scroll, the fixed scroll having a fixed scroll wall extending axially from a fixed scroll base towards the orbiting scroll; an axially extending drive shaft having an eccentric shaft portion so that rotation of the eccentric shaft portion imparts an orbiting motion to the orbiting scroll relative to the fixed scroll; and an axial thrust bearing arrangement including an array of ball bearings for bearing against the orbiting scroll base in an axial direction, each ball bearing describing a circular path over the orbiting scroll base during orbiting motion; at least one thrust surface for bearing against the array of ball bearings; and an adjustment mechanism for adjusting the axial position of said at least one thrust surface and thereby the axial position of the orbiting scroll base.
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公开(公告)号：US10309401B2
公开(公告)日：2019-06-04
申请号：US15541085
申请日：2016-01-06
Applicant: Edwards Limited
Inventor： Nigel Paul Schofield , Andrew Seeley , Katsumi Nishimura , Katsunori Takahashi
Abstract: A vacuum exhaust system which exhausts gas from chambers and which comprises a plurality of branch channels for the exhaustion of the gas from the chambers, a main pipeline in the form of a confluence of the plurality of branch channels, channel open-close valves fitted to correspond with each of the said plurality of branch channels, a channel-switching valve connecting the main channel and a plurality of selection channels and allowing flow between the main channel and any one of the plurality of selection channels, a first pump which functions as a gas exhaust means in the molecular flow region of the gas and is fitted to one of the plurality of branch channels, and second pumps which function as gas exhaust means in the viscous flow region of the gas and are fitted to the plurality of selection channels.
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公开(公告)号：US09249805B2
公开(公告)日：2016-02-02
申请号：US14471698
申请日：2014-08-28
Applicant: Edwards Limited
Inventor： Ian David Stones , Nigel Paul Schofield , Martin Nicholas Stuart
CPC classification number: F04D19/042 , F04D17/168 , F04D19/044 , F04D19/046 , F04D23/008 , H01J49/24
Abstract: A vacuum pump comprises a molecular drag pumping mechanism and a regenerative pumping mechanism. A rotor element of the molecular drag pumping mechanism surrounds rotor elements of the regenerative pumping mechanism.
Abstract translation: 真空泵包括分子牵引泵机构和再生泵送机构。 分子拖拉机构的转子元件围绕再生泵送机构的转子元件。
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